JPH0426700B2 - - Google Patents
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- Publication number
- JPH0426700B2 JPH0426700B2 JP878885A JP878885A JPH0426700B2 JP H0426700 B2 JPH0426700 B2 JP H0426700B2 JP 878885 A JP878885 A JP 878885A JP 878885 A JP878885 A JP 878885A JP H0426700 B2 JPH0426700 B2 JP H0426700B2
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- JP
- Japan
- Prior art keywords
- slurry
- carrier
- hot wire
- electrophoresis
- hot
- Prior art date
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
- G01N27/16—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、接触燃焼式ガスセンサに用いられる
ガス検知素子および温度補償素子の製造装置に関
する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an apparatus for manufacturing a gas detection element and a temperature compensation element used in a catalytic combustion type gas sensor.
接触燃焼式ガスセンサに用いられるガス検知素
子は、第3図に示すように、白金などの抵抗温度
係数の高い材質の線をコイル状にした熱線条10
を活性アルミナなどの担体12で被覆し、さらに
この担体12に可燃性ガスに対する酸化性能に優
れた触媒を付着させた構造となつており、また温
度補償素子は、可燃性ガスに対して不活性な点を
除けばガス検知素子と同様の形状をしている。実
際のセンサは第4図に示すように、ガス検知素子
13と温度補償素子14とが隣接する枝路内に位
置するように抵抗15,16とともにブリツジを
形成せしめて電源17に接続し、両素子13,1
4の接続点と抵抗15,16の接続点との間に出
力検出部18を接続することによつて構成され
る。
As shown in FIG. 3, the gas detection element used in the catalytic combustion type gas sensor is made of a hot wire 10 made of a coiled wire made of a material with a high temperature coefficient of resistance, such as platinum.
is coated with a carrier 12 such as activated alumina, and a catalyst with excellent oxidation performance against combustible gases is attached to this carrier 12, and the temperature compensating element is coated with a catalyst that is inert to combustible gases. It has the same shape as a gas detection element except for the following points. In the actual sensor, as shown in FIG. 4, a bridge is formed with resistors 15 and 16 so that the gas detection element 13 and temperature compensation element 14 are located in adjacent branch paths, and the bridge is connected to the power supply 17. Element 13,1
4 and the connection point between resistors 15 and 16.
このガス検知素子および温度補償素子は通常、
熱線条に担体を付着させた後適当な熱処理を行な
つて熱線条に担体を固着させる方法により製造さ
れる。またガス検知素子用としては、担体を固着
させた後、これに適当な触媒を担持させる方法が
通常とられるが、あらかじめ粉末状の担体に触媒
を担持しておき、この触媒付き担体粉末を熱線条
に付着させるという方法がとられることもある。 This gas sensing element and temperature compensation element are usually
It is manufactured by a method in which a carrier is attached to a hot wire and then an appropriate heat treatment is performed to fix the carrier to the hot wire. Furthermore, for gas detection elements, a method is usually used in which a carrier is fixed and then an appropriate catalyst is supported on it. A method of attaching it to the strips may also be used.
熱線条を担体で被覆する方法の一つとして特開
昭48−83890号公報に記載のように電気泳動を利
用する方法がある。第5図はこの電気泳動法によ
り熱線条に被覆層を形成させる一般的な方法を実
施するための装置を示したもので、活性アルミナ
などの担体粉末が分散したスラリー7の中に、一
方に白金などの電極5を、他方に担体を付着させ
ようとする熱線条10を浸漬し、電極5と熱線条
10とを直流電源6の各極に接続し、分散媒中の
担体粉末の帯電電荷と逆符号の電位を熱線条に印
加することにより熱線条10の表面に担体を付着
させるものである。この方法は、担体の付着量を
電圧値および電圧の印加時間等により制御できる
ため、素子の大きさを揃えやすいことから、セン
サ性能のばらつきを小さくでき、しかも量産性に
も優れているという長所がある。しかしながらこ
の電気泳動により素子を形成する方法は、上記の
ような長所を持つ半面、以下に述べるような製造
技術上の問題がある。 One of the methods for coating hot filaments with a carrier is a method using electrophoresis, as described in Japanese Patent Application Laid-open No. 83890/1983. Figure 5 shows an apparatus for carrying out the general method of forming a coating layer on hot wires by this electrophoresis method. An electrode 5 made of platinum or the like is immersed in the hot filament 10 to which the carrier is to be attached, and the electrode 5 and the hot filament 10 are connected to each pole of a DC power source 6 to reduce the electrical charge of the carrier powder in the dispersion medium. The carrier is attached to the surface of the hot filament 10 by applying a potential of opposite sign to the hot filament 10. This method has the advantage of being able to control the amount of carrier attached by controlling the voltage value, voltage application time, etc., making it easy to align the size of the elements, reducing variations in sensor performance, and being excellent in mass production. There is. However, although this method of forming elements by electrophoresis has the above-mentioned advantages, it also has the following manufacturing technology problems.
すなわち、第5図に示す装置をそのまま用いた
場合、分散媒に浸漬されている熱線条の部分には
総て担体が付着することになる。しかしながら、
実際のセンサでは熱線条の両端は導電性の端子棒
と接合する必要があるため、この部分は電気絶縁
性の担体で被覆されてはならない。さらに、通常
用いられる熱線条は第3図に示すようにコイル状
の形状をしており、このコイル部分にのみ担体を
付着させることが望ましい。このような理由か
ら、第5図の装置を用いて熱線条に担体を付着さ
せる場合には、熱線条の不要な部分に付着した担
体をなんらかの方法で除去するか、あるいは熱線
条のうちで担体を付着させたくない部分をあらか
じめ電気絶縁性の樹脂膜で被覆した後電気泳動に
より担体を付着させ、次いで高温で加熱すること
により絶縁性皮膜を燃焼除去するなどの操作が必
要である。したがつてこれらの方法では、一度付
着した担体の除去操作、絶縁皮膜の塗布などの作
業工程が増大するため量産性の点で好ましくな
い。 That is, when the apparatus shown in FIG. 5 is used as it is, the carrier will adhere to all parts of the hot wire that are immersed in the dispersion medium. however,
In an actual sensor, both ends of the hot wire need to be connected to conductive terminal rods, so these parts must not be covered with an electrically insulating carrier. Furthermore, the commonly used hot wire has a coiled shape as shown in FIG. 3, and it is desirable to attach the carrier only to this coiled portion. For this reason, when attaching a carrier to the hot wire using the apparatus shown in FIG. It is necessary to perform operations such as coating the areas on which you do not want to adhere with an electrically insulating resin film in advance, attaching the carrier by electrophoresis, and then burning and removing the insulating film by heating at a high temperature. Therefore, these methods are unfavorable in terms of mass production because they increase the number of work steps such as removing the carrier once attached and coating the insulating film.
なお、前述の特開昭48−83890号公報では熱線
条の表面に電気泳動法によつて被覆層を形成する
ようになつているが、熱線条の必要な部分のみを
被覆する具体的な方法については記載されていな
い。 In addition, in the above-mentioned Japanese Patent Application Laid-open No. 48-83890, a coating layer is formed on the surface of the hot filament by electrophoresis, but there is no specific method for coating only the necessary parts of the hot filament. is not described.
本発明が解決しようとする問題点は、接触燃焼
式ガスセンサのガス検知素子および温度補償素子
を電気泳動法により製造する場合において、熱線
条の限定された部分にのみ担体または触媒付き担
体を付着させることができる装置を得ることにあ
る。
The problem to be solved by the present invention is that when manufacturing the gas detection element and temperature compensation element of a catalytic combustion gas sensor by electrophoresis, the carrier or the carrier with catalyst is attached only to a limited part of the hot wire. The goal is to obtain equipment that can.
上述の問題点は本発明によれば、熱線条の表面
を電気泳動法により担体または触媒付き担体で被
覆したガス検知素子および温度補償素子から成る
接触燃焼式ガスセンサの製造装置おいて、
(1) 被覆粒子が分散したスラリーを電気泳動槽に
設けたスポイト状の開口部より流出させる手段
(2) 流出スラリー中に熱線条の被覆すべき部分を
挿入する手段
(3) 熱線条と電気泳動槽中の電極との間に直流電
圧を印加する手段
を有することにより解決される。
According to the present invention, the above-mentioned problems are solved in an apparatus for manufacturing a catalytic combustion gas sensor comprising a gas sensing element and a temperature compensating element in which the surface of a hot wire is coated with a carrier or a carrier with a catalyst by electrophoresis. (1) Means for flowing slurry in which coated particles are dispersed through a dropper-shaped opening provided in the electrophoresis tank (2) Means for inserting the portion of the hot wire to be coated into the flowing slurry (3) Means for inserting the portion of the hot wire to be coated into the flowing slurry (3) The hot wire and the inside of the electrophoresis tank This problem is solved by having means for applying a DC voltage between the electrodes.
本発明装置におけるスラリーを流出させる手段
としては、スポイト状の開口部よりスラリーを自
然落下させる方式が好ましく、この場合は落下速
度は電気泳動槽の上部に設けた外気の導入量を調
整するニードルバルブの開度により制御すること
ができるが、この自然落下の方式以外にも例えば
ポンプなどにより強制的にスラリーを流出させる
方式を採用することもできる。 As a means for draining the slurry in the apparatus of the present invention, it is preferable to allow the slurry to fall naturally through a dropper-shaped opening.In this case, the falling speed is determined by a needle valve installed at the top of the electrophoresis tank that adjusts the amount of outside air introduced. The slurry can be controlled by the opening degree of the slurry, but in addition to this natural falling method, it is also possible to adopt a method in which the slurry is forced to flow out using a pump or the like.
また、流出スラリーの形状は流出速度、および
スポイト状開口部の断面形状などによるが、液滴
状、円柱状、帯状などの形状が使用できる。 Further, the shape of the slurry flowing out depends on the flow rate and the cross-sectional shape of the dropper-like opening, but shapes such as a droplet shape, a cylindrical shape, and a band shape can be used.
本発明においては、スラリーを装入した電気泳
動槽の一部にスポイト状の細い開口部を形成する
ことにより、開口部からのスラリーの流出量を制
限し、熱線条の限定した部分にのみスラリーを接
触させた状態で電圧を印加することにより、熱線
条の必要な部分にだけ担体または触媒付き担体を
付着させることができる。
In the present invention, by forming a dropper-like narrow opening in a part of the electrophoresis tank charged with slurry, the amount of slurry flowing out from the opening is restricted, and the slurry is applied only to a limited part of the hot wire. By applying a voltage while the two are in contact with each other, the carrier or the carrier with catalyst can be attached only to the necessary portions of the hot wire.
次に本発明の実施例を図面について説明する。 Next, embodiments of the present invention will be described with reference to the drawings.
第1図において、1は電気泳動槽で、下端には
スポイト状の細い開口部2、上部にはスラリー注
入口3とニードルバルブ4を備えている。電気泳
動槽1内には電極5が配置され、電極5は直流電
源6の一極に接続されている。 In FIG. 1, reference numeral 1 denotes an electrophoresis tank, which is equipped with a thin dropper-shaped opening 2 at the lower end, and a slurry inlet 3 and a needle valve 4 at the upper end. An electrode 5 is disposed within the electrophoresis tank 1, and the electrode 5 is connected to one pole of a DC power source 6.
製造に当つてはまず電気泳動槽1内に、担体ま
たは触媒付き担体粉末を分散させたスラリー7を
電極5がスラリー中にひたるまでスラリー注入口
3より注入する。次いで電気泳動槽1の下端の開
口部2にスラリーの液滴8を形成させるか、また
は開口部2よりスラリーを連続的に流下させる。
この場合開口部2からのスラリーの流出速度はニ
ードルバルブ4の開度により調整することができ
る。 In manufacturing, first, a slurry 7 in which a carrier or a carrier powder with a catalyst is dispersed is injected into the electrophoresis tank 1 through the slurry inlet 3 until the electrode 5 is submerged in the slurry. Next, droplets 8 of the slurry are formed in the opening 2 at the lower end of the electrophoresis tank 1, or the slurry is allowed to flow down continuously from the opening 2.
In this case, the flow rate of the slurry from the opening 2 can be adjusted by the opening degree of the needle valve 4.
次にこの形成された液滴8または連続的に流出
するスラリーの流体中に、金属製のU字型治具9
上に固定したコイル状の熱線条10の被覆すべき
部分を挿入し、治具9を直流電源6に接続するこ
とにより、スラリー7中の分散粒子を熱線条10
の方へ移動せしめ、熱線条の所要個所に担体また
は触媒付き担体を付着させる。 Next, a metal U-shaped jig 9 is inserted into the formed droplets 8 or into the continuously flowing slurry fluid.
By inserting the part to be covered of the coiled hot wire 10 fixed above and connecting the jig 9 to the DC power source 6, the dispersed particles in the slurry 7 are transferred to the hot wire 10.
The carrier or the carrier with catalyst is attached to the desired location of the hot wire.
なお、電気泳動による付着操作の間、液滴の流
出を止め、静止した状態で行うことができるが、
開口部からまだ分離していない状態の液滴の内部
に熱線条を設置することにより、液滴を間欠的に
落下させた状態で行うことも可能である。 Note that during the electrophoretic adhesion operation, it is possible to stop the outflow of the droplets and keep the droplets stationary.
It is also possible to make the droplet fall intermittently by placing a hot wire inside the droplet that has not yet separated from the opening.
実施例 1
第1図の装置を使用し、スラリー注入口3より
活性アルミナ微粉末、アルミナゾルおよび水から
成るスラリーを注入し、注入口3を閉じ、ニード
ルバルブ4を操作して開口部2の下端に液滴を形
成させた。一方、線径30μの白金線から成りコイ
ル外径0.8mm、巻き数10ターンの熱線条の両端を
ニツケル製U字型治具上に溶接し、熱線条のコイ
ル部分が液滴の内部に入る位置にセツトした。こ
の状態で熱線条を陰極に、電極を陽極にして直流
電圧を印加し、熱線条のコイル部分に担体粒子を
付着させた。次いでこの熱線条を治具から外し、
電気炉で800℃に加熱し、付着した担体粒子を熱
線条に固着させた。こうして得られた素子は、第
2図に示すように熱線条のコイル部分11の所定
位置のまわりにのみ担体12で円柱状に被覆され
た形状を有していた。Example 1 Using the apparatus shown in FIG. 1, a slurry consisting of activated alumina fine powder, alumina sol, and water is injected from the slurry inlet 3, the inlet 3 is closed, and the needle valve 4 is operated to fill the lower end of the opening 2. formed droplets. On the other hand, both ends of a hot wire made of platinum wire with a wire diameter of 30μ, a coil outer diameter of 0.8 mm, and a number of turns of 10 are welded onto a U-shaped nickel jig, so that the coil part of the hot wire enters the inside of the droplet. set in position. In this state, a direct current voltage was applied using the hot wire as a cathode and the electrode as an anode, thereby causing carrier particles to adhere to the coil portion of the hot wire. Next, remove this hot filament from the jig,
It was heated to 800°C in an electric furnace to fix the adhered carrier particles to the hot wire. The thus obtained element had a cylindrical shape in which only a predetermined position of the coil portion 11 of the hot wire was covered with a carrier 12, as shown in FIG.
実施例 2
第1図の装置を使用し、かつ実施例1の同様の
スラリーを使用し、ニードルバルブ4の開度を調
整して開口部2からの液滴の落下速度を5秒に1
滴程度となるようにした。次いで実施例1と同様
の治具と熱線条を用意し、開口部からまだ分離し
ない位置にある液滴の内部に熱線条のコイル部分
があるように設置し、実施例1と同様にしてコイ
ル部分に担体を付着させ、実施例1と同様の熱処
理を行つた結果、第2図と同じような形状の素子
が得られた。Example 2 Using the apparatus shown in FIG. 1 and using the same slurry as in Example 1, the opening degree of the needle valve 4 was adjusted so that the falling rate of droplets from the opening 2 was set to 1 per 5 seconds.
It was made to be about the size of a drop. Next, prepare the same jig and hot wire as in Example 1, install the coil part of the hot wire inside the droplet at a position that has not yet separated from the opening, and attach the coil in the same manner as in Example 1. A carrier was attached to the portion and heat treatment was performed in the same manner as in Example 1. As a result, an element having a shape similar to that shown in FIG. 2 was obtained.
実施例 3
第1図の装置を使用し、かつ実施例1と同様の
スラリーを使用し、開口部2からスラリーが連続
的に流下するようにニードルバルブ4の開度を調
整した。次いで実施例1と同様の治具と熱線条を
用意し、開口部近傍に形成された円柱状スラリー
の内部に熱線条のコイル部分が位置するようにセ
ツトし、実施例1と同様にしてコイル部分に担体
を付着させた。なおこの操作の際、電気泳動槽1
中の電極5が1回の付着操作の間スラリーの内部
に位置しているようにスラリー仕込量およびスラ
リーの流下速度を調整した。このようにスラリー
を連続的に流下して担体を付着させた素子の形状
も第2図と同様であつた。Example 3 Using the apparatus shown in FIG. 1 and using the same slurry as in Example 1, the opening degree of the needle valve 4 was adjusted so that the slurry continuously flowed down from the opening 2. Next, the same jig and hot wire as in Example 1 were prepared, and they were set so that the coil portion of the hot wire was located inside the cylindrical slurry formed near the opening. A carrier was attached to the part. Note that during this operation, electrophoresis tank 1
The slurry charge and slurry flow rate were adjusted so that the electrode 5 inside was located inside the slurry during one deposition operation. The shape of the element in which the carrier was attached by continuously flowing the slurry in this manner was also the same as that shown in FIG. 2.
熱線条の被覆される部分の領域は、液滴または
連続的に流下する流体の大きさによつて決まる
が、例えば開口部の内径が0.5mmφのときは液滴
の内部にある熱線条の部分の長さは約1.5mmであ
る。 The area covered by the hot filament is determined by the size of the droplet or the continuously flowing fluid; for example, if the inner diameter of the opening is 0.5 mmφ, the area covered by the hot filament is determined by the size of the droplet or the continuously flowing fluid. The length is approximately 1.5mm.
本発明の装置は、接触燃焼式ガスセンサに用い
られるガス検知素子、温度補償素子を製造する場
合に、電気泳動槽に設けたスポイト状の開口部よ
りスラリーを液滴状、円柱状または帯状に流出さ
せる手段を有し、かつこの流出スラリーの内部に
熱線条を挿入して電気泳動を行なわせるようにし
た装置であるため、開口部に形成させる液滴状、
円柱状、または帯状スラリーのサイズを調整する
ことにより担体で被覆される熱線条の領域を所定
の位置に限定することができる。
The apparatus of the present invention allows slurry to flow out in the form of droplets, cylinders, or strips from a dropper-shaped opening provided in an electrophoresis tank when manufacturing gas detection elements and temperature compensation elements used in catalytic combustion gas sensors. Since this device has a means for electrophoresis and a hot wire is inserted into the inside of the flowing slurry to perform electrophoresis, droplet-like particles formed at the openings,
By adjusting the size of the cylindrical or band-shaped slurry, the area of the hot filaments covered with the carrier can be limited to a predetermined position.
さらに本発明の装置によれば、素子形状のばら
つきが少なく、かつ量産性に優れるという電気泳
動法が本来持つている特長を有効に生かすことが
でき、接触燃焼式ガスセンサの性能および量産性
の向上に大きく貢献することができるものであ
る。 Furthermore, according to the device of the present invention, it is possible to effectively utilize the inherent features of the electrophoresis method, such as less variation in element shape and excellent mass productivity, thereby improving the performance and mass productivity of catalytic combustion gas sensors. It can make a significant contribution to the
第1図は本発明の装置の構成図、第2図は本発
明の装置により製造された素子の一部切欠斜視
図、第3図は接触燃焼式ガスセンサに一般に用い
られるガス検知素子の一部切欠斜視図、第4図は
接触燃焼式ガスセンサに用いられる回路接続図、
第5図は従来装置の構成図である。
……電気泳動槽、2……開口部、3……スラリ
ー注入口、4……ニードルバルブ、5……電極、
6……直流電源、7……スラリー、8……スラリ
ーの液滴、9……U字型治具、10……熱線条、
11……熱線条のコイル部分、12……担体。
Fig. 1 is a configuration diagram of the device of the present invention, Fig. 2 is a partially cutaway perspective view of an element manufactured by the device of the present invention, and Fig. 3 is a part of a gas detection element generally used in a catalytic combustion type gas sensor. A cutaway perspective view, Figure 4 is a circuit connection diagram used in a catalytic combustion gas sensor,
FIG. 5 is a block diagram of a conventional device. ... Electrophoresis tank, 2 ... Opening, 3 ... Slurry inlet, 4 ... Needle valve, 5 ... Electrode,
6... DC power supply, 7... Slurry, 8... Slurry droplets, 9... U-shaped jig, 10... Hot wire,
11... Coil portion of hot wire, 12... Carrier.
Claims (1)
成した素子から成る接触燃焼式ガスセンサの製造
装置において、被覆すべき粒子が分散したスラリ
ーを電気泳動槽に設けたスポイト状の開口部より
流出させる手段と、流出スラリー中に熱線条の被
覆すべき部分を挿入する手段と、電気泳動槽中の
電極と前記熱線条との間に直流電圧を印加する手
段とを有することを特徴とするガスセンサの製造
装置。1. In a manufacturing device for a catalytic combustion gas sensor consisting of an element in which a coating layer is formed on the surface of a hot wire by electrophoresis, a slurry in which particles to be coated are dispersed is flowed out from a dropper-shaped opening provided in an electrophoresis tank. a means for inserting a portion of the hot filament to be coated into the flowing slurry; and a means for applying a DC voltage between an electrode in an electrophoresis tank and the hot filament. Manufacturing equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP878885A JPS61167850A (en) | 1985-01-21 | 1985-01-21 | Apparatus for producing gas sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP878885A JPS61167850A (en) | 1985-01-21 | 1985-01-21 | Apparatus for producing gas sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61167850A JPS61167850A (en) | 1986-07-29 |
| JPH0426700B2 true JPH0426700B2 (en) | 1992-05-08 |
Family
ID=11702602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP878885A Granted JPS61167850A (en) | 1985-01-21 | 1985-01-21 | Apparatus for producing gas sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61167850A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5268753B2 (en) * | 2009-04-02 | 2013-08-21 | 理研計器株式会社 | Method for manufacturing element constituting gas detection device |
-
1985
- 1985-01-21 JP JP878885A patent/JPS61167850A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61167850A (en) | 1986-07-29 |
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