JPH0435900B2 - - Google Patents

Info

Publication number
JPH0435900B2
JPH0435900B2 JP63009848A JP984888A JPH0435900B2 JP H0435900 B2 JPH0435900 B2 JP H0435900B2 JP 63009848 A JP63009848 A JP 63009848A JP 984888 A JP984888 A JP 984888A JP H0435900 B2 JPH0435900 B2 JP H0435900B2
Authority
JP
Japan
Prior art keywords
cleaning
substrate
carrier
liquid
passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP63009848A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01184925A (ja
Inventor
Ichiro Nakao
Teruto Oonishi
Juichi Hirofuji
Yoshitaka Dansui
Motomitsu Suzuki
Yoshuki Shimizu
Mitsuyasu Nagahama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP63009848A priority Critical patent/JPH01184925A/ja
Publication of JPH01184925A publication Critical patent/JPH01184925A/ja
Publication of JPH0435900B2 publication Critical patent/JPH0435900B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP63009848A 1988-01-20 1988-01-20 洗浄装置および洗浄方法 Granted JPH01184925A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63009848A JPH01184925A (ja) 1988-01-20 1988-01-20 洗浄装置および洗浄方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63009848A JPH01184925A (ja) 1988-01-20 1988-01-20 洗浄装置および洗浄方法

Publications (2)

Publication Number Publication Date
JPH01184925A JPH01184925A (ja) 1989-07-24
JPH0435900B2 true JPH0435900B2 (2) 1992-06-12

Family

ID=11731552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63009848A Granted JPH01184925A (ja) 1988-01-20 1988-01-20 洗浄装置および洗浄方法

Country Status (1)

Country Link
JP (1) JPH01184925A (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4606936B2 (ja) * 2005-04-07 2011-01-05 月島環境エンジニアリング株式会社 基板の洗浄方法

Also Published As

Publication number Publication date
JPH01184925A (ja) 1989-07-24

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees