JPH0436189U

JPH0436189U -

Info

Publication number: JPH0436189U
Application number: JP7835690U
Authority: JP
Priority date: 1990-07-23
Filing date: 1990-07-23
Publication date: 1992-03-26
Anticipated expiration: 2005-07-23
Also published as: JP2504499Y2

Description

[Brief explanation of the drawing]

第１図は本考案真空用ゲートバルブの第１実施
例の構成を示す断面図、第２図は第１実施例にお
けるバルブ開状態の要部の断面図、第３図は同じ
くバルブ閉状態の要部の断面図、第４図は第２実
施例におけるバルブ開状態の要部の断面図、第５
図は第３実施例におけるバルブ開状態の要部の断
面図、第６図は第４実施例におけるバルブ開状態
の要部の断面図、第７図は第５実施例におけるバ
ルブ開状態の要部の断面図、第８図ａ，ｂはそれ
ぞれ従来真空用ゲートバルブの一例の構成を示す
部分断面図及びその一部の拡大断面図、第９図は
従来例の他例の構成を示す部分断面図である。１……カウンタープレート、２……シールプレ
ート、３……シール面、４……（クサビ型、直角
三角形状、四辺形状、細長小判状）ストツパ、５
……ストツパ受け、６……カム、６ａ……突起部
、１０……Ｖ型溝、１１……シール材（Ｏリング
）、１２……弾性体（バネ）、１３……フランジ
、１７……押圧機構、１８……山形端部、１９…
…頂点、２０……突子、２１……窪み型溝、２２
……弧状突部、２３……弧状型溝、２４……ピス
トンロツド。 Fig. 1 is a sectional view showing the structure of the first embodiment of the vacuum gate valve of the present invention, Fig. 2 is a sectional view of the main part of the first embodiment in the valve open state, and Fig. 3 is the same in the valve closed state. FIG. 4 is a cross-sectional view of the main part in the valve open state in the second embodiment, and FIG.
The figure is a sectional view of the main part of the valve in the open state in the third embodiment, FIG. 6 is a sectional view of the main part in the valve open state in the fourth embodiment, and FIG. 7 is the main part of the valve in the open state in the fifth embodiment. 8a and 8b are a partial sectional view and an enlarged sectional view of a part of the conventional vacuum gate valve, respectively, and FIG. 9 is a partial sectional view showing the configuration of another example of the conventional vacuum gate valve. FIG. 1... Counter plate, 2... Seal plate, 3... Seal surface, 4... (wedge shape, right triangle shape, quadrilateral shape, elongated oval shape) stopper, 5
... Stopper receiver, 6 ... Cam, 6a ... Projection, 10 ... V-shaped groove, 11 ... Seal material (O ring), 12 ... Elastic body (spring), 13 ... Flange, 17 ... Pressing mechanism, 18... chevron end, 19...
... Vertex, 20 ... Protrusion, 21 ... Concave groove, 22
...Arc-shaped protrusion, 23...Arc-shaped groove, 24...Piston rod.

Claims

[Claims for Utility Model Registration] (1) A counter plate 1 that moves relative to the flange 13 in the direction of blocking the flow path in a vacuum gate valve disposed orthogonally to a flow path to shut off fluid. and a seal plate 2, and a pressing mechanism that presses the seal plate 2 against the seal surface 3 by relative movement of both plates 1 and 2, and this pressing mechanism supports the bottom part of the seal plate 2 so as to be swingable in the lateral direction. A vacuum gate valve comprising a stopper 4, a stopper receiver 5, and return means for the stopper 4. (2) The stopper 4 is wedge-shaped, and both chevron-shaped ends 18 of the wedge-shaped stopper 4 are supported in V-shaped grooves 10 provided in the bottom of the seal plate 2 and in the stopper receiver 5, respectively. Gate valve for vacuum as described. (3) The stopper 4 is a right triangle, and the apex 19 formed by the vertical surface and the slope of the right triangle stopper 4
2. The vacuum gate valve according to claim 1, wherein the stopper 4 has a surface facing the apex 19 supported by a stopper receiver 5. (4) The stopper 4 has a four-sided shape, and the four-sided stopper 4 is installed vertically, and the protrusions 20 at point-symmetrical positions of the four-sided stopper 4 are inserted into the bottom of the seal plate 2 and the recessed groove 21 of the stopper receiver 5, respectively. The vacuum gate valve according to claim 1, which is supported. (5) The stopper 4 has an elongated oval shape, and the arcuate protrusions 22 at both ends of the elongated oval stopper 4 are supported in arcuate grooves 23 provided in the bottom of the seal plate 2 and in the stopper receiver 5, respectively. The vacuum gate valve described in item 1. (6) The vacuum gate valve according to claim 1, wherein the return means for the stopper 4 is an elastic body 12 that connects the stopper receiver 5 and the stopper 4. (7) The vacuum gate valve according to claim 1, wherein the return means for the stopper 4 is an elastic body 12 inserted between the stopper 4 and the sealing surface 3.