JPH0422441B2 - - Google Patents
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- Publication number
- JPH0422441B2 JPH0422441B2 JP60296489A JP29648985A JPH0422441B2 JP H0422441 B2 JPH0422441 B2 JP H0422441B2 JP 60296489 A JP60296489 A JP 60296489A JP 29648985 A JP29648985 A JP 29648985A JP H0422441 B2 JPH0422441 B2 JP H0422441B2
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- Japan
- Prior art keywords
- measured
- measuring
- spherical
- dimensions
- elastic
- Prior art date
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- Length-Measuring Instruments Using Mechanical Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Description
【発明の詳細な説明】
［発明の技術分野］
本発明は、球体としてセラミツク軸受に用いら
れる球体の寸法測定方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a method for measuring the dimensions of a sphere used in a ceramic bearing.
［発明の技術的背景とその問題点］
近年、セラミツクの高剛性、耐摩耗性、耐食性
等を利用して、セラミツク軸やセラミツク軸受の
開発が進められている。このセラミツク軸受に用
いられるセラミツクボールの寸法測定について
は、鋼球の寸法測定の場合と異なり、次のような
問題点があつた。[Technical background of the invention and its problems] In recent years, the development of ceramic shafts and ceramic bearings has been progressing by taking advantage of the high rigidity, wear resistance, corrosion resistance, etc. of ceramics. The measurement of the dimensions of the ceramic balls used in this ceramic bearing is different from the measurement of the dimensions of steel balls, and has the following problems.
すなわち、一般に精密寸法測定の場合には、測
定系と被測定物の弾性係数、被測定物と測定子の
球状端面の直径、測定力により弾性接近量が変化
するので補正を行なうことが必要であるが、鋼球
についてはマスターボールによる比較測定法が確
立しているので、上記のような補正計算をしなく
とも比較的簡便に寸法測定することができる。 In other words, in general, in the case of precision dimension measurement, the amount of elastic approach changes depending on the elastic modulus of the measurement system and the object to be measured, the diameter of the spherical end surfaces of the object and the probe, and the measuring force, so it is necessary to make corrections. However, for steel balls, a comparative measurement method using a master ball has been established, so dimensions can be measured relatively easily without the need for correction calculations as described above.
それに対し、セラミツクボールの場合には、測
定精度については鋼球の場合と同一レベル、例え
ば３級の基準で直径9.525mm（3/8インチ）の球に
対して最大直径−最小直径（Dnax−Dnio）の許容
誤差が0.08μｍ以下という基準が要求されるにも
かかわらず、セラミツクについての精密測定の事
例が少なく、また測定系と被測定物との材質の相
違によつて弾性率が異なるので、補正が複雑にな
る等の問題点があつた。 On the other hand, in the case of ceramic balls, the measurement accuracy is at the same level as steel balls, for example, the maximum diameter - minimum diameter (D nax Although the standard requires a tolerance of 0.08 μm or less for ceramics, there are few cases of precise measurement of ceramics, and the elastic modulus may vary due to the difference in the materials between the measurement system and the object to be measured. Because of the difference, there were problems such as complicated correction.
［発明の目的］
本発明者らは、被測定物とほぼ同一の弾性係数
および端部形状を有する測定子を用いれば、寸法
基準となるブロツクゲージと測定定盤とを同一弾
性率とすることによつて、弾性変形量がきわめて
小さくなることに着目し本発明をなすに至つた。[Purpose of the Invention] The present inventors have discovered that by using a measuring head having almost the same elastic modulus and end shape as the object to be measured, the block gauge and the measurement surface plate, which serve as dimensional standards, can have the same modulus of elasticity. The present invention was developed by paying attention to the fact that the amount of elastic deformation becomes extremely small.
本発明は以上のような知見にもとづいてなされ
たもので複雑な測定値の補正を簡略化でき、しか
もかたより誤差の極めて小さな球体の寸法測定方
法を提供することを目的とする。 The present invention has been made based on the above findings, and an object of the present invention is to provide a method for measuring the dimensions of a sphere, which can simplify the correction of complex measured values, and which has extremely small errors.
［発明の概要］
すなわち、本発明の球体の寸法測定方法は、球
体状の被測定物の寸法を測定するにあたり、前記
被測定物とほぼ等しい外径の球状端面を有し、か
つ前記被測定物と弾性係数が近似する材質で形成
された球状測定子を用いて、前記被測定物の寸法
を測定することを特徴としている。[Summary of the Invention] That is, the method for measuring the dimensions of a sphere according to the present invention, in measuring the dimensions of a spherical object to be measured, has a spherical end surface having an outer diameter approximately equal to that of the object to be measured, and a method for measuring the dimensions of a spherical object. The method is characterized in that the dimensions of the object to be measured are measured using a spherical measuring element made of a material whose elastic modulus is similar to that of the object.
［発明の実施例］
次に、本発明の実施例を図面によつて説明す
る。[Embodiments of the Invention] Next, embodiments of the present invention will be described with reference to the drawings.
実施例
第１図は、本発明の寸法測定方法を適用した精
密寸法測定装置の一例であるダイヤルゲージを示
している。Embodiment FIG. 1 shows a dial gauge which is an example of a precision dimension measuring device to which the dimension measuring method of the present invention is applied.
第１図において、符号１は球状測定子、２はス
ピンドル、３はステム、４は指針を示す。このダ
イヤゲージを使用したセラミツクボールの測定の
概略を第２図および第３図によつて説明する。 In FIG. 1, reference numeral 1 indicates a spherical measuring tip, 2 a spindle, 3 a stem, and 4 a pointer. An outline of the measurement of ceramic balls using this diamond gauge will be explained with reference to FIGS. 2 and 3.
第２図において、符号１は球状測定子を示し、
この測定子１は曲率半径ｄ／２の球状端面を有し
ている。被測定物の測定に際しては、まず測定定
盤５上に、この測定定盤５とほぼ同一の弾性係数
を有する材質の基準ブロツクゲージ６を配置す
る。この実施例では、便宜的に基準ブロツクゲー
ジ６を測定定盤５のかわりに使用することとし、
測定力（Ｎ）で球状測定子１を接触させる。 In FIG. 2, reference numeral 1 indicates a spherical probe;
This probe 1 has a spherical end face with a radius of curvature d/2. When measuring an object to be measured, first, a reference block gauge 6 made of a material having substantially the same elastic modulus as the measurement surface plate 5 is placed on the measurement surface plate 5. In this embodiment, a reference block gauge 6 is used in place of the measurement surface plate 5 for convenience.
Bring the spherical probe 1 into contact with the measuring force (N).
ここで、基準ブロツクゲージ６の基準寸法Ｌ
は、後に述べる被測定物７の直径Ｄと比較測定が
可能な範囲で等しくする。 Here, the standard dimension L of the standard block gauge 6 is
is equal to the diameter D of the object to be measured 7, which will be described later, within a range that allows comparative measurement.
次に、基準ブロツクゲージ６のかわりに、第３
図に示すように、被測定物７を配置し測定する。
ここで、被測定物７の直径Ｄと球状測定子１の球
状端面の直径ｄとは弾性接近量の値に影響を与え
ない範囲で等しいものとし、かつ球状測定子１の
球状端面の材質は、被測定物７とほぼ同一の弾性
係数の材質、例えば同材質とする。 Next, instead of the reference block gauge 6, a third
As shown in the figure, the object to be measured 7 is placed and measured.
Here, the diameter D of the object to be measured 7 and the diameter d of the spherical end surface of the spherical gauge head 1 are assumed to be equal within a range that does not affect the value of the elastic approach amount, and the material of the spherical end face of the spherical gauge head 1 is , is made of a material having substantially the same elastic modulus as the object to be measured 7, for example, the same material.
以上のような方法で測定すると、弾性変形は球
状測定子１と基準ブロツクゲージ６との接触面
８、球状測定子１と被測定物７との接触面９、お
よび被測定物７と測定定盤５との接触面１０の３
ケ所で生じることとなる。 When measured using the method described above, elastic deformation is measured at the contact surface 8 between the spherical gauge head 1 and the reference block gauge 6, the contact surface 9 between the spherical gauge head 1 and the object to be measured 7, and the contact surface 9 between the spherical gauge head 1 and the object to be measured 7, and the area between the object to be measured 7 and the measurement target. Contact surface 10-3 with board 5
This will occur in several places.
それぞれの接触面における弾性接近量を考える
と、接触面８の弾性接近量ε1と接触面１０の弾性
接近量ε2は、弾性係数および形状がほぼ同一のた
め、ε1＝ε2とすることができ、測定系から相殺さ
れることになる。従つて、接触面９の弾性接近量
ε3のみについて考えればよいこととなる。 Considering the amount of elastic approach on each contact surface, the amount of elastic approach ε 1 of the contact surface 8 and the amount of elastic approach ε 2 of the contact surface 10 are almost the same in elastic modulus and shape, so ε 1 = ε 2 can be canceled out from the measurement system. Therefore, it is only necessary to consider the elastic approach amount ε 3 of the contact surface 9.
そこで、次に本発明の球状測定子を用いた場合
の接触面９の弾性接近量を算出する。 Therefore, next, the amount of elastic approach of the contact surface 9 when using the spherical measuring tip of the present invention is calculated.
ヘルツの接触理論より、弾性接近量εは
式：
ε3＝９／16・r1＋r2／r1・r2・（１−V1 2／E1＋１−V2
2／E2）2・P2
……(1)
で表わされる。ここで、E1およびE2は相接する
両物体の弾性係数、v1およびv2は両物体のポアソ
ン比、r1およびr2は両物体の球状端面の半径、Ｐ
は測定力を示す。 According to Hertz's contact theory, the elastic approach amount ε is calculated using the formula: ε 3 =9/16・r 1 +r 2 /r 1・r 2・(1−V 1 2 /E 1 +1−V 2
2 /E 2 ) 2・P 2 ...(1). Here, E 1 and E 2 are the elastic modulus of both objects in contact, v 1 and v 2 are Poisson's ratios of both objects, r 1 and r 2 are the radii of the spherical end surfaces of both objects, and P
indicates the measuring force.
測定力を0.05Kgｆとした時のセラミツクボール
の半径ｒ（mm）と弾性接近量（μｍ）との関係は、
測定子およびセラミツクボールの材質として窒化
ケイ素を用いると、
E1＝E2＝3.2×104Kgｆ／mm2、
r1＝r2＝ｒmm、
v1＝v2＝0.26、
Ｐ＝0.05Kgｆ
となるので、これらの値を(1)式に代入すると、
ε＝2.18×10-4／3√ ……(2)
となる。この(2)式から被測定物の直径に対する弾
性接近量ε3を求めると、ほぼ第４図に示すグラフ
で近似される。 The relationship between the radius r (mm) of the ceramic ball and the amount of elastic approach (μm) when the measuring force is 0.05Kgf is:
When silicon nitride is used as the material for the probe and ceramic ball, E 1 = E 2 = 3.2×10 4 Kgf/mm 2 , r 1 = r 2 = rmm, v 1 = v 2 = 0.26, P = 0.05 Kgf. Therefore, by substituting these values into equation (1), we get ε=2.18×10 -4 / 3 √ ...(2). When the elastic approach amount ε 3 with respect to the diameter of the object to be measured is determined from equation (2), it is approximately approximated by the graph shown in FIG.
一方、比較例として、従来の半径２mmの球状端
面を有する鋼球測定子を用いて、前記と同一の測
定力で前記と同材質のセラミツクボールを測定し
た場合、
E1＝2.12×104Kgｆ／mm2、
E2＝3.2×104Kgｆ／mm2、
r1＝２mm、
r2＝ｒmm、
v1＝0.3、
v2＝0.26、
Ｐ＝0.05Kgｆ
となり、これらを(1)式に代入すると、
ε＝3√7.29＋3.645×10-4 ……(3)
となる。この(3)式から被測定物の直径に対する弾
性接近量ε3を求めると、第５図に示すグラフとな
る。 On the other hand, as a comparative example, when a ceramic ball made of the same material as above was measured with the same measuring force as above using a conventional steel ball measuring head with a spherical end face with a radius of 2 mm, E 1 = 2.12 × 10 4 Kgf /mm 2 , E 2 = 3.2×10 4 Kgf/mm 2 , r 1 = 2 mm, r 2 = rmm, v 1 = 0.3, v 2 = 0.26, P = 0.05 Kgf, and substitute these into equation (1). Then, ε= 3 √7.29+3.645×10 -4 ……(3). When the elastic approach amount ε 3 with respect to the diameter of the object to be measured is determined from this equation (3), the graph shown in FIG. 5 is obtained.
第４図および第５図から分かるように、接触面
９の弾性接近量ε3、従来の鋼球測定子を用いた場
合に比べて小さな値となり、しかも本発明の球状
測定子を用いた場合は、弾性接近量についてはこ
の接触面９についての弾性接近量のみを考えれば
よいので補正を簡略化することができる。比較例
による場合には、第５図に示したように、接触面
８の弾性接近量ε1、接触面１０の弾性接近量ε2を
も考慮しなければならない。 As can be seen from FIGS. 4 and 5, the elastic approach amount ε 3 of the contact surface 9 becomes a smaller value than when using the conventional steel ball measuring head, and moreover, when the spherical measuring head of the present invention is used. With regard to the elastic approach amount, only the elastic approach amount for this contact surface 9 needs to be considered, so correction can be simplified. In the case of the comparative example, as shown in FIG. 5, the elastic approach amount ε 1 of the contact surface 8 and the elastic approach amount ε 2 of the contact surface 10 must also be taken into consideration.
［発明の効果］
以上説明したように、本発明の球体の寸法測定
方法によれば、補正の複雑さと、かたより誤差を
軽減することが可能となる。また高い精度を必要
としないものについては補正をせずに直読するこ
ともでき、寸法測定の迅速化を図ることができ
る。[Effects of the Invention] As explained above, according to the method for measuring dimensions of a sphere according to the present invention, it is possible to reduce the complexity of correction and to reduce errors. Further, for items that do not require high accuracy, it is possible to directly read them without making any corrections, making it possible to speed up dimension measurements.
第１図は本発明の一実施例で使用したダイヤル
ゲージを示す概略図、第２図および第３図はこれ
を利用したセラミツクボールの測定の概略を示す
説明図、第４図は本発明による被測定物の半径と
弾性接近量との関係を示す関係図、第５図は従来
法による被測定物の半径と弾性接近量との関係を
示す関係図である。
１……球状測定子、２……スピンドル、３……
ステム、４……指針、５……測定定盤、６……基
準ブロツクゲージ、７……被測定物、８，９，１
０……接触面。
Fig. 1 is a schematic diagram showing a dial gauge used in an embodiment of the present invention, Figs. 2 and 3 are explanatory diagrams schematically showing the measurement of ceramic balls using this dial gauge, and Fig. 4 is a schematic diagram showing a dial gauge used in an embodiment of the present invention. FIG. 5 is a relationship diagram showing the relationship between the radius of the object to be measured and the amount of elastic approach. FIG. 5 is a relationship diagram showing the relationship between the radius of the object to be measured and the amount of elastic approach according to the conventional method. 1... Spherical probe, 2... Spindle, 3...
Stem, 4...Pointer, 5...Measuring surface plate, 6...Reference block gauge, 7...Object to be measured, 8, 9, 1
0...Contact surface.
Claims (1)
り、前記被測定物とほぼ等しい外径の球状端面を
有し、かつ前記被測定物と弾性係数が近似する材
質で形成された球状測定子を用いて、前記被測定
物の寸法を測定することを特徴とする球体の寸法
測定方法。 ２ 前記被測定物は、セラミツクボールである特
許請求の範囲第１項記載の球体の寸法測定方法。[Claims] 1. When measuring the dimensions of a spherical object to be measured, a spherical end face having an outer diameter approximately equal to that of the object to be measured, and made of a material having an elastic modulus similar to that of the object to be measured. A method for measuring dimensions of a spherical body, characterized in that the dimensions of the object to be measured are measured using a spherical measuring element. 2. The method for measuring dimensions of a sphere according to claim 1, wherein the object to be measured is a ceramic ball.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29648985A JPS62150102A (en) | 1985-12-24 | 1985-12-24 | Apparatus for measuring dimension of sphere |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29648985A JPS62150102A (en) | 1985-12-24 | 1985-12-24 | Apparatus for measuring dimension of sphere |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62150102A JPS62150102A (en) | 1987-07-04 |
| JPH0422441B2 true JPH0422441B2 (en) | 1992-04-17 |
Family
ID=17834216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29648985A Granted JPS62150102A (en) | 1985-12-24 | 1985-12-24 | Apparatus for measuring dimension of sphere |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62150102A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0654204B2 (en) * | 1988-12-14 | 1994-07-20 | 株式会社東芝 | Sphere size measuring device |
| JP2002257502A (en) * | 2001-03-05 | 2002-09-11 | Junichi Kushibiki | Device and method for measuring thickness |
| JP2005192577A (en) * | 2003-12-26 | 2005-07-21 | Hitachi Ltd | Tactile device, tactile indication device, and remote tactile system |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6153501A (en) * | 1984-08-24 | 1986-03-17 | Toshiba Corp | Measuring element |
-
1985
- 1985-12-24 JP JP29648985A patent/JPS62150102A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62150102A (en) | 1987-07-04 |
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