JPH0421871U - - Google Patents
Info
- Publication number
- JPH0421871U JPH0421871U JP6050690U JP6050690U JPH0421871U JP H0421871 U JPH0421871 U JP H0421871U JP 6050690 U JP6050690 U JP 6050690U JP 6050690 U JP6050690 U JP 6050690U JP H0421871 U JPH0421871 U JP H0421871U
- Authority
- JP
- Japan
- Prior art keywords
- cantilever
- acceleration sensor
- weight
- free end
- flexure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001133 acceleration Effects 0.000 claims description 3
- 230000005484 gravity Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Pressure Sensors (AREA)
Description
第１図は本考案よりなる加速センサの実施例を
示した説明図、第２図及び第３図は従来例の構造
説明図、第４図イ，ロは、従来例のカンチレバー
の説明側面図及び平面図、第５図イ，ロは本考案
よりなるカンチレバーの側面作用説明図及びその
平面図である。
１３……カンチレバー、１３′……わたみ部。
Fig. 1 is an explanatory diagram showing an embodiment of the acceleration sensor according to the present invention, Figs. 2 and 3 are structural explanatory diagrams of a conventional example, and Fig. 4 A and B are explanatory side views of a cantilever of a conventional example. FIGS. 5A and 5B are a side view and a plan view of the cantilever according to the present invention. 13... Cantilever, 13'... Wat portion.
Claims (1)
その自由端に錘り５を取付けてなるカンチレバー
３を有する加速度センサにおいて、そのカンチレ
バー３の支持端部から自由端にかけたたわみ部形
状が、錘りの重心を頂点とする二等辺三角形とな
し、このたわみ部に厚膜歪ゲージを設けたことを
特徴とする加速度センサ。 Supported in a cantilevered manner by substrates 1 and 2,
In an acceleration sensor having a cantilever 3 with a weight 5 attached to its free end, the shape of the flexure from the support end of the cantilever 3 to the free end is an isosceles triangle with the center of gravity of the weight as its apex; An acceleration sensor characterized by having a thick film strain gauge installed in this deflection part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6050690U JPH0421871U (en) | 1990-06-07 | 1990-06-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6050690U JPH0421871U (en) | 1990-06-07 | 1990-06-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0421871U true JPH0421871U (en) | 1992-02-24 |
Family
ID=31587929
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6050690U Pending JPH0421871U (en) | 1990-06-07 | 1990-06-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0421871U (en) |
-
1990
- 1990-06-07 JP JP6050690U patent/JPH0421871U/ja active Pending