JPH04357700A - Synchrotron radiation device - Google Patents

Abstract

PURPOSE:To eliminate discontinuation of research, development and the like by providing a preceding accelerator inside a ring-shape after-accelerator to enlarge a beam-line installation range necessary for utilization of radiation beams to the maximum, and providing a plurality of electron beam generating sources. CONSTITUTION:Inside a ring-shape after-accelerator 2 for accelerating an accelerated electron to a further higher energy state, a microtron 1 as a preceding accelerator for accelerating an electron to a grade of light speed is arranged. Accordingly, a number of beam-lines 7 and steppers 8 can be installed efficiently without interference with the accelerator 1. According to the installation of a plurality of electron beam generating sources, electron beams can be obtained from other electron generating sources in the case where operation of an electron beam injector should be stopped owing to a periodic inspection or a failure so that various kinds of research and development as well as manufacturing by utilizing synchrotron radiation can be continued.

Description

[Detailed description of the invention]

[Object of the invention]

0002

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a synchrotron radiation device.

0003

2. Description of the Related Art In recent years, microfabrication technology has made great progress, and various light sources for pattern transfer have been proposed.

One of the light sources for pattern transfer is a synchrotron radiation device. This uses electromagnetic waves emitted in the tangential direction of the electron orbit when high-energy accelerated electrons are deflected by a magnetic field.
It is seen as promising for SI production.

[0005] When using a synchrotron radiation device for such microfabrication, it is necessary to make the shielding chamber for gamma rays and neutrons small, and to reduce the usability of the electromagnetic waves (synchrotron radiation) emitted when electrons are deflected by a magnetic field. It is requested to raise the level.

Typically, a synchrotron radiation device includes a pre-stage accelerator 20 that accelerates electrons to about the speed of light, as shown in FIG. 4, and a ring-shaped accelerator connected to this that accelerates the accelerated electrons to a higher energy state. Post-stage accelerator 3
The first accelerator is located outside the second accelerator.

However, it is necessary to make the shielding room larger to accommodate the space for installing the pre-stage accelerator, and if we also take into account the passageway for carrying equipment into the shielding room, the area where the beam line 41 (vacuum passage) for utilizing synchrotron radiation will be installed will be limited. The problem was that it would be subject to restrictions. A stepper 40 and the like are connected to the beam line 41.

Furthermore, if the operation of the electron beam injector is stopped due to periodic inspection or failure, the electron beam cannot be injected into the storage ring, and the function of the entire synchrotron radiation apparatus ends up stopping. As a result, various research and development and manufacturing activities using synchrotron radiation have been interrupted, resulting in a significant drop in efficiency.

[0009]

[Problems to be Solved by the Invention] According to the conventional synchrotron radiation device, the front stage accelerator is installed outside the rear stage accelerator, so it is necessary to make the shielding room larger to accommodate the space for installing the front stage accelerator. There is also the problem that the range in which a beam line for utilizing synchrotron radiation can be installed is limited.

[0010] Furthermore, if the operation of the electron beam injector is stopped due to periodic inspection or failure, the functions of the entire synchrotron radiation device will stop, and various research and development and manufacturing activities using synchrotron radiation will be interrupted, reducing efficiency. There was a problem in that the value decreased significantly. The present invention has been made in view of the above-mentioned circumstances, and an object of the present invention is to provide a synchrotron radiation device that is small in size and can use an electron beam in a large number of devices.

[0011] The present invention also provides a synchrotron system that does not interrupt various research and development and manufacturing activities using synchrotron radiation even when the operation of the electron beam injector must be stopped due to periodic inspection or failure. The purpose is to provide a radiation device.

[Configuration of the invention]

[0013]

[Means for Solving the Problems] Accordingly, in the first aspect of the present invention, a front stage accelerator for accelerating electrons to about the speed of light is disposed inside a ring-shaped rear stage accelerator for accelerating accelerated electrons to a higher energy state. I am trying to set it up.

In the second aspect of the present invention, a plurality of electron beam generating sources are installed, and a specific one of these sources is operated.

[0015]

[Operation] According to the first aspect of the present invention, since the front stage accelerator is installed inside the ring-shaped rear stage accelerator, it is possible to maximize the installation range of the beam line necessary for utilizing synchrotron radiation. can. Further, since the outside of the ring-shaped post-accelerator is used only for systems such as beam lines, the beam line does not interfere with the pre-stage accelerator.

According to the second aspect of the present invention, since a plurality of electron beam generation sources are installed, even when the operation of the electron beam injector has to be stopped due to periodic inspection or failure, another electron beam source is installed. Since an electron beam can be obtained from the source, it becomes possible to continue various research and development and manufacturing activities using synchrotron radiation without interruption.

[0017]

Embodiments Next, embodiments of the present invention will be described in detail with reference to the drawings.

Embodiment 1 FIG. 1 is a plan view of a synchrotron radiation apparatus according to an embodiment of the present invention.

This synchrotron radiation device includes a microtron 1 as a front-stage accelerator that accelerates electrons to near the speed of light, a storage ring 2 formed around the microtron 1, and a storage ring 2 installed within the storage ring 2. , a beam duct 3 in which accelerated electrons are rotated and controlled by a quadrupole magnet 4 and a deflection magnet 5, and a high frequency cavity 6 connected to the beam duct. It is configured to accelerate.

A synchrotron radiation beam line 7 and a stepper 8 are attached to the beam duct 3, and each stepper is used to perform exposure.

A shielding plate 10 is installed around the storage ring 2.
A clean room 9 is formed through the ring, and a stepper 8 is formed around the entire circumference of the ring except for the device entrance 11.

In this device, electrons are accelerated to near the speed of light by a microtron 1, which is a pre-stage accelerator, and then introduced into a storage ring 2 provided around the electrons through an entrance port 2a. The accelerated electrons are rotated and controlled by a polar magnet 4 and a deflection magnet 5, and are further accelerated to a higher energy by a high frequency cavity 6. 8, and electron beam exposure is performed using each stepper.

According to this device, the second stage accelerator is installed around the first stage accelerator, and the acceleration is made around this, so that a large number of steppers can be installed efficiently, and the size of the device can be reduced. It becomes possible to measure.

Embodiment 2 FIG. 2 is a plan view of a synchrotron radiation apparatus according to a second embodiment of the present invention.

This synchrotron radiation device includes two electron beam injection systems 100 each consisting of an electron gun 10, a linear accelerator 11, and a storage ring 12, and a synchrotron radiation beam connected to the two electron beam injection systems 100 through a switching means 14. line 17
An electron beam using device group 200 consisting of a stepper 18 from
A, 200b, . . . are connected in plurality. Like a normal device, the electrons generated by the electron gun 10 are
The linear accelerator 11 accelerates the speed to near the speed of light, and the storage ring 12 controls the rotation using a polar magnet and a deflection magnet (not shown). Accelerate with energy.

A synchrotron radiation beam line 17 and a stepper 18 are attached to this beam duct 13, and exposure is performed using each stepper.

In this device, two electron beam incidence systems 1
If one of the 00s breaks down or needs to be removed for inspection, normal operation can always be obtained by connecting and using the other one.

In the embodiment described above, the linear accelerator 11 was used as the pre-stage accelerator for accelerating the electrons generated by the electron gun 10, but it goes without saying that a microtron may be used in place of this.

Embodiment 3 FIG. 3 is a plan view of a synchrotron radiation apparatus according to a third embodiment of the present invention.

In the second embodiment, one storage ring 12 was installed for each electron gun 10 and 11 pairs of linear accelerators, but in this example, the switching means 24 is installed before the storage ring 22. ing.

The other parts are formed in the same manner as the synchrotron radiation apparatus of the second embodiment. Identical parts are given the same symbols.

In this device, a plurality of electron guns and linear accelerators 11, which are likely to be inspected and repaired, are arranged, and a storage ring, which is unlikely to be inspected and repaired, is shared. As with 2, if one breaks down or needs to be removed for inspection, the advantage is that if you connect and use the other one, you can always get normal operation. be.

[0033]

[Effects of the Invention] As explained above, the first aspect of the present invention
According to , by installing the front stage accelerator inside the ring-shaped rear stage accelerator, it is possible to maximize the installation range of the beam line necessary to utilize synchrotron radiation, and it is possible to significantly expand the equipment. It can be made smaller.

According to the second aspect of the present invention, since a plurality of electron beam generation sources are installed, it is possible to continue various research and development and manufacturing activities using synchrotron radiation without interruption. Become.

[Brief explanation of drawings]

FIG. 1 is a diagram showing a synchrotron radiation device according to a first embodiment of the present invention.

FIG. 2 is a diagram showing a synchrotron radiation device according to a second embodiment of the present invention.

FIG. 3 is a diagram showing a synchrotron radiation device according to a third embodiment of the present invention.

[Figure 4] Diagram showing a conventional synchrotron radiation device

[Explanation of symbols]

1. Front-stage accelerator microtron 2 Storage ring 3 Beam duct 4 Pole magnet 5 Bending magnet 6 High frequency cavity 7 Synchrotron radiation beam line 8 Stepper 10 Electron gun 11 Accelerator microtron 12 Storage ring 13 Beam duct 16 High frequency cavity 17 Synchrotron radiation beam line 18 Stepper 20 Pre-stage accelerator 30 Post-accelerator 40 Stepper 41 Beam line 100 Electron beam incidence system 200a Electron beam equipment group 200b Electron beam equipment group

Claims (2)

[Claims] 1. An electron beam generation source comprising an electron beam generation source, a front-stage accelerator that accelerates electrons generated by the electron beam generation source, and a ring-shaped rear-stage accelerator that accelerates the accelerated electrons to a higher energy state. , the pre-accelerator is
A synchrotron radiation device, characterized in that it is disposed inside the second stage accelerator. 2. An electron beam injector including a plurality of electron beam generation sources and an accelerator connected to the electron beam generation sources to accelerate electrons generated by the electron beam generation sources; A synchrotron radiation device comprising: a connected storage ring for accumulating accelerated electrons, the storage ring being selectively supplied with beams from the plurality of electron beam generating sources; .