JPH0430800U - - Google Patents
Info
- Publication number
- JPH0430800U JPH0430800U JP7314990U JP7314990U JPH0430800U JP H0430800 U JPH0430800 U JP H0430800U JP 7314990 U JP7314990 U JP 7314990U JP 7314990 U JP7314990 U JP 7314990U JP H0430800 U JPH0430800 U JP H0430800U
- Authority
- JP
- Japan
- Prior art keywords
- printed circuit
- circuit board
- suction means
- vacuum
- suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Manufacturing Of Printed Wiring (AREA)
Description
第１図は本考案の基板支持装置を適用した塗布
装置の側面図、第２図乃至第４図は本考案による
動作を示す図である。
１……塗布ヘツド部、１１……Ｘ−Ｙテーブル
駆動部、２８……基板搬送コンベア、３１……バ
ツクアツプベース、３２Ａ，３２Ｂ……バツクア
ツプピン、３３……中空部、３５……真空ホース
、３６……着脱装置、３７……ソケツト、３８…
…プラグ、３９……真空破壊装置。
FIG. 1 is a side view of a coating apparatus to which the substrate support device of the present invention is applied, and FIGS. 2 to 4 are diagrams showing the operation of the present invention. DESCRIPTION OF SYMBOLS 1... Coating head part, 11... X-Y table driving part, 28... Substrate conveyor, 31... Backup base, 32A, 32B... Backup pin, 33... Hollow part, 35... Vacuum hose, 36... Detachable device, 37... Socket, 38...
...Plug, 39...Vacuum breaking device.
Claims (1)
ト基板を水平に保持した状態で平面方向に移動可
能な基板支持装置に於いて、前記プリント基板を
水平保持するため該プリント基板の下面を真空吸
着する吸着手段と、該吸着手段に供給路を介して
真空圧を供給する真空源と、前記平面方向の移動
時に前記吸着手段によるプリント基板の真空吸着
状態を保ちつつ前記吸着手段と真空源とを切り離
す着脱装置とを設けたことを特徴とする基板支持
装置。 In a board support device capable of moving in a plane direction while holding the printed circuit board horizontally in contact with both ends of the printed circuit board, vacuum suction is performed on the lower surface of the printed circuit board in order to hold the printed circuit board horizontally. a suction means, a vacuum source that supplies vacuum pressure to the suction means via a supply path, and separating the suction means and the vacuum source while maintaining the vacuum suction state of the printed circuit board by the suction means during the movement in the planar direction. A substrate support device characterized by being provided with an attachment/detachment device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7314990U JPH0430800U (en) | 1990-07-10 | 1990-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7314990U JPH0430800U (en) | 1990-07-10 | 1990-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0430800U true JPH0430800U (en) | 1992-03-12 |
Family
ID=31611719
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7314990U Pending JPH0430800U (en) | 1990-07-10 | 1990-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0430800U (en) |
-
1990
- 1990-07-10 JP JP7314990U patent/JPH0430800U/ja active Pending
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