JPH0427945B2 - - Google Patents

Info

Publication number
JPH0427945B2
JPH0427945B2 JP58226165A JP22616583A JPH0427945B2 JP H0427945 B2 JPH0427945 B2 JP H0427945B2 JP 58226165 A JP58226165 A JP 58226165A JP 22616583 A JP22616583 A JP 22616583A JP H0427945 B2 JPH0427945 B2 JP H0427945B2
Authority
JP
Japan
Prior art keywords
heating
thermal
wire
thermal head
resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58226165A
Other languages
Japanese (ja)
Other versions
JPS60116472A (en
Inventor
Nobuo Yasujima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TAISEI KOKI KK
Original Assignee
TAISEI KOKI KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TAISEI KOKI KK filed Critical TAISEI KOKI KK
Priority to JP58226165A priority Critical patent/JPS60116472A/en
Publication of JPS60116472A publication Critical patent/JPS60116472A/en
Publication of JPH0427945B2 publication Critical patent/JPH0427945B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N97/00Electric solid-state thin-film or thick-film devices, not otherwise provided for

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electronic Switches (AREA)
  • Non-Adjustable Resistors (AREA)

Description

【発明の詳細な説明】 本発明は感熱紙の印字するためのサーマルヘツ
ドに関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a thermal head for printing on thermal paper.

感熱紙への記録には感熱式プリンタが用いら
れ、感熱式プリンタは感熱紙にドツト状の発熱抵
抗体を配列した熱印字ヘツド、即ちサーマルヘツ
ドを当て、任意の発熱抵抗体を瞬間的に発熱させ
て希望の数字や文字、図形を記録させるものであ
る。この感熱式プリンタの印字速度や印字寿命な
どの性能は、ほとんどサーマルヘツドの特性によ
つて決まる。
A thermal printer is used to record on thermal paper.A thermal printer applies a thermal printing head, in other words a thermal head, which has dot-shaped heating resistors arranged on the thermal paper, and instantly heats any heating resistor. This allows you to record desired numbers, letters, and shapes. The performance of this thermal printer, such as printing speed and printing life, is determined mostly by the characteristics of the thermal head.

サーマルヘツドは発熱抵抗体の作り方の違いで
薄膜型、厚膜型、半導体型の方式があり、それぞ
れに一長一短がある。即ち、薄膜型は、高解像
度、高速性に向き、画質が良い等の点があげられ
るが、大きなヘツドが作りにくく、製造技術も容
易ではない。厚膜型は、製造工程が簡単で量産性
に向き、低コスト化できるが、熱レスポンスが悪
く微細パターンが作りにくいため画質も良くはな
い。また半導体型は熱レスポンスが速いが、長い
ヘツドが作りにくく高コスト化になる。現在で
は、高密度化と低電力の性能面の向上が要求され
ていることから、薄膜型のサーマルヘツドが多く
用いられているが、サーマルヘツドの動作性能、
即ち低電力発色と高速熱応答性はサーマルヘツド
を構成する材料の熱的性質と形状寸法を含めた構
造に依存される。
Thermal heads come in thin-film, thick-film, and semiconductor types, depending on how the heating resistor is made, and each has its advantages and disadvantages. That is, the thin film type is suitable for high resolution, high speed, and has good image quality, but it is difficult to make a large head and the manufacturing technology is not easy. The thick film type has a simple manufacturing process, is suitable for mass production, and can reduce costs, but its image quality is not good because it has poor thermal response and is difficult to create fine patterns. In addition, the semiconductor type has a fast thermal response, but it is difficult to make a long head and increases the cost. Currently, thin-film thermal heads are often used due to the demand for higher density and lower power performance.
That is, low-power color development and high-speed thermal response depend on the thermal properties of the material constituting the thermal head and its structure, including its geometry.

薄膜型のサーマルヘツドは、その発熱抵抗体を
TaN、NiCr等とするのが一般的であり、これは
耐熱性、温度係数に優れ、下地となるガラス層と
の密着性が良い等の利点がある。また、ヘツドの
構成としては、第1図に示すように、セラミツク
基板1およびガラス基板2上に発熱抵抗体層3を
設けて抵抗体3の両端からリード取出しの電極金
属4を設け、その上に抵抗体保護層(例えば
SiO2)5と耐摩耗層(Ta2O5、SiC等)6が層状
に設けられたものである。
Thin-film thermal heads use their heating resistor.
TaN, NiCr, etc. are generally used, and these have advantages such as excellent heat resistance and temperature coefficient, and good adhesion to the underlying glass layer. As shown in FIG. 1, the structure of the head is such that a heating resistor layer 3 is provided on a ceramic substrate 1 and a glass substrate 2, and electrode metals 4 are provided with leads extending from both ends of the resistor 3. resistor protective layer (e.g.
SiO 2 ) 5 and a wear-resistant layer (Ta 2 O 5 , SiC, etc.) 6 are provided in a layered manner.

これらの薄膜形成には一般にスパツタリング技
術が用いられる。例えば、発熱抵抗体材料として
TaNを選んだ場合、タンタル(Ta)と窒素ガス
(N2)を別々に送り込んで、いわゆる反応スパツ
クリングで窒化タンタルの薄膜抵抗(第1図3)
を形成する。Ta2N抵抗体は、一般の抵抗体とし
て使う場合、酸化による抵抗体の劣化を防ぐため
に表面にTa2O5膜を形成させるが、熱ヘツドとし
て使う場合には300〜400℃という高温の熱パルス
を受けるため保護膜(第1図5)としてSiO2
RF(高周波)スパツクリングで約2μm付着させ、
外部からの酸素を遮断している。しかし、SiO2
は硬さは十分でなく、このまま感熱紙に当てて
(感熱紙への圧力は200g/cm2)走査すると摩耗量
は5μm/Kmにもなる。そこで、SiO2の上に、ピ
ツカース硬さが800〜950のTa2O(第1図6)を
10μm程度反応スパツクリングにより形成される。
また、サーマルヘツドにおける解像度は感熱抵抗
体の密度に関係し、発熱抵抗体の密度はリード線
(電気導線)の密度で決まり、リード線の密度は
リード線の厚さでほぼ決まる。即ち、リード線の
厚さが2μmという薄膜型が解像度に関しては厚膜
型よりも有利になる。このリード線は感熱抵抗体
上に蒸着で形成される(第1図4)。
Sputtering technology is generally used to form these thin films. For example, as a heating resistor material
If TaN is selected, tantalum (Ta) and nitrogen gas (N 2 ) are fed separately to create a tantalum nitride thin film resistor (Fig. 1, 3) using so-called reactive spackling.
form. When a Ta 2 N resistor is used as a general resistor, a Ta 2 O 5 film is formed on the surface to prevent deterioration of the resistor due to oxidation, but when used as a thermal head, it is exposed to high temperatures of 300 to 400°C. SiO 2 is used as a protective film (Fig. 1, 5) to receive heat pulses.
Approximately 2 μm is deposited using RF (high frequency) spackle ring.
It blocks oxygen from outside. However, SiO2
is not sufficiently hard, and if it is scanned by applying it to thermal paper (the pressure on the thermal paper is 200 g/cm 2 ), the amount of wear will be as much as 5 μm/Km. Therefore, Ta 2 O (Fig. 1 6) with a Pickkas hardness of 800 to 950 was placed on top of SiO 2 .
Approximately 10 μm is formed by reaction spackle.
Further, the resolution in the thermal head is related to the density of the heat-sensitive resistor, the density of the heating resistor is determined by the density of the lead wire (electrical conductor wire), and the density of the lead wire is approximately determined by the thickness of the lead wire. In other words, a thin film type with a lead wire thickness of 2 μm is more advantageous than a thick film type in terms of resolution. This lead wire is formed on the heat-sensitive resistor by vapor deposition (FIG. 14).

このように、特に薄膜型のサーマルヘツドは上
記スパツタリング、蒸着等の工程を経て構成され
ており、製造における複雑さ、長時間を必要とさ
れ、サーマルヘツドのコスト高は免れない。
In this way, especially thin film type thermal heads are constructed through the above-mentioned processes such as sputtering and vapor deposition, which makes the manufacturing process complicated and time-consuming, and the cost of the thermal head is inevitably high.

そこで、本発明は従来のサーマルヘツドを改良
したもので、エツチング等の簡易工程により金属
導電体を発熱抵抗線にその一部を露出させて被覆
した発熱線を構成することにより、製造工程、時
間を短縮させて、コストの低減を図つたサーマル
ヘツドを提供することを目的とする。
Therefore, the present invention is an improvement on the conventional thermal head. By constructing a heating wire in which a metal conductor is partially exposed and covered with a heating resistor wire through a simple process such as etching, the manufacturing process can be reduced and An object of the present invention is to provide a thermal head that can shorten the time and reduce costs.

このような目的を達成するために本発明のサー
マルヘツドは、基板上に、感熱紙に印字するため
の発熱体が複数個並設され、該発熱体を絶縁体固
定層により固定したサーマルヘツドであつて、前
記発熱体は発熱抵抗体から成る線材と該線材を被
覆する金属導体とから成り、前記線材は所定箇所
がエツチングにより露出し発熱部を構成するもの
である。
In order to achieve such an object, the thermal head of the present invention is a thermal head in which a plurality of heating elements for printing on thermal paper are arranged in parallel on a substrate, and the heating elements are fixed by an insulating fixing layer. The heating element is composed of a wire made of a heating resistor and a metal conductor covering the wire, and a predetermined portion of the wire is exposed by etching to form a heating portion.

以下、本発明の好ましい実施例を図面により説
明する。
Preferred embodiments of the present invention will be described below with reference to the drawings.

本発明のサーマルヘツドは、第2図に示すよう
に基板10上に発熱体11をその保護を兼ねて絶
縁体固定層12によつて固定されている。発熱体
11は、第3図に示すように、線材から成る発熱
抵抗線13と、これを被覆する金属導電体14と
から成り、発熱抵抗線13の所定箇所、即ち発熱
部15を金属導電体14をエツチングにより除去
して露出させたものである。
In the thermal head of the present invention, as shown in FIG. 2, a heating element 11 is fixed on a substrate 10 by an insulating fixing layer 12 which also serves as protection. As shown in FIG. 3, the heating element 11 is made up of a heating resistance wire 13 made of a wire and a metal conductor 14 covering the wire, and a predetermined portion of the heating resistance wire 13, that is, a heating portion 15 is covered with the metal conductor. 14 is removed and exposed by etching.

発熱体11は、例えば径40〜100μmのNi―Cr
の発熱抵抗線13上にCu(銅)の金属導電体14
をメツキする場合は、直接連続的に電気メツキが
なされる。このときのメツキ厚は20〜50μm程度
である。また、解像度を上げるためには更に細い
感熱抵抗線13を必要とし、且つメツキ厚も薄く
しなければならない。
The heating element 11 is made of Ni-Cr with a diameter of 40 to 100 μm, for example.
A Cu (copper) metal conductor 14 is placed on the heating resistance wire 13 of
When plating, electroplating is performed directly and continuously. The plating thickness at this time is about 20 to 50 μm. Furthermore, in order to increase the resolution, a thinner heat-sensitive resistance wire 13 is required, and the plating thickness must also be made thinner.

Cuのメツキ仕上げをした発熱抵抗線13は、
その発熱部15をエツチングにより露出される。
エツチングは、発熱抵抗線13を基板上に発熱部
15以外の箇所で絶縁体固定層(無機質の接着
剤)12により固定し並設した後に(例えば第4
図)、発熱部15以外の部分にレジストが塗布さ
れてエツチングが行われる。エツチング後は、発
熱部15と基板10間に熱の発散を防止するた
め、更に無機質の接着剤が充填され、感熱紙が当
る部分が平滑されるものである。
The heating resistance wire 13 is plated with Cu.
The heat generating portion 15 is exposed by etching.
Etching is performed after the heat generating resistance wires 13 are fixed and arranged in parallel on the substrate at locations other than the heat generating portion 15 using the insulator fixing layer (inorganic adhesive) 12 (for example, the fourth
(Fig.), a resist is applied to the parts other than the heat generating part 15, and etching is performed. After etching, in order to prevent heat dissipation between the heat generating part 15 and the substrate 10, an inorganic adhesive is further filled, and the area that is touched by the thermal paper is smoothed.

このような発熱体11を、例えば7ドツトのシ
リアルプリンタを用いた場合を第4図に示す。第
4図において、発熱体11はその一端を共通端子
16に接続され基板10上に7個並設される。そ
して、絶縁体固定層(第2図12)により固定さ
れる。固定されたそれぞれの発熱体11の他端は
リード線17(例えばフラツトケーブルの信号
線)を介して本体の駆動回路(図示せず)により
制御される。即ち、各々の信号によつてそれぞれ
の発熱部15が発熱するわけであるが、この場合
電流は、発熱体11の表面の金属導電体14(第
3図)を流れる特性をもち、発熱部15の発熱抵
抗線14以外は金属導電体14を介して共通端子
16(第4図)に流れる。
FIG. 4 shows a case where such a heating element 11 is used in, for example, a 7-dot serial printer. In FIG. 4, seven heating elements 11 are arranged in parallel on a substrate 10 with one end connected to a common terminal 16. Then, it is fixed by an insulator fixing layer (FIG. 2, 12). The other end of each fixed heating element 11 is controlled by a drive circuit (not shown) of the main body via a lead wire 17 (for example, a signal line of a flat cable). That is, each heat generating part 15 generates heat depending on each signal, but in this case, the current has a characteristic of flowing through the metal conductor 14 (FIG. 3) on the surface of the heat generating element 11, and the current flows through the heat generating part 15. Other than the heating resistance wire 14, the current flows through the metal conductor 14 to the common terminal 16 (FIG. 4).

発熱体11が固定された基板10は、第5図に
示すようなサーマルプリンタのヘツドにおけるキ
ツリツジ20の印字面(図の裏側)にセツトされ
る。キヤリツジ20はレール21,22上を移動
するが、これはサーボモータ23により駆動され
るローラ24,25を介してタイミングベルト2
6によつて高精度に移動される。感熱紙は印字ロ
ーラ27により供給され、ステツピングモータ2
8によつてパルス毎に所定量送られる。即ち、供
給された感熱紙の横一列づつ印字し、一文字は発
熱体の数7ドツトの縦列を横へ5ピツチの合計35
ドツトで印字される。一文字をより美しく印字し
ようと思えば発熱体の数を増し、横移動ピツチを
細かくすればよいが、実際には24×24ドツトもあ
れば十分美しく、最少の場合でも7×5ドツトで
あれば実用的に差仕えはない。
The substrate 10 to which the heating element 11 is fixed is set on the printing surface (back side in the figure) of the wood 20 in the head of a thermal printer as shown in FIG. The carriage 20 moves on rails 21 and 22, which are driven by a timing belt 2 via rollers 24 and 25 driven by a servo motor 23.
6 with high precision. Thermal paper is fed by the printing roller 27 and the stepping motor 2
8, a predetermined amount is sent for each pulse. In other words, each horizontal row of supplied thermal paper is printed, and one character is printed by 5 horizontal rows of 7 dots, which is the number of heating elements, totaling 35.
Printed with dots. If you want to print one character more beautifully, you can increase the number of heating elements and make the horizontal movement pitch finer, but in reality, 24 x 24 dots is enough to print beautifully, and even in the minimum case, 7 x 5 dots is sufficient. There is no practical difference.

また、上記発熱体11をラインプリンタに用い
た場合は、第6図に示すような回路構成となり、
このときダイオードアレイ29は分離形が用いら
れる。第6図において、7個の発熱体11の一方
はダイオードアレイ29の夫々のダイオードを逆
方向に介して信号ラインl1〜l7にそれぞれ接続さ
れ、他方は共通にされて制御端子T1(T2,T3…)
に接続されて1ブロツクを構成する。このブロツ
クが感熱紙の紙幅に応じて複数個並設されて、1
ブロツク毎に制御される。例えば、T1ブロツク
とT3ブロツクの1番目の発熱体を発熱させる場
合は、端子T1とT3をグランドにおとし、信号ラ
インl1に電圧を加えることにより行われる。そし
て、供給された感熱紙の横一列を1度に熱し、感
熱紙の送り毎に繰返され給紙送り5ピツチ分で一
文字分の横一行が印字される。そして、この場合
も一ブロツク発熱体11の数を8,12,16個と増
し、給紙速度を遅くすることによつて、より精密
な字体が印字できる。
Furthermore, when the heating element 11 is used in a line printer, the circuit configuration is as shown in FIG.
At this time, a separate diode array 29 is used. In FIG. 6, one of the seven heating elements 11 is connected to the signal lines l 1 to l 7 through the respective diodes of the diode array 29 in opposite directions, and the other is connected to the control terminal T 1 ( T2 , T3 ...)
are connected to constitute one block. A plurality of these blocks are arranged in parallel according to the paper width of the thermal paper, and one
Controlled on a block-by-block basis. For example, to make the first heating element of the T1 block and T3 block generate heat, it is done by grounding the terminals T1 and T3 and applying a voltage to the signal line l1 . Then, one horizontal line of the supplied thermal paper is heated at one time, and this is repeated every time the thermal paper is fed, so that one character's worth of one horizontal line is printed every five pitches of paper feeding. In this case as well, more precise fonts can be printed by increasing the number of heating elements 11 in one block to 8, 12, or 16 and slowing down the paper feeding speed.

次に、上記発熱体は、当初から細線の発熱抵抗
線上に金属導電体をメツキして構成したものであ
るが、第7図に示すように、通常の太さの発熱抵
抗線(Ni―Cr線)に銅パイプをかぶせて数回圧
延し伸線機で線引きして直径数mm、長さ1mの単
心導線とすることによつても製造することができ
る。このようにして製造された発熱抵抗線と金属
導電体は第2,3図と同様に、その所定箇所の発
熱抵抗線をエツチングにより露出させて発熱部を
設けた発熱体が構成される。そして、同様にシリ
アルプリンタ或はラインプリンタに使用される。
Next, although the above-mentioned heating element was originally constructed by plating a metal conductor on a thin heating resistance wire, as shown in Fig. It can also be manufactured by covering a copper pipe over a copper pipe, rolling it several times, and drawing it with a wire drawing machine to make a single-core conductor wire with a diameter of several mm and a length of 1 m. The heating resistance wire and metal conductor manufactured in this manner constitute a heating element in which a heating portion is provided by exposing the heating resistance wire at a predetermined location by etching, as shown in FIGS. 2 and 3. It is also used in serial printers or line printers.

以上の実施例からも明らかなように本発明によ
れば、サーマルヘツドにおいて金属導電体を発熱
抵抗線に被覆し、その所定箇所の発熱抵抗線をエ
ツチングにより露出させた発熱体を構成すること
により、製造における時間、工程を短縮させるこ
とができ、ひいてはサーマルヘツドのコストの低
減を図ることができる。
As is clear from the above embodiments, according to the present invention, a heating element is constructed by coating a heating resistance wire with a metal conductor in a thermal head and exposing the heating resistance wire at a predetermined location by etching. The manufacturing time and steps can be shortened, and the cost of the thermal head can be reduced.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来のサーマルヘツドの構造を示した
断面図、第2図は本発明のサーマルヘツドの構造
を示した断面図、第3図はサーマルヘツドにおけ
る発熱体の構造を示した断面図、第4図は本発明
のサーマルヘツドをシリアルプリンタ用に構成し
た場合の説明図、第5図は第4図のサーマルヘツ
ドを組込んだ場合の印字機構を示した概念図、第
6図は本発明のサーマルヘツドをラインプリンタ
に用いた場合の回路図、第7図は他の方法により
サーマルヘツドの発熱体を構成する場合の流れ図
である。 11…発熱体、12…絶縁体固定層、13…発
熱抵抗線、14…金属導電体、15…発熱部。
FIG. 1 is a sectional view showing the structure of a conventional thermal head, FIG. 2 is a sectional view showing the structure of the thermal head of the present invention, and FIG. 3 is a sectional view showing the structure of the heating element in the thermal head. Fig. 4 is an explanatory diagram of the thermal head of the present invention configured for a serial printer, Fig. 5 is a conceptual diagram showing the printing mechanism when the thermal head of Fig. 4 is incorporated, and Fig. 6 is an explanatory diagram of the case where the thermal head of the present invention is configured for a serial printer. FIG. 7 is a circuit diagram when the thermal head of the invention is used in a line printer, and FIG. 7 is a flowchart when the heating element of the thermal head is constructed by another method. DESCRIPTION OF SYMBOLS 11... Heating element, 12... Insulator fixed layer, 13... Heat generating resistance wire, 14... Metal conductor, 15... Heat generating part.

Claims (1)

【特許請求の範囲】[Claims] 1 基板状に、感熱紙に印字するための発熱体が
複数個並設され、該発熱体を絶縁体固定層により
固定したサーマルヘツドであつて、前記発熱体は
発熱抵抗体から成る線材と該線材を被覆する金属
導電体とから成り、前記線材は所定箇所がエツチ
ングにより露出し発熱部を構成することを特徴と
するサーマルヘツド。
1 A thermal head in which a plurality of heating elements for printing on thermal paper are arranged in parallel on a substrate, and the heating elements are fixed by an insulating fixing layer, and the heating elements are composed of a wire made of a heating resistor and a wire rod made of a heating resistor. 1. A thermal head comprising a metal conductor covering a wire, wherein a predetermined portion of the wire is exposed by etching to form a heat generating portion.
JP58226165A 1983-11-29 1983-11-29 Thermal head Granted JPS60116472A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58226165A JPS60116472A (en) 1983-11-29 1983-11-29 Thermal head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58226165A JPS60116472A (en) 1983-11-29 1983-11-29 Thermal head

Publications (2)

Publication Number Publication Date
JPS60116472A JPS60116472A (en) 1985-06-22
JPH0427945B2 true JPH0427945B2 (en) 1992-05-13

Family

ID=16840882

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58226165A Granted JPS60116472A (en) 1983-11-29 1983-11-29 Thermal head

Country Status (1)

Country Link
JP (1) JPS60116472A (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5492265A (en) * 1977-12-29 1979-07-21 Matsushita Electric Ind Co Ltd Production of thermal head
JPS5784876A (en) * 1980-11-18 1982-05-27 Ricoh Co Ltd Manufacture of thermal head

Also Published As

Publication number Publication date
JPS60116472A (en) 1985-06-22

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