JPH0422411Y2 - - Google Patents

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Publication number
JPH0422411Y2
JPH0422411Y2 JP1984162191U JP16219184U JPH0422411Y2 JP H0422411 Y2 JPH0422411 Y2 JP H0422411Y2 JP 1984162191 U JP1984162191 U JP 1984162191U JP 16219184 U JP16219184 U JP 16219184U JP H0422411 Y2 JPH0422411 Y2 JP H0422411Y2
Authority
JP
Japan
Prior art keywords
cleaning
cleaned
tank
carrier
objects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984162191U
Other languages
Japanese (ja)
Other versions
JPS6176515U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984162191U priority Critical patent/JPH0422411Y2/ja
Publication of JPS6176515U publication Critical patent/JPS6176515U/ja
Application granted granted Critical
Publication of JPH0422411Y2 publication Critical patent/JPH0422411Y2/ja
Expired legal-status Critical Current

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  • Cleaning In General (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Description

【考案の詳細な説明】 [産業上の利用分野] 本考案は、デイスク形の被洗浄物を洗浄するの
に使用される多槽式洗浄装置の改良に関するもの
である。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an improvement of a multi-tank cleaning device used for cleaning disk-shaped objects to be cleaned.

[従来の技術] 例えばコンピユータのメモリ基板として使用さ
れるアルミニウム製デイスクを洗浄する場合、一
般に、有機溶剤や水を使用して超音波洗浄、冷液
洗浄、蒸気洗浄等を順次行う多槽式の洗浄装置が
使用されている。ところが、ラツピングまたはポ
リツシングの終了したデイスクを洗浄する場合に
は、まずそれをブラシ洗浄することによつて付着
したごみや研摩剤などを除去し、そのあとで上記
多槽式洗浄装置によつて仕上げ洗浄するのが望ま
しい。
[Prior Art] For example, when cleaning an aluminum disk used as a memory board for a computer, a multi-tank method is generally used to sequentially perform ultrasonic cleaning, cold liquid cleaning, steam cleaning, etc. using organic solvents and water. Cleaning equipment is used. However, when cleaning a disk that has been wrapped or polished, it is first cleaned with a brush to remove adhering dirt, abrasives, etc., and then finished using the multi-tank cleaning device described above. It is advisable to wash it.

しかしながら、上記従来の洗浄装置において
は、このようなブラシ洗浄と有機溶剤や水による
仕上げ洗浄とを同時に行うことは不可能であり、
そのため、一旦デイスクを別のブラシを備えたス
クラバ洗浄装置で処理したあと、それを上記多槽
式の洗浄装置で仕上げ洗浄するようにしていた
が、デイスクを一つの洗浄ラインで連続的に処理
するのが困難であるため非常に手間がかかり、し
かも、従来のスクラバ洗浄装置がデイスクを1枚
づつしか処理できなかつたため、洗浄が非常に非
能率的且つ非量産的であつた。
However, in the conventional cleaning equipment described above, it is impossible to perform such brush cleaning and final cleaning using an organic solvent or water at the same time.
For this reason, the disks were first treated with a scrubber cleaning device equipped with a separate brush and then finished cleaned with the multi-tank cleaning device mentioned above, but now the disks are processed continuously in one cleaning line. It is very difficult and time-consuming to clean the disks, and furthermore, the conventional scrubber cleaning equipment can only process one disk at a time, making cleaning very inefficient and difficult for mass production.

[考案が解決しようとする問題点] 本考案は、上記従来の欠点を鑑み、多槽式洗浄
装置を、スクラバ洗浄機能を有するものとして構
成すると共に、多数枚のデイスク形被洗浄物を同
時に処理できるように構成することを技術的課題
とする。
[Problems to be solved by the invention] In view of the above-mentioned conventional drawbacks, the present invention configures a multi-tank cleaning device with a scrubber cleaning function, and simultaneously processes a large number of disk-shaped objects to be cleaned. The technical challenge is to configure it so that it can be done.

[問題点を解決するための手段] 上記課題を解決するため、本考案の多槽式洗浄
装置は、デイスク形の被洗浄物を洗浄するための
複数の洗浄槽と、上記被洗浄物を収容するための
キヤリヤと、該キヤリヤを各洗浄槽に順次搬送す
るための搬送手段とを備えた多槽式洗浄装置にお
いて、上記キヤリヤを、被洗浄物の外周部が嵌合
する係合溝を所定間隔を備えた複数の支持ローラ
を凹段状に配設することにより、これらの支持ロ
ーラで多数の被洗浄物を竪向きに並んだ状態で支
持可能なものとして構成し、上記複数の洗浄槽の
一部をスクラバ洗浄槽として、該スクラバ洗浄槽
内に、円板形基板の両側面に多数の突起状の摺擦
片を取付けてなる複数のブラシを、互いに所定の
間隔を保つた状態で、キヤリヤに支持された被洗
浄物間に嵌入する洗浄位置と被洗浄物から離間す
る待機位置との間を揺動自在且つ駆動回転自在に
配設すると共に、被洗浄物の外面に当接して該被
洗浄物を駆動回転させる駆動ローラを配設した、
ことを特徴とするものである。
[Means for Solving the Problems] In order to solve the above problems, the multi-tank cleaning device of the present invention includes a plurality of cleaning tanks for cleaning disk-shaped objects to be cleaned, and a plurality of cleaning tanks for accommodating the objects to be cleaned. In a multi-tank cleaning device, the carrier is provided with an engaging groove in which the outer circumference of the object to be cleaned is fitted, and a conveying means for conveying the carrier sequentially to each cleaning tank. By arranging a plurality of support rollers with intervals in a concave step shape, these support rollers can support a large number of objects to be cleaned in a vertically lined state, and the plurality of cleaning tanks A part of the scrubber cleaning tank is used as a scrubber cleaning tank, and in the scrubber cleaning tank, a plurality of brushes each having a large number of protruding rubbing pieces attached to both sides of a disc-shaped substrate are placed at a predetermined distance from each other. , is disposed so as to be able to swing and rotate freely between a cleaning position that fits between the objects to be cleaned supported by a carrier and a standby position that is separated from the objects to be cleaned, and is in contact with the outer surface of the object to be cleaned. A drive roller is provided to drive and rotate the object to be cleaned.
It is characterized by this.

[作用] キヤリヤに収容された多数の被洗浄物は、搬送
手段によつてキヤリヤと共に各洗浄槽を順次搬送
され、それぞれの洗浄槽において所定の洗浄を施
される。
[Operation] A large number of objects to be cleaned housed in the carrier are sequentially conveyed together with the carrier through each cleaning tank by the conveying means, and are subjected to predetermined cleaning in each cleaning tank.

特にスクラバ洗浄槽においては、各ブラシが被
洗浄物間に嵌入する洗浄位置に回動し、ブラシ両
面の摺擦片が両側の被洗浄物に摺接して洗浄が行
われるが、突起状の摺擦片が、被洗浄物の側面だ
けでなく、外周面や中心孔の内周面にも摺接する
ため、外周面や内周面の汚れまで確実に洗浄され
る。
Particularly in the scrubber cleaning tank, each brush rotates to the cleaning position where it fits between the objects to be cleaned, and the rubbing pieces on both sides of the brush slide against the objects to be cleaned on both sides to perform cleaning. Since the scrubbing piece slides not only on the side surface of the object to be cleaned, but also on the outer circumferential surface and the inner circumferential surface of the center hole, dirt on the outer circumferential surface and the inner circumferential surface is reliably cleaned.

[考案の効果] 本考案によれば、多槽式洗浄装置における一部
の洗浄槽をブラシによるスクラバ洗浄槽とし、有
機溶剤や水を用いる他の洗浄槽と共通のキヤリヤ
を使用して、該キヤリヤに収容された多数の被洗
浄物を該スクラバ洗浄槽で同時に洗浄できるよう
に構成したので、従来困難であつたスクラバ洗浄
と有機溶剤や水による仕上げ洗浄等とのライン化
を実現することができる。
[Effects of the invention] According to the invention, some of the cleaning tanks in a multi-tank cleaning device are made into scrubber cleaning tanks using brushes, and a common carrier is used for other cleaning tanks that use organic solvents or water. Since it is configured so that a large number of items to be cleaned stored in the carrier can be cleaned simultaneously in the scrubber cleaning tank, it is now possible to realize a line that combines scrubber cleaning and final cleaning using organic solvents or water, which was difficult in the past. can.

また、上記キヤリヤを、係合溝を備えた複数の
支持ローラで被洗浄物を外周で支持するように構
成すると共に、スクラバ洗浄槽内に、円板形基板
の両側面に多数の突起状の摺擦片を取付けてなる
複数のブラシを設け、これらのブラシを被洗浄物
間に嵌入させて洗浄するように構成したので、ブ
ラシに設けた突起状に摺擦片が、被洗浄物の側面
だけでなく外周面や中心孔の内周面にも確実に摺
接し、これらの外周面や内周面の汚れまできれい
に落すことできる。
In addition, the carrier is configured to support the object to be cleaned on the outer periphery with a plurality of support rollers provided with engagement grooves, and a large number of protrusions are installed on both sides of the disk-shaped substrate in the scrubber cleaning tank. A plurality of brushes each having a rubbing piece attached thereto are provided, and these brushes are inserted between the objects to be cleaned for cleaning. It also slides securely onto the outer circumferential surface and the inner circumferential surface of the center hole, making it possible to cleanly remove dirt from these outer circumferential surfaces and inner circumferential surfaces.

[実施例] 以下、本考案の実施例を図面に基づいて詳細に
説明するに、第1図及び第2図において、1はデ
イスク形の被洗浄物を洗浄するための洗浄装置の
機体であつて、該機体1の両端には、コンベヤ2
a,3aを備えた被洗浄物の供給口2と取出口3
とを設け、機体1の内部におけるこれらの供給口
2と取出口3との間には、洗浄方法の異なる複数
の洗浄槽4a〜4fを順次配設している。最も供
給口2側に位置する洗浄槽4aは、洗浄液として
洗剤を使用し、ヒータ5で加熱した洗剤中に被洗
浄物を浸漬揺動させながら超音波洗浄するように
構成したものであり、2番目の洗浄槽4bは、ブ
ラシ6によつて被洗浄物を洗浄するスクラバ洗浄
槽として構成したものである。なお、このスクラ
バ洗浄槽4bの具体的構成については後述する。
[Example] Hereinafter, an example of the present invention will be described in detail based on the drawings. In FIGS. 1 and 2, 1 is a body of a cleaning device for cleaning a disk-shaped object to be cleaned. There are conveyors 2 at both ends of the machine 1.
A supply port 2 and a take-out port 3 for the object to be cleaned, which are equipped with a and 3a.
A plurality of cleaning tanks 4a to 4f with different cleaning methods are sequentially arranged between the supply port 2 and the outlet 3 inside the body 1. The cleaning tank 4a located closest to the supply port 2 uses a detergent as a cleaning liquid, and is configured to perform ultrasonic cleaning while immersing and shaking the object in the detergent heated by a heater 5. The cleaning tank 4b is configured as a scrubber cleaning tank in which the brush 6 cleans the object to be cleaned. Note that the specific configuration of this scrubber cleaning tank 4b will be described later.

また、3番目の洗浄槽4cは、純水を使用し、
これに被洗浄物を浸漬揺動させることによつてそ
の洗浄を行うものであり、必要に応じて超音波を
使用することもでき、4番目の洗浄槽4dは、有
機溶剤中に被洗浄物を浸漬して揺動させながら超
音波洗浄するものであり、さらに、5番目の洗浄
槽4eは、同様に有機溶剤を使用する浸漬揺動形
の洗浄槽である。そして、6番目の洗浄槽4f
は、有機溶剤の蒸気を使用する蒸気洗浄槽となつ
ている。
In addition, the third cleaning tank 4c uses pure water,
The cleaning is carried out by immersing the object in the organic solvent and shaking it. Ultrasonic waves can also be used if necessary. Further, the fifth cleaning tank 4e is a immersing and swinging type cleaning tank that similarly uses an organic solvent. And the 6th cleaning tank 4f
is a steam cleaning tank that uses organic solvent vapor.

これらの洗浄槽4a〜4fの数及び配列は、図
示したものに限らず、必要に応じて適宜変更する
ことができる。
The number and arrangement of these cleaning tanks 4a to 4f are not limited to those shown in the drawings, and can be changed as necessary.

デイスク状の被洗浄物を収容するためのキヤリ
ヤ7は、第3図及び第4図に示すように、一対の
側板8,9に下縁にV字状の切欠き10を設けた
方形枠状のキヤリヤ本体8と、多数の係合溝12
を一定間隔で切設した複数の被洗浄物用支持ロー
ラ11,11,……とを有し、これらの支持ロー
ラ11を、キヤリヤ本体8における側板8,9間
に凹段状に位置させて回転自在に架設したもの
で、これらの支持ローラ11,11,……におけ
る係合溝12に被洗浄物13の外周部を竪向きに
係合支持させることにより、多数の被洗浄物13
を一定間隔で同時に収容できるように構成してい
る。
As shown in FIGS. 3 and 4, the carrier 7 for accommodating the disk-shaped object to be cleaned has a rectangular frame shape with a V-shaped notch 10 provided at the lower edge of a pair of side plates 8 and 9. carrier body 8 and a large number of engagement grooves 12.
It has a plurality of support rollers 11, 11, . The rollers 11, 11, .
It is constructed so that it can accommodate both at regular intervals at the same time.

なお、上記キヤリヤ7は、径の異なる被洗浄物
(第3図に鎖線で示す)に共用できるようにする
ため、側板9,9に、被洗浄物13の中心に対し
て放射方向に支持ローラ11の取付孔14a,1
4bを複数組設けておき、必要に応じて支持ロー
ラ11の位置を変えるようにすることもできる。
The carrier 7 is provided with support rollers on the side plates 9, 9 in a radial direction with respect to the center of the object 13, so that it can be used commonly for objects to be cleaned with different diameters (indicated by chain lines in FIG. 3). 11 mounting holes 14a, 1
It is also possible to provide a plurality of sets of rollers 4b and change the position of the support rollers 11 as necessary.

また、上記スクラバ洗浄槽4bは、第5図及び
第6図に示すように、その内容に上記キヤリヤ7
を支持する支持桟15と、該キヤリヤ7内の被洗
浄物13を洗浄するための多数の円板状のブラシ
6と、上記被洗浄物13を駆動回転するための手
段である駆動ローラ16と、駆動時に被洗浄物1
3の飛出しを防止する抑えローラ17と、ブラシ
6に水を供給するスプレー管18とを備えてい
る。
Further, as shown in FIGS. 5 and 6, the scrubber cleaning tank 4b includes the carrier 7.
a support beam 15 that supports the cleaning object 13; a large number of disc-shaped brushes 6 for cleaning the object 13 in the carrier 7; and a drive roller 16 that is a means for driving and rotating the object 13 to be cleaned. , the object to be cleaned 1 during driving
The brush 6 is provided with a restraining roller 17 that prevents the brush 3 from flying out, and a spray pipe 18 that supplies water to the brush 6.

上記ブラシ6は、アルミニウムなどからなる基
板6aの両側面に多数の突起状の摺擦片19を設
け、この摺擦片19を被洗浄物13の側面に摺接
させてその洗浄を行うように構成したもので、該
ブラシ6をブラシ軸20上に一定間隔で多数取付
け、このブラシ軸20を揺動アーム21の先端に
回転自在に取付けると共に、該ブラシ軸20及び
揺動アーム21の基端の揺動軸22をそれぞれ図
示しない駆動源に連結し、この揺動軸22の駆動
によつて、上記ブラシ6を、その一部分が被洗浄
物13,13間の隙間に嵌入して摺擦片19が被
洗浄物13,13の側面に摺接する洗浄位置(第
5図の鎖線位置)と、被洗浄物13から離間する
待機位置(同図の実線位置)の間で揺動させ得る
ように構成している。
The brush 6 is provided with a large number of protruding sliding pieces 19 on both sides of a substrate 6a made of aluminum or the like, and the sliding pieces 19 are brought into sliding contact with the side surfaces of the object 13 to be cleaned, thereby cleaning the object. A large number of the brushes 6 are mounted on the brush shaft 20 at regular intervals, and the brush shaft 20 is rotatably mounted on the tip of the swinging arm 21, and the base ends of the brush shaft 20 and the swinging arm 21 are The swing shafts 22 of the swing shafts 22 are respectively connected to drive sources (not shown), and by driving the swing shafts 22, a part of the brush 6 fits into the gap between the objects 13, 13 to be cleaned, and a sliding piece is formed. 19 can be swung between a cleaning position where it slides into contact with the side surfaces of the objects 13, 13 (dotted line position in FIG. 5) and a standby position where it is separated from the objects 13 to be cleaned (solid line position in the same figure). It consists of

上記ブラシ6に設けた摺擦片19は、被洗浄物
13の外周面や中心穴の内面まで確実に洗浄でき
るようにするため、該被洗浄物13の反対面まで
達するような長さに形成しておくのが望ましく、
この場合、隣接するブラシ6,6における摺擦片
19の位相を互いにずらせておけば、摺擦片同士
が接触して変形するのを防止することができる。
また、上記摺擦片19は、それを均一に分布させ
て設けてもよいが、第5図に示すように、複数の
摺擦片19を1グループとし、複数のグループを
一定間隔で設けるようにしてもよい。
The sliding piece 19 provided on the brush 6 is formed to a length that reaches the opposite surface of the object to be cleaned 13 in order to ensure that the outer peripheral surface of the object to be cleaned and the inner surface of the center hole can be cleaned. It is desirable to keep
In this case, by shifting the phases of the sliding pieces 19 of the adjacent brushes 6, 6, it is possible to prevent the sliding pieces 19 from coming into contact with each other and deforming.
Further, the sliding pieces 19 may be provided in a uniformly distributed manner, but as shown in FIG. You can also do this.

なお、上記摺擦片19は、スポンジやポリウレ
タンホームなど、被洗浄物に傷をつけにくい素材
で形成するのが望ましい。
The rubbing piece 19 is desirably made of a material that does not easily damage the object to be cleaned, such as sponge or polyurethane foam.

また、上記駆動ローラ16は、シリンダ23で
ガイド25に沿つて昇降自在のブラケツト24に
回転自在に取付けられ、該ブラケツト24に固定
したモータ26で駆動されるようになつており、
これを、キヤリヤ7における側板9,9の切欠き
10内において被洗浄物13の外周面に当接する
ように配設している。そして、該駆動ローラ16
の表面には、スポンジ等の摩擦部材を被着し、ス
リツプを防いで回転力を確実に被洗浄物13に伝
達できるようにしている。
Further, the driving roller 16 is rotatably attached to a bracket 24 which can be raised and lowered along a guide 25 by a cylinder 23, and is driven by a motor 26 fixed to the bracket 24.
This is disposed within the notch 10 of the side plates 9, 9 of the carrier 7 so as to come into contact with the outer circumferential surface of the object 13 to be cleaned. Then, the drive roller 16
A friction member such as a sponge is attached to the surface of the cleaning object 13 to prevent slippage and ensure rotational force is transmitted to the object 13 to be cleaned.

被洗浄物13の飛出しを防止する上記抑えロー
ラ17は、基端部を軸28によつて槽壁に枢支さ
れた抑えアーム27の先端に回転自在に取付けら
れ、リンク29を介して上記軸28に連結された
シリンダ30により、被洗浄物13に当接する抑
え位置(第5図の鎖線位置)と、被洗浄物13か
ら離間する待機位置(同図の実線位置)とに変位
できるようになつており、上記抑えアーム27の
先端には、多数のノズル18aを備えた上記スプ
レー管18を抑えローラ17と平行に取付けてい
る。このスプレー管18は、上記ブラシ軸20に
よつて兼用することもできる。
The holding roller 17 that prevents the object 13 to be washed from flying out is rotatably attached to the tip of a holding arm 27 whose base end is pivotally supported on the tank wall by a shaft 28. A cylinder 30 connected to the shaft 28 allows the cylinder 30 to be moved between a holding position where it contacts the object 13 to be cleaned (the position indicated by the chain line in FIG. 5) and a standby position where it is separated from the object 13 to be cleaned (the position indicated by the solid line in the figure). The spray pipe 18 equipped with a large number of nozzles 18a is attached to the tip of the holding arm 27 in parallel with the holding roller 17. This spray pipe 18 can also be used as the brush shaft 20.

図中31,32は、駆動ローラ16及びブラシ
軸20の変位を可能にするため槽壁に設けた長孔
である。これらの長孔30,31は、適宜の手段
で液密にシールするのが望ましい。
In the figure, 31 and 32 are long holes provided in the tank wall to enable displacement of the drive roller 16 and the brush shaft 20. It is desirable that these elongated holes 30 and 31 be sealed liquid-tightly by appropriate means.

さらに、上記機体1には、キヤリヤ7を各洗浄
槽4a〜4fに順次搬送するための搬送手段40
が設けられている。この搬送手段40は、第1図
及び第2図に示すように、上記各洗浄槽4a〜4
fが納められた洗浄室41とその背後の駆動室4
2とを区画する隔壁43の開口44を通じて洗浄
室41側に突出する搬送アーム45を備え、該搬
送アーム45の先端にキヤリヤ7のフツク8aに
先端が係合する吊持体46を取付けると共に、搬
送アーム45の基端を、シリンダ47を駆動源と
する公知の昇降機構48及びモータ49を駆動源
とする公知の横送り機構50に連結したものであ
る。
Further, the body 1 includes a conveying means 40 for sequentially conveying the carrier 7 to each cleaning tank 4a to 4f.
is provided. As shown in FIG. 1 and FIG.
The cleaning chamber 41 in which f is housed and the drive chamber 4 behind it
A transport arm 45 is provided that protrudes toward the cleaning chamber 41 through an opening 44 in a partition wall 43 that separates the transport arm 45 from the carrier 7. The base end of the transport arm 45 is connected to a known elevating mechanism 48 using a cylinder 47 as a drive source and a known transverse feed mechanism 50 using a motor 49 as a drive source.

なお、図中51は、洗浄室41の空気を清浄に
保つためのクリーンユニツトである。
Note that 51 in the figure is a clean unit for keeping the air in the cleaning chamber 41 clean.

上記構成を有する洗浄装置において、多数の被
洗浄物13を収容したキヤリヤ7が供給口2から
コンベヤ2aで洗浄室41内に送り込まれると、
該キヤリヤ7は、搬送アーム45で吊持され、昇
降機構48と横送り機構50との作用によつて各
洗浄槽4a〜4fを順次搬送され、それぞれの洗
浄槽において被洗浄物に所定の洗浄が施される。
そして、洗浄の終了したキヤリヤ7は、被洗浄物
13と共に取出口3から取出される。
In the cleaning apparatus having the above configuration, when the carrier 7 containing a large number of objects 13 to be cleaned is sent into the cleaning chamber 41 from the supply port 2 by the conveyor 2a,
The carrier 7 is suspended by a transport arm 45, and is sequentially transported through each of the cleaning tanks 4a to 4f by the action of an elevating mechanism 48 and a lateral transport mechanism 50, and is subjected to a predetermined cleaning process on the objects to be cleaned in each cleaning tank. will be applied.
The carrier 7 that has been cleaned is then taken out from the outlet 3 together with the object 13 to be cleaned.

そして、上記スクラバ洗浄槽4bにおいては、
キヤリヤ7が搬送アーム45によつて槽内に搬入
され、支持桟15上に載置されると、揺動軸22
の回転によつてブラシ6が第5図に鎖線で示す洗
浄位置まで変位すると共に、駆動ローラ16及び
抑えローラ17がそれぞれシリンダ23,30の
作動によつて被洗浄物13の外周面に当接する位
置まで変位し、被洗浄物13は、駆動ローラ16
により強制回転されながら同様に回転するブラシ
6によつて洗浄される。
In the scrubber cleaning tank 4b,
When the carrier 7 is carried into the tank by the transfer arm 45 and placed on the support frame 15, the swing shaft 22
As a result of the rotation of the brush 6, the brush 6 is displaced to the cleaning position shown by the chain line in FIG. The object to be cleaned 13 is moved to the drive roller 16
While being forcibly rotated by the brush 6, it is cleaned by the brush 6, which also rotates.

このとき、ブラシ6の突起状摺擦片19が、被
洗浄物13の側面だけでなく外周面や中心穴の内
面にまで接触し、被洗浄物全体がまんべんなく洗
浄されることになる。しかも、摺擦片19を突起
状とすることによつて被洗浄物13との摺動抵抗
が小さくなり、駆動ローラ16による該被洗浄物
13の駆動は容易に行われる。もちろんこの洗浄
時には、上記ブラシ6にスプレー管18を通じて
水が供給されることはいうまでもない。
At this time, the protruding sliding piece 19 of the brush 6 contacts not only the side surface of the object to be cleaned 13 but also the outer peripheral surface and the inner surface of the center hole, so that the entire object to be cleaned is evenly cleaned. Moreover, by forming the sliding piece 19 in a protruding shape, the sliding resistance against the object to be cleaned 13 is reduced, and the object to be cleaned 13 can be easily driven by the drive roller 16. Of course, during this cleaning, water is of course supplied to the brush 6 through the spray pipe 18.

上記スクラバ洗浄が終了すると、ブラシ6、駆
動ローラ16及び抑えローラ17がそれぞれ待機
位置に後退し、キヤリヤ7は搬送アーム45によ
つて次の洗浄槽へ搬送される。
When the scrubber cleaning is completed, the brush 6, drive roller 16, and restraining roller 17 are each retreated to their standby positions, and the carrier 7 is conveyed to the next cleaning tank by the conveyance arm 45.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図及び第2図は本考案の一実施例を示す縦
断正面図及び同側面図、第3図及び第4図はキヤ
リヤの側面図及び同縦断面図、第5図及び第6図
はスクラバ洗浄槽の拡大断面図及び同縦断側面図
である。 4a〜4f……洗浄槽、6……ブラシ、7……
キヤリヤ、11……支持ローラ、12……係合
溝、13……被洗浄物、16……駆動ローラ、4
0……搬送手段。
1 and 2 are a longitudinal sectional front view and a side view showing one embodiment of the present invention, FIGS. 3 and 4 are a side view and a longitudinal sectional view of the carrier, and FIGS. 5 and 6 are They are an enlarged cross-sectional view and a longitudinal side view of the scrubber cleaning tank. 4a to 4f...Cleaning tank, 6...Brush, 7...
Carrier, 11...Support roller, 12...Engagement groove, 13...Object to be cleaned, 16...Drive roller, 4
0...Transportation means.

Claims (1)

【実用新案登録請求の範囲】 デイスク形の被洗浄物を洗浄するための複数の
洗浄槽と、上記被洗浄物を収容するためのキヤリ
ヤと、該キヤリヤを各洗浄槽に順次搬送するため
の搬送手段とを備えた多槽式洗浄装置において、 上記キヤリヤを、被洗浄物の外周部が嵌合する
係合溝を所定間隔で備えた複数の支持ローラを凹
段状に配設することにより、これらの支持ローラ
で多数の被洗浄物を竪向きに並んだ状態で支持可
能なものとして構成し、 上記複数の洗浄槽の一部をスクラバ洗浄槽とし
て、該スクラバ洗浄槽内に、円板形基板の両側面
に多数の突起状の摺擦片を取付けてなる複数のブ
ラシを、互いに所定の間隔を保つた状態で、キヤ
リヤに支持された被洗浄物間に嵌入する洗浄位置
と被洗浄物から離間する待機位置との間を揺動自
在且つ駆動回転自在に配設すると共に、被洗浄物
の外面に当接して該被洗浄物を駆動回転させる駆
動ローラとを配設した、 ことを特徴とする多槽式洗浄装置。
[Claims for Utility Model Registration] A plurality of cleaning tanks for cleaning disk-shaped objects to be cleaned, a carrier for accommodating the objects to be cleaned, and a conveyor for sequentially conveying the carriers to each cleaning tank. In the multi-tank cleaning apparatus, the carrier is provided with a plurality of support rollers provided with engagement grooves at predetermined intervals into which the outer circumferential portion of the object to be cleaned is fitted, and the carrier is arranged in a concave step shape. These support rollers are configured to be able to support a large number of objects to be cleaned in a vertically lined state, and a part of the plurality of cleaning tanks described above is used as a scrubber cleaning tank, and a disc-shaped roller is installed in the scrubber cleaning tank. A cleaning position and an object to be cleaned in which a plurality of brushes each having a large number of protruding sliding pieces attached to both sides of a substrate are inserted between objects to be cleaned supported by a carrier while maintaining a predetermined distance from each other. The roller is arranged to be able to swing freely between the roller and the standby position separated from the roller and to rotate freely, and is also provided with a drive roller that comes into contact with the outer surface of the object to be cleaned and drives and rotates the object to be cleaned. Multi-tank cleaning equipment.
JP1984162191U 1984-10-26 1984-10-26 Expired JPH0422411Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984162191U JPH0422411Y2 (en) 1984-10-26 1984-10-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984162191U JPH0422411Y2 (en) 1984-10-26 1984-10-26

Publications (2)

Publication Number Publication Date
JPS6176515U JPS6176515U (en) 1986-05-23
JPH0422411Y2 true JPH0422411Y2 (en) 1992-05-22

Family

ID=30720079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984162191U Expired JPH0422411Y2 (en) 1984-10-26 1984-10-26

Country Status (1)

Country Link
JP (1) JPH0422411Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180104282A (en) * 2015-09-16 2018-09-20 타이코 일렉트로닉스 (상하이) 컴퍼니 리미티드 Cleaning system

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62154391A (en) * 1985-12-27 1987-07-09 Hitachi Plant Eng & Constr Co Ltd Disk group cleaning equipment
JPH0640400B2 (en) * 1986-06-11 1994-05-25 スピ−ドフアム株式会社 Disk cleaning device
JP2817532B2 (en) * 1992-08-05 1998-10-30 日立電子エンジニアリング株式会社 Ultrasonic cleaning equipment

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS618734A (en) * 1984-06-21 1986-01-16 Mitsubishi Chem Ind Ltd Workpiece cleaning equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180104282A (en) * 2015-09-16 2018-09-20 타이코 일렉트로닉스 (상하이) 컴퍼니 리미티드 Cleaning system

Also Published As

Publication number Publication date
JPS6176515U (en) 1986-05-23

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