JPH04314821A - Method for surface hardening treatment - Google Patents
Method for surface hardening treatmentInfo
- Publication number
- JPH04314821A JPH04314821A JP8254491A JP8254491A JPH04314821A JP H04314821 A JPH04314821 A JP H04314821A JP 8254491 A JP8254491 A JP 8254491A JP 8254491 A JP8254491 A JP 8254491A JP H04314821 A JPH04314821 A JP H04314821A
- Authority
- JP
- Japan
- Prior art keywords
- steel material
- steel
- hard film
- film
- hard
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 22
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 56
- 239000010959 steel Substances 0.000 claims abstract description 56
- 238000005121 nitriding Methods 0.000 claims abstract description 20
- 239000000919 ceramic Substances 0.000 claims abstract description 11
- 239000002184 metal Substances 0.000 claims abstract description 10
- 229910052751 metal Inorganic materials 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims description 46
- 238000000576 coating method Methods 0.000 claims description 11
- 239000011248 coating agent Substances 0.000 claims description 6
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 15
- 150000004767 nitrides Chemical class 0.000 abstract description 3
- 239000011148 porous material Substances 0.000 abstract description 3
- 238000007751 thermal spraying Methods 0.000 abstract description 2
- 229910018509 Al—N Inorganic materials 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 23
- 150000002500 ions Chemical class 0.000 description 12
- 239000007789 gas Substances 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 5
- 229910010037 TiAlN Inorganic materials 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 229910001240 Maraging steel Inorganic materials 0.000 description 1
- 229910010038 TiAl Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000003483 aging Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- -1 nitrogen ions Chemical class 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
【0001】0001
【産業上の利用分野】本発明は表面硬化処理方法に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface hardening method.
【0002】0002
【従来の技術】従来、鋼材にメッキ、蒸着を施し、金属
あるいはセラミックスの硬質膜により表面を硬化する表
面硬化処理方法が知られている。2. Description of the Related Art Conventionally, a surface hardening treatment method is known in which a steel material is plated or vapor-deposited and the surface is hardened with a hard metal or ceramic film.
【0003】0003
【発明が解決しようとする課題】しかし、鋼材にメッキ
、蒸着を施したままのものにあっては、未だ表面硬度が
十分でない場合があった。かといって、鋼材の表面を硬
化すべく予め鋼材の表面に窒化層を設け、窒化層の表面
にメッキ、蒸着を施すと、メッキ等による金属あるいは
セラミックスの硬質膜の付着力が弱く、耐摩耗性が悪い
ことにより耐久性に劣ることとなる。[Problems to be Solved by the Invention] However, steel materials that have been plated or vapor-deposited still have insufficient surface hardness in some cases. However, if a nitrided layer is provided on the surface of the steel material in advance to harden the surface of the steel material, and then plating or vapor deposition is applied to the surface of the nitrided layer, the adhesion of the hard metal or ceramic film caused by plating will be weak, resulting in poor wear resistance. Poor properties lead to poor durability.
【0004】本発明は、上記従来の不具合に鑑みてなさ
れたものであって、金属やセラミックスの硬質膜を強力
に付着させたまま、従来よりも表面硬度を高くできる表
面硬化処理方法を提供することを目的とする。The present invention has been made in view of the above-mentioned conventional problems, and provides a surface hardening treatment method that can increase the surface hardness compared to the conventional method while strongly adhering a hard film of metal or ceramics. The purpose is to
【0005】[0005]
【課題を解決するための手段】本発明の表面硬化処理方
法は、鋼材に金属あるいはセラミックスの硬質膜を被覆
する被覆工程と、該硬質膜が被覆された該鋼材を窒化処
理する窒化処理工程とからなることを特徴とするもので
ある。[Means for Solving the Problems] The surface hardening treatment method of the present invention comprises a coating step of coating a steel material with a hard film of metal or ceramics, and a nitriding step of nitriding the steel material coated with the hard film. It is characterized by consisting of.
【0006】被覆工程では、鋼材に金属あるいはセラミ
ックスの硬質膜を被覆する。この被覆工程としては、溶
射、CVD、真空蒸着、イオンプレーティング、SIP
(スパッタイオンプレーティング)等を採用することが
できる。金属あるいはセラミックスの硬質膜は、窒素を
含有するものであることが表面硬度向上の点で好ましい
。被覆工程として、SIP処理により、TiAlN、T
iAl6V4CN、TiN等の硬質膜を施すことが表面
硬度向上の点で好ましい。In the coating step, the steel material is coated with a hard metal or ceramic film. This coating process includes thermal spraying, CVD, vacuum deposition, ion plating, SIP
(sputter ion plating) etc. can be adopted. The metal or ceramic hard film preferably contains nitrogen from the viewpoint of improving surface hardness. As a coating process, TiAlN, T
It is preferable to apply a hard film such as iAl6V4CN or TiN from the viewpoint of improving surface hardness.
【0007】窒化処理工程では、硬質膜が被覆された鋼
材を窒化処理する。この窒化処理工程は、イオン窒化処
理として、その鋼材を低圧力下の窒素と水素との混合ガ
ス中に置き、その鋼材を陰極として電圧を印加し、混合
ガスをグロー放電させることにより行なうことが表面硬
度向上の点で好ましい。In the nitriding process, the steel coated with the hard film is nitrided. This nitriding process can be performed as an ion nitriding process by placing the steel material in a mixed gas of nitrogen and hydrogen under low pressure, applying a voltage using the steel material as a cathode, and causing the mixed gas to glow discharge. This is preferable in terms of improving surface hardness.
【0008】[0008]
【作用】鋼材に金属あるいはセラミックスの硬質膜を被
覆すると、その硬質膜は多孔質に形成される。本発明の
表面硬化処理方法では、この後に窒化処理を施すため、
窒化処理の際に窒素が硬質膜の孔から鋼材に作用し、鋼
材の表面が窒化層を介してより硬化されると考えられる
。[Operation] When a steel material is coated with a hard film of metal or ceramics, the hard film becomes porous. In the surface hardening treatment method of the present invention, since the nitriding treatment is performed after this,
It is thought that during the nitriding treatment, nitrogen acts on the steel material through the pores of the hard film, and the surface of the steel material is further hardened through the nitrided layer.
【0009】また、鋼材に被覆した硬質膜が窒素を含有
するものであれば、窒化処理の際の窒素と硬質膜の窒素
とが鋼材に拡散すると考えられる。窒化処理工程がSI
P処理によるのであれば、窒素がより拡散しやすいと考
えられる。こうして、予め鋼材の表面に窒化層を施して
その後にメッキ等を施すよりも硬質膜の付着力が強く、
かつ十分な表面硬度が得られる。Furthermore, if the hard film coated on the steel material contains nitrogen, it is thought that the nitrogen during the nitriding treatment and the nitrogen in the hard film will diffuse into the steel material. Nitriding process is SI
If P treatment is used, nitrogen is considered to be more likely to diffuse. In this way, the adhesion of the hard film is stronger than if a nitrided layer is applied to the surface of the steel material in advance and then plated, etc.
And sufficient surface hardness can be obtained.
【0010】0010
【実施例】以下、本発明を具体化した実施例を比較例と
ともに図面を参照しつつ説明する。
(実施例)まず、マルエイジング鋼に機械加工を施し、
ウレタン成形機用部品形状の鋼材を用意した。そして、
その鋼材を400〜600℃、3時間で時効硬化処理し
、表面硬度Hv(200g)484〜544とした。
この後、その鋼材に仕上げ機械加工を施した。[Examples] Examples embodying the present invention will be described below together with comparative examples with reference to the drawings. (Example) First, maraging steel was machined,
A steel material in the shape of a part for a urethane molding machine was prepared. and,
The steel material was subjected to age hardening treatment at 400 to 600°C for 3 hours to give a surface hardness of Hv (200 g) of 484 to 544. After this, the steel material was subjected to finish machining.
【0011】{被覆工程}仕上げ機械加工後の鋼材にS
IP処理を施した。すなわち、その鋼材を10−5mb
ar以下の真空容器内に装備し、この真空容器内に15
0〜250℃でArガスを導入して2〜8×10−3m
barの圧力とした。そして、TiAlNターゲットを
陰極及び陽極として400〜600Vの直流電界を印加
し、Arガスにグロー放電を生じさせてArガスからA
rイオンを電離させた。このArイオンにより鋼材の表
面を洗浄するとともに、Arイオンによりターゲットか
らTi、Al、Nイオンを飛ばし、鋼材表面にTi、A
l、Nイオンを付着させた。この後、鋼材を冷却した。
こうして、厚さ2μmのTiAlNからなる硬質膜を施
した。この硬質膜は多孔質に形成されていた。{Coating process} Applying S to the steel material after finish machining
IP treatment was performed. In other words, the steel material is 10-5mb
It is equipped in a vacuum container below ar, and 15
2 to 8 x 10-3m by introducing Ar gas at 0 to 250℃
The pressure was set at bar. Then, a DC electric field of 400 to 600 V is applied using the TiAlN target as a cathode and an anode to cause a glow discharge in the Ar gas, and the A
The r ions were ionized. These Ar ions clean the surface of the steel material, and the Ar ions also remove Ti, Al, and N ions from the target, and the surface of the steel material is coated with Ti, Al, and N ions.
l, N ions were attached. After this, the steel material was cooled. In this way, a hard film made of TiAlN with a thickness of 2 μm was applied. This hard film was porous.
【0012】{窒化処理工程}次いで、硬質膜が被覆さ
れた鋼材をイオン窒化処理した。すなわち、その鋼材を
陰極として13Pa以下の真空容器内に装備し、この真
空容器内に400〜480℃で窒素:水素=1:1(体
積比)の混合ガスを導入して133〜266Paの圧力
とした。そして、陽極に400〜500Vの直流電界を
印加し、混合ガスにグロー放電を生じさせて混合ガスか
らNイオンを電離させた。0.5〜1.5時間その状態
を保った。この後、鋼材を冷却した。こうして、硬質膜
と鋼材との間に厚さ0.05〜0.15mmの鉄と窒素
との化合物からなる窒化層を形成した。{Nitriding process} Next, the steel coated with the hard film was subjected to ion nitriding. That is, the steel material is used as a cathode in a vacuum container with a pressure of 13 Pa or less, and a mixed gas of nitrogen:hydrogen = 1:1 (volume ratio) is introduced into the vacuum container at 400 to 480°C to a pressure of 133 to 266 Pa. And so. Then, a DC electric field of 400 to 500 V was applied to the anode to cause glow discharge in the mixed gas, thereby ionizing N ions from the mixed gas. The condition was maintained for 0.5-1.5 hours. After this, the steel material was cooled. In this way, a nitrided layer made of a compound of iron and nitrogen and having a thickness of 0.05 to 0.15 mm was formed between the hard film and the steel material.
【0013】こうして得た処理済鋼材の断面を図1に示
す。この処理済鋼材は、鋼材1の表面側に窒化層2が形
成され、さらに表面側に硬質層3が形成されていた。
(比較例)実施例と同種の鋼材を用い、実施例と同様に
被覆工程を実施した。こうして、厚さ2μmのTiAl
Nからなる硬質膜を施した。この硬質膜は多孔質に形成
されていた。A cross section of the treated steel material thus obtained is shown in FIG. In this treated steel material, a nitride layer 2 was formed on the surface side of the steel material 1, and a hard layer 3 was further formed on the surface side. (Comparative Example) Using the same type of steel as in the example, the coating process was carried out in the same manner as in the example. In this way, a 2 μm thick TiAl
A hard film made of N was applied. This hard film was porous.
【0014】こうして得た処理済鋼材の断面を図2に示
す。この処理済鋼材は、鋼材1の表面側に硬質層3が形
成されていた。
(評価)実施例による処理済鋼材の表面硬度は、Hv(
50g)980〜1000、Hv(200g)850で
あった。一方、比較例による処理済鋼材の表面硬度は、
Hv(50g)960〜1000、Hv(200g)5
70〜590であった。FIG. 2 shows a cross section of the treated steel thus obtained. In this treated steel material, a hard layer 3 was formed on the surface side of the steel material 1. (Evaluation) The surface hardness of the treated steel material according to the example is Hv (
50g) 980-1000, Hv (200g) 850. On the other hand, the surface hardness of the treated steel material according to the comparative example is
Hv (50g) 960-1000, Hv (200g) 5
It was 70-590.
【0015】したがって、実施例の表面硬化処理方法で
は、窒化処理工程を行なわない比較例よりも表面硬度が
Hv(200g)向上していることがわかる。すなわち
、実施例の方法では、被覆工程の後に窒化処理工程とし
てイオン窒化処理を施すため、Nイオンが硬質膜3の孔
から鋼材1に作用し、鋼材1の表面が窒化層2を介して
より硬化されていると考えられる。また、実施例の方法
では、鋼材1に被覆した硬質膜3が窒素を含有するTi
AlNであるため、イオン窒化処理の際の窒素イオンと
硬質膜3の窒素とがSIP処理により鋼材1に拡散しや
すかったと考えられる。Therefore, it can be seen that the surface hardening method of the example improves the surface hardness by Hv (200 g) compared to the comparative example in which the nitriding process is not performed. That is, in the method of the embodiment, since the ion nitriding process is performed as a nitriding process after the coating process, N ions act on the steel material 1 through the pores of the hard film 3, and the surface of the steel material 1 is further damaged through the nitrided layer 2. It is thought that it has been hardened. Further, in the method of the embodiment, the hard film 3 coated on the steel material 1 is made of Ti containing nitrogen.
Since it is AlN, it is considered that nitrogen ions during the ion nitriding treatment and nitrogen in the hard film 3 were easily diffused into the steel material 1 by the SIP treatment.
【0016】これにより、予め鋼材1の表面に窒化層を
施してその後にメッキ等を施すよりも硬質膜3の付着力
が強く、かつ十分な表面硬度が得られることがわかる。[0016] This shows that the adhesion of the hard film 3 is stronger and a sufficient surface hardness can be obtained than when a nitride layer is previously applied to the surface of the steel material 1 and then plating or the like is applied.
【0017】[0017]
【発明の効果】以上詳述したように、本発明の表面硬化
処理方法では、鋼材に金属あるいはセラミックスの硬質
膜を被覆した後、窒化処理を行っているため、金属やセ
ラミックスの硬質膜を強力に付着させたまま、従来より
も表面硬度を高くすることができる。[Effects of the Invention] As detailed above, in the surface hardening treatment method of the present invention, the nitriding treatment is performed after coating the steel material with a metal or ceramic hard film. The surface hardness can be made higher than before while the adhesive remains attached to the surface.
【0018】したがって、この表面硬化処理方法により
鋼材の表面硬度を向上させれば、その鋼材は耐摩耗性に
優れることにより、優れた耐久性を発揮することができ
る。[0018] Therefore, if the surface hardness of the steel material is improved by this surface hardening treatment method, the steel material will have excellent abrasion resistance and will be able to exhibit excellent durability.
【図1】実施例の表面硬化処理方法を行った処理済鋼材
の断面図である。FIG. 1 is a sectional view of a treated steel material subjected to a surface hardening treatment method of an example.
【図2】比較例の表面硬化処理方法を行った処理済鋼材
の断面図である。FIG. 2 is a cross-sectional view of a treated steel material subjected to a surface hardening treatment method of a comparative example.
1…鋼材 2…窒化層
3…硬質膜1... Steel material 2... Nitrided layer
3...Hard membrane
Claims (1)
を被覆する被覆工程と、該硬質膜が被覆された該鋼材を
窒化処理する窒化処理工程とからなることを特徴とする
表面硬化処理方法。1. A surface hardening treatment method comprising: a coating step of coating a steel material with a metal or ceramic hard film; and a nitriding step of nitriding the steel material coated with the hard film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8254491A JPH04314821A (en) | 1991-04-15 | 1991-04-15 | Method for surface hardening treatment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8254491A JPH04314821A (en) | 1991-04-15 | 1991-04-15 | Method for surface hardening treatment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04314821A true JPH04314821A (en) | 1992-11-06 |
Family
ID=13777448
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8254491A Pending JPH04314821A (en) | 1991-04-15 | 1991-04-15 | Method for surface hardening treatment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04314821A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9714470B2 (en) | 2013-03-05 | 2017-07-25 | Kia Motors Corporation | Method and system for die compensation and restoration using high-velocity oxy-fuel thermal spray coating and plasma ion nitriding |
| CN107460485A (en) * | 2017-06-28 | 2017-12-12 | 江苏大学 | A kind of ion sputter prepares controllable nano porous method in aperture in metal surface |
-
1991
- 1991-04-15 JP JP8254491A patent/JPH04314821A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9714470B2 (en) | 2013-03-05 | 2017-07-25 | Kia Motors Corporation | Method and system for die compensation and restoration using high-velocity oxy-fuel thermal spray coating and plasma ion nitriding |
| US10407776B2 (en) | 2013-03-05 | 2019-09-10 | Hyundai Motor Company | Method and system for die compensation and restoration using high-velocity oxy-fuel thermal spray coating and plasma ion nitriding |
| CN107460485A (en) * | 2017-06-28 | 2017-12-12 | 江苏大学 | A kind of ion sputter prepares controllable nano porous method in aperture in metal surface |
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