JPH04340477A - Measuring apparatus for multiple resistance - Google Patents

Abstract

PURPOSE:To reduce a wiring amount of a feed line and a detective line without lowering the precision in voltage detection relating to measurement of resistance, by devising a common line of forward or backward channels of the feed line and the detection line, regarding a measuring apparatus of multiple resistors, an apparatus wherein measuring probes are put at once on a number of resistors to be measured and are scanned in sequence electrically and the resistances are measured by a four-pole method, in particular. CONSTITUTION:A current feed control means 11 which controls forward-channel feeding of a constant current I for each of a plurality of resistors to be measured of an object 15 of measurement, a first current/voltage feed control means 12 which controls backward-channel feed of the constant current I relating to the resistors to be measured and backward-channel detection of a voltage V generated in each of the resistors, a first resistance measuring means 13 which measures the resistance by a four-terminal method, and a first control means 14 which controls input/output of the current feed control means 11, the first current/voltage feed control means 12 and the first resistance measuring means 13, are provided. The construction includes that one terminal of each of the resistor to be measured is connected to a common line L1 for voltage.

Description

[Detailed description of the invention]

[Table of Contents] Industrial Application Fields Conventional Technology (FIG. 7) Problems to be Solved by the Invention (FIG. 8) Means for Solving the Problems (FIGS. 1 and 2) Working Examples (1) First (Figs. 3 and 4) (2) Description of the second embodiment (Figs. 5 and 6) Effects of the invention

0002

[Field of Industrial Application] The present invention relates to a multi-resistance measuring device, and more specifically, the present invention relates to a multi-resistance measuring device. This relates to a device that performs measurements.

[0003] In recent years, as semiconductor integrated circuit devices have become highly integrated and highly functional, wiring patterns between circuits in electronic devices have also been formed with high density. For example, a large number of regularly arranged wiring patterns are formed on a circuit board of a large-sized computer, and a multi-resistance measuring device is used to test a large number of resistances to be measured in the wiring patterns when testing the reliability of the wiring patterns.

[0004]According to this, a four-wire wiring system in which two power supply lines for constant current and two detection lines for voltage detection are wired to one resistor to be measured. method is adopted. For this reason, as the resistance to be measured of the object to be measured increases, the amount of wiring for the power supply line and detection line of the resistance measuring device must also increase.

[0005] Therefore, it is possible to reduce the amount of wiring by devising a common line for the outgoing and returning routes of the power supply line and detection line related to the resistance measurement without reducing the voltage detection accuracy related to the resistance measurement. A device that can do this is desired.

[0006]

2. Description of the Related Art FIGS. 7 and 8 are explanatory diagrams of a conventional example. FIG. 7 shows a configuration diagram of a conventional multi-resistance measuring device.

For example, a device that measures resistance by applying the measurement probe 4 to the object to be measured 5 at once and electrically scanning it sequentially has a first current/voltage scanner (+ side )1, second current/voltage scanner (-
side) 2 and a resistance measuring circuit 3.

The function of the device is to measure a large number of resistors R1, R2, etc., such as the wiring pattern of a computer board, etc.
When the measurement probe 4 is aligned with Rn, on the + side of the object to be measured 5 (hereinafter referred to as the outward path), a constant current I is applied to each resistance to be measured R1, R2, . is controlled by the first current/voltage scanner (+ side) 1, and the resistors to be measured R1, R2...Rn
The voltage V generated each time is detected and controlled by the first current/voltage scanner (+ side) 1. Note that the constant current I is supplied from the constant current source 3A of the resistance measurement circuit 3.

[0009] Also, on the - side (hereinafter referred to as the return trip),
The constant current I that returns to the constant current source 3A from each resistor to be measured R1, R2...Rn via the measurement probe is controlled in the return path by the second current/voltage scanner (- side) 2, and also The voltage V generated in each of the resistors R1, R2, . . . Note that the voltage V is detected by the comparator 3B of the resistance measurement circuit 3.

[0010] As a result, the bipolar switches SW of the first and second current/voltage scanners 1 and 2 are scan-controlled, so that the resistance value R of each of the large number of resistances to be measured R1, R2...Rn is controlled. (V/I) is continuously measured by the four-terminal method. Note that the four-terminal method has the advantage of being able to measure the resistance to be measured Rn without being affected by the contact resistance of the measurement probe 4.

[0011]

[Problems to be Solved by the Invention] According to the conventional example, for one resistor Rn of the object to be measured 5, there are two power supply lines serving as the forward and return paths of the constant current I, and the voltage V.
A four-wire wiring method is adopted in which four wires in total are used, two detection lines serving as an outbound path and a return path for detecting.

Therefore, the resistance to be measured Rn of the object to be measured 5
With the increase in resistance measurement equipment, the amount of wiring for power supply lines and detection lines for the resistance measuring device must also increase. This is due to the fact that wiring patterns between circuits in electronic equipment are formed in high density as semiconductor integrated circuit devices become more highly integrated and highly functional.
This is because n also increases. For example, circuit boards of large computers tend to have a large number of wiring patterns in which signal lines for supplying multi-input logic gate circuits are regularly arranged.

When measuring a large number of resistors R1, R2, . or second current/voltage scanner 2
It is conceivable to use a common line for power supply lines and detection lines.

However, as shown in FIG. 8, there is a problem in that accurate resistance measurement cannot be performed due to the current flowing around through the contact resistance r of the measurement probe.

For example, in the case where the outgoing (+ side) power supply line Lf and detection line Ld are made into a common line and the first current/voltage scanner 1 is omitted, one resistance to be measured R1 of the object to be measured 5 is used. When attempting to measure , the bipolar switch Sw1 of the second current/voltage scanner 2 is turned on (closed).

As a result, the current I flows from the common feeder line Lf to the contact resistance r1i of one measuring probe 4→resistance to be measured R1→contact resistance r of the other measuring probe 4→the second
flows through a first closed circuit to the bipolar switch Sw1 of the current/voltage scanner 2. Note that since the detection line Ld is connected to the high input resistance comparator 3B of the resistance measurement circuit 3, almost no current flows therethrough.

However, outside the first closed circuit, the current I flows from the common feeder line Lf to the adjacent contact resistances r2i, r2v of one measuring probe 4→contact resistances r1i, r1v of the measuring probe 4→ It flows through a second closed circuit from the measuring resistance R1 to the contact resistance r of the other measuring probe 4 to the bipolar switch Sw1 of the second current/voltage scanner 2.

As a result, the voltage Vb detected by the comparator 3B is the parasitic voltage V generated across the contact resistance r1v of the measurement probe 4 in addition to the true voltage V of the resistance to be measured R1.
This results in the addition of r. Note that the parasitic voltage vr is proportional to the shunt current shunted to the adjacent contact resistance r2i,
The shunt current is defined by the ratio of the contact resistance r1i of the measurement probe 4 and the sum of other contact resistances, r1i+r2i+r2v.

Therefore, the first current/voltage scanner 1 and the second current/voltage scanner 2 can be omitted by simply making the power supply line Lf and detection line Ld of the forward path (+ side) and return path (- side) common lines. Although this wiring method can reduce the amount of wiring to about 50%, there is a problem in that the voltage detection accuracy is significantly lowered and the reliability of the resistance measuring device is lowered.

The present invention has been created in view of the problems of the conventional example, and has been developed to improve the forward and return paths of the power supply line and detection line related to resistance measurement without reducing the voltage detection accuracy related to resistance measurement. The object of the present invention is to provide a multi-resistance measuring device that can reduce the amount of wiring by devising common lines.

[0021]

[Means for Solving the Problems] Figs. 1 and 2 respectively show diagrams (parts 1 and 2) of the principle of a multi-resistance measuring device according to the present invention.

The first multi-resistance measuring device of the present invention, as shown in FIG.
2...Rn, a current energization control means 11 that controls the forward energization of a constant current I for each Rn, and a return energization control of the constant current I related to the resistors to be measured R1, R2...Rn, and the resistors to be measured R1, R2...
A first current/voltage energization control means 12 that controls the return path detection of the voltage V generated for each Rn, and the resistors to be measured R1, R.
2...The first resistance measuring means 13 that measures the resistance of Rn by the four-terminal method, the input/output of the current energization control means 11, the first current/voltage energization control means 12, and the first resistance measuring means 13. and a first control means 14 for controlling the resistors R1, R2...Rn, one terminal of which is connected to the voltage common line L.
1.

In the first multi-resistance measuring device, the current energization control means 11 controls the return energization of the constant current I, and the current/voltage energization control means 12 controls the forward energization of the constant current I. It is characterized by

Further, the second multi-resistance measuring device of the present invention, as shown in FIG.
, R2, .
Constant current I energization control for each Rn and the resistance to be measured R1, R
2...Second circuit that controls the return path detection of the voltage V generated for each Rn.
current/voltage energization control means 17, and the resistor to be measured R1.
, R2...Rn by a four-terminal method, the voltage detection control means 16, the second current/voltage energization control means 17, and the second resistance measurement means 1.
a second control means 19 for controlling the input/output of 8;
It is characterized in that one terminal of the resistors to be measured R1, R2, . . . Rn is connected to a common current line L2.

Furthermore, in the second multi-resistance measuring device, the voltage detection control means 16 controls the return detection of the voltage V, and the second current/voltage energization control means 17 controls the return detection of the voltage V.
The above object is achieved by performing outward route detection control.

[0026]

[Function] According to the first multi-resistance measuring device of the present invention,
As shown in FIG. 1, the current supply control means 11, the first current/
A voltage energization control means 12, a first resistance measurement means 13, and a first control means 14 are provided, and the resistances to be measured R1, R2...
One terminal of Rn is connected to the voltage common line L1.

For this reason, via the first control means 14,
When the constant current I is controlled in the forward path by the current energization control means 11 for each of the plurality of resistances to be measured R1, R2, . . . The constant current I related to R2...Rn is controlled to be energized in the return path, and the voltage V generated in each of the resistors to be measured R1, R2...Rn is controlled to be detected in the return path. As a result, the first resistance measuring means 13 sequentially measures the resistances of the resistances to be measured R1, R2, . . . Rn using the four-terminal method. At this time, since one terminal of the resistors to be measured R1, R2...Rn is connected to the voltage common line L1, the forward and backward paths of the constant current I are connected to one of the resistors to be measured Rn of the object to be measured 15. It is possible to adopt a three-wire wiring method in which a total of three wires are used: two power supply lines for detecting the voltage V, and one detection line for the outgoing or returning path for detecting the voltage V.

As a result, the resistance to be measured R of the object to be measured 15 can be measured without reducing the voltage detection accuracy related to resistance measurement.
Even when n increases, it is possible to reduce the amount of wiring for the feeder line and the detection line to about 75% compared to the conventional four-wire wiring method.

Note that the current energization control means 11 controls the return energization of the constant current I, and the current/voltage energization control means 1
Similarly, even when controlling the forward energization of the constant current I using 2, two power supply lines and one detection line are used to wire one resistor Rn of the object 15 to be measured. It becomes possible to adopt a wire wiring method.

Further, according to the second multi-resistance measuring device of the present invention, as shown in FIG.
and a second control means 19, which controls the resistance to be measured R1,
One terminal of R2...Rn is connected to the current common line L2.

Therefore, when the voltage V generated in each of the plurality of resistances to be measured R1, R2, . . . The second current/voltage energization control means 17 controls the constant current I for each resistor to be measured R1, R2...Rn, and the voltage V generated for each resistor to be measured R1, R2...Rn is controlled for return path detection. be done. As a result, in the second resistance measuring means 18, the resistances to be measured R1, R2...Rn are 4.
Resistance is measured using the terminal method. At this time, the resistance to be measured R
Since one terminal of 1, R2...Rn is connected to the current common line L2, one of the resistances to be measured R of the object to be measured 15
A three-wire system in which wiring is performed using a total of three wires: one power supply line for the outward or return path of the constant current I, and two detection lines for the outward and return paths for detecting the voltage V. It becomes possible to adopt a wiring method.

[0032] As with the first device, even if the resistance Rn of the object to be measured 15 increases, the power supply line and the detection line can be The amount of wiring can be reduced to about 75% compared to the conventional four-wire wiring method.

Note that the voltage detection control means 16 controls the voltage V
Similarly, even if the second current/voltage energization control means 17 performs return path detection control or forward path detection control of the voltage V, for one resistance Rn of the object to be measured 15, It becomes possible to adopt a three-wire wiring method in which wiring is performed using two power supply lines and one detection line.

[0034]

Embodiments Next, embodiments of the present invention will be described with reference to the drawings. 3 to 6 are diagrams illustrating a multi-resistance measuring device according to an embodiment of the present invention.

(1) Description of the first embodiment FIG. 3 is a configuration diagram of a multi-resistance measuring device according to the first embodiment of the present invention.
FIG. 4 shows supplementary explanatory diagrams thereof.

For example, a device that measures resistance by applying the measuring probe 4 to the object to be measured 15 at once and electrically scanning it sequentially is shown in FIG. current/voltage scanner (- side) 22
, a first resistance measuring circuit 23 and a first control device 24.

That is, the current scanner (+ side) 21 is an embodiment of the current supply control means 11, and the current scanner (+ side)
The forward current supply of constant current I is controlled for each of the plurality of resistors to be measured R1, R2, . . . Rn. Current scanner (+ side) 2
1 consists of a unipolar switch 21A as shown in FIG.
One terminal of the unipolar switch 21A is connected to the constant current source 23A of the first resistance measurement circuit 23, and the other terminal is connected to the measurement probe 4.

Here, the forward energization control of the constant current I refers to controlling the measurement circuit on the +I side of one resistor Rn of the object 15 to be measured to be an open circuit or a closed circuit. Further, the open circuit and closed circuit on the +I side are controlled by ON/OFF of the single-pole switch 21A, and are controlled based on the first control signal S1 output from the first control device 24, for example.

Note that one terminal of the resistors to be measured R1, R2, . . . Rn is connected to the voltage common line L1 via the measurement probe 4. The voltage common line L1 is connected to the comparator 23B of the first resistance measuring circuit 23. Furthermore, the measurement probes 4 are brought into contact with both ends of the resistances to be measured R1, R2...Rn, and 4 probes are provided for one resistance to be measured R1, and 4n probes are provided for a device that measures n resistances to be measured. It is being

The first current/voltage scanner (-side) 22 is an embodiment of the first current/voltage energization control means 12,
It controls the return energization of the constant current I related to the resistors to be measured R1, R2...Rn, and controls the detection of the voltage V generated for each of the resistors to be measured R1, R2...Rn. The current/voltage scanner (-side) 22 is a bipolar switch 22 as shown in FIG.
One two terminals of the bipolar switch 22A are connected to the comparator 23B and the constant current source 23A of the first resistance measurement circuit 23, and the other two terminals are connected to the measurement probe 4.

Here, the return energization control of the constant current I refers to controlling the measurement circuit on the -I side of one resistance Rn of the object 15 to be measured to an open circuit and a closed circuit. In addition, the open circuit and closed circuit on the -I side are bipolar switch 22A.
For example, the control is performed based on the first control signal S2 output from the first control device 24. Furthermore, the voltage V detection control is the object to be measured 1.
This refers to controlling the voltage measurement circuit of one of the resistances to be measured Rn in No. 5 to open and close circuits.

The open circuit and closed circuit of the voltage measuring circuit are controlled by turning on/off the bipolar switch 22A, for example, based on the second control signal S2 output from the first control device 24. Control is performed in synchronization with the first control signal S1.

The first resistance measuring circuit 23 is an embodiment of the first resistance measuring means 13, and includes a constant current source 23A, a comparator 23B, and an A/D converter 23C. The constant current source 23A supplies a constant current I to the resistances to be measured R1, R2...Rn, and the comparator 23B supplies the resistances to be measured Rn.
The voltage is detected and output to the A/D converter 23C. The A/D converter 23C outputs the A/D converted voltage to the first control device 24 as a first resistance measurement signal Sv1. In addition, the resistances to be measured R1, R2...Rn
is measured by a four-terminal method such as the Kelvin low resistance measurement method.

The first control device 24 is the first control means 14
This is one example of controlling input/output of a current scanner (+ side) 21, a first current/voltage scanner (- side) 22, and a first resistance measuring circuit 23. For example, when measuring the resistance of one resistor Rn of the object to be measured 15, the control device 24 controls the first unipolar switch 21A and the first unipolar switch 21A of the measurement probe 4 connected to the current scanner (+ side) 21. A similar bipolar switch 22A connected to the current/voltage scanner (- side) 22 is turned on, and the unipolar switch 21A of the other current scanner (+ side) 21 and the first
Bipolar switch 2 of the current/voltage scanner (- side) 22
Turn 2A off.

[0045] As a result, the measurement probe 4 is applied to the object to be measured 15 at once, and the resistances to be measured R1, R2, . . . Rn are measured by sequentially electrically scanning the measurement probe 4.

In this way, according to the multi-resistance measuring device according to the first embodiment of the present invention, as shown in FIG. ) 22, first resistance measurement circuit 23 and first control device 2
4, and one terminal of the resistors to be measured R1, R2...Rn is connected to the voltage common line L1.

For this reason, via the first control device 24,
When the constant current I is controlled for each of the plurality of resistances to be measured R1, R2...Rn of the object to be measured 15 by the current scanner (+ side) 21, the first current/voltage scanner (- side) 22
The constant current I related to the resistors to be measured R1, R2...Rn is controlled in the return path, and the resistors to be measured R1, R2...Rn
The voltage V generated each time is detected and controlled.

[0048] At this time, there is no current flowing around via the contact resistance r of the measurement probe 4 due to the second closed circuit as in the conventional example. That is, in FIG. 4, since the electric circuit of the constant current I to the adjacent resistance to be measured R2 is cut off by the current scanner (+ side) 21, the current I is not passed through the voltage common line L1 as in the conventional example. It doesn't flow. With this, the voltage detected by the comparator 23B is the resistance R to be measured.
The true voltage is 1.

As a result, in the first resistance measuring circuit 23, the resistances of the resistors R1, R2, . . . , Rn to be measured are sequentially measured by the four-terminal method. At this time, the resistances to be measured R1, R2...Rn
Since one terminal of is connected to the voltage common line L1,
For one resistor Rn of the object to be measured 15, the sum of two power supply lines that serve as the forward and return routes of the constant current I, and one detection line that serves as the return route for detecting the voltage V. It becomes possible to adopt a three-wire wiring method in which wiring is performed using three wires.

From this, it can be seen that even if the resistance to be measured Rn of the object to be measured 15 increases without reducing the voltage detection accuracy related to resistance measurement, the wiring amount of the feeder line and detection line can be reduced compared to the conventional example. Compared to the four-wire wiring method, it is possible to reduce the amount by about 75%.

In the multi-resistance measuring device according to the first embodiment, the return energization of constant current I is controlled by the current scanner (+ side) 21, and the current/voltage scanner (- side) 2
2, even when controlling the forward energization of the constant current I, wire is similarly wired to one resistance Rn of the object to be measured 15 using two power supply lines and one detection line. 3
It becomes possible to adopt a wire wiring method.

(2) Explanation of the second embodiment FIG. 5 is a configuration diagram of a multi-resistance measuring device according to the second embodiment of the present invention.
FIG. 6 shows supplementary explanatory diagrams thereof.

In FIG. 5, the difference from the first embodiment is that in the second embodiment, one terminal of the resistors to be measured R1, R2, . . . Rn is connected to the common current line L2.

That is, the second multi-resistance measuring device includes a voltage scanner (+ side) 26 and a second current/voltage scanner (-
side) 27, a first resistance measuring circuit 28, and a first control device 29.

Further, the voltage scanner (+ side) 26 is an embodiment of the voltage detection control means 16, and controls the outward path detection of the voltage V generated for each of the plurality of resistances to be measured R1, R2, . . . Rn of the object to be measured 15. It is something that does. Voltage scanner (+ side)
26 consists of a unipolar switch 26A as shown in FIG. It is connected.

Here, the forward path detection control of the voltage V, that is, the open circuit and closed circuit of the voltage measurement circuit is performed using the single pole switch 26.
The second control device 29 is controlled by ON/OFF of A.
The control is performed based on the third control signal S3 output from.

Note that one terminal of the resistors to be measured R1, R2, . . . Rn is connected to the current common line L2 via the measurement probe 4. The current common line L2 is connected to a constant current source 28A of the second resistance measuring circuit 28. In addition, the measurement probes 4 are brought into contact with both ends of the resistances to be measured R1, R2...Rn, as in the first device, and four probes are provided for one resistance to be measured R1, and resistance measurements are performed on n resistances to be measured. In a device that does this, 4n pieces are provided.

The second current/voltage scanner (-side) 27 is an embodiment of the second current/voltage energization control means 17,
It controls the return energization of the constant current I related to the resistors to be measured R1, R2...Rn and the return detection control of the voltage V generated for each of the resistors to be measured R1, R2...Rn. The current/voltage scanner (-side) 27 consists of a bipolar switch 27A as shown in FIG. 28A, and the other two terminals are connected to the measurement probe 4.

Here, the return energization control of the constant current I, that is, the open circuit and closed circuit of the -I side measurement circuit is controlled by ON/OFF of the bipolar switch 27A, and the output from the second control device 29 The control is performed based on the fourth control signal S4. Furthermore, the return path detection control of the voltage V, that is, the open circuit and closed circuit of the voltage measurement circuit is controlled by the bipolar switch 2.
Controlled by ON/OFF of 7A, the second control device 2
Control is performed based on the fourth control signal S4 outputted from 9 in synchronization with the previous third control signal S3.

The second resistance measuring circuit 28 is an embodiment of the second resistance measuring means 18, and includes a constant current source 28A, a comparator 28B, and an A/D converter 28C. Note that these functions are the same as those of the first resistance measuring circuit 23, so explanations thereof will be omitted.

The second control device 29 is the second control means 19
This is one embodiment of the present invention, which controls the input/output of a voltage scanner (+ side) 26, a first current/voltage scanner (- side) 27, and a first resistance measuring circuit 28. For example, when measuring the resistance of one resistance Rn of the object to be measured 15, the control device 29 controls the first unipolar switch 26A and the first unipolar switch 26A of the measurement probe 4 connected to the voltage scanner (+ side) 26. A similar bipolar switch 27A connected to the current/voltage scanner (- side) 27 is turned ON, and the unipolar switch 26A of the other voltage scanner (+ side) 26 and the first
Bipolar switch 2 of the current/voltage scanner (- side) 27
Turn 7A off.

[0062] As a result, the measurement probe 4 is applied to the object to be measured 15 at once, and the resistances to be measured R1, R2, . . . Rn are measured by sequentially electrically scanning the measurement probe 4.

In this way, according to the multi-resistance measuring device according to the second embodiment of the present invention, as shown in FIG. ) 27, second resistance measurement circuit 28 and second control device 2
9 is provided, and one terminal of the resistors to be measured R1, R2, . . . Rn is connected to the current common line L1.

Therefore, via the second control device 29,
When the voltage V generated in each of the plurality of resistances to be measured R1, R2...Rn of the object to be measured 15 is detected and controlled by the voltage scanner (+ side) 26, the voltage is The constant current I related to the resistors to be measured R1, R2...Rn is controlled to be energized in the return path, and the resistors to be measured R1, R2
...The voltage V generated every Rn is controlled to detect the return path.

At this time, there is no current flowing around through the contact resistance r of the measurement probe 4 due to the second closed circuit as in the conventional example. That is, in FIG. 6, since the electric circuit of the constant current I related to the adjacent resistance to be measured R2 is cut off by the voltage scanner (+ side) 26, as in the conventional example,
Current I does not flow through common current line L2. As a result, the voltage detected by the comparator 28B becomes the true voltage of the resistor to be measured R1.

Thereby, in the second resistance measuring circuit 28, the resistances of the resistors to be measured R1, R2, . . . Rn are sequentially measured by the four-terminal method. At this time, the resistances to be measured R1, R2...Rn
Since one terminal of is connected to the current common line L2,
For one resistor Rn of the object to be measured 15, the sum of one power supply line that serves as an outgoing path for constant current I, and two detection lines that serve as an outgoing path and a returning path for detecting the voltage V. It becomes possible to adopt a three-wire wiring method in which wiring is performed using three wires.

From this, even if the resistance to be measured Rn of the object to be measured 15 increases without reducing the voltage detection accuracy related to resistance measurement, as in the first device,
The amount of wiring for power supply lines and detection lines can be reduced to about 75% compared to the conventional four-wire wiring method.

In the multi-resistance measuring device according to the second embodiment, the voltage scanner (+ side) 26 performs return energization control related to the voltage V, and the current/voltage scanner (- side)
27, even if the forward energization of the voltage V is controlled by 3, one power supply line and two detection lines are used to wire one resistance Rn of the object 15 to be measured.
It becomes possible to adopt a wire wiring method.

[0069]

Effects of the Invention As explained above, according to the first multi-resistance measuring device of the present invention, the current supply control means, the first current /
A voltage energization control means, a first resistance measurement means, and a first control means are provided, and one terminal of the resistance to be measured is connected to a common line for voltage.

Therefore, when the constant current is controlled in the forward path by the current energization control means for each of the plurality of resistors to be measured, the constant current is controlled in the return path by the first current/voltage energization control means. , and the voltage generated for each resistor to be measured is subjected to return detection control. This makes it possible for the first resistance measuring means to sequentially measure the resistance using the four-terminal method from information on one terminal of the resistor to be measured connected to the voltage common line.

[0071] Furthermore, it is possible to adopt a three-wire wiring method with two power supply lines for constant current and one detection line for voltage detection for one resistor to be measured. .

Further, according to the second multi-resistance measuring device of the present invention, the voltage detection control means, the second current/voltage energization control means, the second resistance measurement means, and the second control means are provided, One terminal of the resistor to be measured is connected to a common current line.

Therefore, when the voltage generated in each of a plurality of resistances to be measured is subjected to forward detection control by the voltage detection control means, the second current/voltage energization control means generates a constant current for each resistance to be measured. is controlled to be energized, and the voltage generated each time is controlled to detect the return path. This allows the second resistance measuring means to sequentially measure resistance using the four-terminal method, similar to the first device.

[0074] As a result, even when the resistance to be measured of the object to be measured increases, the voltage detection accuracy related to resistance measurement is not reduced, and the voltage detection accuracy is approximately 25% compared to the conventional 4-wire wiring method. ] It is possible to reduce the number of power supply lines, detection lines, etc.

[Brief explanation of drawings]

[Fig. 1] Principle diagram of the multi-resistance measuring device according to the present invention (Part 1)
).

[Fig. 2] Principle diagram of the multi-resistance measuring device according to the present invention (Part 2)
).

FIG. 3 is a configuration diagram of a multi-resistance measuring device according to a first embodiment of the present invention.

FIG. 4 is a supplementary explanatory diagram of the multi-resistance measuring device according to the first embodiment of the present invention.

FIG. 5 is a configuration diagram of a multi-resistance measuring device according to a second embodiment of the present invention.

FIG. 6 is a supplementary explanatory diagram of a multi-resistance measuring device according to a second embodiment of the present invention.

FIG. 7 is a configuration diagram of a conventional multi-resistance measuring device.

FIG. 8 is a measurement circuit diagram illustrating problems related to a conventional example.

[Explanation of symbols]

11... Current energization control means, 12, 17... First and second current/voltage energization control means, 1
3, 18...first and second resistance measuring means, 14,19...first and second control means, 16...voltage detection control means, L1...common line for voltage, L2...common line for current.

Claims (4)

[Claims] 1. A current energization control means (11) for controlling forward energization of a constant current (I) for each of a plurality of resistances to be measured (R1, R2...Rn) of an object to be measured (15), and said resistance to be measured. A first current/voltage that performs return energization control of constant current (I) related to (R1, R2...Rn) and return detection control of voltage (V) generated for each resistor to be measured (R1, R2...Rn). The energization control means (12) and the resistance to be measured (R1, R2...R
a first resistance measuring means (13) for measuring the resistance of n) by a four-terminal method; the current energization control means (11); a first current/voltage energization control means (12); and a first resistance measuring means. (13) First control means (14) for controlling input/output of
A multi-resistance measuring device, characterized in that one terminal of the resistors to be measured (R1, R2...Rn) is connected to a voltage common line (L1). 2. The multi-resistance measuring device according to claim 1, wherein the current energization control means (11) performs return energization control of a constant current (I), and the current/voltage energization control means (12)
A multi-resistance measuring device, characterized in that it controls forward current energization of a constant current (I). 3. Voltage detection control means (16) for controlling forward path detection of the voltage (V) generated for each of the plurality of resistances to be measured (R1, R2...Rn) of the object to be measured (15); A second current/voltage that controls the constant current (I) for each resistor (R1, R2...Rn) and controls the return path detection of the voltage (V) generated for each resistor to be measured (R1, R2...Rn). An energization control means (17) and the resistance to be measured (R1, R2...R
a second resistance measuring means (18) for measuring the resistance of n) by a four-terminal method, the voltage detection control means (16), a second current/voltage energization control means (17), and a second resistance measuring means. Second control means (19) for controlling input/output of (18)
A multi-resistance measuring device, characterized in that one terminal of the resistors to be measured (R1, R2...Rn) is connected to a common current line (L2). 4. The multi-resistance measuring device according to claim 2, wherein the voltage detection control means (16) performs return detection control of the voltage (V), and the second current/voltage energization control means (16) controls the return path detection of the voltage (V).
7) A multi-resistance measuring device, characterized in that the step 7) controls forward path detection of voltage (V).