JPH0425234B2 - - Google Patents

Info

Publication number: JPH0425234B2
Authority: JP; Japan
Prior art keywords: thin film; track; charged particles; irradiation; speed
Prior art date: 1984-05-14
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP9717784A

Other languages

English (en)

Japanese (ja)

Other versions

JPS60239375A (ja

Inventor

Mamoru Sato

Koichi Yamaguchi

Takeshi Matsumoto

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Kyocera Corp

National Institute of Advanced Industrial Science and Technology AIST

Original Assignee

Agency of Industrial Science and Technology

Kyocera Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1984-05-14

Filing date

1984-05-14

Publication date

1992-04-30

1984-05-14 Application filed by Agency of Industrial Science and Technology, Kyocera Corp filed Critical Agency of Industrial Science and Technology

1984-05-14 Priority to JP9717784A priority Critical patent/JPS60239375A/ja

1985-11-28 Publication of JPS60239375A publication Critical patent/JPS60239375A/ja

1992-04-30 Publication of JPH0425234B2 publication Critical patent/JPH0425234B2/ja

Status Granted legal-status Critical Current

Links

239000010409 thin film Substances 0.000 claims description 64
239000002245 particle Substances 0.000 claims description 24
239000000919 ceramic Substances 0.000 claims description 19
238000000034 method Methods 0.000 claims description 13
239000011148 porous material Substances 0.000 claims description 11
238000004519 manufacturing process Methods 0.000 claims description 6
230000001678 irradiating effect Effects 0.000 claims description 3
150000002500 ions Chemical class 0.000 description 27
238000005530 etching Methods 0.000 description 13
239000000463 material Substances 0.000 description 11
239000000126 substance Substances 0.000 description 11
229910018072 Al 2 O 3 Inorganic materials 0.000 description 7
NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 6
239000007788 liquid Substances 0.000 description 5
238000010586 diagram Methods 0.000 description 4
229910000147 aluminium phosphate Inorganic materials 0.000 description 3
239000007864 aqueous solution Substances 0.000 description 3
239000012528 membrane Substances 0.000 description 3
239000000243 solution Substances 0.000 description 3
238000004364 calculation method Methods 0.000 description 2
238000005260 corrosion Methods 0.000 description 2
230000007797 corrosion Effects 0.000 description 2
239000013078 crystal Substances 0.000 description 2
238000000926 separation method Methods 0.000 description 2
229910010293 ceramic material Inorganic materials 0.000 description 1
238000003486 chemical etching Methods 0.000 description 1
238000005520 cutting process Methods 0.000 description 1
238000007598 dipping method Methods 0.000 description 1
238000009826 distribution Methods 0.000 description 1
230000000694 effects Effects 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
238000002474 experimental method Methods 0.000 description 1
201000003373 familial cold autoinflammatory syndrome 3 Diseases 0.000 description 1
239000010408 film Substances 0.000 description 1
238000001914 filtration Methods 0.000 description 1
239000004088 foaming agent Substances 0.000 description 1
230000005484 gravity Effects 0.000 description 1
238000010884 ion-beam technique Methods 0.000 description 1
239000002184 metal Substances 0.000 description 1
229910052755 nonmetal Inorganic materials 0.000 description 1
238000007747 plating Methods 0.000 description 1
229920000515 polycarbonate Polymers 0.000 description 1
239000004417 polycarbonate Substances 0.000 description 1
229920000642 polymer Polymers 0.000 description 1
229920006254 polymer film Polymers 0.000 description 1
239000002861 polymer material Substances 0.000 description 1
229910052594 sapphire Inorganic materials 0.000 description 1
239000010980 sapphire Substances 0.000 description 1
238000004506 ultrasonic cleaning Methods 0.000 description 1
238000007740 vapor deposition Methods 0.000 description 1

Landscapes

Porous Artificial Stone Or Porous Ceramic Products (AREA)

JP9717784A 1984-05-14 1984-05-14 多孔質セラミツク薄膜並びにその製造法 Granted JPS60239375A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP9717784A JPS60239375A (ja)	1984-05-14	1984-05-14	多孔質セラミツク薄膜並びにその製造法

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP9717784A JPS60239375A (ja)	1984-05-14	1984-05-14	多孔質セラミツク薄膜並びにその製造法

Publications (2)

Publication Number	Publication Date
JPS60239375A JPS60239375A (ja)	1985-11-28
JPH0425234B2 true JPH0425234B2 (2)	1992-04-30

Family

ID=14185298

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP9717784A Granted JPS60239375A (ja)	1984-05-14	1984-05-14	多孔質セラミツク薄膜並びにその製造法

Country Status (1)

Country	Link
JP (1)	JPS60239375A (2)

1984
- 1984-05-14 JP JP9717784A patent/JPS60239375A/ja active Granted

Also Published As

Publication number	Publication date
JPS60239375A (ja)	1985-11-28

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Legal Events

Date	Code	Title	Description
2004-05-14	EXPY	Cancellation because of completion of term