JPH04349926A - Hydrogen gas separation membrane - Google Patents
Hydrogen gas separation membraneInfo
- Publication number
- JPH04349926A JPH04349926A JP12610591A JP12610591A JPH04349926A JP H04349926 A JPH04349926 A JP H04349926A JP 12610591 A JP12610591 A JP 12610591A JP 12610591 A JP12610591 A JP 12610591A JP H04349926 A JPH04349926 A JP H04349926A
- Authority
- JP
- Japan
- Prior art keywords
- porous
- hydrogen
- separation membrane
- gel
- silica
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen; Reversible storage of hydrogen
- C01B3/50—Separation of hydrogen or hydrogen-containing gases from gaseous mixtures, e.g. purification
- C01B3/501—Separation of hydrogen or hydrogen-containing gases from gaseous mixtures, e.g. purification by diffusion
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
- C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
- C01B2203/0405—Purification by membrane separation
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Inorganic Chemistry (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Hydrogen, Water And Hydrids (AREA)
Abstract
Description
【0001】0001
【産業上の利用分野】本発明は混合ガス中の水素を分離
するための水素ガス分離膜に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hydrogen gas separation membrane for separating hydrogen from a mixed gas.
【0002】0002
【従来の技術】水素を含有する混合ガス中から水素を分
離し、99.99%以上の高純度の水素を得る方法とし
てパラジウムを主体とする膜(Pd膜と呼ぶ)が知られ
ている。{石油学会誌、vol.15,No.1,(1
972),P64}2. Description of the Related Art A palladium-based membrane (referred to as a Pd membrane) is known as a method for separating hydrogen from a hydrogen-containing mixed gas and obtaining hydrogen with a purity of 99.99% or higher. {Journal of Japan Petroleum Institute, vol. 15, No. 1, (1
972), P64}
【0003】従来はPdまたはPdを主体とする合金を
伸延し、薄膜とすることによって製造され、この膜は支
持枠で支持して使用されていた。伸延法によって得られ
る膜の厚みの下限には限度があり、又この膜は支持枠で
支持して使用されるため、このような支持方法に耐える
だけの機械的強度を付与する必要があり、あまり薄い膜
を使用すると使用中に膜が破損しやすい。[0003] Conventionally, Pd or a Pd-based alloy was stretched to form a thin film, and this film was used while being supported by a support frame. There is a lower limit to the thickness of the membrane that can be obtained by the stretching method, and since this membrane is used while being supported by a support frame, it is necessary to provide it with sufficient mechanical strength to withstand such a support method. If a too thin membrane is used, the membrane is likely to be damaged during use.
【0004】混合ガス中から特定ガスをガス拡散法によ
って分離する一手段として、ガス分子の平均自由工程よ
り小さい孔径、たとえば10Å〜数1,000Åの細孔
をもつ多孔質のガス分離膜を使用するクヌーセン拡散に
よる分離法が知られている。例えば、かかる方法は比較
的分子比の大きい水素(H2 )/窒素(N2 )、水
素/一酸化炭素(CO)等の混合ガス中のH2 ガス分
離に有効であり、一般にはガス分離膜として有機高分子
膜(ポリイミド、酢酸セルロース、シリコン系等)が採
用されている。As a means of separating a specific gas from a mixed gas by the gas diffusion method, a porous gas separation membrane having pores with a diameter smaller than the mean free path of gas molecules, for example, 10 Å to several 1,000 Å, is used. A separation method using Knudsen diffusion is known. For example, this method is effective for separating H2 gas from mixed gases such as hydrogen (H2)/nitrogen (N2), hydrogen/carbon monoxide (CO), etc., which have relatively large molecular ratios, and is generally used as a gas separation membrane using organic Polymer membranes (polyimide, cellulose acetate, silicone, etc.) are used.
【0005】しかしながら、かかる有機高分子膜は耐熱
性、耐薬品性等の耐久性に劣るという欠陥があるため、
セラミックス多孔体等の無機質材料からなる多孔質のガ
ス分離膜を使用しようとする試みがなされており、また
特開昭59−59223号公報にはかかる無機質材料か
らなる多孔質のガス分離膜が提案され、かつ従来例とし
て示されている。However, such organic polymer films have the disadvantage of poor durability such as heat resistance and chemical resistance.
Attempts have been made to use porous gas separation membranes made of inorganic materials such as porous ceramics, and JP-A-59-59223 proposes a porous gas separation membrane made of such inorganic materials. and is shown as a conventional example.
【0006】また、上記問題点を解決する方法として、
無機質材からなる多孔質支持体にPdを含有する薄膜を
形成させた水素分離膜を使用する方法が特開昭62−1
21616号公報に示されている。[0006] Furthermore, as a method for solving the above problems,
A method using a hydrogen separation membrane in which a thin film containing Pd is formed on a porous support made of an inorganic material is disclosed in JP-A-62-1.
It is shown in Japanese Patent No. 21616.
【0007】[0007]
【発明が解決しようとする課題】前述した従来の方法に
ついては各々次のような問題点がある。
(1)クヌーセン拡散による分離法における混合ガスの
透過係数の比は、理論的には各ガスにおける分子量の逆
数の平方根に等しいため、かなり小さく高濃度の水素ガ
スを得るのは困難である。The conventional methods described above each have the following problems. (1) The ratio of permeability coefficients of mixed gases in the Knudsen diffusion separation method is theoretically equal to the square root of the reciprocal of the molecular weight of each gas, so it is quite small and difficult to obtain highly concentrated hydrogen gas.
【0008】(2)Pd膜法は60〜100μm程度の
比較的厚いものを使用せざるを得ず、高価なPdの使用
量が増大し、また水素の透過速度が小さい。(2) In the Pd film method, a relatively thick film of about 60 to 100 μm must be used, which increases the amount of expensive Pd used and has a low hydrogen permeation rate.
【0009】(3)無機質材料からなる多孔質支持体の
例としては多孔質ガラス、多孔質セラミックス、多孔質
金属等がある。多孔質ガラスは衝撃強度が非常に弱いの
で破損しやすい。多孔質セラミックスの平均細孔径は0
.1μm以上であり、また多孔質金属の平均細孔径は数
十μm以上もあり、両者ともに細孔を被覆するためのP
d膜の厚さが数10μmとなり、水素の透過速度が小さ
い。(3) Examples of porous supports made of inorganic materials include porous glass, porous ceramics, and porous metals. Porous glass has very low impact strength and is easily damaged. The average pore diameter of porous ceramics is 0
.. 1 μm or more, and the average pore diameter of porous metals is several tens of μm or more, and in both cases P is used to cover the pores.
The thickness of the d film is several tens of micrometers, and the hydrogen permeation rate is low.
【0010】本発明上記技術水準に鑑み、従来の分離膜
におけるような不具合がなく、耐熱性・耐圧性があり、
かつ透過速度及び分離係数ともに実用上満足できる性質
を有する水素分離膜を提供しようとするものである。[0010] In view of the above-mentioned technical level, the present invention does not have the problems of conventional separation membranes, has heat resistance and pressure resistance,
The present invention also aims to provide a hydrogen separation membrane having practically satisfactory properties in terms of permeation rate and separation coefficient.
【0011】[0011]
【課題を解決するための手段】本発明は無機多孔体の細
孔内にシリカゲル、アルミナゲルまたはシリカ・アルミ
ナゲルを担持し、さらにその表面にPdを含有する薄膜
を形成させてなることを特徴とする水素ガス分離膜であ
る。[Means for Solving the Problems] The present invention is characterized by supporting silica gel, alumina gel, or silica/alumina gel in the pores of an inorganic porous body, and further forming a thin film containing Pd on the surface of the silica gel, alumina gel, or silica/alumina gel. This is a hydrogen gas separation membrane.
【0012】無機多孔体としては多孔質セラミックス、
多孔質ガラス、多孔質磁器、金属穿孔ろ過体、金属金網
焼結体等があり、本発明においてはいずれのものも使用
できる。しかしながら、無機多孔体の細孔径が大きくな
るとシリカゲル、アルミナゲルまたはシリカ・アルミナ
ゲルの前駆体であるゾルの必要担持量が多く、かつクラ
ックが発生しやすくなり、また細孔径が小さすぎると透
過性能を低下させるので細孔径が100〜10,000
Å程度の無機多孔体を使用することが好ましい。特に、
細孔径1,000Å以上の発泡シリカ、焼結アルミナ及
びムライト等が好ましく使用される。[0012] As the inorganic porous body, porous ceramics,
There are porous glass, porous porcelain, metal perforated filter bodies, metal wire mesh sintered bodies, etc., and any of them can be used in the present invention. However, when the pore size of the inorganic porous material becomes large, the amount of silica gel, alumina gel, or sol that is a precursor of silica/alumina gel is required to be supported, and cracks are likely to occur. The pore diameter is 100 to 10,000.
It is preferable to use an inorganic porous material of about . especially,
Foamed silica, sintered alumina, mullite, etc. with a pore diameter of 1,000 Å or more are preferably used.
【0013】一般に、シリカゲルの製法としては、(1
)水ガラス溶液に大量にNaCl、Na2 SO4 等
の塩を添加し、更に酸が中和して白色粉末状のシリカゲ
ルを得る水ガラス溶液からの沈澱法
(2)SiCl4 を水蒸気流中で燃焼させてSiO2
ガスを生成させ、これを補集するSiCl4 燃焼法
(3)SiO2 を1,700℃付近で蒸発させ、これ
を凝縮させるSiO2 蒸気凝集法
等がある。Generally, the method for producing silica gel is (1
) A precipitation method from a water glass solution in which a large amount of salts such as NaCl, Na2 SO4, etc. are added to the water glass solution, and the acid is further neutralized to obtain white powdery silica gel. (2) SiCl4 is burned in a stream of steam. SiO2
There is the SiCl4 combustion method (3) in which gas is generated and collected, and the SiO2 vapor condensation method in which SiO2 is evaporated at around 1,700° C. and condensed.
【0014】しかしながら、これらの方法によって得ら
れたSiO2 粒子を数十μm程度の薄膜にコーティン
グし、更に10〜30Å程度の多孔質のものとすること
は極めて困難である。そこで、本発明においては上記の
ような不具合がなく薄膜形成可能なシリカゲルを得る方
法としては特願平02−172639号の方法を推奨す
る。[0014] However, it is extremely difficult to coat the SiO2 particles obtained by these methods into a thin film of about several tens of micrometers and to make it porous with a thickness of about 10 to 30 Å. Therefore, in the present invention, the method disclosed in Japanese Patent Application No. 02-172639 is recommended as a method for obtaining silica gel that is free from the above-mentioned problems and can be formed into a thin film.
【0015】すなわち、前記方法においては、シリカゲ
ルの前駆体として例えばエトキシシラン基、メトキシ基
等を含むアルコキシシランを加水分解して得られるもの
を使用することを推奨する。それらのアルコキシシラン
の例としては、テトラエトキシシラン(ケイ酸エチル)
、テトラメトキシシラン(ケイ酸メチル)等がある。That is, in the above method, it is recommended to use a silica gel precursor obtained by hydrolyzing an alkoxysilane containing, for example, an ethoxysilane group or a methoxy group. Examples of those alkoxysilanes include tetraethoxysilane (ethyl silicate)
, tetramethoxysilane (methyl silicate), etc.
【0016】この方法で製造したシリカゲルの平均細孔
径は10〜30Åであり、分子径2.3ÅのH2 透過
には全く抵抗とならない細孔径である。また、このシリ
カゲル表面は従来の多孔体に比べて非常に平滑であるた
め、この表面に膜厚さ1μm以下のPd薄膜を担持して
もピンホールが発生する原因とはならず、H2 透過速
度を大きく向上させる。The average pore diameter of the silica gel produced by this method is 10 to 30 Å, which is a pore diameter that does not provide any resistance to the permeation of H2 having a molecular diameter of 2.3 Å. In addition, since the surface of this silica gel is extremely smooth compared to conventional porous materials, even if a Pd thin film with a thickness of 1 μm or less is supported on this surface, it will not cause pinholes and the H2 permeation rate will increase. greatly improve.
【0017】アルミナゲルの製造方法としては一般に以
下の方法がある。
(1)Alアルコキシドを加水分解する方法Alをイソ
プロピルアルコールに溶解させて作ったイソプロポキシ
ドが低沸点(140.5℃)であるのでよく使用される
。加水分解法としては、アルコール溶液の均一相加水分
解、ベンゼン溶液の不均一相加水分解がある。
(2)Al塩に触媒を加えて加水分解する方法Al塩と
してはAl2 (SO4 )O3 、AlCl3 、A
l(NO3 )O3 等があり、触媒としては硝酸、N
H3 水、Na2 CO3 等がある。
(3)アルミン酸アルカリを加水分解する方法NaAl
O2 水溶液に塩酸を加えて加水分解する。[0017] Generally, there are the following methods for producing alumina gel. (1) Method of hydrolyzing Al alkoxide Isopropoxide prepared by dissolving Al in isopropyl alcohol is often used because it has a low boiling point (140.5°C). Hydrolysis methods include homogeneous phase hydrolysis of alcohol solutions and heterogeneous phase hydrolysis of benzene solutions. (2) Method of hydrolyzing Al salt by adding a catalyst Al salts include Al2 (SO4)O3, AlCl3, A
l(NO3)O3, etc., and the catalysts are nitric acid, N
There are H3 water, Na2 CO3, etc. (3) Method of hydrolyzing alkali aluminate NaAl
Add hydrochloric acid to an O2 aqueous solution to hydrolyze it.
【0018】アルミナゲルは製造方法により異なるが、
約15〜30Åの細孔が形成される。(特願昭59−3
4421号、特願昭60−180980号)[0018] Alumina gel varies depending on the manufacturing method, but
Pores of approximately 15-30 Å are formed. (Special application 1986-3
No. 4421, patent application No. 180980/1980)
【0019
】また、シリカ・アルミナゲルの製造方法としては一般
に以下の方法がある。製造方法としてはアルミニウムア
ルコキシドまたはアルミニウムキレートを加水分解して
得たアルミナゾルを担持した後、けい酸ナトリウム水溶
液を担持し、酸処理後乾燥してゲル化する。
アルミニウムアルコキシドとしてはアルミニウムイソプ
ロポキシド、アルミニウム−2−ブチレート等が、また
、アルミニウムキレートとしてはアルミニウムトリス(
エチルアセトアセテート)やエチルアセトアセテートア
ルミニウムジイソプロピレート等がある。0019
] Furthermore, there are generally the following methods for producing silica/alumina gel. The manufacturing method is to support an alumina sol obtained by hydrolyzing aluminum alkoxide or aluminum chelate, then support an aqueous sodium silicate solution, and then dry and gel after acid treatment. Examples of aluminum alkoxides include aluminum isopropoxide and aluminum-2-butyrate, and examples of aluminum chelates include aluminum tris(
ethyl acetoacetate) and ethyl acetoacetate aluminum diisopropylate.
【0020】上記の方法で製造したシリカ・アルミナゲ
ルの平均細孔径は約10〜20Åである。(特願昭60
−30546号)The average pore diameter of the silica-alumina gel produced by the above method is about 10 to 20 Å. (Special application 1986
-30546)
【0021】Pd薄膜の担持方法としては以下の方法が
ある。
(1)メッキ等の液相法
表面活性化処理(塩化スズの水溶液と塩化パラジウムの
各溶液に交互に浸漬)後、無電解メッキ(パラジウムの
化合物と還元剤を含有する液に浸漬)する方法及び無電
解メッキ後に電気メッキする方法。
(2)真空蒸着法、イオンプレーティング、気相化学反
応法(CVD)等の気相法。The following methods can be used to support the Pd thin film. (1) A method of electroless plating (immersion in a solution containing a palladium compound and a reducing agent) after liquid-phase surface activation treatment such as plating (immersion in an aqueous solution of tin chloride and a solution of palladium chloride alternately). and a method of electroplating after electroless plating. (2) Vapor phase methods such as vacuum evaporation, ion plating, and vapor phase chemical reaction (CVD).
【0022】以上のようにしてPdまたはPd合金の薄
膜を形成させた水素ガス分離膜は水素のみを選択的に透
過する。すなわち、前記ガス分離膜の一方の側に水素を
含有する混合ガスを供給すると、水素ガス分離膜は水素
のみを選択的に透過させ、水素ガス分離膜の他方の側か
ら純粋な水素が流出する。The hydrogen gas separation membrane in which the Pd or Pd alloy thin film is formed as described above selectively permeates only hydrogen. That is, when a mixed gas containing hydrogen is supplied to one side of the gas separation membrane, the hydrogen gas separation membrane selectively permeates only hydrogen, and pure hydrogen flows out from the other side of the hydrogen gas separation membrane. .
【0023】水素の透過速度は温度が高いほど大きく、
また水素ガス分離膜の両側の水素の圧力差が大きいほど
大きくなる。本発明の水素ガス分離膜の好ましい使用温
度範囲は200〜500℃である。[0023] The higher the temperature, the greater the hydrogen permeation rate;
Further, the larger the pressure difference between hydrogen on both sides of the hydrogen gas separation membrane, the larger the difference becomes. The preferred operating temperature range of the hydrogen gas separation membrane of the present invention is 200 to 500°C.
【0024】また、水素透過速度は極めて大きく、40
0℃、圧力差2kg/cm2 の場合100〜140c
m3 /cm2 ・min程度であり、従来の多孔質基
材に直接Pdを担持した水素分離膜の4〜6倍になる。[0024] Furthermore, the hydrogen permeation rate is extremely high, 40
100~140c at 0℃ and pressure difference 2kg/cm2
m3/cm2·min, which is 4 to 6 times that of conventional hydrogen separation membranes in which Pd is directly supported on a porous base material.
【0025】[0025]
【作用】本発明の水素ガス分離膜は従来法に比べてPd
薄膜の厚さが1/5〜1/10になるため、Pd担持量
が減少し、更に水素透過速度も向上するため、大幅なコ
ンパクト化が可能となり、その結果コストも大幅に下げ
ることができる。[Operation] The hydrogen gas separation membrane of the present invention has a higher Pd content than the conventional method.
Since the thickness of the thin film is reduced to 1/5 to 1/10, the amount of Pd supported is reduced and the hydrogen permeation rate is also improved, making it possible to significantly downsize the product and, as a result, significantly reduce costs. .
【0026】[0026]
(実施例1)基材の無機多孔体として、日本ガイシ(株
)製セラミック管(平均細孔径0.5μm、外径10m
m、長さ250mm)を使用し、以下の処理を行った。(Example 1) A ceramic tube manufactured by NGK Insulators (average pore diameter 0.5 μm, outer diameter 10 m
m, length 250 mm), and the following processing was performed.
【0027】(1)シリカゾル1の調製ビーカ内に表1
に示す組成の薬剤をいれ、常温でスターラで急速攪拌・
混合した。攪拌を継続したまま、80℃(沸騰状態)に
予熱すると発熱反応を開始し、約20〜25分で粘度が
急速に高くなる。沸騰開始後15分、20分、25分の
液をそれぞれ冷却し、1−A、1−B、1−C液とする
。1−Aはやや粘度が高い液であり、1−B液はさらに
粘度が高く、常温に冷却するとゼリー状の液である。1
−C液液は常温冷却により固化する状態にある。(1) Preparation of silica sol 1 Place Table 1 in the beaker.
Add the chemical composition shown in the figure below, and stir rapidly with a stirrer at room temperature.
Mixed. When preheated to 80° C. (boiling state) while stirring, an exothermic reaction starts, and the viscosity increases rapidly in about 20 to 25 minutes. The liquids are cooled 15 minutes, 20 minutes, and 25 minutes after the start of boiling, respectively, to obtain liquids 1-A, 1-B, and 1-C. 1-A is a liquid with a slightly high viscosity, and liquid 1-B has an even higher viscosity and becomes a jelly-like liquid when cooled to room temperature. 1
-C liquid The liquid is in a state of being solidified by cooling at room temperature.
【表1】[Table 1]
【0028】(2)シリカゾル2の調製ビーカ内に表1
に示す組成の薬剤を入れ、常温でスターラにより60分
間攪拌・混合し、シリカゾル2とした。(2) Preparation of silica sol 2 Place Table 1 in the beaker.
A chemical having the composition shown below was added and stirred and mixed using a stirrer at room temperature for 60 minutes to obtain Silica Sol 2.
【0029】(3)シリカゾルの担持方法(a)シリカ
ゾル1液の担持
■ 無機多孔体よりなる管を前記シリカゾル1−A液
中に浸漬して該多孔体管壁にシリカゾルを担持した。■
該多孔体を200℃に設定した電気炉内で10分間
焼成した。■ 次に該多孔体を300℃に設定した電
気炉内で10分間焼成した。■ 次に該多孔体を55
0℃に設定した電気炉内で10分間焼成した。■ 上
記■〜■の操作を2回繰り返した。■ 次に1−B液
を使用して■〜■と同様の処理を行った。■ 次に1
−C液を使用して■〜■と同様の処理を行った。(3) Method for supporting silica sol (a) Supporting 1 liquid of silica sol (2) A tube made of an inorganic porous body was immersed in the silica sol 1-A liquid to support the silica sol on the wall of the porous body tube. ■
The porous body was fired for 10 minutes in an electric furnace set at 200°C. (2) Next, the porous body was fired for 10 minutes in an electric furnace set at 300°C. ■ Next, the porous body was
It was fired for 10 minutes in an electric furnace set at 0°C. ■ The above operations from ■ to ■ were repeated twice. (2) Next, the same treatments as (1) to (4) were carried out using liquid 1-B. ■ Next 1
The same treatments as ① to ① were carried out using -C solution.
【0030】(b)シリカゾル2液の担持次にシリカゾ
ル2液を使用して上記■〜■と同様の処理を行った。(b) Supporting two silica sol liquids Next, using two silica sol liquids, the same treatments as in (1) to (4) above were carried out.
【0031】上記の方法によって製作したシリカゲルを
担持したセラミック管を使用し、さらにその表面に以下
の条件でPdを蒸着したサンプルを製作した。
サンプル1:Pdのみを蒸着
サンプル2:Pdと銀Agの合金(Pd:Ag=85:
15重量比)[0031] Using the ceramic tube supporting silica gel manufactured by the above method, a sample was manufactured in which Pd was further deposited on the surface under the following conditions. Sample 1: Vapor deposited only Pd Sample 2: Alloy of Pd and silver (Pd:Ag=85:
15 weight ratio)
【0032】図1に示す装置を使用して水素透過実験を
行った。水素ガス分離膜1をOリング2でステンレス鋼
製外管3に固定し、その外側を電気炉で加熱する。温度
はサーモカップル8を使用し、内管の中心部で測定した
。A hydrogen permeation experiment was conducted using the apparatus shown in FIG. A hydrogen gas separation membrane 1 is fixed to a stainless steel outer tube 3 with an O-ring 2, and the outside thereof is heated in an electric furnace. The temperature was measured using thermocouple 8 at the center of the inner tube.
【0033】供給孔4からH2 /N2 =1(モル比
)の混合ガスを連続的に供給し、排出孔5からブリード
ガスを排出し、下部の取出孔6から99.99%以上の
純粋な水素を得ることができた。A mixed gas of H2/N2 = 1 (molar ratio) is continuously supplied from the supply hole 4, bleed gas is discharged from the discharge hole 5, and 99.99% or more pure gas is discharged from the lower extraction hole 6. We were able to obtain hydrogen.
【0034】混合ガスの圧力を3kg/cm2 G、ガ
ス流量を20Nl/minで500℃における実験結果
を表2に示す。Table 2 shows the experimental results at 500° C. with a mixed gas pressure of 3 kg/cm 2 G and a gas flow rate of 20 Nl/min.
【表2】[Table 2]
【0035】(実施例2)
(1)ステンレス鋼繊維をランダムに重ねて焼結して得
た金属多孔体の表面にAlを蒸着し、その後真空中で加
熱・拡散処理し、金属多孔体内にAlを拡散させたもの
を酸化処理して、該金属多孔体表面にアルミニウム酸化
物を生成させた金属多孔体を支持材とし、該多孔体内に
アルミナゲル膜を担持した。平均細孔径は1μmである
。(Example 2) (1) Al was vapor-deposited on the surface of a porous metal body obtained by randomly stacking and sintering stainless steel fibers, and then heated and diffused in a vacuum to form an ink inside the porous metal body. A porous metal body in which Al was diffused was subjected to oxidation treatment to generate aluminum oxide on the surface of the porous metal body, and the porous metal body was used as a support material, and an alumina gel film was supported within the porous body. The average pore diameter is 1 μm.
【0036】(2)アルミナゲル膜の担持水100gに
対し5gのアルミニウムイソプロオキシドを80℃に保
持した水中に添加し、アルミニウムイソプロオキシドを
加水分解した。これに0.6mlの濃硝酸を加え、80
℃に24時間保持し、解膠してアルミナゾルを得た。こ
のアルミナゾルに多孔質金属を5分間浸漬した後、室温
で24時間乾燥し、80℃で2時間乾燥した後、更に3
50℃で2時間焼成、600℃で2時間焼成した。この
操作を4回繰り返して金属多孔体内にアルミナゲルを担
持した。(2) Supporting alumina gel membrane 5 g of aluminum isoprooxide was added to 100 g of water maintained at 80° C., and the aluminum isoprooxide was hydrolyzed. Add 0.6ml of concentrated nitric acid to this and
The mixture was kept at ℃ for 24 hours and peptized to obtain an alumina sol. After immersing the porous metal in this alumina sol for 5 minutes, it was dried at room temperature for 24 hours, dried at 80°C for 2 hours, and then further dried for 3 hours.
It was fired at 50°C for 2 hours and at 600°C for 2 hours. This operation was repeated four times to support alumina gel within the porous metal body.
【0037】次に、トリクレン100に対してアルミニ
ウムイソプロオキシドを5の重量比で溶解し、アミルナ
の充填を行った前記多孔質金属をこの溶液に含浸し、ト
リクレンを揮発させ、細孔内にアルミニウムプロオキシ
ドを析出させた。次に、この多孔質金属の片側を減圧し
ながら、100℃のスチーム中に入れてアルミニウムイ
ソプロオキシドを加水分解し、室温で乾燥した後、35
0℃で2時間焼成し、更に600℃で1時間焼成した。
この操作を3回繰り返した。Next, aluminum isoprooxide is dissolved in a weight ratio of 5 parts to 100 parts of trichlene, and the porous metal filled with alumina is impregnated with this solution. Prooxide was precipitated. Next, one side of this porous metal was placed in steam at 100°C under reduced pressure to hydrolyze aluminum isoprooxide, dried at room temperature, and heated to 35°C.
It was fired at 0°C for 2 hours and then at 600°C for 1 hour. This operation was repeated three times.
【0038】以上の操作で製造したアルミナゲルを担持
した多孔質金属の平均細孔分布は16Åであった。The average pore distribution of the alumina gel-supported porous metal produced by the above procedure was 16 Å.
【0039】上記の方法によって製作したアルミナゲル
膜を担持した金属多孔体を使用し、さらにその表面にP
dを蒸着したサンプルを製作した。[0039] A porous metal body supporting an alumina gel film produced by the above method was used, and P was further applied to the surface of the porous metal body.
A sample was prepared by vapor-depositing d.
【0040】このサンプルを使用して、実施例1と同様
な方法で水素透過実験を行った。供給孔4からH2 /
N2 =1(モル比)の混合ガスを連続的に供給し、排
出孔5からブリードガスを排出し、下部の取出孔6から
99.99%以上の純粋な水素を得ることができた。Using this sample, a hydrogen permeation experiment was conducted in the same manner as in Example 1. From supply hole 4 H2 /
A mixed gas of N2 = 1 (molar ratio) was continuously supplied, bleed gas was discharged from the discharge hole 5, and 99.99% or more pure hydrogen could be obtained from the lower extraction hole 6.
【0041】混合ガスの圧力を3kg/cm2 G、ガ
ス流量を20Nl/minで500℃における実験結果
を表3に示す。Table 3 shows the experimental results at 500° C. with a mixed gas pressure of 3 kg/cm 2 G and a gas flow rate of 20 Nl/min.
【表3】[Table 3]
【0042】(実施例3)金網を積層焼結して得た金属
多孔体の表面にAlを蒸着し、その後真空中で加熱・拡
散処理し、金属多孔体内にAlを拡散させたものを酸化
処理して、該金属多孔体表面にアルミニウム酸化物を生
成させた金属多孔体を支持材とし、該多孔体の表面に実
施例1と同様の方法でシリカゲル膜を担持して分離膜を
製造した。
金網: 径 0.5μm 材質
: SUS 304(Example 3) Al was vapor-deposited on the surface of a porous metal body obtained by laminating and sintering wire mesh, and then heated and diffused in a vacuum to diffuse Al into the porous metal body, which was then oxidized. A separation membrane was manufactured by using a metal porous body treated to generate aluminum oxide on the surface of the metal porous body as a support material and supporting a silica gel membrane on the surface of the porous body in the same manner as in Example 1. . Wire mesh: Diameter 0.5μm Material: SUS 304
【0043】上記の方法によって製作したシリカゲル膜
を担持した金属多孔体を使用し、さらにその表面にPd
を蒸着したサンプルを製作した。[0043] A porous metal body supporting a silica gel film prepared by the above method was used, and Pd was further applied to the surface of the porous metal body.
A sample was prepared by vapor-depositing.
【0044】このサンプルを使用して、実施例1と同様
な方法で水素透過実験を行った。供給孔4からH2 /
N2 =1(モル比)の混合ガスを連続的に供給し、排
出孔5からブリードガスを排出し、下部の取出孔6から
99.99%以上の純粋な水素を得ることができた。[0044] Using this sample, a hydrogen permeation experiment was conducted in the same manner as in Example 1. From supply hole 4 H2 /
A mixed gas of N2 = 1 (molar ratio) was continuously supplied, bleed gas was discharged from the discharge hole 5, and 99.99% or more pure hydrogen could be obtained from the lower extraction hole 6.
【0045】混合ガスの圧力を3kg/cm2 G、ガ
ス流量を20Nl/minで500℃における実験結果
を表4に示す。Table 4 shows the experimental results at 500° C. with a mixed gas pressure of 3 kg/cm 2 G and a gas flow rate of 20 Nl/min.
【表4】[Table 4]
【0046】(実施例4)実施例1の方法で製作したシ
リカゲル膜を担持したセラミックス管を使用し、さらに
その表面に無電解メッキ法でPdを担持した。(Example 4) A ceramic tube supporting the silica gel film manufactured by the method of Example 1 was used, and Pd was further supported on its surface by electroless plating.
【0047】無電解メッキは以下の条件で行った。
1)試 薬
塩化テトラアンミンパラジウム(II)〔Pd(NH3
)4〕Cl2 ・H2 ONH3 (28%水溶液)
2)条 件
温度=50℃、 pH=12[0047] Electroless plating was carried out under the following conditions. 1) Reagent Tetraamminepalladium(II) chloride [Pd(NH3
)4]Cl2 ・H2 ONH3 (28% aqueous solution)
2) Conditions Temperature = 50°C, pH = 12
【0048】このサンプルを使用し、実施例1と同じ方
法で水素透過実験を行った。実験結果を表5に示す。Using this sample, a hydrogen permeation experiment was conducted in the same manner as in Example 1. The experimental results are shown in Table 5.
【表5】[Table 5]
【0049】(実施例5)実施例1と同じ日本ガイシ(
株)製セラミック管(平均細孔径0.5μm、外径10
mm、長さ250mm)を使用し、以下の処理を行った
。(Example 5) The same Japanese insulator as in Example 1 (
Ceramic tube made by Co., Ltd. (average pore diameter 0.5 μm, outer diameter 10
mm, length 250 mm), and the following processing was performed.
【0050】(1)シリカゾルの調製
ビーカ内に表6に示す組成の薬剤をいれ、常温でスター
ラで急速攪拌・混合した。攪拌を継続したまま80℃(
沸騰状態)に予熱すると加水分解により沸騰を開始する
。25分沸騰後にビーカの外側から水道水で冷却する。
この状態でシリカゾルはやや粘性がある液である。(1) Preparation of silica sol The chemicals having the composition shown in Table 6 were placed in a beaker and rapidly stirred and mixed with a stirrer at room temperature. Continue stirring at 80°C (
When preheated to boiling state), it starts boiling due to hydrolysis. After boiling for 25 minutes, cool the beaker with tap water from the outside. In this state, silica sol is a slightly viscous liquid.
【表6】[Table 6]
【0051】(2)シリカゾルの担持方法■ 無機多
孔体よりなる管を前記シリカゾル中に浸漬して該多孔体
管壁にシリカゾルを担持した。■ 該多孔体を電気炉
内に設置し、昇温速度10℃で500℃まで昇温し、1
0分間保持して焼成した後、室温に降温した。
■ 上記■〜■の操作を4回繰り返した。(2) Method for supporting silica sol (2) A tube made of an inorganic porous material was immersed in the silica sol, and the silica sol was supported on the wall of the porous tube. ■ The porous body was placed in an electric furnace and heated to 500°C at a heating rate of 10°C.
After firing by holding for 0 minutes, the temperature was lowered to room temperature. ■ The above operations from ■ to ■ were repeated four times.
【0052】(3)上記の方法によって製作したシリカ
ゲル膜を担持した金属多孔体を使用し、さらにその表面
にPdを蒸着したサンプルを製作した。(3) Using the metal porous body supporting the silica gel film manufactured by the above method, a sample was manufactured in which Pd was further deposited on the surface of the metal porous body.
【0053】このサンプルを使用して、実施例1と同様
な方法で水素透過実験を行った。供給孔4からH2 /
N2 =1(モル比)の混合ガスを連続的に供給し、抽
出孔5からブリードガスを排出し、下部の取出孔6から
99.99%以上の純粋な水素を得ることができた。Using this sample, a hydrogen permeation experiment was conducted in the same manner as in Example 1. From supply hole 4 H2 /
A mixed gas of N2 = 1 (molar ratio) was continuously supplied, bleed gas was discharged from the extraction hole 5, and 99.99% or more pure hydrogen could be obtained from the lower extraction hole 6.
【0054】混合ガスの圧力を3kg/cm2 G、ガ
ス流量を20Nl/minで500℃における実験結果
を表7に示す。Table 7 shows the experimental results at 500° C. with a mixed gas pressure of 3 kg/cm 2 G and a gas flow rate of 20 Nl/min.
【表7】[Table 7]
【0055】(実施例6)実施例1と同じ日本ガイシ(
株)製セラミック管(平均細孔径0.5μm、外径10
mm、長さ250mm)を使用し、以下の処理を行った
。(Example 6) The same Japanese insulator as in Example 1 (
Ceramic tube made by Co., Ltd. (average pore diameter 0.5 μm, outer diameter 10
mm, length 250 mm), and the following processing was performed.
【0056】(1)シリカゾルの調製
シリカゾルの原料として、ビーカ内に表8に示す組成の
薬剤をいれ、常温でスターラで急速攪拌・混合した。加
水分解により沸騰を開始する。10分沸騰後にビーカの
外側から水道水で冷却する。この状態でシリカゾルはや
や粘性がある液である。(1) Preparation of silica sol As raw materials for silica sol, chemicals having the composition shown in Table 8 were placed in a beaker and rapidly stirred and mixed with a stirrer at room temperature. Boiling starts due to hydrolysis. After boiling for 10 minutes, cool the beaker with tap water from the outside. In this state, silica sol is a slightly viscous liquid.
【表8】[Table 8]
【0057】(2)シリカゾルの担持方法■ 無機多
孔体よりなる管を前記シリカゾル中に浸漬して該多孔体
管壁にシリカゾルを担持した。■ 該多孔体を電気炉
内に設置し、昇温速度10℃で500℃まで昇温し、3
0分間保持して焼成した後、室温に降温した。
■ 上記■〜■の操作を4回繰り返した。(2) Method for supporting silica sol (2) A tube made of an inorganic porous material was immersed in the silica sol, and the silica sol was supported on the wall of the porous tube. ■ The porous body was placed in an electric furnace and heated to 500°C at a heating rate of 10°C.
After firing by holding for 0 minutes, the temperature was lowered to room temperature. ■ The above operations from ■ to ■ were repeated four times.
【0058】(3)上記の方法によって製作したシリカ
ゲル膜を担持した金属多孔体を使用し、さらにその表面
にPdを蒸着したサンプルを製作した。(3) A sample was manufactured using the metal porous body supporting the silica gel film produced by the above method, and further having Pd deposited on its surface.
【0059】このサンプルを使用して、実施例1と同様
な方法で水素透過実験を行った。供給孔4からH2 /
N2 =1(モル比)の混合ガスを連続的に供給し、排
出孔5からブリードガスを排出し、下部の取出孔6から
99.99%以上の純粋な水素を得ることができた。Using this sample, a hydrogen permeation experiment was conducted in the same manner as in Example 1. From supply hole 4 H2 /
A mixed gas of N2 = 1 (molar ratio) was continuously supplied, bleed gas was discharged from the discharge hole 5, and 99.99% or more pure hydrogen could be obtained from the lower extraction hole 6.
【0060】混合ガスの圧力を3kg/cm2 G、ガ
ス流量を20Nl/minで500℃における実験結果
を表9に示す。Table 9 shows the experimental results at 500° C. with a mixed gas pressure of 3 kg/cm 2 G and a gas flow rate of 20 Nl/min.
【表9】[Table 9]
【0061】(実施例7)実施例1と同じ日本ガイシ(
株)製セラミック管(平均細孔径0.5μm、外径10
mm、長さ250mm)を使用し、以下の処理を行った
。(Example 7) The same Japanese insulator as in Example 1 (
Ceramic tube made by Co., Ltd. (average pore diameter 0.5 μm, outer diameter 10
mm, length 250 mm), and the following processing was performed.
【0062】(1)アルミナゾルの調製ビーカ内に表1
0に示す組成の薬剤をいれ、スターラにより攪拌・混合
しながら、80℃で24時間加水分解した。(1) Preparation of alumina sol Table 1 was prepared in a beaker.
A chemical having the composition shown in 0 was added and hydrolyzed at 80° C. for 24 hours while stirring and mixing with a stirrer.
【表10】[Table 10]
【0063】(2)シリカ・アルミナゲルの担持方法■
セラミックス管を前記アルミナゾル中に5分間浸漬
して該多孔体管壁にシリカゾルを担持した。■ 該多
孔体を0.1モル/lのけい酸ナトリウム水溶液に1分
間浸漬した。■ 該多孔体を100℃の水蒸気中に1
時間保持した。■ 上記■〜■の操作を4回繰り返し
た後、90℃の熱水中に1分間浸漬した。(2) Method for supporting silica/alumina gel■
The ceramic tube was immersed in the alumina sol for 5 minutes to support the silica sol on the porous tube wall. (2) The porous body was immersed in a 0.1 mol/l aqueous sodium silicate solution for 1 minute. ■ The porous body was immersed in water vapor at 100°C for 1 hour.
Holds time. (2) After repeating the above operations (1) to (2) four times, the sample was immersed in hot water at 90°C for 1 minute.
【0064】(3)上記の方法によって製作したシリカ
・アルミナゲル膜を担持したセラミックス管を使用し、
さらにその表面にPdを蒸着したサンプルを製作した。(3) Using the ceramic tube supporting the silica/alumina gel film manufactured by the above method,
Furthermore, a sample was fabricated with Pd deposited on its surface.
【0065】このサンプルを使用して、実施例1と同様
な方法で水素透過実験を行った。供給孔4からH2 /
N2 =1(モル比)の混合ガスを連続的に供給し、排
出孔5からブリードガスを排出し、下部の取出孔6から
99.99%以上の純粋な水素を得ることができた。[0065] Using this sample, a hydrogen permeation experiment was conducted in the same manner as in Example 1. From supply hole 4 H2 /
A mixed gas of N2 = 1 (molar ratio) was continuously supplied, bleed gas was discharged from the discharge hole 5, and 99.99% or more pure hydrogen could be obtained from the lower extraction hole 6.
【0066】混合ガスの圧力を3kg/cm2 G、ガ
ス流量を20Nl/minで500℃における実験結果
を表11に示す。Table 11 shows the experimental results at 500° C. with a mixed gas pressure of 3 kg/cm 2 G and a gas flow rate of 20 Nl/min.
【表11】[Table 11]
【0067】[0067]
【発明の効果】本発明の水素ガス分離膜は混合ガスから
高分離性能で、しかも高透過速度で水素を分離すること
が可能であり、さらに本発明の水素分離膜の製造方法も
容易であり、本発明は工業上有益である。[Effects of the Invention] The hydrogen gas separation membrane of the present invention has high separation performance and can separate hydrogen from a mixed gas at a high permeation rate, and furthermore, the method for manufacturing the hydrogen separation membrane of the present invention is easy. , the present invention is industrially useful.
【図1】本発明のガス分離膜の性能を実証するために使
用した実験装置の概略図。FIG. 1 is a schematic diagram of the experimental equipment used to demonstrate the performance of the gas separation membrane of the present invention.
Claims (1)
ルミナゲルまたはシリカ・アルミナゲルを担持し、さら
にその表面にパラジウムを含有する薄膜を形成させてな
ることを特徴とする水素ガス分離膜。1. A hydrogen gas separation membrane characterized by supporting silica gel, alumina gel, or silica/alumina gel in the pores of an inorganic porous body, and further forming a thin film containing palladium on the surface of the membrane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3126105A JP2955062B2 (en) | 1991-05-29 | 1991-05-29 | Hydrogen gas separation membrane |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3126105A JP2955062B2 (en) | 1991-05-29 | 1991-05-29 | Hydrogen gas separation membrane |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04349926A true JPH04349926A (en) | 1992-12-04 |
| JP2955062B2 JP2955062B2 (en) | 1999-10-04 |
Family
ID=14926745
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3126105A Expired - Lifetime JP2955062B2 (en) | 1991-05-29 | 1991-05-29 | Hydrogen gas separation membrane |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2955062B2 (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0715880A4 (en) * | 1994-06-28 | 1996-12-27 | Ngk Insulators Ltd | Gas separator and method for producing the same |
| US5980989A (en) * | 1993-03-31 | 1999-11-09 | Ngk Insulators, Ltd. | Gas separator and method for preparing it |
| CN1076212C (en) * | 1996-05-08 | 2001-12-19 | 中国科学院大连化学物理研究所 | Method for preparation of extra-thin palladium-ceramic compound film |
| WO2002064241A1 (en) * | 2001-02-16 | 2002-08-22 | Sumitomo Electric Industries, Ltd. | Hydrogen-permeable structure and method for manufacture thereof or repair thereof |
| KR100358078B1 (en) * | 1999-08-23 | 2002-10-25 | 한국화학연구원 | Silica stabilized palladium composite membranes and their preparation methods |
| US6641647B2 (en) | 2000-12-05 | 2003-11-04 | Sumitomo Electric Industries, Ltd. | Hydrogen-permeable structure and method of manufacturing the same |
| EP1547673A1 (en) * | 2003-12-19 | 2005-06-29 | Min-Hon Rei | Method for forming supported palladium membrane used for hydrogen purification |
| WO2005065806A1 (en) * | 2004-01-09 | 2005-07-21 | Bp P.L.C. | A metal palladium composite membrane or alloy palladium composite membrane and their preparation methods |
| KR100595529B1 (en) * | 2005-09-01 | 2006-07-03 | 한국화학연구원 | Catalyst-impregnated porous polymer membrane for removing dissolved oxygen and its manufacturing method |
| JP2007503995A (en) * | 2003-09-04 | 2007-03-01 | コリア リサーチ インスティテュートオフ゛ ケミカル テクノロシ゛ー | Titania composite membrane for water / alcohol separation and method for producing the same |
| WO2009102009A1 (en) * | 2008-02-15 | 2009-08-20 | National Institute Of Advanced Industrial Science And Technology | Filmy self-supporting thin metal film for hydrogen separation and process for producing the same |
-
1991
- 1991-05-29 JP JP3126105A patent/JP2955062B2/en not_active Expired - Lifetime
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| US5980989A (en) * | 1993-03-31 | 1999-11-09 | Ngk Insulators, Ltd. | Gas separator and method for preparing it |
| EP0715880A4 (en) * | 1994-06-28 | 1996-12-27 | Ngk Insulators Ltd | Gas separator and method for producing the same |
| CN1076212C (en) * | 1996-05-08 | 2001-12-19 | 中国科学院大连化学物理研究所 | Method for preparation of extra-thin palladium-ceramic compound film |
| KR100358078B1 (en) * | 1999-08-23 | 2002-10-25 | 한국화학연구원 | Silica stabilized palladium composite membranes and their preparation methods |
| US6641647B2 (en) | 2000-12-05 | 2003-11-04 | Sumitomo Electric Industries, Ltd. | Hydrogen-permeable structure and method of manufacturing the same |
| WO2002064241A1 (en) * | 2001-02-16 | 2002-08-22 | Sumitomo Electric Industries, Ltd. | Hydrogen-permeable structure and method for manufacture thereof or repair thereof |
| US6828037B2 (en) | 2001-02-16 | 2004-12-07 | Sumitomo Electric Industries, Ltd. | Hydrogen-permeable structure and method for manufacture thereof or repair thereof |
| JP2007503995A (en) * | 2003-09-04 | 2007-03-01 | コリア リサーチ インスティテュートオフ゛ ケミカル テクノロシ゛ー | Titania composite membrane for water / alcohol separation and method for producing the same |
| EP1547673A1 (en) * | 2003-12-19 | 2005-06-29 | Min-Hon Rei | Method for forming supported palladium membrane used for hydrogen purification |
| WO2005065806A1 (en) * | 2004-01-09 | 2005-07-21 | Bp P.L.C. | A metal palladium composite membrane or alloy palladium composite membrane and their preparation methods |
| JP2007517655A (en) * | 2004-01-09 | 2007-07-05 | ビーピー ピー・エル・シー・ | Metal palladium composite membrane or alloy palladium composite membrane and method for producing the same |
| CN1327942C (en) * | 2004-01-09 | 2007-07-25 | 中国科学院大连化学物理研究所 | Composite metal palladium membrane or alloy palladium membrane and its preparing method |
| EA011051B1 (en) * | 2004-01-09 | 2008-12-30 | Бп П.Л.К. | A metal palladium composite membrane or alloy palladium composite membrane and their preparation method |
| US8052775B2 (en) | 2004-01-09 | 2011-11-08 | Bp P.L.C. | Process for the preparation of a two-layer metal palladium or palladium alloy composite membrane |
| KR100595529B1 (en) * | 2005-09-01 | 2006-07-03 | 한국화학연구원 | Catalyst-impregnated porous polymer membrane for removing dissolved oxygen and its manufacturing method |
| WO2009102009A1 (en) * | 2008-02-15 | 2009-08-20 | National Institute Of Advanced Industrial Science And Technology | Filmy self-supporting thin metal film for hydrogen separation and process for producing the same |
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| Publication number | Publication date |
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| JP2955062B2 (en) | 1999-10-04 |
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