JPH04264155A - Epoxy resin composition for semiconductor sealing - Google Patents
Epoxy resin composition for semiconductor sealingInfo
- Publication number
- JPH04264155A JPH04264155A JP2601891A JP2601891A JPH04264155A JP H04264155 A JPH04264155 A JP H04264155A JP 2601891 A JP2601891 A JP 2601891A JP 2601891 A JP2601891 A JP 2601891A JP H04264155 A JPH04264155 A JP H04264155A
- Authority
- JP
- Japan
- Prior art keywords
- epoxy resin
- weight
- compound
- fused silica
- resin composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003822 epoxy resin Substances 0.000 title claims abstract description 60
- 229920000647 polyepoxide Polymers 0.000 title claims abstract description 60
- 239000000203 mixture Substances 0.000 title claims abstract description 24
- 239000004065 semiconductor Substances 0.000 title claims description 21
- 238000007789 sealing Methods 0.000 title description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 26
- -1 hydrotalcite compound Chemical class 0.000 claims abstract description 25
- 239000005350 fused silica glass Substances 0.000 claims abstract description 23
- 229960001545 hydrotalcite Drugs 0.000 claims abstract description 15
- 229910001701 hydrotalcite Inorganic materials 0.000 claims abstract description 15
- 239000000945 filler Substances 0.000 claims abstract description 13
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 11
- 125000000217 alkyl group Chemical group 0.000 claims abstract description 3
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical group C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229920005989 resin Polymers 0.000 claims description 17
- 239000011347 resin Substances 0.000 claims description 17
- 239000002245 particle Substances 0.000 claims description 16
- 238000005538 encapsulation Methods 0.000 claims description 13
- 150000001463 antimony compounds Chemical class 0.000 claims description 9
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 claims description 7
- 229910052794 bromium Inorganic materials 0.000 claims description 7
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 3
- 125000004432 carbon atom Chemical group C* 0.000 claims description 2
- 125000005843 halogen group Chemical group 0.000 claims description 2
- 239000011342 resin composition Substances 0.000 claims description 2
- 239000004593 Epoxy Substances 0.000 claims 1
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical class C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 abstract description 7
- 229920003986 novolac Polymers 0.000 abstract description 7
- 150000001875 compounds Chemical class 0.000 abstract description 6
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 abstract description 4
- ADCOVFLJGNWWNZ-UHFFFAOYSA-N antimony trioxide Inorganic materials O=[Sb]O[Sb]=O ADCOVFLJGNWWNZ-UHFFFAOYSA-N 0.000 abstract description 3
- 238000002156 mixing Methods 0.000 abstract description 2
- 239000004841 bisphenol A epoxy resin Substances 0.000 abstract 1
- 229910052736 halogen Inorganic materials 0.000 abstract 1
- 150000002367 halogens Chemical class 0.000 abstract 1
- YEAUATLBSVJFOY-UHFFFAOYSA-N tetraantimony hexaoxide Chemical compound O1[Sb](O2)O[Sb]3O[Sb]1O[Sb]2O3 YEAUATLBSVJFOY-UHFFFAOYSA-N 0.000 abstract 1
- 238000000034 method Methods 0.000 description 27
- 238000005476 soldering Methods 0.000 description 18
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 16
- 230000000694 effects Effects 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 5
- 239000003063 flame retardant Substances 0.000 description 5
- 229910000679 solder Inorganic materials 0.000 description 5
- 150000004668 long chain fatty acids Chemical class 0.000 description 4
- 125000001624 naphthyl group Chemical group 0.000 description 4
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 4
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 4
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical class [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 239000003054 catalyst Substances 0.000 description 3
- 239000007822 coupling agent Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 150000002989 phenols Chemical class 0.000 description 3
- 230000000704 physical effect Effects 0.000 description 3
- LXBGSDVWAMZHDD-UHFFFAOYSA-N 2-methyl-1h-imidazole Chemical compound CC1=NC=CN1 LXBGSDVWAMZHDD-UHFFFAOYSA-N 0.000 description 2
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 239000006087 Silane Coupling Agent Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 150000001450 anions Chemical class 0.000 description 2
- 229940058905 antimony compound for treatment of leishmaniasis and trypanosomiasis Drugs 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 229930003836 cresol Natural products 0.000 description 2
- 229910002026 crystalline silica Inorganic materials 0.000 description 2
- 230000001186 cumulative effect Effects 0.000 description 2
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 2
- 238000009472 formulation Methods 0.000 description 2
- 125000000524 functional group Chemical group 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000004898 kneading Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 239000004843 novolac epoxy resin Substances 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 150000003003 phosphines Chemical class 0.000 description 2
- 238000011417 postcuring Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- YWWDBCBWQNCYNR-UHFFFAOYSA-N trimethylphosphine Chemical compound CP(C)C YWWDBCBWQNCYNR-UHFFFAOYSA-N 0.000 description 2
- WZCQRUWWHSTZEM-UHFFFAOYSA-N 1,3-phenylenediamine Chemical compound NC1=CC=CC(N)=C1 WZCQRUWWHSTZEM-UHFFFAOYSA-N 0.000 description 1
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 1
- AHDSRXYHVZECER-UHFFFAOYSA-N 2,4,6-tris[(dimethylamino)methyl]phenol Chemical compound CN(C)CC1=CC(CN(C)C)=C(O)C(CN(C)C)=C1 AHDSRXYHVZECER-UHFFFAOYSA-N 0.000 description 1
- SLWOPZBLNKPZCQ-UHFFFAOYSA-N 2-(naphthalen-1-ylmethyl)oxirane Chemical compound C=1C=CC2=CC=CC=C2C=1CC1CO1 SLWOPZBLNKPZCQ-UHFFFAOYSA-N 0.000 description 1
- FUIQBJHUESBZNU-UHFFFAOYSA-N 2-[(dimethylazaniumyl)methyl]phenolate Chemical compound CN(C)CC1=CC=CC=C1O FUIQBJHUESBZNU-UHFFFAOYSA-N 0.000 description 1
- XOZZOYCKUMOOTJ-UHFFFAOYSA-N 2-[[2-bromo-6-(oxiran-2-ylmethyl)naphthalen-1-yl]methyl]oxirane Chemical compound BrC1=C(C2=CC=C(C=C2C=C1)CC1CO1)CC1CO1 XOZZOYCKUMOOTJ-UHFFFAOYSA-N 0.000 description 1
- VYIBPABTZVACTK-UHFFFAOYSA-N 2-[[2-methyl-6-(oxiran-2-ylmethyl)naphthalen-1-yl]methyl]oxirane Chemical compound C(C1CO1)C1=C(C=CC2=CC(=CC=C12)CC1CO1)C VYIBPABTZVACTK-UHFFFAOYSA-N 0.000 description 1
- YQECVXUQIRRFQN-UHFFFAOYSA-N 2-[[3-methyl-5-(oxiran-2-ylmethyl)naphthalen-1-yl]methyl]oxirane Chemical compound C(C1CO1)C1=CC=CC2=C(C=C(C=C12)C)CC1CO1 YQECVXUQIRRFQN-UHFFFAOYSA-N 0.000 description 1
- QHVNYJKBFJIBSX-UHFFFAOYSA-N 2-[[4,8-dimethyl-5-(oxiran-2-ylmethyl)naphthalen-2-yl]methyl]oxirane Chemical compound C(C1CO1)C1=CC=C(C2=CC(=CC(=C12)C)CC1CO1)C QHVNYJKBFJIBSX-UHFFFAOYSA-N 0.000 description 1
- PRFOGIAMORFRQR-UHFFFAOYSA-N 2-[[4-methyl-5-(oxiran-2-ylmethyl)naphthalen-2-yl]methyl]oxirane Chemical compound C(C1CO1)C1=CC=CC2=CC(=CC(=C12)C)CC1CO1 PRFOGIAMORFRQR-UHFFFAOYSA-N 0.000 description 1
- YQAYPSKEWNBJHH-UHFFFAOYSA-N 2-[[5-(oxiran-2-ylmethyl)naphthalen-1-yl]methyl]oxirane Chemical compound C=1C=CC2=C(CC3OC3)C=CC=C2C=1CC1CO1 YQAYPSKEWNBJHH-UHFFFAOYSA-N 0.000 description 1
- JENBVMYWZLPMNV-UHFFFAOYSA-N 2-[[5-(oxiran-2-ylmethyl)naphthalen-2-yl]methyl]oxirane Chemical compound C=1C=C2C(CC3OC3)=CC=CC2=CC=1CC1CO1 JENBVMYWZLPMNV-UHFFFAOYSA-N 0.000 description 1
- YTWBFUCJVWKCCK-UHFFFAOYSA-N 2-heptadecyl-1h-imidazole Chemical compound CCCCCCCCCCCCCCCCCC1=NC=CN1 YTWBFUCJVWKCCK-UHFFFAOYSA-N 0.000 description 1
- ZCUJYXPAKHMBAZ-UHFFFAOYSA-N 2-phenyl-1h-imidazole Chemical compound C1=CNC(C=2C=CC=CC=2)=N1 ZCUJYXPAKHMBAZ-UHFFFAOYSA-N 0.000 description 1
- VEORPZCZECFIRK-UHFFFAOYSA-N 3,3',5,5'-tetrabromobisphenol A Chemical compound C=1C(Br)=C(O)C(Br)=CC=1C(C)(C)C1=CC(Br)=C(O)C(Br)=C1 VEORPZCZECFIRK-UHFFFAOYSA-N 0.000 description 1
- TYOXIFXYEIILLY-UHFFFAOYSA-N 5-methyl-2-phenyl-1h-imidazole Chemical compound N1C(C)=CN=C1C1=CC=CC=C1 TYOXIFXYEIILLY-UHFFFAOYSA-N 0.000 description 1
- ULKLGIFJWFIQFF-UHFFFAOYSA-N 5K8XI641G3 Chemical compound CCC1=NC=C(C)N1 ULKLGIFJWFIQFF-UHFFFAOYSA-N 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-M Bicarbonate Chemical compound OC([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-M 0.000 description 1
- 229930185605 Bisphenol Natural products 0.000 description 1
- KRKNYBCHXYNGOX-UHFFFAOYSA-K Citrate Chemical compound [O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O KRKNYBCHXYNGOX-UHFFFAOYSA-K 0.000 description 1
- MQJKPEGWNLWLTK-UHFFFAOYSA-N Dapsone Chemical compound C1=CC(N)=CC=C1S(=O)(=O)C1=CC=C(N)C=C1 MQJKPEGWNLWLTK-UHFFFAOYSA-N 0.000 description 1
- FEWJPZIEWOKRBE-JCYAYHJZSA-L L-tartrate(2-) Chemical compound [O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O FEWJPZIEWOKRBE-JCYAYHJZSA-L 0.000 description 1
- 229910020038 Mg6Al2 Inorganic materials 0.000 description 1
- 229920000459 Nitrile rubber Polymers 0.000 description 1
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 229920000265 Polyparaphenylene Polymers 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 125000005595 acetylacetonate group Chemical group 0.000 description 1
- 150000008065 acid anhydrides Chemical class 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 125000002723 alicyclic group Chemical group 0.000 description 1
- 239000004844 aliphatic epoxy resin Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 150000004982 aromatic amines Chemical class 0.000 description 1
- 239000010425 asbestos Substances 0.000 description 1
- 235000010290 biphenyl Nutrition 0.000 description 1
- 239000004305 biphenyl Substances 0.000 description 1
- 125000001246 bromo group Chemical group Br* 0.000 description 1
- JHIWVOJDXOSYLW-UHFFFAOYSA-N butyl 2,2-difluorocyclopropane-1-carboxylate Chemical compound CCCCOC(=O)C1CC1(F)F JHIWVOJDXOSYLW-UHFFFAOYSA-N 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 239000000378 calcium silicate Substances 0.000 description 1
- 229910052918 calcium silicate Inorganic materials 0.000 description 1
- OYACROKNLOSFPA-UHFFFAOYSA-N calcium;dioxido(oxo)silane Chemical compound [Ca+2].[O-][Si]([O-])=O OYACROKNLOSFPA-UHFFFAOYSA-N 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 125000001309 chloro group Chemical group Cl* 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 229910052570 clay Inorganic materials 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 239000003431 cross linking reagent Substances 0.000 description 1
- WHHGLZMJPXIBIX-UHFFFAOYSA-N decabromodiphenyl ether Chemical compound BrC1=C(Br)C(Br)=C(Br)C(Br)=C1OC1=C(Br)C(Br)=C(Br)C(Br)=C1Br WHHGLZMJPXIBIX-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- GDVKFRBCXAPAQJ-UHFFFAOYSA-A dialuminum;hexamagnesium;carbonate;hexadecahydroxide Chemical compound [OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[Mg+2].[Mg+2].[Mg+2].[Mg+2].[Mg+2].[Mg+2].[Al+3].[Al+3].[O-]C([O-])=O GDVKFRBCXAPAQJ-UHFFFAOYSA-A 0.000 description 1
- BVURNMLGDQYNAF-UHFFFAOYSA-N dimethyl(1-phenylethyl)amine Chemical compound CN(C)C(C)C1=CC=CC=C1 BVURNMLGDQYNAF-UHFFFAOYSA-N 0.000 description 1
- XXBDWLFCJWSEKW-UHFFFAOYSA-N dimethylbenzylamine Chemical compound CN(C)CC1=CC=CC=C1 XXBDWLFCJWSEKW-UHFFFAOYSA-N 0.000 description 1
- ZZTCPWRAHWXWCH-UHFFFAOYSA-N diphenylmethanediamine Chemical compound C=1C=CC=CC=1C(N)(N)C1=CC=CC=C1 ZZTCPWRAHWXWCH-UHFFFAOYSA-N 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 239000012772 electrical insulation material Substances 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- ANSXAPJVJOKRDJ-UHFFFAOYSA-N furo[3,4-f][2]benzofuran-1,3,5,7-tetrone Chemical compound C1=C2C(=O)OC(=O)C2=CC2=C1C(=O)OC2=O ANSXAPJVJOKRDJ-UHFFFAOYSA-N 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 125000000623 heterocyclic group Chemical group 0.000 description 1
- 150000002460 imidazoles Chemical class 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000012770 industrial material Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 1
- 239000001095 magnesium carbonate Substances 0.000 description 1
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- IKGXNCHYONXJSM-UHFFFAOYSA-N methanolate;zirconium(4+) Chemical compound [Zr+4].[O-]C.[O-]C.[O-]C.[O-]C IKGXNCHYONXJSM-UHFFFAOYSA-N 0.000 description 1
- 239000006082 mold release agent Substances 0.000 description 1
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- NFHFRUOZVGFOOS-UHFFFAOYSA-N palladium;triphenylphosphane Chemical compound [Pd].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 NFHFRUOZVGFOOS-UHFFFAOYSA-N 0.000 description 1
- 239000012188 paraffin wax Substances 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920002857 polybutadiene Polymers 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920005990 polystyrene resin Polymers 0.000 description 1
- XPGAWFIWCWKDDL-UHFFFAOYSA-N propan-1-olate;zirconium(4+) Chemical compound [Zr+4].CCC[O-].CCC[O-].CCC[O-].CCC[O-] XPGAWFIWCWKDDL-UHFFFAOYSA-N 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229910052895 riebeckite Inorganic materials 0.000 description 1
- YGSDEFSMJLZEOE-UHFFFAOYSA-M salicylate Chemical compound OC1=CC=CC=C1C([O-])=O YGSDEFSMJLZEOE-UHFFFAOYSA-M 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical compound [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229920006132 styrene block copolymer Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- TXDNPSYEJHXKMK-UHFFFAOYSA-N sulfanylsilane Chemical compound S[SiH3] TXDNPSYEJHXKMK-UHFFFAOYSA-N 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 238000001721 transfer moulding Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- TUQOTMZNTHZOKS-UHFFFAOYSA-N tributylphosphine Chemical compound CCCCP(CCCC)CCCC TUQOTMZNTHZOKS-UHFFFAOYSA-N 0.000 description 1
- RXJKFRMDXUJTEX-UHFFFAOYSA-N triethylphosphine Chemical compound CCP(CC)CC RXJKFRMDXUJTEX-UHFFFAOYSA-N 0.000 description 1
- IUURMAINMLIZMX-UHFFFAOYSA-N tris(2-nonylphenyl)phosphane Chemical compound CCCCCCCCCC1=CC=CC=C1P(C=1C(=CC=CC=1)CCCCCCCCC)C1=CC=CC=C1CCCCCCCCC IUURMAINMLIZMX-UHFFFAOYSA-N 0.000 description 1
- WXAZIUYTQHYBFW-UHFFFAOYSA-N tris(4-methylphenyl)phosphane Chemical compound C1=CC(C)=CC=C1P(C=1C=CC(C)=CC=1)C1=CC=C(C)C=C1 WXAZIUYTQHYBFW-UHFFFAOYSA-N 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Epoxy Resins (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Abstract
Description
【0001】0001
【産業上の利用分野】本発明は、半田耐熱性、難燃性お
よび高温信頼性に優れる半導体封止用エポキシ樹脂組成
物に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an epoxy resin composition for encapsulating semiconductors which has excellent soldering heat resistance, flame retardancy and high temperature reliability.
【0002】0002
【従来の技術】エポキシ樹脂は耐熱性、耐湿性、電気特
性、接着性などに優れており、さらに配合処方により種
々の特性が付与できるため、塗料、接着剤、電気絶縁材
料など工業材料として利用されている。[Prior art] Epoxy resins have excellent heat resistance, moisture resistance, electrical properties, adhesive properties, etc., and can be given various properties depending on the formulation, so they are used as industrial materials such as paints, adhesives, and electrical insulation materials. has been done.
【0003】たとえば、半導体装置などの電子回路部品
の封止方法として従来より金属やセラミックスによるハ
ーメチックシールとフェノール樹脂、シリコーン樹脂、
エポキシ樹脂などによる樹脂封止が提案されている。し
かし、経済性、生産性、物性のバランスの点からエポキ
シ樹脂による樹脂封止が中心になっている。For example, as a sealing method for electronic circuit components such as semiconductor devices, hermetic seals using metals and ceramics, phenolic resins, silicone resins,
Resin sealing using epoxy resin or the like has been proposed. However, from the viewpoint of economy, productivity, and balance of physical properties, resin sealing using epoxy resin has become the main method.
【0004】一方、最近はプリント基板への部品実装に
おいても高密度化、自動化が進められており、従来のリ
ードピンを基板の穴に挿入する“挿入実装方式”に代り
、基板表面に部品を半田付けする“表面実装方式”が盛
んになってきた。それに伴い、パッケージも従来のDI
P(デュアル・インライン・パッケージ)から高密度実
装、表面実装に適した薄型のFPP(フラット・プラス
チック・パッケージ)に移行しつつある。On the other hand, recently, higher density and automation have been promoted in the mounting of components on printed circuit boards, and instead of the conventional "insertion mounting method" in which lead pins are inserted into holes in the board, components are soldered onto the surface of the board. The "surface mount method" for attaching devices has become popular. Along with this, the packaging has changed from the conventional DI.
There is a shift from P (dual in-line package) to thin FPP (flat plastic package), which is suitable for high-density packaging and surface mounting.
【0005】表面実装方式への移行に伴い、従来あまり
問題にならなかった半田付け工程が大きな問題になって
きた。従来のピン挿入実装方式では半田付け工程はリー
ド部が部分的に加熱されるだけであったが、表面実装方
式ではパッケージ全体が熱媒に浸され加熱される。表面
実装方式における半田付け方法としては半田浴浸漬、不
活性ガスの飽和蒸気による加熱(ベーパーフェイズ法)
や赤外線リフロー法などが用いられるが、いずれの方法
でもパッケージ全体が210〜270℃の高温に加熱さ
れることになる。そのため従来の封止樹脂で封止したパ
ッケージは、半田付け時に樹脂部分にクラックが発生し
、信頼性が低下して製品として使用できないという問題
がおきる。[0005] With the transition to the surface mounting method, the soldering process, which had not been a problem in the past, has become a big problem. In the conventional pin insertion mounting method, only the leads are partially heated during the soldering process, but in the surface mounting method, the entire package is immersed in a heating medium and heated. Soldering methods for surface mounting methods include immersion in a solder bath and heating with saturated vapor of inert gas (vapor phase method).
or an infrared reflow method, but in either method the entire package is heated to a high temperature of 210 to 270°C. For this reason, packages sealed with conventional sealing resin have the problem that cracks occur in the resin portion during soldering, reducing reliability and making the package unusable as a product.
【0006】半田付け工程におけるクラックの発生は、
後硬化してから実装工程の間までに吸湿した水分が半田
付け加熱時に爆発的に水蒸気化、膨脹することに起因す
るといわれており、その対策として後硬化したパッケー
ジを完全に乾燥し密封した容器に収納して出荷する方法
が用いられている。[0006] The occurrence of cracks in the soldering process is
This is said to be caused by the moisture absorbed between post-curing and the mounting process becoming explosively vaporized and expanding during soldering heat.As a countermeasure, the post-cured package is completely dried and sealed in a container. The method used is to store and ship the product.
【0007】封止用樹脂の改良も種々検討されている。
たとえば、ナフタレン骨格を有するエポキシ樹脂を添加
し、樹脂の低応力化を達成する方法(特開平2−886
21号公報、特開平2−110958号公報)などがあ
げられる。Various improvements in sealing resins have also been studied. For example, a method of adding an epoxy resin having a naphthalene skeleton to reduce the stress of the resin (Japanese Patent Application Laid-Open No. 2-886
No. 21, JP-A-2-110958), etc.
【0008】また、封止用樹脂の耐湿性を改良するため
、ハイドロタルサイト系化合物の添加(特開昭61−1
9625号公報)が提案されている。Furthermore, in order to improve the moisture resistance of the sealing resin, a hydrotalcite compound was added (Japanese Patent Laid-Open No. 61-1
No. 9625) has been proposed.
【0009】一方、半導体などの電子部品はUL規格に
より難燃性の付与が義務づけられており、このため、封
止用樹脂には通常、臭素化合物およびアンチモン化合物
などの難燃剤が添加されている。On the other hand, electronic components such as semiconductors are required to be flame retardant according to UL standards, and for this reason, flame retardants such as bromine compounds and antimony compounds are usually added to sealing resins. .
【0010】0010
【発明が解決しようとする課題】しかるに乾燥パッケー
ジを容器に封入する方法は製造工程および製品の取扱作
業が繁雑になるうえ、製品価格が高価になる欠点がある
。However, the method of enclosing a dry package in a container has the disadvantage that the manufacturing process and handling of the product are complicated, and the product price is high.
【0011】また、種々の方法で改良された樹脂も、そ
れぞれ少しづつ効果をあげてきているが、まだ十分では
ない。ナフタレン骨格を有するエポキシ樹脂を添加し、
樹脂の低応力化を達成する方法(特開平2−88621
号公報、特開平2−110958号公報)は半田付け時
の樹脂部分のクラック防止に効果があるものの、高温で
の信頼性が低下する問題があった。[0011] In addition, resins that have been improved by various methods are gradually producing effects, but they are still not sufficient. Adding an epoxy resin with a naphthalene skeleton,
Method for achieving low stress in resin (Japanese Patent Application Laid-Open No. 2-88621
JP-A-2-110958) is effective in preventing cracks in the resin portion during soldering, but has the problem of reduced reliability at high temperatures.
【0012】一方、高温での信頼性は150〜200℃
の高温環境下での半導体の機能を保証するもので、発熱
量の大きい半導体や自動車のエンジンまわりで使用する
半導体などでは必須の性能である。On the other hand, reliability at high temperatures is 150 to 200°C.
It guarantees the functionality of semiconductors in high-temperature environments, and is essential for semiconductors that generate a large amount of heat and semiconductors used around automobile engines.
【0013】ナフタレン骨格を有するエポキシ樹脂の高
温信頼性の問題は、難燃性を付与するために添加してい
る臭素化合物およびアンチモン化合物などの難燃剤が主
原因であることがわかっている。このため、半田耐熱性
、難燃性および高温信頼性のすべてに優れる半導体封止
用エポキシ樹脂組成物は得られていなかった。It has been found that the problem with high temperature reliability of epoxy resins having a naphthalene skeleton is mainly caused by flame retardants such as bromine compounds and antimony compounds added to impart flame retardancy. For this reason, an epoxy resin composition for semiconductor encapsulation that is excellent in all of solder heat resistance, flame retardance, and high-temperature reliability has not been obtained.
【0014】本発明の目的は、かかる半田付け工程で生
じるクラックの問題を解消し、難燃剤の添加による高温
での信頼性低下のない、すなわち半田耐熱性、難燃性お
よび高温信頼性に共に優れる半導体封止用エポキシ樹脂
組成物を提供することにある。The object of the present invention is to solve the problem of cracks that occur in the soldering process, and to prevent the reliability from decreasing at high temperatures due to the addition of flame retardants, that is, to improve soldering heat resistance, flame retardance, and high-temperature reliability. An object of the present invention is to provide an excellent epoxy resin composition for encapsulating semiconductors.
【0015】[0015]
【課題を解決するための手段】本発明者らは、ナフタレ
ン骨格を有するエポキシ樹脂にハイドロタルサイト系化
合物を添加することにより、上記の課題を達成し、目的
に合致した半導体封止用エポキシ樹脂組成物が得られる
ことを見出し、本発明に到達した。[Means for Solving the Problems] The present inventors have achieved the above-mentioned problems by adding a hydrotalcite-based compound to an epoxy resin having a naphthalene skeleton, and have created an epoxy resin for semiconductor encapsulation that meets the purpose. It was discovered that a composition can be obtained, and the present invention was achieved.
【0016】すなわち、本発明は、エポキシ樹脂(A)
、硬化剤(B)、充填剤(C)、ハイドロタルサイト系
化合物(D)、臭素化合物(E)およびアンチモン化合
物(F)を含有してなる樹脂組成物であって、前記エポ
キシ樹脂(A)が下記式(I)That is, the present invention provides epoxy resin (A)
, a curing agent (B), a filler (C), a hydrotalcite compound (D), a bromine compound (E), and an antimony compound (F), the resin composition comprising the epoxy resin (A). ) is the following formula (I)
【0017】[0017]
【化2】[Case 2]
【0018】(式中、R1 〜R8のうち、2つはグリ
シジルエーテル基を表わし、他は、水素原子、ハロゲン
原子、または炭素数1〜4のアルキル基を示す。)で表
されるエポキシ樹脂(a)を必須成分として含有し、前
記充填剤(C)の割合が全体の75〜95重量%であり
、前記ハイドロタルサイト系化合物(D)の割合が全体
の0.01〜10重量%である半導体封止用エポキシ樹
脂組成物を提供するものである。Epoxy resin represented by (wherein, two of R1 to R8 represent a glycidyl ether group, and the others represent a hydrogen atom, a halogen atom, or an alkyl group having 1 to 4 carbon atoms) (a) as an essential component, the proportion of the filler (C) is 75 to 95% by weight of the whole, and the proportion of the hydrotalcite compound (D) is 0.01 to 10% by weight of the whole. The present invention provides an epoxy resin composition for semiconductor encapsulation.
【0019】以下、本発明の構成を詳述する。The configuration of the present invention will be explained in detail below.
【0020】本発明におけるエポキシ樹脂(A)は、上
記式(I)で表されるエポキシ樹脂(a)を必須成分と
して含有することが重要である。エポキシ樹脂(a)を
含有しない場合は半田付け工程におけるクラックの発生
防止効果および耐熱性効果は発揮されない。上記式(I
)において、R1 〜R8の好ましい具体例としては、
水素原子、メチル基、エチル基、プロピル基、i−プロ
ピル基、n−ブチル基、sec−ブチル基、tert−
ブチル基、塩素原子、臭素原子などがあげられる。It is important that the epoxy resin (A) in the present invention contains the epoxy resin (a) represented by the above formula (I) as an essential component. If the epoxy resin (a) is not contained, the effect of preventing crack generation and the heat resistance effect in the soldering process will not be exhibited. The above formula (I
), preferred specific examples of R1 to R8 are:
Hydrogen atom, methyl group, ethyl group, propyl group, i-propyl group, n-butyl group, sec-butyl group, tert-
Examples include butyl group, chlorine atom, bromine atom, etc.
【0021】本発明におけるエポキシ樹脂(a)の好ま
しい具体例としては、1,5−ジグリシジルナフタレン
、1,5−ジグリシジル−7−メチルナフタレン、1,
6−ジグリシジルナフタレン、1,6−ジグリシジル−
2−メチルナフタレン、1,6−ジグリシジル−8−メ
チルナフタレン、1,6−ジグリシジル−4,8−ジメ
チルナフタレン、2−ブロム−1,6−ジグリシジルナ
フタレン、8−ブロム−1,6−ジグリシジルナフタレ
ンなどがあげられる。Preferred specific examples of the epoxy resin (a) in the present invention include 1,5-diglycidylnaphthalene, 1,5-diglycidyl-7-methylnaphthalene, 1,
6-diglycidylnaphthalene, 1,6-diglycidyl-
2-Methylnaphthalene, 1,6-diglycidyl-8-methylnaphthalene, 1,6-diglycidyl-4,8-dimethylnaphthalene, 2-bromo-1,6-diglycidylnaphthalene, 8-bromo-1,6-di Examples include glycidylnaphthalene.
【0022】本発明に於けるエポキシ樹脂(A)は上記
のエポキシ樹脂(a)とともに該エポキシ樹脂(a)以
外の他のエポキシ樹脂をも併用して含有することができ
る。併用できる他のエポキシ樹脂としては、例えば、ク
レゾールノボラック型エポキシ樹脂、フェノ−ルノボラ
ック型エポキシ樹脂、ビフェニル型エポキシ樹脂、ビス
フェノ−ルAやレゾルシンなどから合成される各種ノボ
ラック型エポキシ樹脂、ビスフェノ−ルA型エポキシ樹
脂、線状脂肪族エポキシ樹脂、脂環式エポキシ樹脂、複
素環式エポキシ樹脂、ハロゲン化エポキシ樹脂などがあ
げられる。The epoxy resin (A) in the present invention may contain, in addition to the above-mentioned epoxy resin (a), other epoxy resins in addition to the epoxy resin (a). Other epoxy resins that can be used in combination include, for example, cresol novolak epoxy resins, phenol novolac epoxy resins, biphenyl epoxy resins, various novolac epoxy resins synthesized from bisphenol A and resorcinol, and bisphenol A. Examples include type epoxy resins, linear aliphatic epoxy resins, alicyclic epoxy resins, heterocyclic epoxy resins, and halogenated epoxy resins.
【0023】エポキシ樹脂(A)中に含有されるエポキ
シ樹脂(a)の割合に関しては特に制限がなく必須成分
としてエポキシ樹脂(a)が含有されれば本発明の効果
は発揮されるが、より十分な効果を発揮させるためには
、エポキシ樹脂(a)をエポキシ樹脂(A)中に通常5
0重量%以上、好ましくは70重量%以上含有せしめる
必要がある。There is no particular restriction on the proportion of the epoxy resin (a) contained in the epoxy resin (A), and the effects of the present invention can be exhibited as long as the epoxy resin (a) is contained as an essential component. In order to exhibit a sufficient effect, epoxy resin (a) is usually mixed into epoxy resin (A) by 5%.
It is necessary to contain 0% by weight or more, preferably 70% by weight or more.
【0024】本発明において、エポキシ樹脂(A)の配
合量は通常4〜20重量%、好ましくは6〜18重量%
である。In the present invention, the blending amount of the epoxy resin (A) is usually 4 to 20% by weight, preferably 6 to 18% by weight.
It is.
【0025】本発明における硬化剤(B)は、エポキシ
樹脂(A)と反応して硬化させるものであれば特に限定
されず、それらの具体例としては、たとえばフェノール
ノボラック樹脂、クレゾールノボラック樹脂、ビスフェ
ノ−ルAやレゾルシンから合成される各種ノボラック樹
脂、各種多価フェノ−ル化合物、無水マレイン酸、無水
フタル酸、無水ピロメリット酸などの酸無水物およびメ
タフェニレンジアミン、ジアミノジフェニルメタン、ジ
アミノジフェニルスルホンなどの芳香族アミンなどがあ
げられる。半導体封止用としては、耐熱性、耐湿性およ
び保存性の点から、フェノール系硬化剤が好ましく用い
られ、用途によっては二種以上の硬化剤を併用してもよ
い。The curing agent (B) in the present invention is not particularly limited as long as it can be cured by reacting with the epoxy resin (A), and specific examples thereof include phenol novolak resin, cresol novolak resin, bisphenol -Various novolak resins synthesized from Sol A and resorcinol, various polyhydric phenol compounds, acid anhydrides such as maleic anhydride, phthalic anhydride, and pyromellitic anhydride, metaphenylenediamine, diaminodiphenylmethane, diaminodiphenylsulfone, etc. Examples include aromatic amines. For semiconductor encapsulation, phenolic curing agents are preferably used from the viewpoint of heat resistance, moisture resistance, and storage stability, and two or more types of curing agents may be used in combination depending on the application.
【0026】本発明において、硬化剤(B)の配合量は
通常2〜15重量%、好ましくは3〜10重量%である
。さらには、エポキシ樹脂(A)と硬化剤(B)の配合
比は、機械的性質および耐湿性の点から(A)に対する
(B)の化学当量比が0.7〜1.3、特に0.8〜1
.2の範囲にあることが好ましい。In the present invention, the amount of the curing agent (B) is usually 2 to 15% by weight, preferably 3 to 10% by weight. Furthermore, the compounding ratio of the epoxy resin (A) and the curing agent (B) should be such that the chemical equivalent ratio of (B) to (A) is 0.7 to 1.3, especially 0. .8~1
.. It is preferable that it is in the range of 2.
【0027】また、本発明においてエポキシ樹脂(A)
と硬化剤(B)の硬化反応を促進するため硬化触媒を用
いてもよい。硬化触媒は硬化反応を促進するものならば
特に限定されず、たとえば2−メチルイミダゾール、2
,4−ジメチルイミダゾール、2−エチル−4−メチル
イミダゾール、2−フェニルイミダゾール、2−フェニ
ル−4−メチルイミダゾール、2−ヘプタデシルイミダ
ゾールなどのイミダゾール化合物、トリエチルアミン、
ベンジルジメチルアミン、α−メチルベンジルジメチル
アミン、2−(ジメチルアミノメチル)フェノール、2
,4,6−トリス(ジメチルアミノメチル)フェノール
、1,8−ジアザビシクロ(5,4,0)ウンデセン−
7などの3級アミン化合物、ジルコニウムテトラメトキ
シド、ジルコニウムテトラプロポキシド、テトラキス(
アセチルアセトナト)ジルコニウム、トリ(アセチルア
セトナト)アルミニウムなどの有機金属化合物およびト
リフェニルホスフィン、トリメチルホスフィン、トリエ
チルホスフィン、トリブチルホスフィン、トリ(p−メ
チルフェニル)ホスフィン、トリ(ノニルフェニル)ホ
スフィンなどの有機ホスフィン化合物があげられる。な
かでも耐湿性の点から、有機ホスフィン化合物が好まし
く、トリフェニルホスフィンが特に好ましく用いられる
。これらの硬化触媒は、用途によっては二種以上を併用
してもよく、その添加量はエポキシ樹脂(A)100重
量部に対して0.5〜5重量部の範囲が好ましい。[0027] Furthermore, in the present invention, epoxy resin (A)
A curing catalyst may be used to promote the curing reaction of and curing agent (B). The curing catalyst is not particularly limited as long as it promotes the curing reaction, and examples include 2-methylimidazole and 2-methylimidazole.
, 4-dimethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 2-phenyl-4-methylimidazole, imidazole compounds such as 2-heptadecyl imidazole, triethylamine,
Benzyldimethylamine, α-methylbenzyldimethylamine, 2-(dimethylaminomethyl)phenol, 2
, 4,6-tris(dimethylaminomethyl)phenol, 1,8-diazabicyclo(5,4,0)undecene-
Tertiary amine compounds such as 7, zirconium tetramethoxide, zirconium tetrapropoxide, tetrakis (
Organometallic compounds such as acetylacetonato)zirconium, tri(acetylacetonato)aluminum, and organic compounds such as triphenylphosphine, trimethylphosphine, triethylphosphine, tributylphosphine, tri(p-methylphenyl)phosphine, tri(nonylphenyl)phosphine, etc. Examples include phosphine compounds. Among them, from the viewpoint of moisture resistance, organic phosphine compounds are preferred, and triphenylphosphine is particularly preferably used. Two or more of these curing catalysts may be used in combination depending on the application, and the amount added is preferably in the range of 0.5 to 5 parts by weight per 100 parts by weight of the epoxy resin (A).
【0028】本発明における充填剤(C)としては、溶
融シリカ(G)、結晶性シリカ、窒化ケイ素、炭化ケイ
素、炭酸カルシウム、炭酸マグネシウム、アルミナ、マ
グネシア、クレー、タルク、ケイ酸カルシウム、酸化チ
タン、アスベスト、ガラス繊維などを添加することがで
きる。なかでも低応力性の点から、溶融シリカ(G)が
好ましく用いられる。Fillers (C) in the present invention include fused silica (G), crystalline silica, silicon nitride, silicon carbide, calcium carbonate, magnesium carbonate, alumina, magnesia, clay, talc, calcium silicate, and titanium oxide. , asbestos, glass fiber, etc. can be added. Among them, fused silica (G) is preferably used from the viewpoint of low stress properties.
【0029】ここで、溶融シリカ(G)は真比重2.3
以下の非晶性シリカを意味する。その製造は必ずしも溶
融状態を経る必要はなく、任意の製造法を用いることが
できる。たとえば結晶性シリカを溶融する方法、各種原
料から合成する方法などがあげられる。Here, fused silica (G) has a true specific gravity of 2.3
It means the following amorphous silica. Its production does not necessarily have to go through a molten state, and any production method can be used. Examples include a method of melting crystalline silica and a method of synthesizing it from various raw materials.
【0030】溶融シリカ(G)の形状および粒径は特に
限定されないが、平均粒径10μm以下の破砕溶融シリ
カ99〜50重量%と平均粒径40μm以下の球状溶融
シリカ1〜50重量%からなる溶融シリカ(G)が半田
耐熱性の向上効果が大きく、流動性が良好なため好まし
く用いられる。中でも、平均粒径10μm以下、特に3
μm以上10μm以下の破砕溶融シリカ99〜50重量
%、特に99〜70重量%と平均粒径4μm以下、特に
0.1μm以上4μm以下の球状溶融シリカ1〜50重
量%、特に1〜30重量%からなり、球状溶融シリカの
平均粒径が破砕溶融シリカの平均粒径より小さく、特に
1/2以下の溶融シリカ(G)が最も好ましく用いられ
る。ここで、平均粒径は、累積重量50%になる粒径(
メジアン径)を意味し、平均粒径が異なる2種類以上の
破砕または球状溶融シリカを併用した場合は、その混合
物の破砕または球状溶融シリカの平均粒径を意味する。The shape and particle size of the fused silica (G) are not particularly limited, but it consists of 99-50% by weight of crushed fused silica with an average particle size of 10 μm or less and 1-50% by weight of spherical fused silica with an average particle size of 40 μm or less. Fused silica (G) is preferably used because it has a large effect of improving soldering heat resistance and has good fluidity. Among them, the average particle size is 10 μm or less, especially 3
99-50% by weight, especially 99-70% by weight of crushed fused silica with a particle diameter of 1 to 10 μm, and 1 to 50% by weight, especially 1 to 30% by weight of spherical fused silica with an average particle size of 4 μm or less, especially 0.1 μm to 4 μm. Fused silica (G), in which the average particle size of spherical fused silica is smaller than the average particle size of crushed fused silica, particularly 1/2 or less, is most preferably used. Here, the average particle size is the particle size at which the cumulative weight is 50% (
When two or more types of crushed or spherical fused silica with different average particle sizes are used together, it means the average particle size of the crushed or spherical fused silica of the mixture.
【0031】本発明において、充填剤(C)の割合は、
成形性および低応力性の点から全体の75〜95重量%
である。充填剤(C)として溶融シリカ(G)を用いた
場合、その割合は全体の75〜90重量%が好ましく、
75〜88重量%が特に好ましい。In the present invention, the proportion of filler (C) is:
75 to 95% by weight of the total from the viewpoint of formability and low stress properties
It is. When fused silica (G) is used as the filler (C), its proportion is preferably 75 to 90% by weight of the total,
Particularly preferred is 75-88% by weight.
【0032】本発明におけるハイドロタルサイト系化合
物(D)は、下記式(II)または(III)で示され
る複合金属化合物である。The hydrotalcite compound (D) in the present invention is a composite metal compound represented by the following formula (II) or (III).
【0033】
Mgx Aly (OH)2x+3y−nzAz
・mH2 O ‥‥‥(II) Mgx Aly
O(2x+3y)/2
‥‥‥(III)(ただし、Aはn価の陰
イオンAn−を生成しうる官能基、nは1〜3の整数、
x、yおよびzは0<y/x≦1、0≦z/y<1.5
の関係にある0または正の数、mは0または正の数を示
す。)。Mgx Aly (OH)2x+3y-nzAz
・mH2 O ‥‥‥(II) Mgx Aly
O(2x+3y)/2
‥‥‥(III) (However, A is a functional group capable of generating an n-valent anion An-, n is an integer of 1 to 3,
x, y and z are 0<y/x≦1, 0≦z/y<1.5
m represents 0 or a positive number, and m represents 0 or a positive number. ).
【0034】上記式(II)において、官能基Aから生
成しうるn価の陰イオンAn−の好ましい具体例として
は、F− 、Cl− 、Br− 、I− 、OH− 、
HCO3 − 、CH3 COO− 、HCOO− 、
CO3 2−、SO4 2−、(COO− )2 、酒
石酸イオン〔CH(OH)COO− 〕2 、クエン酸
イオン〔C(OH)COO− 〕(CH2 COO−
)2 、サリチル酸イオンC6 H4 (OH)COO
− などがあげられる。なかでも、CO3 2−が特に
好ましい。In the above formula (II), preferred specific examples of the n-valent anion An- that can be generated from the functional group A include F-, Cl-, Br-, I-, OH-,
HCO3 − , CH3 COO− , HCOO− ,
CO3 2-, SO4 2-, (COO-)2, tartrate ion [CH(OH)COO-]2, citrate ion [C(OH)COO-](CH2 COO-
)2, salicylate ion C6 H4 (OH)COO
- and so on. Among these, CO3 2- is particularly preferred.
【0035】上記式(III)で表されるハイドロタル
サイト系化合物(D)はたとえば、上記式(II)で表
されるハイドロタルサイト系化合物(D)を、400〜
900℃で焼成処理することにより製造される。The hydrotalcite compound (D) represented by the above formula (III) is, for example, a hydrotalcite compound (D) represented by the above formula (II),
Manufactured by firing at 900°C.
【0036】ハイドロタルサイト系化合物(D)の好ま
しい具体例として、Mg4.5 Al2 (OH)13
CO3 ・3.5H2 O、Mg4.5 Al2 (O
H)13CO3 、Mg5 Al1.5 (OH)13
CO3 ・3.5H2 O、Mg5 Al1.5 (O
H)13CO3 、Mg6 Al2 (OH)16CO
3 ・4H2 O、Mg6 Al2 (OH)16CO
3 、Mg0.65Al0.35O1.175 、Mg
0.7 Al0.3 O1.15、Mg0.75Al0
.25O1.125 、Mg0.8 Al0.2 O1
.1 などがあげられる。[0036] As a preferable example of the hydrotalcite compound (D), Mg4.5 Al2 (OH)13
CO3 ・3.5H2 O, Mg4.5 Al2 (O
H)13CO3, Mg5 Al1.5 (OH)13
CO3 ・3.5H2 O, Mg5 Al1.5 (O
H)13CO3, Mg6Al2(OH)16CO
3 ・4H2 O, Mg6 Al2 (OH)16CO
3, Mg0.65Al0.35O1.175, Mg
0.7 Al0.3 O1.15, Mg0.75Al0
.. 25O1.125, Mg0.8 Al0.2 O1
.. 1 etc.
【0037】本発明においてハイドロタルサイト系化合
物(D)の添加量は全体の0.01〜10重量%、好ま
しくは0.02〜5重量%、特に好ましくは0.05〜
2重量%である。添加量が0.01重量%未満では高温
信頼性の向上効果が不十分であり、10重量%を越える
と半田耐熱性が低下する。In the present invention, the amount of the hydrotalcite compound (D) added is 0.01 to 10% by weight, preferably 0.02 to 5% by weight, particularly preferably 0.05 to 5% by weight.
It is 2% by weight. If the amount added is less than 0.01% by weight, the effect of improving high temperature reliability will be insufficient, and if it exceeds 10% by weight, the soldering heat resistance will decrease.
【0038】本発明における臭素化合物(E)およびア
ンチモン化合物(F)は通常、半導体封止用エポキシ樹
脂組成物に難燃剤として添加されるもので、特に限定さ
れず、公知のものが使用できる。The bromine compound (E) and antimony compound (F) in the present invention are usually added as flame retardants to the epoxy resin composition for semiconductor encapsulation, and are not particularly limited, and known compounds can be used.
【0039】臭素化合物(E)の好ましい具体例として
は、臭素化ビスフェノールA型エポキシ樹脂、臭素化フ
ェノールノボラック型エポキシ樹脂などの臭素化エポキ
シ樹脂、臭素化ポリカーボネート樹脂、臭素化ポリスチ
レン樹脂、臭素化ポリフェニレンオキサイド樹脂、テト
ラブロモビスフェノールA、デカブロモジフェニルエー
テルなどがあげられ、なかでも、臭素化ビスフェノール
A型エポキシ樹脂、臭素化フェノールノボラック型エポ
キシ樹脂などの臭素化エポキシ樹脂が、成形性の点から
特に好ましく用いられる。Preferred specific examples of the bromine compound (E) include brominated epoxy resins such as brominated bisphenol A type epoxy resins, brominated phenol novolak type epoxy resins, brominated polycarbonate resins, brominated polystyrene resins, and brominated polyphenylene resins. Examples include oxide resins, tetrabromobisphenol A, decabromodiphenyl ether, etc. Among them, brominated epoxy resins such as brominated bisphenol A type epoxy resins and brominated phenol novolac type epoxy resins are particularly preferably used from the viewpoint of moldability. It will be done.
【0040】臭素化合物(E)の添加量は、臭素原子に
換算して全体の0.1〜5重量%が難燃性および高温信
頼性の点で好ましい。特に好ましくは、0.2〜2重量
%である。The amount of the bromine compound (E) added is preferably 0.1 to 5% by weight of the total amount in terms of bromine atoms from the viewpoint of flame retardancy and high temperature reliability. Particularly preferred is 0.2 to 2% by weight.
【0041】また、アンチモン化合物(F)の好ましい
具体例としては、三酸化アンチモンがあげられる。アン
チモン化合物(F)の添加量は、全体の0.1〜10重
量%が難燃性および高温信頼性の点で好ましい。特に好
ましくは、0.2〜4重量%である。A preferred example of the antimony compound (F) is antimony trioxide. The amount of antimony compound (F) added is preferably 0.1 to 10% by weight based on the total weight from the viewpoint of flame retardancy and high temperature reliability. Particularly preferably, it is 0.2 to 4% by weight.
【0042】本発明において、充填剤(C)をシランカ
ップリング剤、チタネートカップリング剤などのカップ
リング剤であらかじめ表面処理することが、信頼性の点
で好ましい。カップリング剤としてエポキシシラン、ア
ミノシラン、メルカプトシランなどのシランカップリン
グ剤が好ましく用いられる。In the present invention, it is preferable from the viewpoint of reliability that the filler (C) is previously surface-treated with a coupling agent such as a silane coupling agent or a titanate coupling agent. As the coupling agent, silane coupling agents such as epoxysilane, aminosilane, and mercaptosilane are preferably used.
【0043】本発明の半導体封止用エポキシ樹脂組成物
にはカーボンブラック、酸化鉄などの着色剤、シリコー
ンゴム、変性ニトリルゴム、変性ポリブタジエンゴム、
スチレン系ブロック共重合体などのエラストマー、ポリ
エチレンなどの熱可塑性樹脂、長鎖脂肪酸、長鎖脂肪酸
の金属塩、長鎖脂肪酸のエステル、長鎖脂肪酸のアミド
、パラフィンワックスなどの離型剤および有機過酸化物
などの架橋剤を任意に添加することができる。The epoxy resin composition for semiconductor encapsulation of the present invention contains colorants such as carbon black and iron oxide, silicone rubber, modified nitrile rubber, modified polybutadiene rubber,
Elastomers such as styrenic block copolymers, thermoplastic resins such as polyethylene, long chain fatty acids, metal salts of long chain fatty acids, esters of long chain fatty acids, amides of long chain fatty acids, mold release agents such as paraffin wax, and organic polymers. Crosslinking agents such as oxides can optionally be added.
【0044】本発明の半導体封止用エポキシ樹脂組成物
は溶融混練することが好ましく、たとえばバンバリーミ
キサー、ニーダー、ロール、単軸もしくは二軸の押出機
およびコニーダーなどの公知の混練方法を用いて溶融混
練することにより、製造される。The epoxy resin composition for semiconductor encapsulation of the present invention is preferably melt-kneaded, for example, using a known kneading method such as a Banbury mixer, kneader, roll, single- or twin-screw extruder, or co-kneader. Manufactured by kneading.
【0045】[0045]
【実施例】以下、実施例により本発明を具体的に説明す
る。[Examples] The present invention will be specifically explained below with reference to Examples.
【0046】実施例1〜9、比較例1〜6表1に示した
溶融シリカ(G)を用い、表2に示した配合処方で原料
をミキサ−によりドライブレンドした。これを、バレル
設定温度90℃の二軸の押出機を用いて溶融混練後、冷
却・粉砕して半導体封止用エポキシ樹脂組成物を製造し
た。Examples 1 to 9, Comparative Examples 1 to 6 Using the fused silica (G) shown in Table 1, the raw materials were dry blended in a mixer according to the formulation shown in Table 2. This was melt-kneaded using a twin-screw extruder with a barrel temperature set at 90° C., then cooled and pulverized to produce an epoxy resin composition for semiconductor encapsulation.
【0047】[0047]
【表1】[Table 1]
【0048】[0048]
【表2】[Table 2]
【0049】この組成物を用い、低圧トランスファ−成
形法により175℃×2分の条件で成形し、180℃×
5時間の条件でポストキュアして次の物性測定法により
各組成物の物性および成形性を測定した。Using this composition, molding was performed at 175°C for 2 minutes using a low-pressure transfer molding method, followed by molding at 180°C for 2 minutes.
After post-curing for 5 hours, the physical properties and moldability of each composition were measured using the following physical property measuring method.
【0050】半田耐熱性:表面にAl蒸着した模擬素子
を搭載した64pinQFP20個を成形、ポストキュ
アし、85℃/85%RHで72時間加湿後、250℃
に加熱した半田浴に10秒間浸漬してクラックの発生し
たQFPを不良とした。[0050] Soldering heat resistance: 20 64-pin QFPs equipped with simulated elements with Al vapor deposited on the surface were molded, post-cured, humidified at 85°C/85%RH for 72 hours, and then heated at 250°C.
The QFP was immersed in a heated solder bath for 10 seconds, and QFPs with cracks were judged to be defective.
【0051】難燃性:5″×1/2″×1/16″の燃
焼試験片を成形、ポストキュアし、UL94規格に従い
難燃性を評価した。Flame retardancy: A 5" x 1/2" x 1/16" combustion test piece was molded and post-cured, and flame retardance was evaluated according to UL94 standard.
【0052】高温信頼性:半田耐熱性評価後の64pi
nQFPを用い、175℃で高温信頼性を評価し、累積
故障率50%になる時間を求め、高温寿命とした。[0052] High temperature reliability: 64pi after soldering heat resistance evaluation
Using nQFP, high-temperature reliability was evaluated at 175° C., and the time required for the cumulative failure rate to reach 50% was determined, which was defined as the high-temperature life.
【0053】これらの結果を表3に示す。[0053] These results are shown in Table 3.
【0054】[0054]
【表3】[Table 3]
【0055】表3にみられるように、本発明の半導体封
止用エポキシ樹脂組成物(実施例1〜9)は半田耐熱性
、難燃性および高温信頼性に優れている。中でも特定の
形状および粒径の溶融シリカ(G)を配合した実施例4
〜9は、半田耐熱性不良率が15%以下と特に優れてい
る。As seen in Table 3, the epoxy resin compositions for semiconductor encapsulation of the present invention (Examples 1 to 9) are excellent in solder heat resistance, flame retardancy, and high temperature reliability. Among them, Example 4 in which fused silica (G) with a specific shape and particle size was blended.
Samples 9 to 9 are particularly excellent in terms of solder heat resistance failure rate of 15% or less.
【0056】これに対してエポキシ樹脂(a)を含有し
ない比較例1では半田耐熱性に劣り、臭素化合物(E)
および/またはアンチモン化合物(F)を含有しない比
較例2〜4では難燃性に劣っている。On the other hand, in Comparative Example 1, which does not contain epoxy resin (a), the soldering heat resistance is poor and the bromine compound (E)
And/or Comparative Examples 2 to 4 that do not contain the antimony compound (F) have poor flame retardancy.
【0057】また、ハイドロタルサイト系化合物(D)
を含有しない比較例5では高温信頼性に劣っている。[0057] Additionally, hydrotalcite compound (D)
Comparative Example 5, which does not contain , has poor high-temperature reliability.
【0058】さらに、充填剤(C)として配合している
溶融シリカ(G)の含有量が、本発明の範囲外の比較例
6では半田耐熱性に劣っている。Furthermore, in Comparative Example 6, where the content of fused silica (G) blended as the filler (C) was outside the scope of the present invention, the soldering heat resistance was poor.
【0059】[0059]
【発明の効果】本発明の半導体封止用エポキシ樹脂組成
物は、特定のエポキシ樹脂、硬化剤、充填剤、ハイドロ
タルサイト系化合物、臭素化合物およびアンチモン化合
物を配合したために、半田耐熱性、難燃性および高温信
頼性に優れている。Effects of the Invention The epoxy resin composition for semiconductor encapsulation of the present invention has excellent soldering heat resistance and difficulty, since it contains a specific epoxy resin, a curing agent, a filler, a hydrotalcite compound, a bromine compound, and an antimony compound. Excellent flammability and high temperature reliability.
Claims (3)
充填剤(C)、ハイドロタルサイト系化合物(D)、臭
素化合物(E)およびアンチモン化合物(F)を含有し
てなる樹脂組成物であって、前記エポキシ樹脂(A)が
下記式(I) 【化1】 (式中、R1 〜R8のうち、2つはグリシジルエーテ
ル基を表わし、他は、水素原子、ハロゲン原子、または
炭素数1〜4のアルキル基を示す。)で表されるエポキ
シ樹脂(a)を必須成分として含有し、前記充填剤(C
)の割合が全体の75〜95重量%であり、前記ハイド
ロタルサイト系化合物(D)の割合が全体の0.01〜
10重量%である半導体封止用エポキシ樹脂組成物。Claim 1: Epoxy resin (A), curing agent (B),
A resin composition comprising a filler (C), a hydrotalcite compound (D), a bromine compound (E), and an antimony compound (F), wherein the epoxy resin (A) has the following formula (I). Epoxy represented by [Formula 1] (wherein, two of R1 to R8 represent a glycidyl ether group, and the others represent a hydrogen atom, a halogen atom, or an alkyl group having 1 to 4 carbon atoms) Contains resin (a) as an essential component, and contains the filler (C
) is 75 to 95% by weight of the whole, and the proportion of the hydrotalcite compound (D) is 0.01 to 95% of the whole.
An epoxy resin composition for semiconductor encapsulation having a content of 10% by weight.
その割合が全体の75〜90重量%である請求項(1)
記載の半導体封止用エポキシ樹脂組成物。[Claim 2] The filler (C) is fused silica (G),
Claim (1) The proportion thereof is 75 to 90% by weight of the whole.
The epoxy resin composition for semiconductor encapsulation described above.
以下の破砕溶融シリカ99〜50重量%と平均粒径40
μm以下の球状溶融シリカ1〜50重量%からなる請求
項(1)記載の半導体封止用エポキシ樹脂組成物。[Claim 3] Fused silica (G) has an average particle size of 10 μm.
The following crushed fused silica 99-50% by weight and average particle size 40
The epoxy resin composition for semiconductor encapsulation according to claim 1, comprising 1 to 50% by weight of spherical fused silica having a particle size of 1 to 5 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2601891A JPH04264155A (en) | 1991-02-20 | 1991-02-20 | Epoxy resin composition for semiconductor sealing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2601891A JPH04264155A (en) | 1991-02-20 | 1991-02-20 | Epoxy resin composition for semiconductor sealing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04264155A true JPH04264155A (en) | 1992-09-18 |
Family
ID=12181961
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2601891A Pending JPH04264155A (en) | 1991-02-20 | 1991-02-20 | Epoxy resin composition for semiconductor sealing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04264155A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6156865A (en) * | 1998-11-19 | 2000-12-05 | Nec Corporation | Flame retardant thermosetting resin composition |
| JP2007023273A (en) * | 2005-06-17 | 2007-02-01 | Hitachi Chem Co Ltd | Epoxy resin molding compound for sealing use and electronic component device |
| JP2017082027A (en) * | 2015-10-22 | 2017-05-18 | 信越化学工業株式会社 | Curable epoxy resin composition for primarily encapsulating photocoupler |
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| JPS6119625A (en) * | 1984-07-05 | 1986-01-28 | Toshiba Corp | Epoxy resin composition for sealing semiconductor |
| JPH0286148A (en) * | 1988-09-21 | 1990-03-27 | Nitto Denko Corp | Semiconductor device |
| JPH0288621A (en) * | 1988-09-27 | 1990-03-28 | Mitsubishi Electric Corp | Epoxy resin composition for semiconductor encapsulation |
| JPH0294654A (en) * | 1988-09-30 | 1990-04-05 | Nitto Denko Corp | Semiconductor device |
| JPH02265916A (en) * | 1989-04-06 | 1990-10-30 | Mitsubishi Electric Corp | Epoxy resin composition for semiconductor sealing |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6156865A (en) * | 1998-11-19 | 2000-12-05 | Nec Corporation | Flame retardant thermosetting resin composition |
| JP2007023273A (en) * | 2005-06-17 | 2007-02-01 | Hitachi Chem Co Ltd | Epoxy resin molding compound for sealing use and electronic component device |
| JP2017082027A (en) * | 2015-10-22 | 2017-05-18 | 信越化学工業株式会社 | Curable epoxy resin composition for primarily encapsulating photocoupler |
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