JPH0426532U - - Google Patents
Info
- Publication number
- JPH0426532U JPH0426532U JP6824890U JP6824890U JPH0426532U JP H0426532 U JPH0426532 U JP H0426532U JP 6824890 U JP6824890 U JP 6824890U JP 6824890 U JP6824890 U JP 6824890U JP H0426532 U JPH0426532 U JP H0426532U
- Authority
- JP
- Japan
- Prior art keywords
- link
- board
- arm
- substrate
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 17
- 238000001035 drying Methods 0.000 claims description 4
- 230000037431 insertion Effects 0.000 claims 2
- 238000003780 insertion Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Description
第１図は基板クランプ装置の正面図、第２図は
そのクランプ装置の動作説明図、第３図は本考案
に係る基板クランプ装置を備える遠心式基板乾燥
装置の縦断正面図、第４図はリンクの変形例を示
す要部断面図、第５図は従来例の第３図相当図で
ある。
５……ロータ、５ａ……回転フランジ、１３…
…基板受け具、１４……増速リンク機構、１５…
…基板保持具、１７……基端ピン、１８……リン
ク、１９……先端ピン、２０……駆動アーム、２
１……アーム駆動支軸、２４……係止具、２５…
…係止ピン、Ａ……クランプ位置、Ｂ……アンク
ランプ位置、Ｐ……駆動アームの回動上死点、Ｗ
……基板。
FIG. 1 is a front view of the substrate clamping device, FIG. 2 is an explanatory diagram of the operation of the clamping device, FIG. 3 is a longitudinal sectional front view of a centrifugal substrate drying device equipped with the substrate clamping device according to the present invention, and FIG. 4 is a front view of the substrate clamping device. FIG. 5, which is a sectional view of a main part showing a modified example of the link, is a view corresponding to FIG. 3 of the conventional example. 5... Rotor, 5a... Rotating flange, 13...
... Board holder, 14... Speed-up link mechanism, 15...
... Substrate holder, 17 ... Base end pin, 18 ... Link, 19 ... Tip pin, 20 ... Drive arm, 2
1... Arm drive support shaft, 24... Locking tool, 25...
...Lock pin, A...clamp position, B...unclamp position, P...rotation top dead center of drive arm, W
……substrate.
Claims (1)
一対の回転フランジ間に架設した基板のクランプ
装置であつて、 基板受け具をロータに架設して、複数の基板を
基板受け具で直接または間接に受け止め、基板の
中心をロータの回転中心の近傍に位置させるよう
に配置し、 基板保持具をロータの基板挿入側近傍に配置し
て、増速リンク機構でクランプ位置とアンクラン
プ位置との間で回動操作させ、クランプ位置では
基板受け具で受け止めた複数の基板の上縁を基板
保持具の当接部で当接保持し、アンクランプ位置
では基板保持具を基板挿入側より退避させるよう
に構成し、 増速リンク機構は、基板保持具にリンクの基端
部を基端ピンで連結するとともに、リンクの先端
部を先端ピンで駆動アームに連結し、駆動アーム
の基端部をアーム駆動支軸に固定して成り、 リンクを弾性変形可能な弾性部材を介在させて
構成し、 クランプ位置において、基端ピンからアーム駆
動支軸に向かう延長線上にアーム回動上死点を設
定するとともに、アーム回動上死点と基端ピン間
の距離をリンクの両端ピン間の自由長よりも大き
く設定し、 クランプ位置では、駆動アームをアーム回動上
死点を超えた近傍に回動して位置決めし、リンク
の弾性復元力により基板保持具をクランプ位置に
拘束することを特徴とする遠心式基板乾燥装置の
基板クランプ装置。 ２ リンクの途中部に係止具を固定するとともに
、ロータに係止ピンを突設し、 係止ピンは、クランプ位置における基端ピンと
アーム駆動支軸との間に位置させ、係止具を係止
ピンで係止することにより、基板保持具及びリン
クに作用する遠心力に抗してリンクをクランプ位
置に拘束するように構成した遠心式基板乾燥装置
の基板クランプ装置。[Claims for Utility Model Registration] 1. A substrate clamping device installed between a pair of front and rear rotating flanges constituting the rotor of a centrifugal substrate drying device, which clamps a plurality of substrates by installing a substrate holder on the rotor. Receive the board directly or indirectly with a board holder, place the board so that the center of the board is located near the rotation center of the rotor, place the board holder near the board insertion side of the rotor, and use the speed-increasing link mechanism to clamp the board. At the clamp position, the upper edges of the plurality of boards received by the board holder are held in contact with the abutting part of the board holder, and at the unclamp position, the board holder is The speed increasing link mechanism is configured to be retracted from the board insertion side, and the speed increasing link mechanism connects the base end of the link to the board holder with a base end pin, and connects the tip end of the link to the drive arm with the end pin, and is driven. The base end of the arm is fixed to the arm drive spindle, the link is constructed with an elastic member that can be elastically deformed, and at the clamp position, the arm rotates on an extended line from the base pin to the arm drive spindle. At the same time as setting the top dead center of the arm rotation, set the distance between the top dead center of the arm rotation and the base end pin to be larger than the free length between the pins at both ends of the link, and in the clamp position, move the drive arm to the top dead center of the arm rotation. 1. A substrate clamping device for a centrifugal substrate drying device, characterized in that the substrate holder is rotated and positioned in the vicinity beyond the limit, and the substrate holder is restrained at the clamping position by the elastic restoring force of the link. 2 A locking tool is fixed in the middle of the link, and a locking pin is provided protruding from the rotor, and the locking pin is located between the base end pin and the arm drive shaft at the clamp position, A substrate clamping device for a centrifugal substrate drying apparatus configured to restrain a link in a clamp position against centrifugal force acting on a substrate holder and the link by locking with a locking pin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6824890U JPH0744016Y2 (en) | 1990-06-26 | 1990-06-26 | Substrate clamp device for centrifugal substrate dryer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6824890U JPH0744016Y2 (en) | 1990-06-26 | 1990-06-26 | Substrate clamp device for centrifugal substrate dryer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0426532U true JPH0426532U (en) | 1992-03-03 |
| JPH0744016Y2 JPH0744016Y2 (en) | 1995-10-09 |
Family
ID=31602518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6824890U Expired - Lifetime JPH0744016Y2 (en) | 1990-06-26 | 1990-06-26 | Substrate clamp device for centrifugal substrate dryer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0744016Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06112186A (en) * | 1992-09-25 | 1994-04-22 | Dainippon Screen Mfg Co Ltd | Horizontal shaft rotating type substrate dryer |
-
1990
- 1990-06-26 JP JP6824890U patent/JPH0744016Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06112186A (en) * | 1992-09-25 | 1994-04-22 | Dainippon Screen Mfg Co Ltd | Horizontal shaft rotating type substrate dryer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0744016Y2 (en) | 1995-10-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |