JPH0422897A - X-ray device - Google Patents
X-ray deviceInfo
- Publication number
- JPH0422897A JPH0422897A JP2126678A JP12667890A JPH0422897A JP H0422897 A JPH0422897 A JP H0422897A JP 2126678 A JP2126678 A JP 2126678A JP 12667890 A JP12667890 A JP 12667890A JP H0422897 A JPH0422897 A JP H0422897A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- door
- chamber
- loading
- rays
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はＸ！Ｉを用いた装置の試料搬入搬出装置に関す
る。[Detailed Description of the Invention] [Industrial Field of Application] The present invention is based on X! This invention relates to a sample loading/unloading device for an apparatus using I.
従来ＯＸ＠を用イ＊装＋ｔａ、％ｈ）Ｗ３６２−２１９
６５２号公報に記載のように、作業者ｔｘｍから保護す
るため、Ｘ＠発生部、及び、ｘＭ露光部分をＸ線を透過
しない試料室内に設置する。試料室内に試料を搬入また
は搬出する時は、Ｘ線の発生を中止し、試料Ｎ￥Ｃあけ
られたＪＩｔ−開けて試料を出し入れするようになって
いた。Conventional OX@I*equipment+ta,%h)W362-219
As described in Japanese Patent No. 652, the X@ generating section and the xM exposure section are installed in a sample chamber that does not transmit X-rays in order to protect them from operator txm. When carrying a sample into or out of the sample chamber, the generation of X-rays was stopped, the sample N\C opening was opened, and the sample was put in and taken out.
ＸｉはＸ＠発主部に数十ＫＶから百数十ＫＶＯ高電圧を
印加して発生させるが、Ｘｉの発生を一時停止した後、
再び、Ｘ１ｌｌを発生されるにはＯｖから一度に数十Ｋ
Ｖから百数十に’ｌ／の印加電圧を加えるのでなく士数
秒から数十秒の時間をかけて印加電圧を上昇させ、目的
の印加電圧にする。従来技術では、試料の搬入搬出時に
毎回ｘ１Ｍ発生を中断、再発生させる必要があるため、
大量の試料を次々に光人支出する装置では、Ｘ線発生中
上後の再発生に要する時間が無視できず、大量の試料を
効率よく処理することができなかった。Xi is generated by applying a high voltage of several tens of KV to over a hundred KVO to the main part of the X@ generator, but after temporarily stopping the generation of Xi,
Again, it takes several tens of K at a time from Ov to generate X1ll.
Instead of applying an applied voltage of 1/2 to 100 V, the applied voltage is increased over a period of several seconds to several tens of seconds to reach the desired applied voltage. With the conventional technology, it is necessary to interrupt and regenerate x1M generation every time a sample is loaded or unloaded.
In an apparatus that processes a large number of samples one after another, the time required for the generation and regeneration of X-rays cannot be ignored, making it impossible to efficiently process a large number of samples.
本発明の目的は、ｘＭ発発生上止再発生に要する時間を
なくし、大量の試料を効率よく処理する方法、および、
その装置を提供することにある。The purpose of the present invention is to provide a method for efficiently processing a large amount of samples by eliminating the time required for the occurrence and re-occurrence of xM, and
The goal is to provide that device.
〔課題を解決する丸めの手段〕
上記目的を達成するためＫ、本発明は試料室の試料搬入
扉と搬出扉の＃ＫＸ線を遮蔽可能な予備室を設け、予備
室にも試料を搬入搬出する扉を設け、扉を二重にし、試
料交換時にどちらかの扉を閉じる。[Rounding means for solving the problem] In order to achieve the above object, the present invention provides a pre-chamber that can shield #KX-rays at the sample loading door and unloading door of the sample chamber, and allows samples to be carried in and taken out of the sample chamber as well. double the doors, and close one of the doors when replacing the sample.
Ｘ線は、常時、発生させておく、試料を搬入する際は、
まず、試料室扉を閉じ、予備室扉を開は試料を予備室に
搬入する。この時点では試料室扉が閉じているのでＸ線
が外部に漏洩することはない。次に１予備室の扉を閉じ
る。予備室の扉が完全に閉じた後、試料室の扉を開ける
。この時点では、予備室ＯＪｌが閉じているので、やは
シ、Ｘｉが漏洩することはない。次に、予備室の試料を
試料室に移動させる。移動完了後、再び、試料室の扉を
閉じる。装置は試料案内にはいった試料を処理する。X-rays should be generated at all times, and when transporting samples,
First, the sample chamber door is closed, the preliminary chamber door is opened, and the sample is carried into the preliminary chamber. At this point, the sample chamber door is closed, so no X-rays leak outside. Next, close the door to the first spare room. After the preliminary chamber door is completely closed, open the sample chamber door. At this point, the preliminary chamber OJl is closed, so there is no leakage of Xi or Xi. Next, the sample in the preliminary chamber is moved to the sample chamber. After completing the movement, close the sample chamber door again. The device processes the sample that enters the sample guide.
試料室から試料を搬出する時は、まず、予備室の扉を閉
め、次に１試料室の扉を開け、試料を試料室から予備室
に搬出する０次に、試料室の扉を閉じた後、予備室の扉
を開け、試料を外に搬出する。When carrying out a sample from the sample chamber, first close the door of the preliminary chamber, then open the door of the first sample chamber, and carry out the sample from the sample chamber to the preliminary chamber.Next, close the door of the sample chamber. After that, open the door of the preliminary room and take the sample outside.
以上の方法によれば、常に、試料室か予備室のどちらか
の扉が閉じているのでＸ線が装置外部に漏洩することは
ない。したがって、Ｘ線を連続して発生させても作業者
は安全に作業ができ、しかも、Ｘ線発生を中止、再発生
させるための時間が不必要となり、大量の試料を連続し
て処理することができる。According to the above method, since the door of either the sample chamber or the preliminary chamber is always closed, X-rays will not leak outside the apparatus. Therefore, even if X-rays are generated continuously, workers can work safely, and there is no need for time to stop and restart X-ray generation, making it possible to process a large amount of samples continuously. I can do it.
試料の搬入経路と搬出経路を別々にもてば、試料が試料
室にはいって処理を受けているときは試料室Ｊ％は閉じ
ているので予備室の扉を開けてもＸ線は漏洩しない。従
って、試料を処理中ＩＩＣ次の試料を待機させ、予備室
の扉を閉じておき、先の試料の処理が終了したら、試料
室の扉を開け、先の試料を搬出、次の試料を搬入し、試
料の入れかえが終了したら、試料室扉を閉じ次に新たな
試料を処理中に予備室扉を開けて処理済試料を予備室か
ら搬出し、さらに、次の試料を予備室と搬入し予備室扉
を閉じる。先の試料の処理の終了まで待機させる。以上
の動作をくりかえせば、試料の処理中に予備室で処理済
試料の搬出と新しい試料の搬入が行われるので予備室に
、−旦、試料を止めるために要する時間は、多数の試料
を処理する場合、トータルの処理時間に加算されないた
め、効率よく、大量の試料が処理できる。If there are separate entrance and exit routes for the sample, the sample room J% will be closed when the sample enters the sample room and is being processed, so X-rays will not leak even if the preliminary room door is opened. . Therefore, while a sample is being processed, the next sample is placed on standby and the door of the preliminary chamber is closed. When the processing of the previous sample is completed, the door of the sample chamber is opened, the previous sample is carried out, and the next sample is carried in. After changing the sample, close the sample chamber door, open the preliminary chamber door while processing a new sample, carry out the processed sample from the preliminary chamber, and then carry the next sample into the preliminary chamber. Close the spare room door. Wait until the processing of the previous sample is completed. If the above operation is repeated, the processed sample will be taken out of the preparatory room and a new sample will be brought in while the sample is being processed. In this case, it is not added to the total processing time, so a large amount of samples can be processed efficiently.
以下、本発明の一実施例であるはんだ付検査装置を第１
図によシ説明する。図中、１Ｆｉ処理中の試料、２Ｆｉ
ＸＹＯ，ｚ、ｆ−ジ、５はＸ線源、４はイメージインテ
ンシファイア、５ｉｉ？Ｖカメラ、６は画像処理装置、
７は、ｘ！！制御装置、８は試料室、９は試料搬入予備
室、１０は待機中試料、１２は試料室搬出扉、１６は試
料室搬入扉駆動装置、１４は搬入予備室搬入扉、１５は
搬入予備室搬入扉駆動装置、１６は試料搬入装置、１７
は試料ローダ、１８は試料搬入予備室、１９は処理済試
料、２０は試料室搬出扉、２１Ｆｉ試料室搬出扉駆動装
置、２２Ｆｉ予備室搬出扉、２３は予備室搬出扉駆動装
置１２４は試料搬出装置、２５ａ試料アンローダ、２７
は扉シーケンス制御回路、２８は、ステージ制御回路、
２９は、システム制御装置、３０は試料搬入小装置であ
る。Hereinafter, a soldering inspection apparatus which is an embodiment of the present invention will be described below.
This will be explained with the help of a diagram. In the figure, samples undergoing 1Fi treatment, 2Fi
XYO, z, f-di, 5 is the X-ray source, 4 is the image intensifier, 5ii? V camera, 6 is an image processing device,
7 is x! ! Control device, 8 is a sample chamber, 9 is a sample loading preliminary room, 10 is a waiting sample, 12 is a sample chamber unloading door, 16 is a sample chamber loading door drive device, 14 is a loading preliminary chamber loading door, 15 is a loading preliminary chamber Loading door drive device, 16, sample loading device, 17
is a sample loader, 18 is a sample carry-in preliminary chamber, 19 is a processed sample, 20 is a sample chamber carry-out door, 21 is a sample chamber carry-out door drive device, 22 is a preliminary chamber carry-out door, 23 is a preliminary chamber carry-out door drive device 124 is a sample carry-out door. Device, 25a Sample unloader, 27
28 is a door sequence control circuit, 28 is a stage control circuit,
29 is a system control device, and 30 is a small sample carrying device.
Ｘ４１源３から発生したｘ＃！は試料１を透過し、イメ
ージインテンシファイア４でｘ！！から光に変換され、
さらに、ＴＶ左カメラ電気信号に変換される。試料搬入
小装置ｉ［０、ＸＹＯステージ２の試料下部分は孔がお
いておシ、Ｘ線が透過するようになっている。試料上に
ははんだ付部分がある。x# generated from X41 Source 3! is transmitted through sample 1, and x! is transmitted through image intensifier 4. ! is converted into light,
Furthermore, it is converted into a TV left camera electrical signal. A hole is provided in the lower part of the sample loading device i[0, XYO stage 2, so that X-rays can pass therethrough. There is a soldered part on the sample.
はんだはＸ線を吸収するのでＴＶ右カメラには、はんだ
付部分が暗く検出される。Ｘ線吸収量ははんだ厚さに依
存するのでＴＶ右カメラで検出された濃淡画像を画像処
理装置６で処理すれば、はんだ行状態の良否の判定検査
ができる。Solder absorbs X-rays, so the soldered area appears dark on the TV right camera. Since the amount of X-ray absorption depends on the solder thickness, if the grayscale image detected by the TV right camera is processed by the image processing device 6, the quality of the solder line state can be inspected.
試料１が検査中は、試料室扉１２と２０は閉じている。When sample 1 is being examined, sample chamber doors 12 and 20 are closed.
試料室１２と２０が閉じている間に、予備室扉１４およ
び２２を開け、検査済試料１９を試料搬出装置２４で予
備室１８から搬出し、試料アンローダ２５に移す。アン
ローダに移動終了したら予備室扉２２を閉じる。試料搬
出中、もう−方の試料搬入予備室９では、試料ローダ１
７から次に検査する試料１０を搬入、試料搬入終了後、
予備室扉１４を閉じる。この時点ではすべての扉が閉じ
ている。試料１の検査が終了し九ら、試料室８の扉１２
と２０を閉じる。検査済試料１をステージ２を図中左端
まで移動し、試料搬入小装置３０により、試料搬出装置
２４上に試料１を試料室８から搬出する。搬出が終了し
たら１ｎ２０を閉じる。搬出が終了したらステージ２を
図中右端に移動させ、新たな試料１０を試料製造装置１
６によシ、試料搬入出装置３０上に移動させる。移動が
終了したら試料室の試料搬入Ｂ１２を閉じる。While the sample chambers 12 and 20 are closed, the preliminary chamber doors 14 and 22 are opened, and the inspected sample 19 is carried out from the preliminary chamber 18 by the sample carrying device 24 and transferred to the sample unloader 25. When the movement to the unloader is completed, the preliminary chamber door 22 is closed. During sample loading, in the other sample loading preliminary room 9, the sample loader 1
From 7 onwards, sample 10 to be inspected next is carried in, and after sample loading is complete,
Close the spare room door 14. All doors are closed at this point. After the inspection of sample 1 is completed, the door 12 of sample chamber 8 is opened.
and close 20. The inspected sample 1 is moved on the stage 2 to the left end in the figure, and the sample 1 is carried out from the sample chamber 8 onto the sample carry-out device 24 using the small sample carry-in device 30. When the unloading is completed, close 1n20. When the unloading is completed, move the stage 2 to the right end in the figure and transfer the new sample 10 to the sample manufacturing device 1.
6, move it onto the sample loading/unloading device 30. When the movement is completed, close the sample loading B12 in the sample chamber.
新たな試料が試料室に搬入され九ら、直ちに、新たな試
料の検査を開始する。試料室の二つの扉１２と２０が閉
じたら、予備室扉１４と２２を開ける。As soon as a new sample is brought into the sample room, testing of the new sample begins. After the two doors 12 and 20 of the sample chamber are closed, the preliminary chamber doors 14 and 22 are opened.
次に検査済試料１９を試料搬出装置２４で試料アンロー
ダ２５上に移動させる。移動が終了したら予備室扉２２
を閉じる。一方、試料搬入予備室９では、試料ローダ１
７から新たな試料を試料搬入装置１６上に移動させる。Next, the inspected sample 19 is moved onto the sample unloader 25 by the sample unloading device 24. When the movement is complete, open the spare room door 22
Close. On the other hand, in the sample loading preliminary room 9, the sample loader 1
7, a new sample is moved onto the sample loading device 16.
新丸な試料の搬入が完了したら、予備室扉１４を閉じる
。この時点では、再び、すべての扉が閉じている。検査
が処理したう、再び、試料室扉１２と２０を開け、検査
済試料の搬出と新たな試料の搬入が行われる。各界は扉
シーケンス制御装置の信号によシ各界の駆動装置１５．
１５． ２１． ２５によりシーケンスどおりに駆動
される。さらに、扉シーケンス制御回路２７、画像処理
装置６、ステージ制御回路２８は、システム制御装置２
９によ）制御され、試料の交換と検査を次々に行う。When the loading of a new sample is completed, the preliminary chamber door 14 is closed. At this point, all doors are closed again. After the test is processed, the sample chamber doors 12 and 20 are opened again, and the tested sample is taken out and a new sample is brought in. Each field is driven by the signal from the door sequence control device.
15. 21. 25 in sequence. Further, the door sequence control circuit 27, the image processing device 6, and the stage control circuit 28 are connected to the system control device 2.
9) to perform sample exchange and inspection one after another.
第２図に本発明の他の一実施例を示す。図中、３１ ハ
ＥＲローダ・アンローダ、５２ｄエレベータ、である、
試料１が検査中は試料室扉１２は閉じている。試料室１
２ｆＺ）扉１２が閉じている間に、予備室扉１４を開け
、エレベータ３２を下げ、試料ローダψア／ローダ３１
から新たな試料１０を試料搬入装置１６上に移動させる
。移動完了稜、エレベータ３２を上げ、検査済試料１９
を試料搬出装置２４によシ試料ローダアンローダ５１に
搬出させる。検査済試料の搬出が終了したら、予備室扉
を閉じる。この時点で、試料室扉１２と予備室ｆｉ１４
Ｆｉ両方とも閉じている。検査が終了したら試料室Ｊｊ
ｊ２を開け、ステージ２を図中右端に寄せ、検査済とな
った試料１を試料搬入小装置３０により、予備室内の試
料搬出装置１９上に搬出する。次に、エレベータ３２を
下げ、新たな試料１０を試料搬入装置１６によシ、試料
製造装置３０上に移動させる。新しい試料の移動が完了
したら検査を開始すると共に、試料室＃１２を閉じる。FIG. 2 shows another embodiment of the present invention. In the figure, 31 is an ER loader/unloader, and 52d is an elevator.
While the sample 1 is being tested, the sample chamber door 12 is closed. Sample chamber 1
2fZ) While the door 12 is closed, open the preliminary chamber door 14, lower the elevator 32, and lower the sample loader ψ/loader 31.
A new sample 10 is then moved onto the sample loading device 16. Move completed, elevator 32 is raised, inspected sample 19
The sample is transferred to the sample loader/unloader 51 by the sample transfer device 24. After carrying out the inspected samples, close the preliminary room door. At this point, the sample chamber door 12 and the preliminary chamber fi14
Fi is both closed. After the test is completed, please return to the sample room Jj.
j2 is opened, the stage 2 is moved to the right end in the figure, and the inspected sample 1 is carried out by the small sample carry-in device 30 onto the sample carry-out device 19 in the preliminary chamber. Next, the elevator 32 is lowered, and a new sample 10 is moved onto the sample manufacturing device 30 by the sample loading device 16. When the transfer of the new sample is completed, the test is started and the sample chamber #12 is closed.
試料室扉１２が閉じ終ったら、予備室扉を開けて検査済
試料を予備室から試料ローダアンローダへ搬出、エレベ
ータ３２を下げ、前述のように新たな試料を予備室に搬
入、エレベータ５２を上げ、予備室扉を閉め、検査が終
了するまで待機する。After the sample chamber door 12 is closed, the preliminary chamber door is opened, the inspected sample is carried out from the preliminary chamber to the sample loader unloader, the elevator 32 is lowered, a new sample is carried into the preliminary chamber as described above, and the elevator 52 is raised. , close the preliminary room door and wait until the inspection is completed.
以上をくシかえし、次々と試料を検査する。第１図の実
施例では試料搬入口と搬出口が分かれてお夛、試料ロー
ダとアンローダを別々のもの圧するのに向いている。ま
た、他の試料製造装置などと一直線上に並べることがで
きる。Repeat the above steps and inspect the samples one after another. In the embodiment shown in FIG. 1, the sample loading inlet and the unloading outlet are separated, which is suitable for separately loading the sample loader and unloader. Moreover, it can be arranged in a straight line with other sample manufacturing devices.
第２図の実施例では試料のローダとアンローダを一つに
しているが、ローダとアンローダを別にし、搬入時と搬
出時にローダとアンローダをいれかえる手段をとれるこ
とは言うまでもない。In the embodiment shown in FIG. 2, the sample loader and unloader are integrated, but it goes without saying that the loader and unloader can be separate and the loader and unloader can be exchanged during loading and unloading.
本発明とよれば、Ｘ＠を連線して発生したままでよいの
で、ｘ縁の発生中断、再発生に伴う試料処理時間の増加
が防げるので、大量の試料を効率よく処理することがで
きる。According to the present invention, since it is sufficient to continue generating X@ in a continuous line, it is possible to prevent the interruption of generation of the x edge and increase in sample processing time due to reoccurrence, so that a large amount of samples can be processed efficiently. .
第１図は本発明の一実施例の系統図、第２図は本発明の
他の実施例の系統図である。
３・°・Ｘ巌源、１２，２０・・・試料室扉、９，１８
・・・予備室、８・・・試料室、１４．２２・・・予備
室扉。FIG. 1 is a system diagram of one embodiment of the present invention, and FIG. 2 is a system diagram of another embodiment of the invention. 3・°・X Gangen, 12,20...Sample chamber door, 9,18
...Preliminary room, 8...Sample room, 14.22...Preliminary room door.
Claims (1)
室に試料を搬入、搬出するＸ線を遮蔽する扉とを含むＸ
線装置において、 前記試料室の扉の前にＸ線を遮蔽し、かつ、前記試料を
一時保管する場所と、一時保管場所に前記試料を搬入、
搬出し、かつ、Ｘ線を遮蔽する扉と、一時保管場所から
前記試料室へ搬入搬出する手段とを設けたことを特徴と
するＸ線装置。 ２、請求項１において、前記試料室に前記試料の搬入扉
と前記試料の搬出扉とを別々に設け、前記試料搬入扉の
前にＸ線を遮蔽し、かつ、前記試料を一時保管する手段
と、前記試料搬出扉の後にＸ線を遮蔽し、かつ、前記試
料を一時保管する手段とを別々に設けたＸ線装置。 ３、請求項１において、前記試料室への前記搬出扉およ
び前記搬出扉を閉じている間に、前記試料一時保管手段
内に置かれた処理済試料を、前記試料一時保管手段から
搬出し、前記試料一時保管手段に新たに処理すべき試料
を搬出し、前記試料一時保管手段へ装置外から前記試料
を搬入、搬出する扉が閉じている間に、前記試料室の試
料搬入、搬出扉を開け、前記試料一時保管手段へ前記試
料室から処理済試料を搬出し、前記試料一時保管手段か
ら前記試料室へ未処理試料を搬入するＸ線装置。[Claims] 1. An X-ray system including an X-ray generating section, a sample chamber for shielding X-rays, and a door for shielding X-rays used to carry samples into and out of the sample chamber.
In the X-ray apparatus, there is a place in front of the door of the sample chamber that shields the X-rays and temporarily stores the sample, and a place where the sample is transported to the temporary storage place.
An X-ray apparatus, characterized in that it is provided with a door for carrying out and shielding X-rays, and a means for carrying in and out from a temporary storage location to the sample chamber. 2. In claim 1, means for separately providing the sample loading door and the sample loading door in the sample chamber, shielding X-rays in front of the sample loading door, and temporarily storing the sample. and a means for shielding X-rays and temporarily storing the sample after the sample carrying-out door. 3. In claim 1, while the carry-out door to the sample chamber and the carry-out door are closed, the processed sample placed in the sample temporary storage means is carried out from the sample temporary storage means, Carrying out a new sample to be processed into the sample temporary storage means, and opening the sample loading and unloading doors of the sample chamber while the door for loading and unloading the sample from outside the apparatus to the sample temporary storage unit is closed. An X-ray apparatus that is opened, carries out a processed sample from the sample chamber to the sample temporary storage means, and carries an unprocessed sample from the sample temporary storage means into the sample chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2126678A JPH0422897A (en) | 1990-05-18 | 1990-05-18 | X-ray device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2126678A JPH0422897A (en) | 1990-05-18 | 1990-05-18 | X-ray device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0422897A true JPH0422897A (en) | 1992-01-27 |
Family
ID=14941152
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2126678A Pending JPH0422897A (en) | 1990-05-18 | 1990-05-18 | X-ray device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0422897A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004125646A (en) * | 2002-10-03 | 2004-04-22 | Ishida Co Ltd | X-ray inspection equipment |
| WO2007071890A1 (en) * | 2005-12-22 | 2007-06-28 | Eg & G Middle East | Container inspection system |
| KR100775762B1 (en) * | 2006-06-28 | 2007-11-09 | 한국원자력연구원 | Hot Cell Equipment Semi-In / Out Rear Door System |
| GB2438100A (en) * | 2004-12-03 | 2007-11-14 | Eg & G Middle East | Container inspection system |
| US7356116B2 (en) | 2004-12-03 | 2008-04-08 | Eg&G Middle East | Container inspection system |
| US9632206B2 (en) | 2011-09-07 | 2017-04-25 | Rapiscan Systems, Inc. | X-ray inspection system that integrates manifest data with imaging/detection processing |
| US10302807B2 (en) | 2016-02-22 | 2019-05-28 | Rapiscan Systems, Inc. | Systems and methods for detecting threats and contraband in cargo |
| CN110398495A (en) * | 2018-04-25 | 2019-11-01 | 住友化学株式会社 | Inspection system and the driving method for checking system |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59129693A (en) * | 1983-01-07 | 1984-07-26 | タバイエスペツク株式会社 | Method of replacing initial gas of non-outside air gas atmosphere box |
-
1990
- 1990-05-18 JP JP2126678A patent/JPH0422897A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59129693A (en) * | 1983-01-07 | 1984-07-26 | タバイエスペツク株式会社 | Method of replacing initial gas of non-outside air gas atmosphere box |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004125646A (en) * | 2002-10-03 | 2004-04-22 | Ishida Co Ltd | X-ray inspection equipment |
| GB2438100A (en) * | 2004-12-03 | 2007-11-14 | Eg & G Middle East | Container inspection system |
| US7356116B2 (en) | 2004-12-03 | 2008-04-08 | Eg&G Middle East | Container inspection system |
| US7636418B2 (en) | 2004-12-03 | 2009-12-22 | Eg&G Middle East | Container inspection system |
| GB2438100B (en) * | 2004-12-03 | 2010-06-16 | Eg & G Middle East | Container inspection system |
| WO2007071890A1 (en) * | 2005-12-22 | 2007-06-28 | Eg & G Middle East | Container inspection system |
| KR100775762B1 (en) * | 2006-06-28 | 2007-11-09 | 한국원자력연구원 | Hot Cell Equipment Semi-In / Out Rear Door System |
| US10509142B2 (en) | 2011-09-07 | 2019-12-17 | Rapiscan Systems, Inc. | Distributed analysis x-ray inspection methods and systems |
| US10422919B2 (en) | 2011-09-07 | 2019-09-24 | Rapiscan Systems, Inc. | X-ray inspection system that integrates manifest data with imaging/detection processing |
| US9632206B2 (en) | 2011-09-07 | 2017-04-25 | Rapiscan Systems, Inc. | X-ray inspection system that integrates manifest data with imaging/detection processing |
| US10830920B2 (en) | 2011-09-07 | 2020-11-10 | Rapiscan Systems, Inc. | Distributed analysis X-ray inspection methods and systems |
| US11099294B2 (en) | 2011-09-07 | 2021-08-24 | Rapiscan Systems, Inc. | Distributed analysis x-ray inspection methods and systems |
| US12174334B2 (en) | 2011-09-07 | 2024-12-24 | Rapiscan Systems, Inc. | Distributed analysis X-ray inspection methods and systems |
| US10302807B2 (en) | 2016-02-22 | 2019-05-28 | Rapiscan Systems, Inc. | Systems and methods for detecting threats and contraband in cargo |
| US10768338B2 (en) | 2016-02-22 | 2020-09-08 | Rapiscan Systems, Inc. | Systems and methods for detecting threats and contraband in cargo |
| US11287391B2 (en) | 2016-02-22 | 2022-03-29 | Rapiscan Systems, Inc. | Systems and methods for detecting threats and contraband in cargo |
| CN110398495A (en) * | 2018-04-25 | 2019-11-01 | 住友化学株式会社 | Inspection system and the driving method for checking system |
| JP2019194582A (en) * | 2018-04-25 | 2019-11-07 | 住友化学株式会社 | Inspection system and method for driving inspection system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE69133564T2 (en) | Vacuum treatment apparatus and working method therefor | |
| JPH0422897A (en) | X-ray device | |
| EP0489295A2 (en) | Liquid crystal panel inspection method | |
| US20230326772A1 (en) | Method of supplying chemical liquid | |
| CN107490587B (en) | Inspection apparatus | |
| US7007206B2 (en) | Interactive circuit assembly test/inspection scheduling | |
| JPS62195662A (en) | Method and device for repairing mask | |
| CN108663835A (en) | A kind of liquid crystal apparatus detection method | |
| SE8304114D0 (en) | TESTABLE TIME DELAY | |
| NO961303L (en) | Method and apparatus for testing an integrated circuit | |
| KR20160026949A (en) | X-Ray Apparatus for Inspecting a Plural of Objects Simultaneously and Method for the Same | |
| US7031796B2 (en) | Radiation damage reduction | |
| JP3291591B2 (en) | Charged particle beam drawing exposure method and apparatus | |
| KR101899639B1 (en) | Device for dust emitting of foreign matter and dust emission cause analysis device | |
| CN115201234A (en) | Digital ray detection device and detection method for composite material workpiece | |
| KR102142036B1 (en) | Method for Investigating Article in Multi and Continuous Mode and Apparatus for the Same | |
| KR20260013344A (en) | Transport system for CT inspection of parts | |
| KR20020064413A (en) | Apparatus for testing memory device | |
| JPH04194678A (en) | Burn-in apparatus and burn-in board inserting and pulling-out method | |
| JPH11191524A (en) | Photolitho process equipment | |
| KR200211268Y1 (en) | Apparatus for stablizing process chamber of optical exposure system in semiconductor | |
| KR20150075922A (en) | X-Ray Apparatus for Inspecting a Plural of Objects Simultaneously and Method for the Same | |
| JPH0354843A (en) | Semiconductor manufacturing device | |
| JPH0494114A (en) | Electron beam lithography | |
| JPS63168949A (en) | Electron microscope |