JPH04305364A - Pretreatment for vacuum brazing - Google Patents
Pretreatment for vacuum brazingInfo
- Publication number
- JPH04305364A JPH04305364A JP6661791A JP6661791A JPH04305364A JP H04305364 A JPH04305364 A JP H04305364A JP 6661791 A JP6661791 A JP 6661791A JP 6661791 A JP6661791 A JP 6661791A JP H04305364 A JPH04305364 A JP H04305364A
- Authority
- JP
- Japan
- Prior art keywords
- aluminum material
- degreasing
- water
- stage
- aluminum materials
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Abstract
Description
【0001】0001
【産業上の利用分野】この発明はアルミニウム製のコア
プレート及びフィンを真空ろう付けして熱交換器を製造
する場合の前記コアプレート及びフィンの真空ろう付け
前の処理方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of treating aluminum core plates and fins before vacuum brazing when manufacturing a heat exchanger by vacuum brazing aluminum core plates and fins.
【0002】0002
【従来技術】アルミニウム製熱交換器は図2に示すよう
にコアプレート1とフィン2とを真空ろう付けにより接
合した複雑な形状を有している。真空ろう付けする場合
はその前工程として従来からコアプレート1とフィン2
とを塩素系溶剤を用いて脱脂(洗浄)してきたが、近年
、塩素系溶剤はオゾン層を破壊することが判明し、環境
保護、公害防止の趣旨からその使用量が規制され、今後
は使用が不可能の状態となる。その他の前処理方法とし
ては特開昭61ー108466号公報に開示されている
酸性剤による洗浄があるが、この洗浄は設備、治具を腐
食させるので、この腐食を防ぐための耐酸処理、溶出す
るCr含有排水に対する処理を考慮する必要があり、コ
ストアップの原因となる。又、炉中ろう付けなどに使用
されているアルカリ性脱脂剤は検討されたことはあるが
、これをコアプレート1とフィン2の真空ろう付けの前
処理剤として使用するとエッチング量が多くなり、コア
プレート1とフィン2の表面に酸化皮膜が生成し、スマ
ットが発生し、真空ろう付けが困難となる。2. Description of the Related Art As shown in FIG. 2, an aluminum heat exchanger has a complicated shape in which a core plate 1 and fins 2 are joined together by vacuum brazing. When performing vacuum brazing, the core plate 1 and fins 2 have traditionally been assembled as a pre-process.
However, in recent years, it has been discovered that chlorine-based solvents destroy the ozone layer, and the amount of chlorine-based solvents used has been regulated for the purpose of environmental protection and pollution prevention. becomes impossible. Other pretreatment methods include cleaning with an acidic agent as disclosed in JP-A-61-108466, but since this cleaning corrodes equipment and jigs, acid-resistant treatment and elution are required to prevent this corrosion. It is necessary to consider the treatment of Cr-containing wastewater, which causes an increase in costs. Furthermore, alkaline degreasing agents used in furnace brazing have been studied, but if this is used as a pre-treatment agent for vacuum brazing the core plate 1 and fins 2, the amount of etching will increase and the core An oxide film is formed on the surfaces of the plate 1 and the fins 2, causing smut, making vacuum brazing difficult.
【0003】0003
【発明が解決しようとする課題】この発明は熱交換器を
構成するコアプレートとフィン(以後両者をアルミニウ
ム材と言う)の表面の酸化皮膜やスマットの生成を抑制
し、優れた品質の真空ろう付けが可能であり、又従来の
方法に比べ設備費用、ランニングコストの大幅の低減を
可能とする真空ろう付け前処理方法の提供を課題とする
。なお、本願の先行技術資料として前記の特開昭61ー
108466号公報の外に特開昭62ー54091号公
報がある。[Problems to be Solved by the Invention] This invention suppresses the formation of oxide films and smut on the surfaces of the core plate and fins (hereinafter referred to as aluminum materials) that constitute a heat exchanger, and provides a vacuum solder of excellent quality. It is an object of the present invention to provide a vacuum brazing pretreatment method that can be used to perform vacuum brazing, and that can significantly reduce equipment costs and running costs compared to conventional methods. In addition to the above-mentioned JP-A-61-108466, there is also JP-A-62-54091 as a prior art document related to the present application.
【0004】0004
【課題を解決する手段】上記の課題を解決するためこの
発明は、熱交換器を構成するアルミニウム材を水又は湯
中で超音波揺動により前記アルミニウム材の表面に付着
する油の大半を除去する予備洗浄工程と、予備洗浄工程
を経たアルミニゥム材の表面に残存する油をpH7〜1
1の弱アルカリ性脱脂剤により除去すると共に酸化皮膜
、スマットの生成を抑制する脱脂工程と、この脱脂工程
中にアルミニウム材に付着した脱脂剤の残渣を常温水中
で超音波揺動により除去する水洗工程と、水洗工程を経
たアルミニウム材を乾燥させる乾燥工程とから構成され
ている。[Means for Solving the Problems] In order to solve the above problems, the present invention removes most of the oil adhering to the surface of the aluminum material constituting the heat exchanger by ultrasonic shaking in water or hot water. A pre-washing process to remove the oil remaining on the surface of the aluminum material after the pre-washing process to a pH of 7 to 1.
A degreasing process in which the formation of an oxide film and smut is suppressed while being removed using a weakly alkaline degreasing agent in step 1, and a washing process in which the residue of the degreasing agent adhering to the aluminum material during this degreasing process is removed by ultrasonic shaking in water at room temperature. and a drying process of drying the aluminum material that has undergone the water washing process.
【0005】[0005]
【作用】予備洗浄工程ではアルミニウム材の表面に付着
する油の大半はアルミニウム材を水又は湯中で超音波揺
動させることにより除去される。脱脂工程ではpH7〜
11の弱アルカリ性脱脂剤によりアルミニウム材の表面
に残存する油が除去されると共に酸化皮膜、スマットの
生成が抑制される。水洗工程では脱脂工程中にアルミニ
ウム材に付着した脱脂剤の残渣がアルミニウム材を常温
水中で超音波揺動させることにより完全に除去される。
乾燥工程ではアルミニウム材を風速2m/sec以上、
雰囲気温度100℃以上の気流で20分以内で乾燥させ
るので酸化皮膜の生成を防止し、真空ろう付け性をよく
する。[Operation] In the pre-cleaning step, most of the oil adhering to the surface of the aluminum material is removed by ultrasonically shaking the aluminum material in water or hot water. In the degreasing process, pH is 7~
The weak alkaline degreaser No. 11 removes oil remaining on the surface of the aluminum material and suppresses the formation of an oxide film and smut. In the water washing step, the residue of the degreasing agent adhering to the aluminum material during the degreasing step is completely removed by ultrasonically shaking the aluminum material in room temperature water. In the drying process, the aluminum material is heated at a wind speed of 2 m/sec or more.
Since it is dried within 20 minutes with an air flow at an ambient temperature of 100°C or higher, it prevents the formation of an oxide film and improves vacuum brazing properties.
【0006】[0006]
【実施例】以下実施例を示す図面によりこの発明を説明
する。図1に示すようにこの発明は予備洗浄工程3、脱
脂工程4、水洗工程5、乾燥工程6とから構成されてい
る。各工程間にはエアブローによる水切り工程がある。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be explained below with reference to drawings showing examples. As shown in FIG. 1, this invention is comprised of a preliminary cleaning process 3, a degreasing process 4, a water washing process 5, and a drying process 6. Between each process, there is a draining process using air blow.
【0007】予備洗浄工程3ではアルミニウム材Wは水
又は湯中に浸され、その表面に付着した加工油の大半は
超音波発振器7による超音波揺動の物理的作用によって
除去される。この予備洗浄工程3によって次の脱脂工程
4での負荷が低減され、液状の脱脂剤の寿命が伸びる。
脱脂工程4では脱脂剤中のアルカリビルダー及び界
面活性剤のキレート、乳化分散などの作用によりアルミ
ニウム材表面の残りの加工油を除去し、かつ脱脂剤のエ
ッチング作用によりアルミニウム材表面のAl等の物質
と酸化皮膜とが除去される。In the pre-cleaning step 3, the aluminum material W is immersed in water or hot water, and most of the machining oil adhering to its surface is removed by the physical action of ultrasonic vibration by the ultrasonic oscillator 7. This pre-cleaning step 3 reduces the load on the next degreasing step 4 and extends the life of the liquid degreaser. In the degreasing step 4, residual machining oil on the surface of the aluminum material is removed by the chelation, emulsification and dispersion of the alkali builder and surfactant in the degreaser, and substances such as Al on the surface of the aluminum material are removed by the etching action of the degreaser. and the oxide film are removed.
【0008】水洗工程5ではアルミニウム材Wは常温水
中で、超音波揺動の物理的作用をうけるので脱脂剤の残
渣は除去される。乾燥工程6においてアルミニウム材W
の表面の水分が風速2m/sec以上、雰囲気温度10
0℃以上の空気で20分以内で除去される。In the washing step 5, the aluminum material W is subjected to the physical action of ultrasonic vibration in water at room temperature, so that the residue of the degreasing agent is removed. In the drying step 6, the aluminum material W
When the moisture on the surface of the
It is removed within 20 minutes with air at temperatures above 0°C.
【0009】次に、良好な真空ろう付け性を得るための
要点を前記の各工程に就いて説明する。なお、良好な真
空ろう付け性の意味は熱交換器における冷媒液の漏れ不
良が少なく、ろう付けのフィレットが冷媒液の圧力に十
分耐える程度の大きさを有すること、又外観上異物の残
留付着による変色がないことを言う。又真空ろう付けの
前処理の要点は(1)加工油がアルミニウム材から十分
に除去されていること、(2)アルミニウム材の表面に
生成される酸化皮膜が薄いこと(約200オングストロ
ム)、(3)アルミニウム材表層部の組成が変化してい
ないこと及びアルミニウム材表層部に不純物残渣が付着
していないことである。[0009] Next, key points for obtaining good vacuum brazing properties will be explained with regard to each of the above steps. Good vacuum brazing properties mean that there is little leakage of the refrigerant in the heat exchanger, that the brazing fillet is large enough to withstand the pressure of the refrigerant, and that there is no residual adhesion of foreign matter in the appearance. There is no discoloration caused by In addition, the key points of pre-treatment for vacuum brazing are (1) that processing oil is sufficiently removed from the aluminum material, (2) that the oxide film formed on the surface of the aluminum material is thin (approximately 200 angstroms), (3) There is no change in the composition of the surface layer of the aluminum material, and no impurity residue is attached to the surface layer of the aluminum material.
【0010】脱脂工程4の重要性に就いて。脱脂剤のp
Hが11以上のアルカリ性の場合ではろう材中のMgが
Mg(OH)2 などの水酸化物となる領域があり、し
かもAlの溶解速度(エッチング量)は脱脂剤のpHが
大きくなるほど大きくなるためAlが選択的にエッチン
グされ、アルミニウム材中のSiの露出が多くなり、ア
ルミニウム材表層の組成に変化が起きたり、露出Mgが
酸化皮膜層を増加させたり、ろう材中のFeなどの不純
物がスマットとして表面に析出し、ろう付性を悪くする
。
又pHが1〜3の酸性の脱脂剤を使用するとAlのエッ
チング量が多いほかに、前述のようにSuS等の設備、
治具の腐食、Crの溶出が発生し、これらの防止手段を
考慮するとコストが高くなる。又、中性領域の脱脂剤は
脱脂力が小さいので、これを大きくするために界面活性
剤の割合を多くする必要があり、このために化学的酸素
要求量(COD)の増加と言った排水処理性の問題が生
じ、さらにはエッチング力がないために酸化皮膜を薄く
することができない欠点がある。以上の点を考慮すると
弱アルカリ領域(pH7〜11)の脱脂剤が適している
。Regarding the importance of degreasing step 4. degreaser p
In the case of alkalinity where H is 11 or more, there is a region where Mg in the brazing material becomes a hydroxide such as Mg(OH)2, and the dissolution rate (etching amount) of Al increases as the pH of the degreasing agent increases. Therefore, Al is selectively etched, increasing the exposure of Si in the aluminum material, causing a change in the composition of the surface layer of the aluminum material, exposing Mg increasing the oxide film layer, and impurities such as Fe in the brazing material. precipitates on the surface as smut, impairing brazing properties. Furthermore, if an acidic degreasing agent with a pH of 1 to 3 is used, not only will a large amount of Al be etched, but as mentioned above, equipment such as SuS, etc.
Corrosion of the jig and elution of Cr occur, and costs increase when measures to prevent these are taken into account. Also, since degreasing agents in the neutral range have low degreasing power, it is necessary to increase the proportion of surfactant in order to increase the degreasing power. Problems arise in processability, and furthermore, there is a drawback that the oxide film cannot be made thin due to lack of etching power. Considering the above points, a degreasing agent in a weakly alkaline range (pH 7 to 11) is suitable.
【0011】水洗工程5の重要性に就いて。この工程の
目的は前工程即ち脱脂工程4での脱脂剤の残渣を完全に
濯ぎ落とすことにあるが、水洗に湯を使用すると図4に
示すように浸漬時間が長くなるとアルミニウム材表面で
の酸化皮膜の成長速度が速くなり、脱脂工程4での酸化
皮膜を除去した効果を無駄にしてしまうことになる。従
って常温水を使用する必要がある。又純水を使用する程
酸化皮膜が厚くなる実験結果もある。Regarding the importance of water washing step 5. The purpose of this step is to completely rinse off the residue of the degreasing agent from the previous step, that is, degreasing step 4. However, if hot water is used for washing, as shown in Figure 4, the longer the immersion time, the more oxidation will occur on the surface of the aluminum material. The growth rate of the film becomes faster, and the effect of removing the oxide film in the degreasing step 4 is wasted. Therefore, it is necessary to use room temperature water. There are also experimental results showing that the more pure water is used, the thicker the oxide film becomes.
【0012】乾燥工程6の重要性について。水洗工程で
湯を使うことが好ましくないことと同じ理由で、乾燥時
間が長いこと、即ち加熱された水分が長時間アルミニウ
ム材の表面と接触すると酸化皮膜が成長する。このこと
から短時間で乾燥させることが重要であり、図3(ロ)
から20分以内で乾燥させることが必要である。この時
間は製品の大きさ、形状によって変わるが図3(イ)か
ら風速2m/sec以上、雰囲気温度100℃以上が必
要となる。Regarding the importance of drying step 6. For the same reason that it is undesirable to use hot water in the washing process, an oxide film will grow if the drying time is long, that is, if heated moisture comes into contact with the surface of the aluminum material for a long time. For this reason, it is important to dry in a short time, as shown in Figure 3 (b).
It is necessary to dry within 20 minutes. This time varies depending on the size and shape of the product, but as shown in FIG. 3(a), a wind speed of 2 m/sec or more and an ambient temperature of 100° C. or more are required.
【0013】エッチング量は20g/m2 ・hr以下
が望ましいが、総エッチング量が問題であるので必ずし
もこの数値に制約されるものでない。他の実施例として
は基本工程は同じであるが、脱脂剤の種類と処理時間の
制御によりエッチング量をコントロールしてフッ化物系
フラックスを用いたろう付けなどの他のろう付け方法の
前処理にも適応可能である。The amount of etching is preferably 20 g/m 2 ·hr or less, but since the total amount of etching matters, it is not necessarily limited to this value. As another example, the basic process is the same, but the amount of etching is controlled by controlling the type of degreaser and processing time, and it can also be used as a pretreatment for other brazing methods such as brazing using fluoride flux. Adaptable.
【0014】[0014]
【効果】この発明は上記の構成を有するので次のような
優れた効果を有する。
(イ)熱交換器を構成するアルミニウム材の表面の加工
油を完全に除去し、酸化皮膜やスマットの生成を抑制す
るので、優れた品質の真空ろう付けを有する熱交換器を
提供する。
(ロ)従来の真空ろう付け前処理方法に比べ設備費用、
ランニングコストが大幅に低減する。[Effects] Since the present invention has the above structure, it has the following excellent effects. (a) To provide a heat exchanger with vacuum brazing of excellent quality since processing oil on the surface of the aluminum material constituting the heat exchanger is completely removed and the formation of oxide film and smut is suppressed. (b) Equipment costs compared to conventional vacuum brazing pretreatment methods;
Running costs are significantly reduced.
【図1】本発明の一実施例のブロック図である。FIG. 1 is a block diagram of one embodiment of the present invention.
【図2】アルミニウム製熱交換器の斜視図である。FIG. 2 is a perspective view of an aluminum heat exchanger.
【図3】(イ)はろう付け前処理方法において、アルミ
ニウム材の乾燥条件をその残留水分量がゼロとなる時の
乾燥時間(min)と雰囲気温度(℃)との関係を示す
図である。
(ロ)はアルミニウム材に生成される酸化皮膜の厚さ(
オングストロム)と乾燥時間(min)との関係を示す
図である。[Figure 3] (A) is a diagram showing the relationship between the drying conditions of aluminum material and the drying time (min) when the residual moisture content becomes zero and the ambient temperature (°C) in the brazing pretreatment method. . (b) is the thickness of the oxide film formed on the aluminum material (
FIG. 3 is a diagram showing the relationship between drying time (min) and drying time (min).
【図4】ろう付け前処理方法において、アルミニウム材
の浸漬時間(min)と生成される酸化皮膜の厚さ(オ
ングストロム)との関係を示す図である。FIG. 4 is a diagram showing the relationship between the immersion time (min) of the aluminum material and the thickness (Angstrom) of the generated oxide film in the brazing pretreatment method.
3 予備洗浄工程 4 脱脂工程 5 水洗工程 6 乾燥工程 3 Preliminary cleaning process 4 Degreasing process 5 Water washing process 6 Drying process
Claims (1)
水又は湯中で超音波揺動により前記アルミニウム材の表
面に付着する油の大半を除去する予備洗浄工程と、予備
洗浄工程を経たアルミニウム材の表面に残存する油をp
H7〜11の弱アルカリ性脱脂剤により除去すると共に
酸化皮膜、スマットの生成を抑制する脱脂工程と、この
脱脂工程中にアルミニウム材に付着した脱脂剤の残渣を
常温水中で超音波揺動により除去する水洗工程と、水洗
工程を経たアルミニウム材を乾燥させる乾燥工程とから
なる真空ろう付け前処理方法。1. A pre-cleaning step in which most of the oil adhering to the surface of the aluminum material is removed by ultrasonic shaking of the aluminum material constituting the heat exchanger in water or hot water, and the aluminum material that has undergone the pre-washing step. The oil remaining on the surface of
A degreasing process that removes with a weakly alkaline degreaser of H7-11 and suppresses the formation of oxide film and smut, and removes the residue of the degreaser that adheres to the aluminum material during this degreasing process by ultrasonic shaking in water at room temperature. A vacuum brazing pretreatment method consisting of a water washing process and a drying process of drying the aluminum material that has undergone the water washing process.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3066617A JPH07106447B2 (en) | 1991-03-29 | 1991-03-29 | Vacuum brazing pretreatment method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3066617A JPH07106447B2 (en) | 1991-03-29 | 1991-03-29 | Vacuum brazing pretreatment method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04305364A true JPH04305364A (en) | 1992-10-28 |
| JPH07106447B2 JPH07106447B2 (en) | 1995-11-15 |
Family
ID=13321039
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3066617A Expired - Lifetime JPH07106447B2 (en) | 1991-03-29 | 1991-03-29 | Vacuum brazing pretreatment method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07106447B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116638167A (en) * | 2023-03-20 | 2023-08-25 | 南京百灵汽车电气机械有限公司 | A Method of Improving the Qualification Rate of Heat Exchanger Brazing |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53113741A (en) * | 1977-03-16 | 1978-10-04 | Toyo Radiator Kk | Manufacture of aluminum made heat exchanger |
| JPS54118358A (en) * | 1978-03-07 | 1979-09-13 | Toyo Radiator Kk | Production of aluminum heat exchanger |
| JPS59120362A (en) * | 1982-12-28 | 1984-07-11 | Mitsubishi Heavy Ind Ltd | Pretreatment of soldering member |
| JPS6076274A (en) * | 1983-09-30 | 1985-04-30 | Fuji Electric Co Ltd | Brazing method using aluminum |
| JPH0342084A (en) * | 1989-07-10 | 1991-02-22 | Tokuyama Soda Co Ltd | Cleaning method and equipment |
-
1991
- 1991-03-29 JP JP3066617A patent/JPH07106447B2/en not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53113741A (en) * | 1977-03-16 | 1978-10-04 | Toyo Radiator Kk | Manufacture of aluminum made heat exchanger |
| JPS54118358A (en) * | 1978-03-07 | 1979-09-13 | Toyo Radiator Kk | Production of aluminum heat exchanger |
| JPS59120362A (en) * | 1982-12-28 | 1984-07-11 | Mitsubishi Heavy Ind Ltd | Pretreatment of soldering member |
| JPS6076274A (en) * | 1983-09-30 | 1985-04-30 | Fuji Electric Co Ltd | Brazing method using aluminum |
| JPH0342084A (en) * | 1989-07-10 | 1991-02-22 | Tokuyama Soda Co Ltd | Cleaning method and equipment |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116638167A (en) * | 2023-03-20 | 2023-08-25 | 南京百灵汽车电气机械有限公司 | A Method of Improving the Qualification Rate of Heat Exchanger Brazing |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07106447B2 (en) | 1995-11-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4050954A (en) | Surface treatment of semiconductor substrates | |
| JP3881517B2 (en) | Method for producing a sputter target with improved finish | |
| US5964953A (en) | Post-etching alkaline treatment process | |
| JP4970429B2 (en) | Litho strip conditioning | |
| JP4308572B2 (en) | Surface treatment method for aluminum alloy substrate for heat exchanger and heat exchanger manufactured by this method | |
| US6312527B1 (en) | Non-corrosive cleaning method for use in the manufacture of microelectronic device | |
| CN114210639B (en) | Cleaning process for reducing number of bright spots on surface of germanium wafer | |
| JPH02104682A (en) | Method for cleaning surface of aluminum material for cap and treating agent therefor | |
| JPH07106447B2 (en) | Vacuum brazing pretreatment method | |
| CN113140468A (en) | Integrated circuit wafer front processing technology | |
| JPH04101418A (en) | Method of increasing lifetime of si wafer | |
| CN112126936A (en) | A kind of high-efficiency surface cleaning agent for die-casting aluminum and magnesium alloys and preparation method thereof | |
| CN113235100A (en) | Surface treatment method before oxygen-free copper brazing | |
| TWI638043B (en) | 矽 wafer lotion and method of cleaning 矽 wafer | |
| JP3771294B2 (en) | Wafer cleaning method | |
| JPH0433338A (en) | Wafer washing liquid and washing method of semiconductor wafer using same | |
| KR940000878B1 (en) | Surface treatment method of aluminium | |
| JP2000077376A (en) | Ultrasonic cleaning method and apparatus therefor | |
| Newman | Etching of aluminum and its alloys | |
| KR950001904A (en) | Gate electrode formation method | |
| JP2008194638A (en) | New cleaning method for mask and mask blank | |
| US3277820A (en) | Lithographic plate and method of making same | |
| CN121852924A (en) | Method for removing aluminum nitride film on surface of aluminum material based on potassium hydroxide | |
| JP2004327878A (en) | Method of washing silicon wafer | |
| KR20230077041A (en) | Method of removing the deposition of collimator for sputter equipment in semiconductor manufacturing |