JPH04364436A - Calibrating method for leakage inspecting apparatus - Google Patents
Calibrating method for leakage inspecting apparatusInfo
- Publication number
- JPH04364436A JPH04364436A JP3138702A JP13870291A JPH04364436A JP H04364436 A JPH04364436 A JP H04364436A JP 3138702 A JP3138702 A JP 3138702A JP 13870291 A JP13870291 A JP 13870291A JP H04364436 A JPH04364436 A JP H04364436A
- Authority
- JP
- Japan
- Prior art keywords
- container
- inspected
- leakage
- leak
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 7
- 238000007689 inspection Methods 0.000 claims abstract description 15
- 238000012360 testing method Methods 0.000 claims description 20
- 238000005259 measurement Methods 0.000 claims description 7
- 238000012545 processing Methods 0.000 description 13
- 238000001514 detection method Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Abstract
Description
【0001】0001
【産業上の利用分野】この発明は防水型器具或は密封容
器等の洩れの有無を検査する洩れ検査装置に関し、特に
洩れ量を直読表示させるための演算に利用する校正値を
得るための校正方法を提案するものである。[Field of Industrial Application] The present invention relates to a leak testing device for testing the presence or absence of leaks in waterproof appliances or sealed containers, and in particular to calibration for obtaining calibration values used in calculations for directly reading and displaying leakage amounts. This paper proposes a method.
【0002】0002
【従来の技術】密封容器等の洩れの有無を検査する方法
の一つとして、被検査容器と、洩れのない基準容器に空
圧源から同一の空気圧を与え、その供給路を遮断した後
に、両者間に圧力差つまり差圧が発生するか否かを見て
、差圧の発生が無ければ洩れなしと判定し、差圧が規定
値以上発生した場合は洩れ有りと判定し、良否を判定す
る洩れ検査方法が実用されている。2. Description of the Related Art As one method for inspecting sealed containers, etc. for leaks, the same air pressure is applied from an air pressure source to the container to be inspected and a reference container with no leaks, and after the supply path is cut off, Check whether a pressure difference occurs between the two, and if no differential pressure occurs, it is determined that there is no leak, and if the differential pressure occurs above the specified value, it is determined that there is a leak, and the quality is determined. A leak testing method is in practical use.
【0003】この洩れ検査方法によれば、測定値は差圧
値として得られるため、容器等の洩れ量を知るには差圧
値を洩れ量(cc/分)に換算する必要がある。また良
否判定の基準が洩れ量で与えられた場合には、この基準
となる洩れ量(cc/分)を差圧値に換算し、検査装置
の判定基準値として設定しなければならない。つまり被
検査容器に洩れが有るか否かを問うだけの検査であれば
、差圧の発生が有り無しによって検査すればよいから有
能に機能するが、洩れの量を測定したい場合、或は許容
値が洩れ量で与えられたような場合には差圧値−洩れ量
の換算を行なわなくてはならなくなり面倒な作業が強い
られる。According to this leakage testing method, since the measured value is obtained as a differential pressure value, it is necessary to convert the differential pressure value into a leakage rate (cc/min) in order to know the amount of leakage from a container or the like. In addition, when the standard for determining pass/fail is given as the leakage amount, the leakage amount (cc/min) serving as the standard must be converted into a differential pressure value and set as the determination reference value of the inspection device. In other words, if the test is simply asking whether there is a leak in the container to be inspected, it will function effectively as it only needs to be tested based on the presence or absence of differential pressure, but if you want to measure the amount of leakage, or If the allowable value is given by the amount of leakage, it is necessary to convert the differential pressure value to the amount of leakage, which is a tedious task.
【0004】このため、本出願人は「特願昭62−37
229号:洩れ検査装置」により被検査容器から洩れる
洩れ量(cc/分)を直読表示することができる洩れ検
査装置を提案した。図7に先に提案した洩れ検査装置の
構成を示す。図中11は正又は負の空気圧を発生する空
圧源を示す。空圧源11で発生した空気圧は減圧弁12
と3方電磁弁13を通じて2分されて二つの分岐管22
,23に与えられ、二つの分岐管22,23に与えられ
た空気圧は2方電磁弁によって構成される第1制御弁1
4と第2制御弁15を通じて被検査容器16と基準タン
ク17に加えられる。また被検査容器16と基準タンク
17内の圧力差を差圧検出器18で検出し、その検出信
号を増幅器19で増幅する。ここまでの構成は一般的な
差圧検出型の洩れ検査装置と同じである。[0004] For this reason, the present applicant has filed a patent application for
No. 229: Leak Testing Device", we proposed a leak testing device that can directly read and display the amount of leakage (cc/min) leaking from a container to be tested. FIG. 7 shows the configuration of the previously proposed leakage testing device. In the figure, reference numeral 11 indicates an air pressure source that generates positive or negative air pressure. The air pressure generated by the air pressure source 11 is transferred to the pressure reducing valve 12.
and two branch pipes 22 which are divided into two through the three-way solenoid valve 13.
, 23, and the air pressure given to the two branch pipes 22, 23 is supplied to the first control valve 1 constituted by a two-way solenoid valve.
4 and the second control valve 15 to the test container 16 and the reference tank 17. Further, a pressure difference between the container to be inspected 16 and the reference tank 17 is detected by a differential pressure detector 18, and the detected signal is amplified by an amplifier 19. The configuration up to this point is the same as a general differential pressure detection type leak testing device.
【0005】この先に提案した洩れ検査装置の特徴とす
る構成は被検査容器16側の配管に容積変化付加器24
を付設した点と、差圧検出器18の信号系に演算処理装
置25を設けた点である。容積変化付加器24は3方電
磁弁26の切替操作に応じて、被検査容器16側の内容
積を一定量変化させる動作を行う。The characteristic configuration of the leakage testing device proposed earlier is that a volume change adder 24 is attached to the piping on the side of the container 16 to be tested.
and that an arithmetic processing unit 25 is provided in the signal system of the differential pressure detector 18. The volume change adder 24 operates to change the internal volume of the container to be inspected 16 by a certain amount in response to the switching operation of the three-way solenoid valve 26.
【0006】つまり被検査容器16に連通する室27と
、3方電磁弁26を通じて空圧源11に連通する室29
を有し、3方電磁弁26を開いて室29の圧力を上げる
とピストン31は右方向に動く、ピストン31にはピス
トンロッド32が取付けられておりピストン31の横動
に応じて室27の内部において進退し、室27の容積を
変化させる。That is, a chamber 27 communicates with the container 16 to be inspected, and a chamber 29 communicates with the pneumatic source 11 through the three-way solenoid valve 26.
When the three-way solenoid valve 26 is opened to increase the pressure in the chamber 29, the piston 31 moves to the right. It moves back and forth inside, changing the volume of the chamber 27.
【0007】33はマイクロメーターヘッドを示す。こ
のマイクロメーターヘッドによってピストンロッド32
の進退量を規定し室27の容積の変化量を設定できるよ
うにしている。3方電磁弁26は空圧源11の圧力を室
29に直接供給する状態と、室29を大気に解放する切
替動作を行う。通常において室29は大気圧の状態にあ
る。この為ピストンはスプリング40によって左方に押
されて、ピストン31が左方の壁に当たっている状態に
ある。[0007] 33 indicates a micrometer head. This micrometer head allows the piston rod 32
The amount of change in the volume of the chamber 27 can be set by specifying the amount of movement of the chamber 27. The three-way solenoid valve 26 performs a switching operation between directly supplying the pressure of the air pressure source 11 to the chamber 29 and opening the chamber 29 to the atmosphere. Normally, chamber 29 is at atmospheric pressure. Therefore, the piston is pushed to the left by the spring 40, and the piston 31 is in contact with the left wall.
【0008】被検査容器16側の内容積を一定量変化さ
せるには3方電磁弁26を動作させ、空圧源11の圧力
を室29に与える。室29の圧力がスプリング40の力
に打ち勝ちピストン31を右方向に移動させマイクロメ
ーターヘッド33で設定された位置で停止する。ピスト
ンロッド32の退出により室27の内容積はピストンロ
ッド32の退出量の容積だけ増加する。To change the internal volume of the container 16 to be inspected by a certain amount, the three-way solenoid valve 26 is operated to apply pressure from the air pressure source 11 to the chamber 29 . The pressure in the chamber 29 overcomes the force of the spring 40, causing the piston 31 to move rightward and stop at the position set by the micrometer head 33. As the piston rod 32 withdraws, the internal volume of the chamber 27 increases by the amount by which the piston rod 32 withdraws.
【0009】等価内容積を測定する場合は被検査容器1
6として洩れのない良品を取付けると共に被検査容器1
6及び基準タンク17に一定のテスト圧Pを与えた後に
、第1制御弁14及び第2制御弁15を閉じる。この状
態で室27の内容積を変化させる。室27の容積変化は
被検査容器16側の配管を含めた内容積に変化を与える
。内容積変化がΔVのとき発生差圧がΔPであれば等価
内容積VE は(1)式で求めることができる。When measuring the equivalent internal volume, the container to be inspected 1
6, install a non-defective product with no leakage, and place the container to be inspected 1.
6 and the reference tank 17, the first control valve 14 and the second control valve 15 are closed. In this state, the internal volume of the chamber 27 is changed. A change in the volume of the chamber 27 causes a change in the internal volume including the piping on the side of the container 16 to be inspected. If the internal volume change is ΔV and the generated differential pressure is ΔP, the equivalent internal volume VE can be determined by equation (1).
【0010】
VE =(1.03+P)ΔV/ΔP………(1)P:
テスト圧〔kg/cm2 G〕
ΔV:容積変化量〔cc〕
ΔP:発生差圧〔kg/cm2 〕
差圧ΔPは差圧検出器18によって検出され、増幅器1
9で増幅してAD変換器34に与えられる。AD変換器
34でディジタル信号に変換された差圧信号は演算処理
装置25に入力される。VE=(1.03+P)ΔV/ΔP……(1)P:
Test pressure [kg/cm2 G] ΔV: Volume change [cc] ΔP: Generated differential pressure [kg/cm2] The differential pressure ΔP is detected by the differential pressure detector 18, and the amplifier 1
9 and is amplified and provided to the AD converter 34. The differential pressure signal converted into a digital signal by the AD converter 34 is input to the arithmetic processing unit 25 .
【0011】演算処理装置25は、例えばマイクロコン
ピュータによって構成することができる。マイクロコン
ピュータは周知のように中央処理装置25Aとこの中央
処理装置25Aを所定の順序で動作させるプログラムを
収納したROM25Bと、入力されるデータ及び演算処
理したデータ等を記憶するRAM25Cと、入力ポート
25Dと、出力ポート25Eで構成される。[0011] The arithmetic processing unit 25 can be constituted by, for example, a microcomputer. As is well known, a microcomputer includes a central processing unit 25A, a ROM 25B that stores a program for operating the central processing unit 25A in a predetermined order, a RAM 25C that stores input data and processed data, and an input port 25D. and an output port 25E.
【0012】被検査容器16側の等価内容積を測定する
場合は演算処理装置25を構成するマイクロコンピュー
タを等価内容積測定モードで動作させる。等価内容積測
定モードにおいて、入力ポート25Dに差圧データが入
力されると中央処理装置25Aは予めキーボード35か
ら入力しているテスト圧Pと室27の容積変化量ΔVを
使って等価内容積VE を算出する。算出した等価内容
積VE は、例えばRAM25Cに記憶し、また必要に
応じて外部に設けたRAMカード或は磁気デスク(特に
図示しない)等に書込み保存する。When measuring the equivalent internal volume of the container 16 to be inspected, the microcomputer constituting the arithmetic processing unit 25 is operated in an equivalent internal volume measuring mode. In the equivalent internal volume measurement mode, when differential pressure data is input to the input port 25D, the central processing unit 25A uses the test pressure P input in advance from the keyboard 35 and the volume change amount ΔV of the chamber 27 to calculate the equivalent internal volume VE. Calculate. The calculated equivalent internal volume VE is stored, for example, in the RAM 25C, and if necessary, written and saved in an externally provided RAM card or magnetic disk (not particularly shown).
【0013】内容積が異なる被検査容器16が各種存在
する場合は、各種の被検査容器毎に等価内容積VE を
測定し、RAM25C又はその他の記憶手段にその等価
内容積VE を記憶する。等価内容積VE が求まるこ
とにより演算処理装置25は検査モードで動作するとき
以下に示す(2)式から洩れ量ΔQ〔cc/分〕を算出
することができる。If there are various types of containers 16 to be inspected with different internal volumes, the equivalent internal volume VE is measured for each type of container to be inspected, and the equivalent internal volume VE is stored in the RAM 25C or other storage means. By determining the equivalent internal volume VE, the arithmetic processing unit 25 can calculate the leakage amount ΔQ [cc/min] from equation (2) shown below when operating in the inspection mode.
【0014】
ΔQ=VE (ΔP/1.03)60/T3
………(2)この算出結果を表示器36に表示する
ことにより、被検査容器16の洩れ量を直読表示するこ
とができる。ΔQ=VE (ΔP/1.03)60/T3
(2) By displaying this calculation result on the display 36, the leakage amount of the container 16 to be inspected can be directly read and displayed.
【0015】[0015]
【発明が解決しようとする課題】先に提案した洩れ量表
示型の洩れ検査装置では、被検査容器16の等価内容積
を求めるために容積変化付加器24を用いている。容積
変化付加器24はマイクロメーターヘッド33を調整す
ることにより容積の変化量を各種設定できる。ところで
被検査容器16の内容積は各種のものが検査対象となる
。容積変化付加器24によって与える容積変化は被検査
容器の内容積の約0.5〜1.0%程度必要である。
従って被検査容器16の内容積が大きい場合は容積変化
付加器24の容積変化量ΔVも大きくしなければならな
い。また被検査容器16の内容積が小さい場合には容積
変化付加器24の容積変化量ΔVは小さくしなければな
らない。The previously proposed leakage display type leakage testing device uses a volume change adder 24 to determine the equivalent internal volume of the container 16 to be tested. The volume change adder 24 can set various amounts of change in volume by adjusting the micrometer head 33. By the way, various internal volumes of the containers 16 to be inspected are subject to inspection. The volume change provided by the volume change adder 24 is required to be approximately 0.5 to 1.0% of the internal volume of the container to be inspected. Therefore, when the internal volume of the container 16 to be inspected is large, the volume change amount ΔV of the volume change adder 24 must also be increased. Further, when the internal volume of the container 16 to be inspected is small, the volume change amount ΔV of the volume change adder 24 must be small.
【0016】容積変化付加器24の容積変化量ΔVは上
述したようにマイクロメーターヘッド33を調整するこ
とによって調整できるが、その調整範囲は有限である。
従って被検査容器16の内容積が大きいものから小さい
ものまで各種存在する場合は容積変化付加器24を容積
の設定範囲が各種異なる容積変化付加器を用意しなけれ
ばならない。The volume change amount ΔV of the volume change adder 24 can be adjusted by adjusting the micrometer head 33 as described above, but the adjustment range is limited. Therefore, if there are various types of containers 16 to be inspected, ranging from large to small internal volumes, it is necessary to prepare volume change adders 24 with different volume setting ranges.
【0017】また被検査容器24をその都度交換する手
間が必要となり面倒である。また負圧によって検査しな
ければならない容器の場合には、容積変化付加器24に
よって容積変化を与えても圧力変化を発生させることが
できない。従って負圧によって検査する場合には洩れ量
を直読表示させる検査方法は採れない欠点がある。この
発明の目的は被検査容器の内容積が大きくても、小さく
ても容積変化付加器を交換する必要がなく、また負圧に
よって検査する型式の洩れ検査装置にも洩れ量を直読表
示させることができる洩れ検査装置の校正方法を提案す
るものである。[0017] Furthermore, it is necessary to replace the container 24 to be inspected each time, which is troublesome. Further, in the case of a container that must be inspected using negative pressure, even if a volume change is applied by the volume change adder 24, a pressure change cannot be generated. Therefore, when inspecting using negative pressure, there is a drawback that an inspection method that directly reads and displays the amount of leakage cannot be used. The purpose of this invention is to eliminate the need to replace the volume change adder even if the internal volume of the container to be inspected is large or small, and to directly read and display the leakage amount on a leakage testing device of the type that tests using negative pressure. This paper proposes a method for calibrating a leak inspection device that can perform the following steps.
【0018】[0018]
【課題を解決するための手段】この発明では容積変化付
加器の代りに、予め洩れ量が校正された微少リーク弁を
用いる。この微少リーク弁は予め毎分0.1cc〜数c
c程度の微少リークが得られるようにリーク量が設定さ
れる。この微少リーク弁を例えば被検査容器側の配管に
設けることによって被検査容器側の空気圧を時間の経過
に従って変化させることができ、被検査容器側の内容積
を変化させたと等価な現象を得ることができる。[Means for Solving the Problems] In the present invention, a small leak valve whose leakage amount has been calibrated in advance is used in place of the volume change adder. This minute leak valve has a flow rate of 0.1 cc to several cc per minute.
The leak amount is set so that a minute leak of about c is obtained. By providing this minute leak valve, for example, in the piping on the side of the container to be inspected, the air pressure on the side of the container to be inspected can be changed over time, and a phenomenon equivalent to changing the internal volume of the container to be inspected can be obtained. Can be done.
【0019】従って差圧値をゼロリセットしたタイミン
グから一定時間T3を規定し、この一定時間T3 の経
過後に差圧値ΔP(mmH2 O)を演算処理装置25
に読込むと共に、(3)式の演算を行なうことによって
等価内容積VE を求めることができる。
VE =1.03(ΔQ/ΔP)T3 /60 ……
(3)ΔQ:微少リーク弁のリーク量(cc/分)T3
:検出時間(秒)
よってこの発明の校正方法によれば微少リーク弁からリ
ークさせる時間T3を変えるだけで被検査容器の容積が
大きいものから小さいものまでの等価内容積を求めるこ
とができる。また空圧源11が負圧の場合でも校正を行
なうことができる。Therefore, a certain period of time T3 is defined from the timing when the differential pressure value is reset to zero, and after the elapse of this certain period of time T3, the differential pressure value ΔP (mmH2O) is calculated by the arithmetic processing unit 25.
The equivalent internal volume VE can be obtained by reading in the equation (3) and calculating the equation (3). VE =1.03(ΔQ/ΔP)T3/60...
(3) ΔQ: Leakage amount of minute leak valve (cc/min) T3
: Detection time (seconds) Therefore, according to the calibration method of the present invention, the equivalent internal volume of the container to be inspected from large to small can be determined by simply changing the time T3 for leaking from the minute leak valve. Furthermore, calibration can be performed even when the air pressure source 11 is under negative pressure.
【0020】[0020]
【実施例】図1にこの発明の一実施例を示す。図1にお
いて、図と対応する部分には同一符号を付し、その重複
説明は省略する。この発明の特徴は被検査容器16側の
配管に微少リーク弁37を設けた構造である。つまりこ
の側では2方弁38を介して微少リーク弁37を被検査
容器16の配管に接続した場合を示す。2方弁38は校
正モードにおいて開に制御され、校正モードにおいて微
少リーク弁37を被検査容器16の配管に連通させる。[Embodiment] FIG. 1 shows an embodiment of the present invention. In FIG. 1, parts corresponding to those in the figure are designated by the same reference numerals, and redundant explanation thereof will be omitted. A feature of this invention is a structure in which a minute leak valve 37 is provided in the piping on the side of the container 16 to be inspected. That is, this side shows the case where the minute leak valve 37 is connected to the piping of the container 16 to be inspected via the two-way valve 38. The two-way valve 38 is controlled to be open in the calibration mode, and allows the minute leak valve 37 to communicate with the piping of the container 16 to be inspected in the calibration mode.
【0021】微少リーク弁37は例えば本出願人が提案
した「実願平1−87260号:微少リーク弁」を用い
ることができる。図2乃至図5に先に提案した微少リー
ク弁の構造を示す。図2において1は金属ブロックを示
す。この金属ブロック1は例えば図3に示すように円柱
体の胴を180°対向する位置で切り落とした断面形状
とされる。As the minute leak valve 37, for example, ``Minute Leak Valve'' proposed by the applicant of the present application No. 1-87260 can be used. 2 to 5 show the structure of the previously proposed micro leak valve. In FIG. 2, 1 indicates a metal block. The metal block 1 has a cross-sectional shape, for example, as shown in FIG. 3, where the body of a cylindrical body is cut off at 180° opposing positions.
【0022】金属ブロック1の両端面には同軸芯上に孔
2A,2Bが形成され、この孔2A,2Bの内周面に雌
ネジ3A,3Bが形成される。この雌ネジ3A,3Bに
図4及び図5に示す継手20が接続される。孔2A,2
Bの奥に細管貫通孔4が形成され、この細管貫通孔4に
よって孔2Aと2Bの間が連通される。細管貫通孔4に
細管5を貫通させる。細管5は例えば外径が0.8mm
φ,内径0.5mmφのステンレス製のパイプを用いる
ことができる。細管貫通孔4は細管5の外径よりわずか
に大きい程度の内径を有して形成され、シール材6A,
6Bによって細管5の外周と細管貫通孔4の内壁との間
をシールする。シール材6A,6Bはオーリングを用い
ることができ、このオーリングをリング状のネジによっ
て形成されたシール抑え7A,7Bで細管貫通孔4の内
壁面に抑え付け、細管5の外周と細管貫通孔4の内壁と
の間をシールする。Coaxial holes 2A and 2B are formed on both end faces of the metal block 1, and female threads 3A and 3B are formed on the inner peripheral surfaces of the holes 2A and 2B. A joint 20 shown in FIGS. 4 and 5 is connected to the female threads 3A and 3B. Hole 2A, 2
A thin tube through hole 4 is formed at the back of B, and this thin tube through hole 4 communicates between the holes 2A and 2B. The thin tube 5 is passed through the thin tube through hole 4. For example, the thin tube 5 has an outer diameter of 0.8 mm.
A stainless steel pipe with an inner diameter of 0.5 mm can be used. The thin tube through hole 4 is formed to have an inner diameter slightly larger than the outer diameter of the thin tube 5, and the sealing material 6A,
6B seals between the outer periphery of the thin tube 5 and the inner wall of the thin tube through hole 4. O-rings can be used as the sealing materials 6A and 6B, and the O-rings are pressed against the inner wall surface of the capillary through hole 4 with seal retainers 7A and 7B formed by ring-shaped screws, and the O-rings are pressed against the inner wall surface of the capillary tube through hole 4 and the outer periphery of the capillary tube 5 and the capillary through hole are sealed. A seal is formed between the inner wall of the hole 4 and the inner wall of the hole 4.
【0023】細管貫通孔4にはこの細管貫通孔4と直交
する方向に形成したネジ孔8が連通される。ネジ孔8に
はネジ9が螺入されネジ9を締め付けることによって細
管5を押しつぶすことができる。なお、この例ではネジ
9の先端に、ネジ9とは別に作られたコマ9Aを連結し
、コマ9Aを介してネジ9の締付力を細管5に与える構
造としている。このようにコマ9Aを介挿することによ
って細管5にネジ9の捩り力を直接与えることがなく、
細管5をネジ切ってしまう事故を防止するようにしてい
る。A threaded hole 8 formed in a direction perpendicular to the thin tube through hole 4 communicates with the thin tube through hole 4 . A screw 9 is screwed into the screw hole 8, and by tightening the screw 9, the thin tube 5 can be crushed. In this example, a piece 9A made separately from the screw 9 is connected to the tip of the screw 9, and the tightening force of the screw 9 is applied to the thin tube 5 via the piece 9A. By inserting the piece 9A in this way, the twisting force of the screw 9 is not directly applied to the thin tube 5,
This is to prevent an accident of threading the thin tube 5.
【0024】図6は微少リーク弁の洩れ量を校正するた
めの測定器を示す。この測定器は基台40の上面に透明
な外筒41が植設され、この外筒41の軸芯に同様に透
明な内筒42が植設される。内筒42の上端は蓋43で
密封され、下端側は外筒41と内筒42は互いに連通さ
れている。内筒42には微少リーク弁から延長された細
管5が上向きに挿入される。外筒41及び内筒42には
Fで示す位置まで液体が封入される。FIG. 6 shows a measuring device for calibrating the leakage amount of the minute leakage valve. In this measuring instrument, a transparent outer cylinder 41 is installed on the upper surface of a base 40, and a transparent inner cylinder 42 is installed in the axis of this outer cylinder 41 as well. The upper end of the inner cylinder 42 is sealed with a lid 43, and the outer cylinder 41 and the inner cylinder 42 communicate with each other at the lower end. A thin tube 5 extending from a minute leak valve is inserted upward into the inner cylinder 42 . Liquid is sealed in the outer cylinder 41 and the inner cylinder 42 up to the position indicated by F.
【0025】微少リーク弁を通じて内筒42に空気を送
り込むことにより、内筒42内の液面はFで示す位置か
ら漸次降下する。内筒42内の容積に対応した目盛りを
外筒41に付しておくことにより内筒42に溜まる空気
の量を計測することができ、内筒42の内径を適当に選
ぶことによって1分間0.1cc〜1ccのような微少
な空気の量を計測することができる。By feeding air into the inner cylinder 42 through the minute leak valve, the liquid level within the inner cylinder 42 gradually drops from the position indicated by F. By attaching a scale corresponding to the volume inside the inner cylinder 42 to the outer cylinder 41, the amount of air accumulated in the inner cylinder 42 can be measured. It is possible to measure minute amounts of air such as .1cc to 1cc.
【0026】上述したように、この微少リーク弁によれ
ば絞りとなるべき部分を細管5を押しつぶして形成した
から、微少な断面積を安定に維持することができ、従っ
て微少な洩れ量を正確に設定することができる。また細
管5を押しつぶした状態でネジ9の締め付けを緩めるこ
とによって細管5は元の状態に戻る。よって細管5の断
面積を任意に設定することができ、リーク量を自由に設
定することができる。また図6に示した校正器を利用す
ることによって微少リークを正確に設定することができ
る。As mentioned above, according to this micro-leak valve, since the part that should become the throttle is formed by crushing the thin tube 5, it is possible to stably maintain a micro-cross-sectional area, and therefore the amount of micro-leakage can be accurately controlled. Can be set to . Moreover, by loosening the screw 9 while the thin tube 5 is being crushed, the thin tube 5 returns to its original state. Therefore, the cross-sectional area of the thin tube 5 can be set arbitrarily, and the amount of leakage can be set freely. Further, by using the calibrator shown in FIG. 6, minute leaks can be set accurately.
【0027】説明は再び図1に戻る。被検査容器16側
の等価内容積を求めるには次のように動作する。被検査
容器16として洩れのない容器を選んで接続する。3方
電磁弁13と第1制御弁14と第2制御弁15を開き、
被検査容器16と基準タンク17に空圧源11が発生す
る空気圧を与える。所定の時間(1〜2秒程度)経過し
た時点で第1制御弁14及び第2制御弁15を閉じ空圧
源11を被検査容器16及び基準タンク17から切離す
。The explanation returns to FIG. 1 again. In order to obtain the equivalent internal volume on the side of the container to be inspected 16, the following operation is performed. A leak-free container is selected as the container 16 to be inspected and connected. Open the three-way solenoid valve 13, the first control valve 14, and the second control valve 15,
The air pressure generated by the air pressure source 11 is applied to the container 16 to be inspected and the reference tank 17. When a predetermined period of time (about 1 to 2 seconds) has elapsed, the first control valve 14 and the second control valve 15 are closed to disconnect the air pressure source 11 from the container to be inspected 16 and the reference tank 17.
【0028】この状態で被検査容器16及び基準タンク
17内の圧力を安定化させる(1〜2秒程度)。空気が
安定化したと予想されるタイミングで差圧検出器18か
ら出力される検出電圧を増幅器19の入力側で強制的に
ゼロリセットし、このゼロリセットのタイミングで2方
電磁38を開き、微少リーク弁37に空気圧を与え、予
め校正した量のリーク量で被検査側の空気をリークさせ
る(負圧の場合は外気から被検査容器16に空気が侵入
する)。In this state, the pressure inside the test container 16 and the reference tank 17 is stabilized (for about 1 to 2 seconds). At the timing when the air is expected to be stabilized, the detection voltage output from the differential pressure detector 18 is forcibly reset to zero on the input side of the amplifier 19, and at the timing of this zero reset, the two-way electromagnetic circuit 38 is opened to Air pressure is applied to the leak valve 37 to leak air from the side to be inspected at a pre-calibrated leakage amount (in the case of negative pressure, air enters the container to be inspected 16 from the outside air).
【0029】リークの開始から所定の時間(T3 秒)
経過した時点で差圧値ΔPを演算処理装置25に取込む
。
時間T3 を規定することによってリーク開始から微少
リーク弁37を通じてリークした空気の量ΔQ(cc/
T3 )が規定される。よって時間T3 (秒)が経過
した時点で差圧ΔPを読込むことによって(3)式の演
算を行なうことができる。(3)式の演算によって被検
査容器16の等価内容積VE を求めることができる。[0029] Predetermined time (T3 seconds) from the start of leakage
At the time when the differential pressure value ΔP has elapsed, the differential pressure value ΔP is taken into the arithmetic processing unit 25. By specifying the time T3, the amount of air ΔQ (cc/
T3) is defined. Therefore, the calculation of equation (3) can be performed by reading the differential pressure ΔP after the time T3 (seconds) has elapsed. The equivalent internal volume VE of the container 16 to be inspected can be determined by calculating equation (3).
【0030】被検査容器16の等価内容積VE が求ま
ることにより、検査モードに切換えることができる。尚
各種の大きさの被検査容器16の等価内容積VE を予
め求めておき、各等価内容積VE を演算処理装置25
に記憶させておくことにより、爾後校正を行なうことな
く直接検査モードに入ることができる。By determining the equivalent internal volume VE of the container 16 to be inspected, it is possible to switch to the inspection mode. Note that the equivalent internal volumes VE of the containers 16 to be inspected of various sizes are determined in advance, and each equivalent internal volume VE is calculated by the arithmetic processing unit 25.
By storing this in the memory, it is possible to directly enter the inspection mode without performing calibration afterwards.
【0031】[0031]
【発明の効果】以上説明したように、この発明によれば
被検査容器16の等価内容積を求め、この等価内容積を
基に被検査容器16の洩れ量を直読表示する洩れ検査装
置において、校正に用いる容積変化付加器を微少リーク
弁37に代えたから、微少リーク弁を通じてリークさせ
る空気の量を時間の長短によって自由に設定することが
できる。As explained above, according to the present invention, in the leakage testing device that calculates the equivalent internal volume of the container 16 to be inspected and directly reads and displays the amount of leakage of the container 16 to be inspected based on this equivalent internal volume, Since the volume change adder used for calibration is replaced with the minute leak valve 37, the amount of air leaked through the minute leak valve can be freely set depending on the length of time.
【0032】従って被検査容器16の容積が大きい場合
は時間T3 を長く採ればよい。また被検査容器16の
容積が小さい場合は時間T3 を短かく採ればよい。こ
の結果被検査容器16の容積の大小に関係なく共通の微
少リーク弁37を使って被検査容器16の等価内容積V
E を求める校正を行なうことができる利点が得られる
。また微少リーク弁37を設けたから、検査モードにお
いて微少リーク弁37を使って校正を行なうことができ
る。つまり演算処理装置25で算出した洩れ量ΔQと微
少リーク弁37のリーク量とを比較することにより測定
系の感度の校正とチェックを行なうことができる。Therefore, if the volume of the container 16 to be inspected is large, the time T3 may be set longer. Furthermore, if the volume of the container 16 to be inspected is small, the time T3 may be shortened. As a result, regardless of the volume of the container 16 to be inspected, the equivalent internal volume V of the container 16 to be inspected is
This provides the advantage of being able to perform a calibration to determine E. Further, since the minute leak valve 37 is provided, calibration can be performed using the minute leak valve 37 in the inspection mode. That is, by comparing the leakage amount ΔQ calculated by the arithmetic processing unit 25 with the leakage amount of the minute leak valve 37, the sensitivity of the measurement system can be calibrated and checked.
【図1】この発明の一実施例を示すブロック図。FIG. 1 is a block diagram showing an embodiment of the present invention.
【図2】この発明に用いる微少リーク弁の構造を説明す
るための断面図。FIG. 2 is a sectional view for explaining the structure of a minute leak valve used in the present invention.
【図3】図2に示した微少リーク弁の正面図。FIG. 3 is a front view of the minute leak valve shown in FIG. 2.
【図4】図2に示した微少リーク弁に用いる継手の構造
を説明するための断面図。4 is a sectional view for explaining the structure of a joint used in the minute leak valve shown in FIG. 2. FIG.
【図5】図4の正面図。FIG. 5 is a front view of FIG. 4.
【図6】図2に示した微少リーク弁を校正する場合に用
いる校正器の構造を説明するための断面図。6 is a sectional view for explaining the structure of a calibrator used when calibrating the minute leak valve shown in FIG. 2. FIG.
【図7】従来の技術を説明するためのブロック図。FIG. 7 is a block diagram for explaining a conventional technique.
11 空圧源 12 減圧弁 13 3方電磁弁 14 第1制御弁 15 第2制御弁 16 被検査容器 17 基準タンク 18 差圧検出器 19 増幅器 25 演算処理装置 37 微少リーク弁 11 Pneumatic source 12 Pressure reducing valve 13 3-way solenoid valve 14 First control valve 15 Second control valve 16 Container to be inspected 17 Standard tank 18 Differential pressure detector 19 Amplifier 25 Arithmetic processing unit 37 Minute leak valve
Claims (1)
源と、この空圧源から与えられる空気圧を第1制御弁を
通じて与えられ終端部に洩れのない被検査容器が接続さ
れた測定側配管と、上記空圧源から与えられる空気圧を
第2制御弁を通じて与えられ、終端部に基準容器が接続
された基準側配管と、これら基準側配管と測定配管との
間の圧力差を測定する差圧検出器とを具備して成る洩れ
検査装置において、測定側配管に微少リーク弁を設け、
この微少リーク弁を通じて単位時間当り既知の量の空気
を洩らすことにより、上記測定側配管と基準側配管の間
に差圧を発生させ、一定時間内に発生する差圧値と、上
記微少リーク弁を通じて洩れる空気の量とによって上記
測定側配管の等価内容積を校正値として求める洩れ検査
装置の校正方法。Claim 1: A measurement system comprising: a pneumatic source that generates positive or negative pneumatic pressure; and a leak-free test container connected to the terminal end of which the pneumatic pressure supplied from the pneumatic source is supplied through a first control valve. Measure the pressure difference between the side piping, the reference side piping to which air pressure from the air pressure source is applied through the second control valve and the reference container is connected to the terminal end, and the reference side piping and the measurement piping. In a leak inspection device equipped with a differential pressure detector, a small leak valve is installed in the measurement side piping,
By leaking a known amount of air per unit time through this minute leak valve, a differential pressure is generated between the measurement side piping and the reference side piping, and the differential pressure value generated within a certain time and the minute leak valve are A method for calibrating a leak testing device, in which the equivalent internal volume of the measurement side piping is determined as a calibration value based on the amount of air leaking through the pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3138702A JP2700962B2 (en) | 1991-06-11 | 1991-06-11 | Calibration method of leak inspection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3138702A JP2700962B2 (en) | 1991-06-11 | 1991-06-11 | Calibration method of leak inspection equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04364436A true JPH04364436A (en) | 1992-12-16 |
| JP2700962B2 JP2700962B2 (en) | 1998-01-21 |
Family
ID=15228132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3138702A Expired - Lifetime JP2700962B2 (en) | 1991-06-11 | 1991-06-11 | Calibration method of leak inspection equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2700962B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012112752A (en) * | 2010-11-24 | 2012-06-14 | Fukuda:Kk | Leakage amount standard instrument |
| JP2018072262A (en) * | 2016-11-02 | 2018-05-10 | 株式会社コスモ計器 | Leak tester, leakage coefficient calculation method and program |
| CN111174980A (en) * | 2020-01-12 | 2020-05-19 | 北京化工大学 | Device and method for measuring tiny leakage |
| CN115127750A (en) * | 2022-06-24 | 2022-09-30 | 北京海德利森科技有限公司 | Hydrogen tiny leakage detection method |
| JP2023077364A (en) * | 2021-11-24 | 2023-06-05 | 株式会社ガスター | Leak inspection equipment Leak inspection method |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102230127B1 (en) * | 2019-02-13 | 2021-03-18 | 오경근 | Leak master for leak tester |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6345526A (en) * | 1986-04-04 | 1988-02-26 | Cosmo Keiki:Kk | Leak inspection device |
| JPH01276036A (en) * | 1988-04-27 | 1989-11-06 | Hitachi Metals Ltd | Evaluating method for leak inspecting machine |
-
1991
- 1991-06-11 JP JP3138702A patent/JP2700962B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6345526A (en) * | 1986-04-04 | 1988-02-26 | Cosmo Keiki:Kk | Leak inspection device |
| JPH01276036A (en) * | 1988-04-27 | 1989-11-06 | Hitachi Metals Ltd | Evaluating method for leak inspecting machine |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012112752A (en) * | 2010-11-24 | 2012-06-14 | Fukuda:Kk | Leakage amount standard instrument |
| JP2018072262A (en) * | 2016-11-02 | 2018-05-10 | 株式会社コスモ計器 | Leak tester, leakage coefficient calculation method and program |
| CN111174980A (en) * | 2020-01-12 | 2020-05-19 | 北京化工大学 | Device and method for measuring tiny leakage |
| JP2023077364A (en) * | 2021-11-24 | 2023-06-05 | 株式会社ガスター | Leak inspection equipment Leak inspection method |
| CN115127750A (en) * | 2022-06-24 | 2022-09-30 | 北京海德利森科技有限公司 | Hydrogen tiny leakage detection method |
| CN115127750B (en) * | 2022-06-24 | 2024-05-10 | 北京海德利森科技有限公司 | Hydrogen micro-leakage detection method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2700962B2 (en) | 1998-01-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6584828B2 (en) | Method and apparatus of nondestructive testing a sealed product for leaks | |
| US9097609B1 (en) | Hermetic seal leak detection apparatus with variable size test chamber | |
| US6279383B1 (en) | Method and apparatus for detecting leakage | |
| JPH0466307B2 (en) | ||
| KR20090003195A (en) | Leak test method and leak test device for pipeline | |
| US4542643A (en) | Fluid leak testing method | |
| JPH07181101A (en) | Leak quantity detector | |
| JPH04364436A (en) | Calibrating method for leakage inspecting apparatus | |
| US5406831A (en) | Instrument for measurement of vacuum in sealed thin wall packets | |
| JPH10185749A (en) | Method and apparatus for leak inspection | |
| JP3378602B2 (en) | Apparatus for measuring liquid flow rate and leak rate in test object | |
| KR101837604B1 (en) | Device for detecting leakage of gas meter | |
| JP2001066216A (en) | Instrument and method for measuring quantity of leakage from gasket | |
| JP3715543B2 (en) | Airtight performance test method | |
| JPH0542283Y2 (en) | ||
| KR100922587B1 (en) | Airtight Container Leak Inspection System | |
| JP2005077310A (en) | Gas measuring device and self-diagnosis method therefor | |
| JP3186644B2 (en) | Gas leak inspection method | |
| KR20230119703A (en) | Leak Testing Apparatus and Methods | |
| JPH11304632A (en) | Computing device for drift correction value for leak inspection and leak inspection apparatus using it | |
| JP2002107258A (en) | Artificial leak device for air leak tester | |
| JP3132710B2 (en) | Leak inspection equipment | |
| JP7793258B2 (en) | Defect inspection method | |
| KR100455309B1 (en) | Solenoid Valve Flow Measurement Apparatus and Method | |
| JPH0230462B2 (en) | MOREKENSASOCHI |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081003 Year of fee payment: 11 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081003 Year of fee payment: 11 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091003 Year of fee payment: 12 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091003 Year of fee payment: 12 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20101003 Year of fee payment: 13 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111003 Year of fee payment: 14 |
|
| EXPY | Cancellation because of completion of term | ||
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111003 Year of fee payment: 14 |