JPH0423249U - - Google Patents
Info
- Publication number
- JPH0423249U JPH0423249U JP6494990U JP6494990U JPH0423249U JP H0423249 U JPH0423249 U JP H0423249U JP 6494990 U JP6494990 U JP 6494990U JP 6494990 U JP6494990 U JP 6494990U JP H0423249 U JPH0423249 U JP H0423249U
- Authority
- JP
- Japan
- Prior art keywords
- cylinder
- stage
- polishing
- take
- polishing table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 10
- 238000010586 diagram Methods 0.000 description 8
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6494990U JPH0423249U (mo) | 1990-06-21 | 1990-06-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6494990U JPH0423249U (mo) | 1990-06-21 | 1990-06-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0423249U true JPH0423249U (mo) | 1992-02-26 |
Family
ID=31596341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6494990U Pending JPH0423249U (mo) | 1990-06-21 | 1990-06-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0423249U (mo) |
-
1990
- 1990-06-21 JP JP6494990U patent/JPH0423249U/ja active Pending
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