JPH0422826Y2 - - Google Patents
Info
- Publication number
- JPH0422826Y2 JPH0422826Y2 JP2930587U JP2930587U JPH0422826Y2 JP H0422826 Y2 JPH0422826 Y2 JP H0422826Y2 JP 2930587 U JP2930587 U JP 2930587U JP 2930587 U JP2930587 U JP 2930587U JP H0422826 Y2 JPH0422826 Y2 JP H0422826Y2
- Authority
- JP
- Japan
- Prior art keywords
- small
- diameter bellows
- sealing ring
- ring
- vacuum processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007789 sealing Methods 0.000 claims description 19
- 239000002184 metal Substances 0.000 claims description 9
- 238000005192 partition Methods 0.000 claims description 8
- 238000009489 vacuum treatment Methods 0.000 claims 1
- 230000003014 reinforcing effect Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Diaphragms And Bellows (AREA)
- Physical Vapour Deposition (AREA)
- Sealing Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2930587U JPH0422826Y2 (2) | 1987-02-26 | 1987-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2930587U JPH0422826Y2 (2) | 1987-02-26 | 1987-02-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63136730U JPS63136730U (2) | 1988-09-08 |
| JPH0422826Y2 true JPH0422826Y2 (2) | 1992-05-26 |
Family
ID=30833072
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2930587U Expired JPH0422826Y2 (2) | 1987-02-26 | 1987-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0422826Y2 (2) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5088767B2 (ja) * | 2005-03-31 | 2012-12-05 | 株式会社日立エンジニアリング・アンド・サービス | 往復動機構を備えた真空装置 |
-
1987
- 1987-02-26 JP JP2930587U patent/JPH0422826Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63136730U (2) | 1988-09-08 |
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