JPH04232751A - 熱インクジェット・プリントヘッド及び製造方法 - Google Patents

熱インクジェット・プリントヘッド及び製造方法

Info

Publication number: JPH04232751A
Authority: JP; Japan
Prior art keywords: heating resistor; ink; region; passivation layer; heater
Prior art date: 1990-07-02
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Withdrawn

Application number

JP16122591A

Other languages

English (en)

Japanese (ja)

Inventor

Abdul M Elhatem

アブドゥール　エム　エルハテム

Steven A Buhler

スティーヴン　エイ　ビューラー

Mohammed M Mojaradi

モハメッド　エム　モジャラディ

Putul D Patel

プテュール　ディー　パテル

Parviz P Mazdiyazni

パルヴィズ　ピー　マズディヤズニ

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Xerox Corp

Original Assignee

Xerox Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1990-07-02

Filing date

1991-07-02

Publication date

1992-08-21

1991-07-02 Application filed by Xerox Corp filed Critical Xerox Corp

1992-08-21 Publication of JPH04232751A publication Critical patent/JPH04232751A/ja

Status Withdrawn legal-status Critical Current

Links

238000004519 manufacturing process Methods 0.000 title description 5
230000001681 protective effect Effects 0.000 claims abstract 3
238000010438 heat treatment Methods 0.000 claims description 94
229910052715 tantalum Inorganic materials 0.000 abstract description 25
GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical group [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 abstract description 25
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 19
229910052782 aluminium Inorganic materials 0.000 abstract description 19
238000011109 contamination Methods 0.000 abstract description 4
230000015572 biosynthetic process Effects 0.000 abstract description 2
238000005260 corrosion Methods 0.000 abstract description 2
230000007797 corrosion Effects 0.000 abstract description 2
230000002708 enhancing effect Effects 0.000 abstract 1
239000010410 layer Substances 0.000 description 79
238000002161 passivation Methods 0.000 description 41
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 40
235000012239 silicon dioxide Nutrition 0.000 description 20
239000000377 silicon dioxide Substances 0.000 description 20
229910021420 polycrystalline silicon Inorganic materials 0.000 description 13
229920005591 polysilicon Polymers 0.000 description 13
239000000758 substrate Substances 0.000 description 13
238000000034 method Methods 0.000 description 11
239000003973 paint Substances 0.000 description 10
229910052581 Si3N4 Chemical group 0.000 description 9
HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical group N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 9
OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 8
229910052698 phosphorus Inorganic materials 0.000 description 8
239000011574 phosphorus Substances 0.000 description 8
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
229910052710 silicon Inorganic materials 0.000 description 7
239000010703 silicon Substances 0.000 description 7
239000011253 protective coating Substances 0.000 description 5
238000000151 deposition Methods 0.000 description 4
238000005530 etching Methods 0.000 description 3
239000012535 impurity Substances 0.000 description 3
238000009413 insulation Methods 0.000 description 3
238000000059 patterning Methods 0.000 description 3
230000004888 barrier function Effects 0.000 description 2
238000009792 diffusion process Methods 0.000 description 2
239000011521 glass Substances 0.000 description 2
BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 2
239000011229 interlayer Substances 0.000 description 2
239000000654 additive Substances 0.000 description 1
230000000996 additive effect Effects 0.000 description 1
238000010276 construction Methods 0.000 description 1
239000007943 implant Substances 0.000 description 1
238000007641 inkjet printing Methods 0.000 description 1
239000012212 insulator Substances 0.000 description 1
238000002955 isolation Methods 0.000 description 1
239000000463 material Substances 0.000 description 1
238000002844 melting Methods 0.000 description 1
230000008018 melting Effects 0.000 description 1
230000002093 peripheral effect Effects 0.000 description 1
238000007639 printing Methods 0.000 description 1
239000004065 semiconductor Substances 0.000 description 1
239000013589 supplement Substances 0.000 description 1
230000001502 supplementing effect Effects 0.000 description 1

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14088—Structure of heating means
- B41J2/14112—Resistive element
- B41J2/14129—Layer structure
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1604—Production of bubble jet print heads of the edge shooter type
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/13—Heads having an integrated circuit

Landscapes

Engineering & Computer Science (AREA)
Manufacturing & Machinery (AREA)
Particle Formation And Scattering Control In Inkjet Printers (AREA)

JP16122591A 1990-07-02 1991-07-02 熱インクジェット・プリントヘッド及び製造方法 Withdrawn JPH04232751A (ja)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US54756790A	1990-07-02	1990-07-02
US547567		2000-04-12

Publications (1)

Publication Number	Publication Date
JPH04232751A true JPH04232751A (ja)	1992-08-21

Family

ID=24185172

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP16122591A Withdrawn JPH04232751A (ja)	1990-07-02	1991-07-02	熱インクジェット・プリントヘッド及び製造方法

Country Status (3)

Country	Link
EP (1)	EP0465212A3 (fr)
JP (1)	JPH04232751A (fr)
CA (1)	CA2044402A1 (fr)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4532530A (en) *	1984-03-09	1985-07-30	Xerox Corporation	Bubble jet printing device
US4719477A (en) *	1986-01-17	1988-01-12	Hewlett-Packard Company	Integrated thermal ink jet printhead and method of manufacture
US4935752A (en) *	1989-03-30	1990-06-19	Xerox Corporation	Thermal ink jet device with improved heating elements
US4947193A (en) *	1989-05-01	1990-08-07	Xerox Corporation	Thermal ink jet printhead with improved heating elements

1991
- 1991-06-12 CA CA 2044402 patent/CA2044402A1/fr not_active Abandoned
- 1991-07-02 JP JP16122591A patent/JPH04232751A/ja not_active Withdrawn
- 1991-07-02 EP EP19910305984 patent/EP0465212A3/en not_active Withdrawn

Also Published As

Publication number	Publication date
EP0465212A2 (fr)	1992-01-08
CA2044402A1 (fr)	1992-01-03
EP0465212A3 (en)	1992-11-25

Legal Events

Date

Code

Title

Description

1998-10-06

A300

Application deemed to be withdrawn because no request for examination was validly filed

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 19981008

Publication	Publication Date	Title
EP0154515B1 (fr)	1989-11-08	Imprimante à projection d'encre par bulles
JP4332227B2 (ja)	2009-09-16	熱式インク・ジェット・プリンタ用薄膜駆動ヘッド
KR100484168B1 (ko)	2005-04-19	잉크젯 프린트헤드 및 그 제조방법
KR100560593B1 (ko)	2006-03-17	액체 토출 헤드의 제조방법
US4994826A (en)	1991-02-19	Thermal ink jet printhead with increased operating temperature and thermal efficiency
JPH062414B2 (ja)	1994-01-12	インクジェットヘッド
EP1352744B1 (fr)	2010-08-25	Distributeur de liquide et imprimante
JP3559701B2 (ja)	2004-09-02	インクジェット記録ヘッド用基板、該基板の製造方法及びインクジェット記録ヘッド及びインクジェット記録装置
US4835553A (en)	1989-05-30	Thermal ink jet printhead with increased drop generation rate
TWI231270B (en)	2005-04-21	Fluid injection head structure
US5835112A (en)	1998-11-10	Segmented electrical distribution plane
JPH10109421A (ja)	1998-04-28	液体噴射記録ヘッド用発熱基板
US6558969B2 (en)	2003-05-06	Fluid-jet printhead and method of fabricating a fluid-jet printhead
US6132032A (en)	2000-10-17	Thin-film print head for thermal ink-jet printers
JP2002144571A (ja)	2002-05-21	プリンタ、プリンタヘッド及びプリンタヘッドの製造方法
JP2005212483A (ja)	2005-08-11	インクジェットプリントヘッド及びその製造方法
EP0659564B1 (fr)	2002-03-20	Cartouche de tête à jet d'encre et appareil à jet d'encre
JPH04232751A (ja)	1992-08-21	熱インクジェット・プリントヘッド及び製造方法
JP3584752B2 (ja)	2004-11-04	液体噴射記録装置およびその製造方法
US7037736B2 (en)	2006-05-02	Fluid ejection device
JP4137257B2 (ja)	2008-08-20	サーマルインクジェットプリントヘッド及びその製造方法
US7367657B2 (en)	2008-05-06	Inkjet printhead with transistor driver
US20090141083A1 (en)	2009-06-04	Inkjet printhead and method of manufacturing the same
CN100594131C (zh)	2010-03-17	喷墨头芯片结构
KR100438726B1 (ko)	2004-07-05	잉크 젯 프린트 헤드 및 이의 제조 방법