JPH04292328A - Ac magnetic levitating conveying device - Google Patents

Abstract

PURPOSE:To decrease a given space through reduction of the height of each electromagnet in a position where electromagnet trains cross each other and to save a power consumption through the decrease of the number of windings of a coil. CONSTITUTION:A demagnetizing coil 3 of a common electromagnet positioned in the intersection between one and an other electromagnet train is switcheable and connectable to a magnetic pole coil 3a or 3b in the one or the other electromagnet train by means of a switching means 4. In this way, conveyance of a levitating body passing through a position above the one electromagnet train from a position above the other electromagnet train is practicable and the height of a common electromagnet can be reduced compared with that of a conventional device. Thereby, adaptation to a manufacturing device for a semiconductor the space of which is often limited becomes advantageous. Further, since magnetic resistance of a coil is low, the number of windings of a coil is decreased and saving of a consumption power can take place.

Description

[Detailed description of the invention]

0001

[Industrial Application Field] The present invention relates to a transfer device suitable for use in, for example, wafer transfer equipment in semiconductor manufacturing equipment where dust generation is averse, and other fields where it is required to transfer objects without contact. The present invention relates to an AC magnetic levitation transport device in which an object to be transported is placed on a floating body and the floating body is levitated and travels on a magnet array.

0002

2. Description of the Related Art FIG. 5 shows the configuration of a typical conventional AC magnetic levitation conveyance device. In FIG. 5, the electromagnet array 1 is supplied with a single-phase current and a three-phase AC summed current from a power source 5. This single-phase component generates an eddy current in the floating body 2, and the eddy current generates a magnetic field, which is formed in a direction repelling the magnetic field of the electromagnet array 1, so that the floating body 2 levitates. On the other hand, a moving magnetic field is formed in the electromagnet array 1 by the three-phase components. This moving magnetic field generates an eddy current in the floating body 2, and this eddy current interacts with the moving magnetic field, so that the floating body 2 is conveyed over the electromagnet array 1.

Another conventional device will be explained with reference to FIG. This device shown in FIG. 6 is provided with electromagnet rows 1a and 1b having mutually different directions, arranged so that they intersect, and the electromagnet 01c at the point of intersection is shared.
The conveyance direction of the floating body 2 is changed on the floating body 1c.

[0004] In the above, the floating body 2 is transported on the X-direction electromagnetic row 1a, and has been transported to the intersection with the Y-direction electromagnetic row 1b, and thereafter is transported on the Y-direction electromagnetic row 1b. The coil 03 of the shared electromagnet 01c located at the intersection of the different electromagnet rows 1a and 1b has the structure shown in FIG. 4, and normally two to three coils 03 are formed on a common iron core. Here it is formed by three pieces,
The X-direction electromagnet row 1a and the Y-direction electromagnet are connected to the coil 3 of row 1b.
It has a structure in which layers a and 3b are stacked in two layers. The electromagnet wiring method in this case is as shown in FIG. 3, and the wiring of the coil 3a of the X-direction electromagnet row 1a and the wiring of the coil 3b of the Y-direction electromagnet row 1b are independent.

[0005]

[Problems to be Solved by the Invention] In the conventional device, as shown in FIG. 4, the coil height H becomes large, which is disadvantageous for manufacturing devices such as semiconductors where there are many space constraints, and the magnetic resistance is large. There were issues such as the need to increase the number of turns in the coil and the need to provide a high-power power source.

[0006] The present invention aims to solve the above problems.

[0007]

[Means for Solving the Problems] The AC magnetic levitation conveyance device of the present invention is an AC magnetic levitation conveyance device that levitates and conveys a floating body made of a conductive non-magnetic metal material on an array of electromagnets. The present invention is characterized in that means is provided for switching the magnetic pole coil of the shared electromagnet located at the intersection of the other electromagnet row as the magnetic pole coil of one of the electromagnet rows.

[0008]

[Operation] In the above, when a floating object is transferred from one electromagnet row to the other, the magnetic pole coil of the shared electromagnet is first connected to the magnetic pole coil of the electromagnet of one electromagnet row, and electricity is applied, and the floating object is transferred to one electromagnet row. It is transported on a row of electromagnets. When the floating object arrives at the intersection of one electromagnet row and the other electromagnet row, switching means connects the magnetic pole coil of the shared electromagnet from one electromagnet row to the magnetic pole coil of the electromagnet of the other electromagnet row,
The other electromagnet row is energized, and the floating object is transported over the other electromagnet row.

[0009] As a result of the above, the magnetic pole coil of the shared electromagnet can be shared, so the height of the shared electromagnet can be lowered compared to conventional equipment, and it can be applied to semiconductor manufacturing equipment where space is often limited. This is advantageous, and since the magnetic resistance of the coil is small, it is possible to reduce the number of turns of the coil and save power consumption.

0010

Embodiment An embodiment of the present invention is shown in FIGS. 1 and 2. This embodiment shown in FIGS. 1 and 2 has an X-direction electromagnet array 1a and a Y-direction electromagnet array 1a.
A shared electromagnet 1c having a coil 3 arranged at a position intersecting with the directional electromagnet array 1b, and a shared electromagnet 1c connected to both ends of the coil 3 of the shared electromagnet 1c and connected to the coil 3 of the electromagnet of the X-direction electromagnet array 1a or the Y-direction A change-over switch 4 is provided for selectively connecting the electromagnet coil 3b of the electromagnet array 1b.

In the above, when the floating body 2 is transported in the X direction and then transported in the Y direction, the shared electromagnet 1c is initially
The changeover switch 4 is switched so that the coil 3 can be used as the X-direction electromagnet array 1a, and the coil 3 is connected to the coil 3a.

Next, the X-direction electromagnet array 1a is excited to transport the floating body 2. After transporting the floating body 2 to the intersection of the X-direction electromagnet row 1a and the Y-direction electromagnet row 1b, the changeover switch 4 is switched so that the shared electromagnet 1c changes to the Y-direction electromagnet row 1b.
The coil 3 is connected to the coil 3b so that it can be used as a magnet, and the Y-direction electromagnet array 1b is energized to transport the floating body 2.

[0013] As a result of the above, it becomes possible to transport the floating object from above the X-direction electromagnet array to above the Y-direction electromagnet array, and the height of the shared electromagnet can be lowered compared to conventional devices, thereby saving space. It is advantageous to apply it to manufacturing equipment for semiconductors, etc., which has many restrictions, and since the magnetic resistance of the coil is small, it is possible to reduce the number of turns of the coil and reduce power consumption.

[0014]

[Effects of the Invention] The AC magnetic levitation conveyance device of the present invention allows the magnetic pole coil of a shared electromagnet located at the intersection of one and the other electromagnet array to be switched and connected to the magnetic pole coil of one or the other electromagnet array by a switching means. This makes it possible to transport levitated objects from one electromagnet row to the other, and the height of the shared electromagnet can be lowered compared to conventional equipment, which has many space constraints. It is advantageous to apply it to manufacturing equipment for semiconductors, etc., and since the magnetic resistance of the coil is small, it is possible to reduce the number of turns of the coil and reduce power consumption.

[Brief explanation of the drawing]

FIG. 1 is a connection diagram of a coil of an electromagnet according to an embodiment of the present invention.

FIG. 2 is an explanatory diagram of the above embodiment, in which (a) is a perspective view, (a) is a perspective view;
b) is an AA arrow view of (a).

FIG. 3 is a connection diagram of a coil of an electromagnet according to a conventional device.

FIG. 4 is an explanatory diagram of a conventional device in which electromagnet rows intersect;
(a) is a perspective view, and (b) is a BB arrow view of (a).

FIG. 5 is a perspective view of a conventional device in which one electromagnet array is provided.

FIG. 6 is a plan view of a conventional device in which two electromagnet rows are arranged to intersect.

[Explanation of symbols]

1a, 1b Electromagnet array 1c Shared electromagnet 2
Floating body 3, 3a, 3b coil

Claims (1)

[Claims] Claim 1: In an AC magnetic levitation transport device that levitates and transports a floating body made of a conductive non-magnetic metal material over an electromagnet array, a magnetic pole coil of a shared electromagnet located at the intersection of one intersecting electromagnet array and the other intersecting electromagnet array. An alternating current magnetic levitation conveyance device, characterized in that it is provided with means for switching the magnetic pole coil of one of the electromagnet rows.