JPH04354545A - Recirculating compact clean room - Google Patents

Abstract

PURPOSE:To make a compact recirculating clean room by making posts which support a structure hollow, making them also serve as return ducts and thereby eliminating special duct arrangement. CONSTITUTION:In the recirculating clean room which has a floor 5, ceiling, posts 4, and four sides, the posts 4 in four corners are made hollow and to also serve as the return ducts. Consequently, the clean air from the blow-off opening 2 of a blowing unit 1, which is set on a ceiling part and provided with a HEPA filter, is made a downward stream and also recirculated to the intake port 3 of the blowing unit 1 through the floor with air vent holes and the return ducts 4. Thus, the cleanliness of the room is maintained at a high level, and also the inner volume of the room can be made small.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a small circulating clean room that can be used for operations requiring a high level of cleanliness, such as manufacturing precision semiconductor parts, cultivating living organisms, and packaging food products.

0002

[Prior art] As a simple clean room, conventional HE
PA (High Efficiency Particulate
Attach a blower unit 11 equipped with a filter (ulateAir) to filter air introduced from the outside as shown in FIG. 4(a), and then send it into the room or booth, or as shown in FIG. It has a structure in which air is sucked in through an intake port 12 located near the part, filtered, and blown out through an air outlet 13, thereby circulating the air.

However, in the former case, the cleanliness cannot be improved because the air is discharged outside without being circulated, while in the latter structure, the air is turbulent inside the clean room, making it difficult to maintain the cleanliness. difficult to do.

[0004] Large clean rooms have a structure that has a blower unit on the ceiling and a return groove under the floor to improve the cleanliness by making the air flow downflow. In small-sized clean rooms, the structure of the return duct is large-scale, so there is no downflow circulation type.

[0005]

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a small-sized clean room of a circulation type in which airflow is close to downflow without requiring a large-scale structure.

[0006]

[Means for Solving the Problems] The circulation type clean room of the present invention has a floor, a ceiling, pillars and four sides, and is characterized in that the pillars are hollow and serve as return ducts. The four sides may be replaceable panels.

[0007]

[Function] In order to have a return duct similar to a full-scale clean room and yet have a compact structure,
As shown in the figure, the pillars at the four corners are hollow and are also used as return ducts 4. As a result, the clean air blown out from the outlet 2 of the blower unit 1 with the HEPA filter installed on the ceiling flows downward, and also flows through the floor 5 having ventilation holes and the return duct 4. Since the air is circulated to the suction port 3 of the blower unit 1, a high degree of cleanliness in the room can be maintained. Furthermore, by making the four sides replaceable, additional devices such as a clean bench, measuring device, pass box, etc. can be attached as necessary. Thereby, the number of items to be carried into the room can be reduced, and the internal volume of the clean room can be reduced.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be explained below with reference to embodiments shown in the drawings.

FIG. 2 shows the basic structure of the present invention. There is a ventilation unit 1 with a HEPA filter in the center of the ceiling.
The pillars at the four corners also serve as return ducts 4, through which air returns to the blower unit 1 again. Basically, the four sides are free panels 6.

FIG. 3 shows an example of application of the present invention. A case is shown in which a door 8 for entering the room, a pass box 9 for carrying in materials, a clean bench 10 for work, a measuring device 7, etc. are attached to the panel 6.

[0011]

[Effects of the Invention] As explained above, according to the present invention, the four pillars supporting the structure are made hollow and are also used as return ducts, so special duct piping is not required and the structure is compact. A circulating clean room can be realized. Moreover, by having a panel structure in which the four sides can be replaced, it becomes possible to apply the device according to the purpose.

The degree of cleanliness within a clean room is determined by the internal volume and structure of the room, the capacity of the blower, and the amount of materials brought into the room from outside. Also, since there is no equipment, etc., the internal volume of the room can be reduced. This allows the electric capacity of the blower fan to be lowered, making it possible to maintain high cleanliness with low power consumption.

[Brief explanation of drawings]

FIG. 1 is a sectional view showing the basic configuration of the present invention.

FIG. 2 is a perspective view showing a basic embodiment of the present invention.

FIG. 3 is a perspective view showing another embodiment of the present invention.

FIG. 4 is a sectional view showing an example of a conventional clean room.

[Explanation of symbols]

1. Air blower unit, 2. Air outlet, 3. Suction port, 4. Return duct, 5. Floor, 6. Panel, 7.
Measuring equipment, 8 Door, 9 Pass box, 10
Clean bench

Claims (2)

[Claims] 1. A circulation type clean room having a floor, a ceiling, pillars and four sides, wherein the pillars are hollow and serve as return ducts. 2. The circulation clean room according to claim 1, wherein four sides are made of replaceable panels.