JPH0433651U - - Google Patents
Info
- Publication number
- JPH0433651U JPH0433651U JP7413390U JP7413390U JPH0433651U JP H0433651 U JPH0433651 U JP H0433651U JP 7413390 U JP7413390 U JP 7413390U JP 7413390 U JP7413390 U JP 7413390U JP H0433651 U JPH0433651 U JP H0433651U
- Authority
- JP
- Japan
- Prior art keywords
- flow path
- coolant flow
- ion implantation
- cooling element
- embedded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005468 ion implantation Methods 0.000 claims description 4
- 239000002826 coolant Substances 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 2
- 238000010521 absorption reaction Methods 0.000 claims 1
- 230000005855 radiation Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図はこの考案の一実施例のイオン注入用プ
ラテンの概略構造図、第２図は従来のイオン注入
用プラテンの概略構造図である。
１……イオン注入用プラテン、２……電子冷却
素子、６……冷媒流路。
FIG. 1 is a schematic structural diagram of an ion implantation platen according to an embodiment of this invention, and FIG. 2 is a schematic structural diagram of a conventional ion implantation platen. 1... platen for ion implantation, 2... electronic cooling element, 6... coolant channel.
Claims (1)
て、放熱部が冷媒流路内に露呈し吸熱部が表面近
傍に位置する電子冷却素子を埋設したことを特徴
とするイオン注入用プラテン。 1. An ion implantation platen provided with a coolant flow path, characterized in that an electronic cooling element having a heat radiation part exposed in the coolant flow path and a heat absorption part located near the surface is embedded.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990074133U JPH0740520Y2 (en) | 1990-07-11 | 1990-07-11 | Platen for ion implantation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990074133U JPH0740520Y2 (en) | 1990-07-11 | 1990-07-11 | Platen for ion implantation |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0433651U true JPH0433651U (en) | 1992-03-19 |
| JPH0740520Y2 JPH0740520Y2 (en) | 1995-09-20 |
Family
ID=31613562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990074133U Expired - Lifetime JPH0740520Y2 (en) | 1990-07-11 | 1990-07-11 | Platen for ion implantation |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0740520Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6434752U (en) * | 1987-08-26 | 1989-03-02 |
-
1990
- 1990-07-11 JP JP1990074133U patent/JPH0740520Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6434752U (en) * | 1987-08-26 | 1989-03-02 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0740520Y2 (en) | 1995-09-20 |
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