JPH0434493U - - Google Patents
Info
- Publication number
- JPH0434493U JPH0434493U JP7722290U JP7722290U JPH0434493U JP H0434493 U JPH0434493 U JP H0434493U JP 7722290 U JP7722290 U JP 7722290U JP 7722290 U JP7722290 U JP 7722290U JP H0434493 U JPH0434493 U JP H0434493U
- Authority
- JP
- Japan
- Prior art keywords
- main body
- communication ports
- turbo
- utility
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図および第２図は本考案によるターボ分子
ポンプの第１実施例を示す図であり、第１図はそ
の正面図、第２図はその底面図、第３図は本考案
の第２実施例を示すターボ分子ポンプの底面図、
第４図および第５図は本考案の第３実施例を示す
図であり、第４図はターボ分子ポンプの底面図、
第５図はその側面図、第６図および第７図はそれ
ぞれ従来のターボ分子ポンプを示すその底面図で
ある。
１１……排気口、１２……ケーブルコネクタ、
１３，１４……水冷口、１６……パージポート、
１８……本体。
1 and 2 are diagrams showing a first embodiment of a turbomolecular pump according to the present invention. FIG. 1 is a front view thereof, FIG. 2 is a bottom view thereof, and FIG. A bottom view of a turbomolecular pump showing an example,
4 and 5 are diagrams showing a third embodiment of the present invention, and FIG. 4 is a bottom view of a turbomolecular pump;
FIG. 5 is a side view, and FIGS. 6 and 7 are bottom views of a conventional turbomolecular pump, respectively. 11...exhaust port, 12...cable connector,
13, 14...Water cooling port, 16...Purge port,
18...Main body.
Claims (1)
するターボ分子ポンプにおいて、前記連通口を本
体の片側に集めて配置したことを特徴とするター
ボ分子ポンプ。 1. A turbo-molecular pump having a plurality of communication ports communicating between the inside and the outside of the main body, characterized in that the communication ports are arranged in a concentrated manner on one side of the main body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7722290U JPH0434493U (en) | 1990-07-18 | 1990-07-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7722290U JPH0434493U (en) | 1990-07-18 | 1990-07-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0434493U true JPH0434493U (en) | 1992-03-23 |
Family
ID=31619408
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7722290U Pending JPH0434493U (en) | 1990-07-18 | 1990-07-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0434493U (en) |
-
1990
- 1990-07-18 JP JP7722290U patent/JPH0434493U/ja active Pending
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