JPH0436231U

JPH0436231U -

Info

Publication number: JPH0436231U
Application number: JP7719390U
Authority: JP
Priority date: 1990-07-20
Filing date: 1990-07-20
Publication date: 1992-03-26

Description

[Brief explanation of the drawing]

第１図〜第３図は、第一の考案の実施例、第二
の考案の実施例に共通する図面であつて、第１図
、第２図は熱処理炉を示し、第１図は第２図の
−線断面図、第２図は第１図の−線断面図
、第３図は発熱素子の平面図である。第４図及び
第５図は第一の考案の実施例を示すものであつて
、第４図はヒータの拡大断面図、第５図は他の例
によるヒータの拡大断面図である。第６図〜第１
２図は第二の考案の実施例を示すものであつて、
第６図は冷却機能を備えたヒータの拡大断面図、
第７図は同ヒータの一部破砕斜視図、第８図は熱
処理の時間−温度曲線を示すグラフ、第９図は第
１図、第２図とは異なる例による熱処理炉の断面
図（第１０図の−線断面図）、第１０図は第
９図の−線断面図、第１１図、第１２図は、
夫々更に他の例による熱処理炉の第９図と同様の
断面図である。第１３図〜第２０図は従来例を示
すものであつて、第１３図はカセツト（板状被処
理物収容器）の断面図、第１４図は他のカセツト
の斜視図、第１５図はカセツトと熱処理炉との位
置関係の一例を示す断面図、第１６図は連続熱処
理装置の概略図、第１７図は他の例による連続熱
処理装置の内部概略図、第１８図、第１９図及び
第２０図は夫々熱処理の時間−温度曲線を示すグ
ラフである。なお、図面示された符号において、１，２０，
３０，４０……熱処理炉、３……扉、５，８……
ヒータ、７……被処理物支持部材、９……冷却機
能を備えたヒータ、１１……ガラス板、１２……
耐熱絶縁材、１３……発熱素子、１４，１６……
薄板、１５……遠赤外線放射材、１７……冷却管
、２２……天蓋、２４……被処理物支持板、２４
ａ……溝、３１……側壁、３３……高沸点オイル
、３４……発熱体、３５……オイル収容壁、３６
……バルブ、３７……配管、Ｗ……被収容物（ガ
ラス基板）、である。 1 to 3 are drawings common to the embodiment of the first invention and the embodiment of the second invention, in which FIGS. 1 and 2 show a heat treatment furnace, and FIG. 2 is a cross-sectional view taken along the line -- in FIG. 2, FIG. 2 is a cross-sectional view taken along the line -- in FIG. 1, and FIG. 3 is a plan view of the heating element. 4 and 5 show an embodiment of the first invention, in which FIG. 4 is an enlarged sectional view of a heater, and FIG. 5 is an enlarged sectional view of a heater according to another example. Figure 6 ~ 1st
Figure 2 shows an embodiment of the second invention,
Figure 6 is an enlarged sectional view of a heater with a cooling function;
FIG. 7 is a partially fragmented perspective view of the same heater, FIG. 8 is a graph showing the time-temperature curve of heat treatment, and FIG. 9 is a cross-sectional view of a heat treatment furnace in an example different from FIGS. 10), FIG. 10 is a sectional view taken along the - line in FIG. 9, and FIGS. 11 and 12 are
FIG. 9 is a sectional view similar to FIG. 9 of a heat treatment furnace according to still another example; 13 to 20 show conventional examples, in which FIG. 13 is a cross-sectional view of a cassette (plate-shaped object container), FIG. 14 is a perspective view of another cassette, and FIG. A sectional view showing an example of the positional relationship between a cassette and a heat treatment furnace, FIG. 16 is a schematic diagram of a continuous heat treatment apparatus, FIG. 17 is an internal schematic diagram of a continuous heat treatment apparatus according to another example, FIGS. 18, 19, and FIG. 20 is a graph showing the time-temperature curve of each heat treatment. In addition, in the symbols shown in the drawings, 1, 20,
30, 40... Heat treatment furnace, 3... Door, 5, 8...
Heater, 7... Workpiece support member, 9... Heater with cooling function, 11... Glass plate, 12...
Heat-resistant insulating material, 13... Heat generating element, 14, 16...
Thin plate, 15... Far-infrared radiation emitting material, 17... Cooling pipe, 22... Canopy, 24... Processing object support plate, 24
a... Groove, 31... Side wall, 33... High boiling point oil, 34... Heating element, 35... Oil storage wall, 36
...Valve, 37... Piping, W... Object to be accommodated (glass substrate).

補正平３．１０．１８実用新案登録請求の範囲を次のように補正する
。Amendment 3/10/18 The scope of claims for utility model registration is amended as follows.

【実用新案登録請求の範囲】１板状加熱手段が所定間隔で多層状に装置本体
内に配され、板状の被処理物を前記の各板状加熱
手段の間に位置するように支持する被処理物支持
手段を有し、前記の各被処理物が、この被処理物
に対向する前記加熱手段によつて加熱されるよう
にして複数の前記被処理物を処理するように構成
された板状体熱処理装置。２加熱又は冷却のための板状の加熱・冷却用部
材が所定間隔で多層状に装置本体内に配され、板
状の被処理物を前記の各加熱・冷却用部材の間に
位置するように支持する被処理物支持手段を有し
、前記の各被処理物が、この被処理物に対向する
前記加熱・冷却用部材によつて加熱、冷却される
ようにして複数の前記被処理物を処理するように
構成された板状体熱処理装置。[Claims for Utility Model Registration] 1. Plate-shaped heating means are arranged in multiple layers at predetermined intervals in the main body of the apparatus, and a plate-shaped object to be processed is supported so as to be positioned between the above-mentioned plate-shaped heating means. It has a processing object supporting means, and is configured to process a plurality of processing objects in such a manner that each of the processing objects is heated by the heating means facing the processing object. Plate heat treatment equipment. 2 Plate - shaped heating/ cooling members for heating or cooling are arranged in a multilayered manner at predetermined intervals in the apparatus main body, and the plate-shaped object to be processed is heated or cooled by each of the heating/ cooling members. a plurality of workpiece supporting means positioned between the workpieces, each of the workpieces being heated and cooled by the heating/ cooling member facing the workpiece; A plate heat treatment apparatus configured to treat the object to be treated.

Claims

[Claims for Utility Model Registration] 1. Plate-shaped heating means are arranged in multiple layers at predetermined intervals in the main body of the apparatus, and a plate-shaped object to be processed is supported so as to be positioned between the above-mentioned plate-shaped heating means. It has a processing object supporting means, and is configured to process a plurality of processing objects in such a manner that each of the processing objects is heated by the heating means facing the processing object. Plate heat treatment equipment. 2 Plate-shaped heating/cooling members consisting of a plate-shaped heating means and a plate-shaped cooling means are arranged in a multi-layered manner in the main body of the apparatus at predetermined intervals, and the plate-shaped object to be processed is placed between each of the heating/cooling members. each of the objects to be processed is heated by the heating/cooling member facing the object to be processed;
A plate heat treatment apparatus configured to process a plurality of objects to be processed while being cooled.