JPH0431021B2 - - Google Patents

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Publication number
JPH0431021B2
JPH0431021B2 JP62331100A JP33110087A JPH0431021B2 JP H0431021 B2 JPH0431021 B2 JP H0431021B2 JP 62331100 A JP62331100 A JP 62331100A JP 33110087 A JP33110087 A JP 33110087A JP H0431021 B2 JPH0431021 B2 JP H0431021B2
Authority
JP
Japan
Prior art keywords
superconducting
base material
film
powder
superconducting material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62331100A
Other languages
Japanese (ja)
Other versions
JPH01172555A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP62331100A priority Critical patent/JPH01172555A/en
Publication of JPH01172555A publication Critical patent/JPH01172555A/en
Publication of JPH0431021B2 publication Critical patent/JPH0431021B2/ja
Granted legal-status Critical Current

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Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

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  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Coating By Spraying Or Casting (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、超電導材の製造方法に関するもの
である。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a method for manufacturing a superconducting material.

〔従来技術及びその問題点〕[Prior art and its problems]

超電導物質は、既に高エネルギー粒子加速器、
医療診断用MRI−CT 物性研究装置等におい
て、超電導マグネツトの形で実用化されている。
また、発電機、エネルギーの貯蔵や変換、リニア
モーターカー、資源回収用磁気分離装置、核融合
炉、送電ケーブル、磁気シールド材等への応用、
さらには、ジヨセフソン効果を用いた超電導素子
は、超高速コンピユーター、赤外線検出器、低雑
音の増幅器等への応用が期待されており、これら
が本格的に実用化された場合の産業的、社会的イ
ンパクトの大きさは、未だ測りがたい。
Superconducting materials are already used in high-energy particle accelerators,
It has been put into practical use in the form of superconducting magnets in MRI-CT physical property research equipment for medical diagnosis, etc.
Applications include generators, energy storage and conversion, linear motor cars, magnetic separation devices for resource recovery, nuclear fusion reactors, power transmission cables, magnetic shielding materials, etc.
Furthermore, superconducting elements using the Josephson effect are expected to be applied to ultra-high-speed computers, infrared detectors, low-noise amplifiers, etc., and if these are put into full-scale practical use, they will have significant industrial and social impact. The magnitude of the impact is still difficult to measure.

これまでに開発された超電導物質の代表的なも
のとして、Nb−Ti合金があり、これは、現在9T
までの磁界発生用線材として広く使用されてい
る。Nb−Ti合金のTc(超電導状態が存在する臨
界温度)は、9Kである。また、Nb−Ti合金より
も格段に高いTcを有する材料として化合物系超
電導物質が開発され、現在Nb3Sn(Tc:18K)と
V3Ga(Tc:15K)が線材化され実用に供せられ
ている。さらに、Nb3Geでは23KのTcが得られ
ている。
A typical superconducting material developed so far is Nb-Ti alloy, which is currently 9T
It is widely used as a wire for generating magnetic fields. The Tc (critical temperature at which a superconducting state exists) of the Nb-Ti alloy is 9K. In addition, compound superconducting materials have been developed as materials with significantly higher Tc than Nb-Ti alloys, and currently Nb 3 Sn (Tc: 18K) and Nb 3 Sn (Tc: 18K) are being developed.
V 3 Ga (Tc: 15K) has been made into wire and put into practical use. Furthermore, a Tc of 23K has been obtained with Nb 3 Ge.

このように長年に亘つて高Tc超電導物質を得
るための努力がなされてきたが、従来の合金系お
よび化合物系超電導物質においては、Tc23Kが
大きな壁になつている。Tcが23K以下の超電導
物質の冷却には、高価な液体ヘリウムが必要であ
り、このことが超電導物質の広範な応用を阻害し
ている。このTcの壁を打破する材料として、
1986年にIBMチユーリツヒのMuller氏等が、Ba
−La−Cu−O系の酸化物で超電導の徴候が認め
られたと発表して以来、酸化物系超電導物質の開
発競争に拍車がかかつた。1986年にはTcが40K
であつたものが、1987年の初めには、早くも77K
の液体窒素温度を超えるY−Ba−Cu−O系超電
導物質が開発され、Tcは約93Kに達した。さら
に、その後も精力的な開発が続けられており、今
のところ安全性等に問題はあるものの室温で超電
導現象を示す超電導物質の開発も報告されてい
る。液体窒素温度で使用可能な高温超電導物質の
発見は、前述した応用分野への期待度を増々高め
るものである。しかし、Tcの値が高くしかも熱
処理時に割れが発生しにくい超電導皮膜が形成さ
れた超電導材を、容易に製造することができる方
法は、まだ提案されていない。
Although efforts have been made to obtain high Tc superconducting materials for many years, Tc23K has become a major barrier to conventional alloy-based and compound-based superconducting materials. Cooling superconducting materials with Tc below 23 K requires expensive liquid helium, which hinders their widespread application. As a material to break down this Tc wall,
In 1986, Mr. Muller et al.
Since the announcement that signs of superconductivity were observed in -La-Cu-O-based oxides, the race to develop oxide-based superconducting materials has accelerated. In 1986 Tc was 40K
By the beginning of 1987, it was already 77K.
A Y-Ba-Cu-O superconducting material has been developed that exceeds the liquid nitrogen temperature of , and its Tc has reached approximately 93K. Furthermore, vigorous development has continued since then, and there have been reports of the development of superconducting materials that exhibit superconducting phenomena at room temperature, although there are currently safety issues. The discovery of high-temperature superconducting materials that can be used at liquid nitrogen temperatures increases expectations for the aforementioned application fields. However, no method has yet been proposed that can easily produce a superconducting material having a high Tc value and a superconducting film that is less likely to crack during heat treatment.

従つて、この発明の目的は、Tcの値が高くし
かも熱処理時に割れが発生しにくい超電導皮膜が
形成された超電導材を容易に製造方法を提供する
ことにある。
Accordingly, an object of the present invention is to provide a method for easily producing a superconducting material in which a superconducting film having a high Tc value and hardly cracking occurs during heat treatment is formed.

〔問題点を解決するための手段〕[Means for solving problems]

この発明は、基材の表面上に、CuxOy基を含む
複合酸化物超電導物質の粉末を溶射して、基材と
超電導皮膜とからなる超電導素材を調製し、次い
で、前記超電導素材に熱処理を施して、超電導材
を製造するに際して、溶射開始後は、前記粉末を
半溶融状態で前記基材の表面上に溶射し、その
後、前記粉末を完全溶融状態で前記基材の表面上
に溶射し、かくして、前記基材と前記超電導皮膜
との間に、前記超電導皮膜の空孔率より大きい空
孔率を有する中間層を形成し、もつて、前記超電
導素材の熱処理時に、前記超電導皮膜に割れが発
生するのを防止することに特徴を有するものであ
る。
This invention prepares a superconducting material consisting of a base material and a superconducting film by thermally spraying powder of a composite oxide superconducting material containing Cu x O y groups onto the surface of a base material, and then coats the superconducting material with When producing a superconducting material by heat treatment, after starting thermal spraying, the powder is sprayed in a semi-molten state onto the surface of the base material, and then the powder is sprayed in a completely molten state onto the surface of the base material. By thermal spraying, an intermediate layer having a porosity larger than that of the superconducting film is formed between the base material and the superconducting film, so that during the heat treatment of the superconducting material, the superconducting film The feature is that it prevents cracks from occurring.

次に、この発明の、超電導材の製造方法の一実
施態様を図面を参照しながら説明する。
Next, one embodiment of the method for manufacturing a superconducting material according to the present invention will be described with reference to the drawings.

第1図は、この発明の、超電導材の製造方法に
使用するプラズマ溶射装置を示す断面図である。
FIG. 1 is a sectional view showing a plasma spraying apparatus used in the method of manufacturing a superconducting material according to the present invention.

第1図に示すように、プラズマ溶射装置1は、
真空容器4と、真空容器4内に設けられた溶射ノ
ズル5と、溶射ノズル5内に設けられたタングス
テン製電極6と、溶射ノズル5と電極6との間に
接続されたプラズマ電源7とからなつている。
As shown in FIG. 1, the plasma spraying apparatus 1 includes:
From a vacuum vessel 4, a thermal spray nozzle 5 provided within the vacuum vessel 4, a tungsten electrode 6 provided within the thermal spray nozzle 5, and a plasma power source 7 connected between the thermal spray nozzle 5 and the electrode 6. It's summery.

真空容器4内に、溶射ノズル5と対向して基材
2を設置し、真空容器4内を減圧し、溶射ノズル
5内にアルゴン、ヘリウム等の差動ガスおよび
CuxOy基を含む複合酸化物超電導物質の粉末(10
から100μm)をそれぞれ連続的に供給し、そし
て、プラズマ電源7を作動させて、溶射ノズル5
と電極6との間にプラズマアークを発生させる。
The base material 2 is placed in the vacuum vessel 4 facing the thermal spray nozzle 5, the pressure inside the vacuum vessel 4 is reduced, and a differential gas such as argon, helium, etc.
Powder of complex oxide superconducting material containing Cu x O y group (10
100 μm) respectively, and then the plasma power source 7 is activated to spray the thermal spray nozzle 5.
A plasma arc is generated between the electrode 6 and the electrode 6.

上記プラズマ溶射装置1によつて、超電導素材
8を製造するには、以下のようにする。即ち、真
空容器4内を減圧し、溶射ノズル5の後端部内に
作動ガスを供給し、溶射ノズル5の前端部内に、
CuxOy基を含む複合酸化物超電導物質の粉末を供
給し、プラズマ電源7から電極6に電力を供給す
る。この場合、溶射開始から所定時間は、前記粉
末が半溶融状態となるように、プラズマ電源7か
らの電力を調整し、その後、前記粉末が完全溶融
状態となるように、プラズマ電源7からの電力を
調整する。これによつて、基材2と、その表面上
に形成された、空孔率の大きい、即ち、組織が粗
な超電導物質からなる中間層3Aと、中間層3A
の表面上に形成された、空孔率が小さい、即ち、
組織が緻密な超電導皮膜3Bとからなる超電導素
材8が製造される。
The superconducting material 8 is manufactured using the plasma spraying apparatus 1 as follows. That is, the pressure inside the vacuum container 4 is reduced, the working gas is supplied into the rear end of the thermal spray nozzle 5, and the inside of the front end of the thermal spray nozzle 5 is
Powder of a composite oxide superconducting material containing Cu x O y groups is supplied, and power is supplied from the plasma power supply 7 to the electrode 6 . In this case, the power from the plasma power source 7 is adjusted so that the powder is in a semi-molten state for a predetermined time from the start of thermal spraying, and then the power from the plasma power source 7 is adjusted so that the powder is in a completely molten state. Adjust. As a result, the base material 2, the intermediate layer 3A formed on the surface thereof and made of a superconducting material with a high porosity, that is, a coarse structure, and the intermediate layer 3A formed on the surface thereof.
Formed on the surface of, the porosity is small, i.e.
A superconducting material 8 consisting of a superconducting film 3B with a dense structure is manufactured.

このように、基材2と超電導皮膜3Bとの間
に、頂度、クツシヨンの機能を有する中間層3A
が形成されるので、その後の熱処理時に、基材2
と超電導皮膜3Bとの熱膨張率の差によつて超電
導皮膜3Bに割れが発生することが防止される。
In this way, between the base material 2 and the superconducting film 3B, an intermediate layer 3A having a top and cushion function is formed.
is formed, so during the subsequent heat treatment, the base material 2
The difference in thermal expansion coefficient between the superconducting film 3B and the superconducting film 3B prevents cracks from occurring in the superconducting film 3B.

超電導素材8の熱処理条件は、次の通りであ
る。即ち、超電導素材8を500から980℃の温度に
加熱し、次いで、酸素含有雰囲気中において、20
℃/min以下の速度で超電導素材8を冷却する。
The heat treatment conditions for the superconducting material 8 are as follows. That is, the superconducting material 8 is heated to a temperature of 500 to 980°C, and then heated to a temperature of 20°C in an oxygen-containing atmosphere.
The superconducting material 8 is cooled at a rate of ℃/min or less.

ここで、加熱温度を500から980℃の範囲とした
のは、500℃未満では、超電導皮膜3Bの結晶を、
超電導現象が生じる斜方晶にすることができず且
つ超電導皮膜3Bの酸素欠損量が大きくなるから
であり、一方、980℃を超えると、基材2と超電
導皮膜3Bとが化学反応を起して、皮膜3Bに超
電導現象が現われないからである。
Here, the reason why the heating temperature was set in the range of 500 to 980°C is because below 500°C, the crystals of the superconducting film 3B
This is because it is impossible to form an orthorhombic crystal in which a superconducting phenomenon occurs and the amount of oxygen vacancies in the superconducting film 3B becomes large.On the other hand, when the temperature exceeds 980°C, a chemical reaction occurs between the base material 2 and the superconducting film 3B. This is because the superconducting phenomenon does not appear in the film 3B.

〔実施例〕〔Example〕

次に、この発明の実施例について説明する。 Next, embodiments of the invention will be described.

第1図に示すプラズマ溶射装置1の真空容器4
内に、銅製の板状基材2をセツトし、作動ガスと
して、アルゴンガスとヘリウムガスとの混合ガス
(Ar:20/min,He:40/min)を溶射ノズ
ル5内に連続的に供給し、プラズマ電源7から電
極6に8KWの電力を供給し、Y0.3−Ba0.7−Cu1
O3-yからなる超電導物質の粉末(粒径10から
100μm)を溶射ノズル5内に供給し、そして、
真空容器4内の気圧を80mbarに減圧して、基材
2の表面上に50μmの膜厚を有する中間層3Aを
形成した。中間層3Aの空孔率は20%であつた。
次に、プラズマ電源7からの電力を25KWに増大
して、中間層3Aの表面上に100μmの膜厚を有
する超電導皮膜3Bを形成した。超電導皮膜3B
の空孔率は2%であつた。次に、このようにして
得た超電導素材8を加熱炉に入れて930℃の温度
に30分間加熱し、その後20℃/minの速度で冷却
した。そして、超電導皮膜3Bの剥離状態を調べ
たところ剥離は全く見られなかつた。次に、Tc
とJc(臨界電流密度を調べた。この結果、Tcは
90K,Jcは150A/cm2であつた。
Vacuum vessel 4 of plasma spraying apparatus 1 shown in FIG.
A copper plate-shaped base material 2 is set inside the spray nozzle 5, and a mixed gas of argon gas and helium gas (Ar: 20/min, He: 40/min) is continuously supplied into the thermal spray nozzle 5 as a working gas. Then, 8KW of power is supplied from the plasma power supply 7 to the electrode 6, and Y 0.3 −Ba 0.7 −Cu 1
Powder of superconducting material consisting of O 3-y (particle size from 10
100 μm) into the thermal spray nozzle 5, and
The pressure inside the vacuum container 4 was reduced to 80 mbar, and an intermediate layer 3A having a thickness of 50 μm was formed on the surface of the base material 2. The porosity of the intermediate layer 3A was 20%.
Next, the power from the plasma power source 7 was increased to 25 KW to form a superconducting film 3B having a thickness of 100 μm on the surface of the intermediate layer 3A. Superconducting film 3B
The porosity was 2%. Next, the superconducting material 8 thus obtained was placed in a heating furnace and heated to a temperature of 930°C for 30 minutes, and then cooled at a rate of 20°C/min. Then, when the state of peeling of the superconducting film 3B was examined, no peeling was observed at all. Then, Tc
and Jc (critical current density was investigated. As a result, Tc is
90K, Jc was 150A/cm 2 .

〔発明の効果〕〔Effect of the invention〕

以上説明したように、この発明によれば、Tc
およびJcの値が大きく、しかも熱処理時に割れが
発生しにくい超電導皮膜が形成された超電導材を
容易に製造することができるという効果がもたら
される。
As explained above, according to this invention, Tc
This brings about the effect that it is possible to easily produce a superconducting material having a large value of Jc and a superconducting film that is less prone to cracking during heat treatment.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、この発明の、超電導材の製造方法に
使用するプラズマ溶射装置を示す断面図である。 図面において、1……プラズマ溶射装置、2…
…基材、3A……中間層、3B……超電導皮膜、
4……真空容器、5……溶射ノズル、6……電
極、7……電源、8……超電導素材。
FIG. 1 is a sectional view showing a plasma spraying apparatus used in the method of manufacturing a superconducting material according to the present invention. In the drawings, 1... plasma spraying device, 2...
... Base material, 3A ... Intermediate layer, 3B ... Superconducting film,
4... Vacuum container, 5... Thermal spray nozzle, 6... Electrode, 7... Power source, 8... Superconducting material.

Claims (1)

【特許請求の範囲】[Claims] 1 基材の表面上に、CuxOy基を含む複合酸化物
超電導物質の粉末を溶射して、基材と超電導皮膜
とからなる超電導素材を調製し、次いで、前記超
電導素材に熱処理を施して、超電導材を製造する
に際して、溶射開始後は、前記粉末を半溶融状態
で前記基材の表面上に溶射し、その後、前記粉末
を完全溶融状態で前記基材の表面上に溶射し、か
くして、前記基材と前記超電導皮膜との間に、前
記超電導皮膜の空孔率より大きい空孔率を有する
中間層を形成し、もつて、前記超電導素材の熱処
理時に、前記超電導皮膜に割れが発生するのを防
止することを特徴とする、超電導材の製造方法。
1 A superconducting material consisting of a base material and a superconducting film is prepared by spraying powder of a composite oxide superconducting material containing a Cu x O y group onto the surface of a base material, and then heat treatment is performed on the superconducting material. When producing a superconducting material, after starting thermal spraying, the powder is thermally sprayed in a semi-molten state onto the surface of the base material, and then the powder is thermally sprayed in a completely molten state onto the surface of the base material, In this way, an intermediate layer having a porosity greater than that of the superconducting film is formed between the base material and the superconducting film, thereby preventing cracks in the superconducting film during heat treatment of the superconducting material. A method for producing a superconducting material, characterized by preventing generation of superconducting materials.
JP62331100A 1987-12-26 1987-12-26 Production of superconducting material Granted JPH01172555A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62331100A JPH01172555A (en) 1987-12-26 1987-12-26 Production of superconducting material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62331100A JPH01172555A (en) 1987-12-26 1987-12-26 Production of superconducting material

Publications (2)

Publication Number Publication Date
JPH01172555A JPH01172555A (en) 1989-07-07
JPH0431021B2 true JPH0431021B2 (en) 1992-05-25

Family

ID=18239859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62331100A Granted JPH01172555A (en) 1987-12-26 1987-12-26 Production of superconducting material

Country Status (1)

Country Link
JP (1) JPH01172555A (en)

Also Published As

Publication number Publication date
JPH01172555A (en) 1989-07-07

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