JPH04367202A - Fe-based amorphous alloy thin belt having excellent magnetically soft characteristic and its manufacture - Google Patents
Fe-based amorphous alloy thin belt having excellent magnetically soft characteristic and its manufactureInfo
- Publication number
- JPH04367202A JPH04367202A JP3143604A JP14360491A JPH04367202A JP H04367202 A JPH04367202 A JP H04367202A JP 3143604 A JP3143604 A JP 3143604A JP 14360491 A JP14360491 A JP 14360491A JP H04367202 A JPH04367202 A JP H04367202A
- Authority
- JP
- Japan
- Prior art keywords
- amorphous alloy
- based amorphous
- ribbon
- alloy ribbon
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
- H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
- H01F1/14—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
- H01F1/147—Alloys characterised by their composition
- H01F1/153—Amorphous metallic alloys, e.g. glassy metals
- H01F1/15308—Amorphous metallic alloys, e.g. glassy metals based on Fe/Ni
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- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Soft Magnetic Materials (AREA)
- Manufacturing Cores, Coils, And Magnets (AREA)
Abstract
Description
【0001】0001
【産業上の利用分野】本発明は、電力トランス、高周波
トランスの鉄心、磁気回路のヨーク、可飽和リアクトル
の鉄心あるいは磁気センサなどに適用できる、飽和磁束
密度が高く軟磁気特性のすぐれたFe基非晶質合金に関
するものである。[Industrial Application Field] The present invention is based on Fe, which has a high saturation magnetic flux density and excellent soft magnetic properties, and can be applied to power transformers, high frequency transformer cores, magnetic circuit yokes, saturable reactor cores, magnetic sensors, etc. It concerns amorphous alloys.
【0002】0002
【従来の技術】単ロール急冷法によって製造されるFe
基非晶質合金薄帯は電磁気特性がすぐれ、生産性が高い
ことから電力トランスの鉄心材料として注目され、一部
で実用化も進んでいる。しかし、現在一般に使われてい
る方向性珪素鋼板に比べると、材料コストが高いこと、
板厚が薄すぎることにより実用化の進捗は当初の予想に
比べて遅れている。これらの非晶質合金固有の実用的問
題のうち、板厚に関する課題は特公昭63−40629
号公報に開示される多重スリットノズル法により50μ
mを超える板厚の厚肉材料が開発され、技術的にはほぼ
解決された。また、材料コストについても、生産性は上
記多重スリットノズル法により2倍以上に向上するのを
はじめ、低コスト原料の使用を可能にした技術の開発な
どで珪素鋼板とのコスト差は縮まっている。[Prior Art] Fe produced by single roll quenching method
Basic amorphous alloy ribbons have excellent electromagnetic properties and high productivity, so they are attracting attention as iron core materials for power transformers, and are even being put into practical use in some areas. However, compared to the grain-oriented silicon steel sheets commonly used today, the material cost is high;
Progress in commercialization has been slower than initially expected because the plate thickness is too thin. Among the practical problems specific to these amorphous alloys, the issue regarding plate thickness was addressed in Japanese Patent Publication No. 63-40629.
50μ by the multi-slit nozzle method disclosed in the publication.
A thick-walled material with a thickness exceeding 100 m has been developed, and the problem has almost been solved technically. In addition, in terms of material costs, productivity has more than doubled with the multi-slit nozzle method mentioned above, and the cost difference with silicon steel sheets has narrowed due to the development of technology that enables the use of low-cost raw materials. .
【0003】それにもかかわらず、非晶質合金鉄心トラ
ンスの普及率はまだ低い。その理由の一つに近年におけ
る珪素鋼板の著しい鉄損改善がある。非晶質合金の鉄損
の推移がほぼ横ばいのままである理由として、非晶質合
金の鉄損が、元来珪素鋼板に比べて1/5程度ときわめ
て低いため、鉄損低減の努力がほとんどなされなかった
こと、さらに珪素鋼板で鉄損低減の有効な手段が非晶質
合金においてはほとんど効果を示さないことなどが挙げ
られる。すなわち、珪素鋼板の鉄損低減の手法は、結晶
方位制御、結晶粒径制御、薄手化、Si増量、レーザ照
射、張力付与が代表的である。これらの要因を最適化す
ることにより、今日、実験室規模ではあるが、50Hz
、1.3Tにおける鉄損W13/50 が0.16〜0
.18W/kgのすぐれた値が得られることが野沢ら(
日本応用磁気学会 第51回研究会資料(1987年
)第3頁)、および西池ら(同 第21頁)によって
示されている。珪素鋼板のこの鉄損値は、平均的Fe基
非晶質合金薄帯の鉄損と比べて遜色がなく、最高レベル
の値0.1W/kgと比べても、その差は以前より大幅
に縮まっている。[0003] Nevertheless, the penetration rate of amorphous alloy core transformers is still low. One of the reasons for this is the remarkable improvement in core loss of silicon steel sheets in recent years. The reason why the iron loss of amorphous alloys has remained almost flat is that the iron loss of amorphous alloys is originally extremely low, about 1/5 of that of silicon steel sheets, so efforts to reduce iron loss have been difficult. In addition, effective measures for reducing iron loss in silicon steel sheets have little effect on amorphous alloys. That is, typical methods for reducing iron loss in silicon steel sheets include crystal orientation control, crystal grain size control, thinning, increasing the amount of Si, laser irradiation, and applying tension. By optimizing these factors, today, although on a laboratory scale, 50Hz
, iron loss W13/50 at 1.3T is 0.16 to 0
.. Nozawa et al. (
Materials from the 51st meeting of the Japanese Society of Applied Magnetics (1987, p. 3) and Nishiike et al. (p. 21). This iron loss value of silicon steel sheet is comparable to that of an average Fe-based amorphous alloy ribbon, and even when compared to the highest level value of 0.1 W/kg, the difference is much larger than before. It's shrinking.
【0004】珪素鋼板で効果を示した上記の手法のうち
、非晶質合金の鉄損改善に対しても適用の可能性がある
のは薄手化、レーザ照射、張力付与である。しかし、適
用の結果は、通常板厚30μmの薄帯に対しては全く効
果がないか、あってもわずかであった。この理由は、も
ともと渦電流損の比率の小さい非晶質合金においては渦
電流損の減少とヒステリシス損の増加が相殺されるため
である。上記の3つの手段のうちレーザ照射は厚肉の非
晶質合金に対しては効果を示した。[0004] Among the above methods that have been shown to be effective for silicon steel sheets, thinning, laser irradiation, and tension application are potentially applicable to improving the core loss of amorphous alloys. However, the result of application was that there was no effect at all or only a slight effect on a thin ribbon with a thickness of 30 μm. The reason for this is that in an amorphous alloy, which originally has a small eddy current loss ratio, a decrease in eddy current loss and an increase in hysteresis loss are offset. Of the three methods mentioned above, laser irradiation was effective for thick amorphous alloys.
【0005】厚肉非晶質合金に対するレーザ照射の効果
については、T.Satoらがすでに報告している(1
985年,North−Holland 発行 Pro
ceedings of the FifthInte
rnational Conference on R
apidly Quenched Metals Vo
lume 2 第1643頁)。彼らは非晶質合金薄
帯の板厚が大きいほどレーザ照射による鉄損の低減が大
きいこと(図4参照)、これは板厚が大きいほど異常渦
電流損が大きくなるためであることを明らかにしている
。しかし図4のようにレーザ照射後の厚肉材の鉄損値が
薄肉材より低くなることはなく、板厚30μm以上でW
13/50 の値が0.1W/kg程度以下に改善され
ることはなかった。Regarding the effect of laser irradiation on thick amorphous alloys, T. Sato et al. have already reported (1
Published by North-Holland in 985 Pro
ceedings of the Fifth Inte
National Conference on R
apidly Quenched Metals Vo
lume 2 page 1643). They found that the greater the thickness of the amorphous alloy ribbon, the greater the reduction in iron loss due to laser irradiation (see Figure 4), and that this is because the greater the thickness, the greater the abnormal eddy current loss. I have to. However, as shown in Figure 4, the iron loss value of thick-walled materials after laser irradiation is not lower than that of thin-walled materials, and when the thickness is 30 μm or more, W
The value of 13/50 was not improved to about 0.1 W/kg or less.
【0006】[0006]
【発明が解決しようとする課題】本発明は、鉄損を大幅
に改善したFe基非晶質合金薄帯およびその製造方法を
提供することを目的とする。SUMMARY OF THE INVENTION An object of the present invention is to provide an Fe-based amorphous alloy ribbon with significantly improved core loss and a method for producing the same.
【0007】[0007]
【課題を解決するための手段・作用】本発明の要旨とす
るところは下記のとおりである。
(1) 多重スリットノズルを用いて製造された45
μm以上の板厚を有するFe基非晶質合金薄帯において
、該非晶質合金薄帯の表面層の、少なくとも0.5μm
の厚さを、表裏両面それぞれから除去することにより、
最大磁束密度1.3Tにおけるヒステリシス損を0.0
4W/kg以下にすることを特徴とする軟磁気特性のす
ぐれたFe基非晶質合金薄帯の製造方法。[Means and operations for solving the problems] The gist of the present invention is as follows. (1) 45 manufactured using a multi-slit nozzle
In an Fe-based amorphous alloy ribbon having a thickness of μm or more, the surface layer of the amorphous alloy ribbon has a thickness of at least 0.5 μm.
By removing the thickness from both the front and back sides,
Hysteresis loss at maximum magnetic flux density of 1.3T is 0.0
A method for producing an Fe-based amorphous alloy ribbon with excellent soft magnetic properties, characterized in that the magnetic strength is 4 W/kg or less.
【0008】(2) 薄帯表面層の除去をケミカルエ
ッチングで行うことを特徴とする前項1記載の軟磁気特
性のすぐれたFe基非晶質合金薄帯の製造方法。
(3) 前項1および2記載の方法で作製された軟磁
気特性のすぐれたFe基非晶質合金薄帯。
(4) 前項1記載の方法で作製された板厚が30μ
m以上のFe基非晶質合金薄帯に磁区細分化処理を行う
ことにより、50Hz、1.3Tにおける鉄損を0.0
8W/kg以下にすることを特徴とする軟磁気特性のす
ぐれたFe基非晶質合金薄帯の製造方法。(2) The method for producing an Fe-based amorphous alloy ribbon with excellent soft magnetic properties as described in the preceding item 1, characterized in that the surface layer of the ribbon is removed by chemical etching. (3) An Fe-based amorphous alloy ribbon with excellent soft magnetic properties produced by the method described in 1 and 2 above. (4) The thickness of the plate manufactured by the method described in section 1 above is 30μ.
By performing magnetic domain refining treatment on a Fe-based amorphous alloy ribbon with a diameter of 50Hz or more, the iron loss at 1.3T at 50Hz can be reduced to 0.0.
A method for producing an Fe-based amorphous alloy ribbon with excellent soft magnetic properties, characterized in that the magnetic strength is 8 W/kg or less.
【0009】(5) 磁区細分化の方法がパルスレー
ザ照射によることを特徴とする前項4記載の軟磁気特性
のすぐれたFe基非晶質合金薄帯の製造方法。
(6) 磁区細分化の方法が薄帯の幅方向に平行な溝
の形成によることを特徴とする前項4記載の軟磁気特性
のすぐれたFe基非晶質合金薄帯の製造方法。
(7) 磁区細分化の方法が機械的歪みの導入による
ことを特徴とする前項4記載の軟磁気特性のすぐれたF
e基非晶質合金薄帯の製造方法。(5) The method for producing an Fe-based amorphous alloy ribbon having excellent soft magnetic properties as described in the above item 4, wherein the method of magnetic domain refining is pulsed laser irradiation. (6) The method for producing an Fe-based amorphous alloy ribbon with excellent soft magnetic properties as described in item 4 above, wherein the magnetic domain refining method is by forming grooves parallel to the width direction of the ribbon. (7) The F having excellent soft magnetic properties as described in the preceding item 4, characterized in that the method of magnetic domain refining is the introduction of mechanical strain.
A method for producing an e-based amorphous alloy ribbon.
【0010】(8) 前項4記載の方法で作製された
軟磁気特性のすぐれたFe基非晶質合金薄帯。本発明は
多重スリットノズル法によって作製される50μm以上
の板厚をもつ厚肉のFe基非晶質合金薄帯の表面層をケ
ミカルエッチングで除去するとき図1に示すように、ヒ
ステリシス損が板厚除去量とともに急減し、板厚50μ
m以下ではほぼ一定のきわめて小さい値を保持するとい
う本発明者らがはじめて見出した知見に基づいて完成さ
れたものである。これに対して、一般的方法の単一スリ
ットノズル法で作製される板厚30μmの非晶質合金薄
帯では、同じケミカルエッチングによる板厚除去に対し
て、ヒステリシス損はエッチングの初期にやや減少する
もののその到達ヒステリシス損値は厚肉材料に比べて大
きく、0.04W/kg以下には達しない。また、ヒス
テリシス損が一定である板厚範囲がきわめて狭いことが
図1より明らかである。すなわち、多重スリットノズル
法で作製される厚肉非晶質合金薄帯をエッチングするこ
とにより、従来のFe基非晶質合金薄帯では到達不可能
なきわめて低いヒステリシス損が得られるのである。エ
ッチングにより0.04W/kg以下のヒステリシス損
を得るためには、初期の板厚が45μm以上である必要
性から、本発明においては薄帯の板厚の下限を45μm
に限定した。また、エッチングによる板厚除去量は両面
とも0.5μm以上でなければ、ヒステリシス損の向上
が小さいため、除去量の下限を表裏両面とも少なくとも
0.5μmと規定した。(8) An Fe-based amorphous alloy ribbon with excellent soft magnetic properties produced by the method described in item 4 above. In the present invention, when the surface layer of a thick Fe-based amorphous alloy ribbon with a thickness of 50 μm or more produced by the multi-slit nozzle method is removed by chemical etching, the hysteresis loss is reduced as shown in FIG. It decreases rapidly with the amount of thickness removed, and the plate thickness is 50μ.
This was completed based on the finding discovered for the first time by the present inventors that below m, a substantially constant extremely small value is maintained. On the other hand, in the case of an amorphous alloy ribbon with a thickness of 30 μm produced by the general single-slit nozzle method, the hysteresis loss slightly decreases in the early stage of etching when the thickness is removed by the same chemical etching. However, the achieved hysteresis loss value is larger than that of thick-walled materials, and does not reach 0.04 W/kg or less. Furthermore, it is clear from FIG. 1 that the plate thickness range in which the hysteresis loss is constant is extremely narrow. That is, by etching a thick amorphous alloy ribbon produced by the multi-slit nozzle method, an extremely low hysteresis loss that cannot be achieved with conventional Fe-based amorphous alloy ribbons can be obtained. In order to obtain a hysteresis loss of 0.04 W/kg or less by etching, the initial plate thickness must be 45 μm or more, so in the present invention, the lower limit of the thickness of the ribbon is set to 45 μm.
limited to. Further, since the improvement in hysteresis loss is small unless the amount of plate thickness removed by etching is 0.5 μm or more on both surfaces, the lower limit of the amount removed is defined as at least 0.5 μm on both the front and back surfaces.
【0011】さらに、エッチングによるヒステリシス損
低減処理をした板厚30μm以上のFe基非晶質合金薄
帯に磁区細分化手法を施すことにより、きわめて低い鉄
損を達成できる。磁区細分化の手段としては、レーザ照
射、薄帯幅方向に平行な溝の形成、あるいは線状の機械
的歪み導入など公知の方法を適用できる。磁区細分化に
あたり重要な留意点は、ヒステリシス損の増加を最小限
に抑えることである。レーザ照射法について述べるなら
ば、レーザのパワーを、従来のエッチングなしの場合に
比べて小さくすることである。あるいは、レーザスポッ
トの間隔を広く設定することである。具体的には、レー
ザパワーにより制御する場合はエッチングなしの適正値
の1/2程度ないしそれ以下、スポット間隔の場合はエ
ッチングなしの2倍程度ないしそれ以上とする。本発明
において適正照射条件を一義的に規定することは困難で
ある。それは、アニール、エッチング、レーザ照射の3
プロセスの順番によって最適照射条件が異なるからであ
る。プロセスの順番はつぎの6種類がある。具体的に示
すならば、■アニール、エッチング、レーザ照射、■ア
ニール、レーザ照射、エッチング、■レーザ照射、アニ
ール、エッチング、■レーザ照射、エッチング、アニー
ル、■エッチング、レーザ照射、アニール、■エッチン
グ、アニール、レーザ照射、の6種類である。このうち
、■、■、■の3つは、最高特性同士を比較するとき、
■、■、■に比べて劣っていた。よって、本発明では■
、■、■のプロセスを推奨する。Furthermore, extremely low iron loss can be achieved by applying a magnetic domain refining technique to a Fe-based amorphous alloy ribbon having a thickness of 30 μm or more that has been subjected to hysteresis loss reduction treatment by etching. As a means for magnetic domain refining, known methods such as laser irradiation, formation of grooves parallel to the ribbon width direction, or introduction of linear mechanical strain can be applied. An important point to keep in mind when subdividing magnetic domains is to minimize the increase in hysteresis loss. Regarding the laser irradiation method, the power of the laser is reduced compared to the conventional case without etching. Alternatively, the distance between the laser spots can be set wide. Specifically, when controlling by laser power, the spot spacing is set to about 1/2 or less of the proper value without etching, and when controlling the spot spacing, it is set to about twice or more than the proper value without etching. In the present invention, it is difficult to uniquely define appropriate irradiation conditions. There are three methods: annealing, etching, and laser irradiation.
This is because the optimum irradiation conditions differ depending on the order of the processes. There are six types of process orders: Specifically, ■annealing, etching, laser irradiation, ■annealing, laser irradiation, etching, ■laser irradiation, annealing, etching, ■laser irradiation, etching, annealing, ■etching, laser irradiation, annealing, ■etching, There are six types: annealing and laser irradiation. Among these, three of them, ■, ■, ■, when comparing the best characteristics,
It was inferior to ■, ■, and ■. Therefore, in the present invention, ■
We recommend the following processes: ,■,■.
【0012】次に、■、■、■のプロセスに対して、好
ましいレーザ照射条件をレーザスポットの大きさを指標
として具体的に示す。ここでレーザスポットとはレーザ
照射により薄帯表面に形成される照射痕のことである。
プロセス■、すなわちアニール→エッチング→レーザ照
射においては、レーザスポットの直径を5〜50μmと
なる照射条件で照射する。この条件をレーザパワーで表
すと、直径0.5mm以下のレーザビームを用いるとき
、ほぼ0.01〜0.5Wに相当する。これによって鉄
損は、初期板厚45μm以上の非晶質合金薄帯をアニー
ル後、エッチングして板厚30μmとした場合に約10
〜30%、同じく初期板厚65μmを50μmにアニー
ル後エッチングした場合は約20〜50%改善される。
プロセス■および■においては■に比べて強い条件で照
射する。好ましい条件をスポットの直径で表示すると、
50〜200μmである。Next, preferable laser irradiation conditions for the processes (1), (2), and (3) will be specifically shown using the size of the laser spot as an index. Here, the laser spot refers to an irradiation mark formed on the surface of the ribbon by laser irradiation. In process (1), ie, annealing→etching→laser irradiation, irradiation is performed under irradiation conditions such that the diameter of the laser spot is 5 to 50 μm. Expressing this condition in terms of laser power, when using a laser beam with a diameter of 0.5 mm or less, it corresponds to approximately 0.01 to 0.5 W. As a result, the iron loss is approximately 10 when an amorphous alloy ribbon with an initial thickness of 45 μm or more is annealed and then etched to a thickness of 30 μm.
~30%, and when the initial plate thickness is 65 μm and then etched to 50 μm after annealing, the improvement is approximately 20 to 50%. In processes (2) and (2), irradiation is performed under stronger conditions than in (2). When the favorable conditions are expressed by the diameter of the spot,
It is 50 to 200 μm.
【0013】同様に、磁区細分化手法として溝形成法を
採用する場合も、溝の深さを従来よりも浅くするか、溝
の間隔を広くするなどヒステリシス損の増加を極力抑え
ることが肝要である。さらに機械的歪みの導入にあたっ
ては、歪みの大きさを小さくするとともに、線状歪みの
間隔を従来法の適正値より少なくとも2倍に広げる必要
がある。Similarly, when adopting the groove forming method as a magnetic domain refining method, it is important to suppress the increase in hysteresis loss as much as possible by making the depth of the grooves shallower than before or widening the interval between the grooves. be. Furthermore, when introducing mechanical strain, it is necessary to reduce the magnitude of the strain and to widen the interval between linear strains to at least twice the appropriate value for the conventional method.
【0014】磁区細分化処理を適用するエッチング後の
板厚を30μm以上とした理由を図2を用いて説明する
。図2において△、▲印は従来の薄い薄帯をアニール後
エッチングしたものに最適条件でレーザ照射を行い、鉄
損W13/50 の変化を示している。図から照射前(
△)と照射後(▲)の鉄損の改善はわずかであることが
分る。一方、本発明のエッチング後の板厚が30μm以
上の材料においては照射による鉄損の改善効果が著しい
ことが分る。鉄損改善効果は、エッチング後の板厚が3
0μm未満であっても、従来の薄い薄帯をエッチングし
たものに比べると大きく(図示せず)、鉄損W13/5
0 は0.08W/kgより小さい値を示すが、除去板
厚が大きいため経済性に問題がある。よって磁区細分化
処理を施こす板厚を30μm以上に限定した。The reason why the thickness of the plate after etching to which the magnetic domain refining process is applied is set to 30 μm or more will be explained with reference to FIG. In FIG. 2, marks △ and ▲ indicate changes in iron loss W13/50 when laser irradiation was performed under optimal conditions on a conventional thin ribbon that had been annealed and etched. From the figure, before irradiation (
It can be seen that the improvement in iron loss between △) and after irradiation (▲) is slight. On the other hand, it can be seen that in the material having a plate thickness of 30 μm or more after etching according to the present invention, the iron loss improvement effect due to irradiation is remarkable. The iron loss improvement effect is achieved when the plate thickness after etching is 3
Even if it is less than 0 μm, it is larger than the conventional etched thin ribbon (not shown), and the iron loss W13/5
0 indicates a value smaller than 0.08 W/kg, but since the removed plate thickness is large, there is a problem in economic efficiency. Therefore, the thickness of the plate subjected to the magnetic domain refining treatment was limited to 30 μm or more.
【0015】本発明が対象とする非晶質合金はFe基非
晶質合金である。具体的には、Feを主成分とし、B、
Si、Cを副成分とする非晶質合金である。ここでFe
は高い飽和磁束密度を得るために必須の元素であり、副
成分は非晶質を形成するために不可欠な元素である。各
構成元素の好ましい組成範囲は、Fe:75〜82(原
子%、以下同じ)、B:7〜16、Si:4〜18、C
:0〜4である。この基本組成に、飽和磁束密度、透磁
率、熱的安定性、耐食性、皮膜形成特性などの実用的特
性を向上させるために合計で20原子%以下のCoある
いはNiを、あるいは5原子%以下のMo、Cr、Mn
、Nb、W、Ta、V、Snを添加できる。The amorphous alloy targeted by the present invention is an Fe-based amorphous alloy. Specifically, Fe is the main component, B,
It is an amorphous alloy containing Si and C as subcomponents. Here Fe
is an essential element to obtain a high saturation magnetic flux density, and the subcomponent is an essential element to form an amorphous state. The preferred composition ranges of each constituent element are: Fe: 75-82 (atomic %, same hereinafter), B: 7-16, Si: 4-18, C
:0 to 4. To this basic composition, in order to improve practical properties such as saturation magnetic flux density, magnetic permeability, thermal stability, corrosion resistance, and film forming properties, a total of 20 atomic % or less of Co or Ni, or 5 atomic % or less of Co or Ni is added. Mo, Cr, Mn
, Nb, W, Ta, V, and Sn can be added.
【0016】次に本発明の実施態様についてさらに説明
を加える。本発明で用いる多重スリットノズルは図3に
示すようなスリット状開口部を2以上有するノズルであ
る。この多重スリットノズルを使用しない場合は、鉄心
材料に要求される所要特性を満足する厚肉非晶質合金は
得られない。よって本発明において採用する製造方法は
多重スリットノズル法に限定する。また初期の板厚を4
5μm以上に規定した理由は、45μm未満では表面粗
さの影響がエッチング後も残り、ヒステリシス損の減少
量が小さいため、目的とする1.3Tにおけるヒステリ
シス損(0.04W/kg以下)が達成されず、その結
果として、磁区細分化処理を施しても鉄損W13/50
が0.08W/kg以下に低減しないためである。Next, the embodiments of the present invention will be further explained. The multi-slit nozzle used in the present invention is a nozzle having two or more slit-like openings as shown in FIG. If this multi-slit nozzle is not used, a thick amorphous alloy that satisfies the required properties required for the iron core material cannot be obtained. Therefore, the manufacturing method employed in the present invention is limited to the multiple slit nozzle method. Also, the initial plate thickness was changed to 4
The reason why it is specified to be 5 μm or more is that if it is less than 45 μm, the effect of surface roughness remains even after etching, and the reduction in hysteresis loss is small, so the target hysteresis loss (0.04 W/kg or less) at 1.3 T is achieved. As a result, even if magnetic domain refining processing is performed, the iron loss W13/50
This is because it does not reduce to 0.08 W/kg or less.
【0017】本発明のエッチングはケミカルな手法、例
えば、5vol.%のフッ化水素を含有する過酸化水素
液を用いることができる。アニールは、不活性ガス雰囲
気中で、非晶質合金の結晶化温度がTxのとき、Tx〜
Tx−180℃の温度で、5〜120分間行う。The etching of the present invention is performed using a chemical method, for example, 5vol. A hydrogen peroxide solution containing % hydrogen fluoride can be used. Annealing is performed in an inert gas atmosphere, when the crystallization temperature of the amorphous alloy is Tx, Tx ~
It is carried out at a temperature of Tx-180°C for 5 to 120 minutes.
【0018】[0018]
実施例1
組成Fe80.5Si6.5 B12C1(原子%)の
合金を、Cu製のロールを用いる単ロール急冷法によっ
て板厚53μm幅25mmの非晶質合金薄帯を作製した
。薄帯製造においてノズルは0.4mm幅のスリット状
開口部3個を間隔1mmに配設したものを用いた。ただ
しロール周速は24m/sとした。この非晶質合金薄帯
を380℃で60分、N2ガス雰囲気中で磁界中アニー
ルした後、エッチングにより板厚を表裏両面からあわせ
て10μm除去した。ここで用いたエッチング液はフッ
化水素5vol.%の過酸化水素液である。表面層を除
去した薄帯のヒステリシス損を求めたところ0.020
W/kgであった。なおヒステリシス損は単板試験器を
用いて測定した鉄損の周波数依存性から求めた。この薄
帯にYAGパルスレーザを照射した。照射条件は、ビー
ム直径0.1mmのYAGパルスレーザをパワー0.1
W、薄帯の幅方向にスポットの間隔が250μm、点列
の間隔が5mmとなるように、ビームを走査した。単板
試験器で測定した鉄損W13/50 は0.053W/
kgであった。この鉄損値はエッチングをしない同一板
厚33μmのFe基非晶質合金にレーザ照射して得られ
る鉄損値0.098W/kgに比べてすぐれた値である
。Example 1 An amorphous alloy ribbon having a thickness of 53 μm and a width of 25 mm was produced from an alloy having the composition Fe80.5Si6.5 B12C1 (atomic %) by a single roll quenching method using a roll made of Cu. In manufacturing the ribbon, a nozzle was used in which three slit-shaped openings each having a width of 0.4 mm were arranged at an interval of 1 mm. However, the roll circumferential speed was 24 m/s. This amorphous alloy ribbon was annealed in a magnetic field at 380° C. for 60 minutes in an N2 gas atmosphere, and then etched to remove a total thickness of 10 μm from both the front and back surfaces. The etching solution used here was 5 vol. of hydrogen fluoride. % hydrogen peroxide solution. The hysteresis loss of the ribbon with the surface layer removed was found to be 0.020.
It was W/kg. The hysteresis loss was determined from the frequency dependence of iron loss measured using a single-plate tester. This ribbon was irradiated with a YAG pulse laser. The irradiation conditions are a YAG pulse laser with a beam diameter of 0.1 mm and a power of 0.1
W, the beam was scanned in the width direction of the ribbon so that the spot spacing was 250 μm and the dot row spacing was 5 mm. Iron loss W13/50 measured with a veneer tester is 0.053W/
It was kg. This iron loss value is superior to the iron loss value of 0.098 W/kg obtained by laser irradiation on a Fe-based amorphous alloy having the same plate thickness of 33 μm without etching.
【0019】実施例2
実施例1と同一組成、同一方法で鋳造された同一寸法の
非晶質合金薄帯を、380℃で60分、N2 ガス雰囲
気中で磁界中アニールした後、レーザ照射した。照射は
、ビーム直径0.1mmのYAGパルスレーザをスポッ
ト径が100μmとなる条件で、薄帯の幅方向にスポッ
トの間隔が250μm、点列の間隔が5mmとなるよう
にビームを走査した。レーザ照射の後、この薄帯をケミ
カルエッチングにより板厚を表裏両面からあわせて2μ
m除去した。なお、エッチング液はフッ化水素5vol
.%の過酸化水素液である。この薄帯の鉄損を単板試験
器により測定したところ、W13/50 は0.065
W/kgであった。この鉄損値はエッチングをしない場
合の鉄損0.104W/kgに比べてすぐれた値である
。Example 2 An amorphous alloy ribbon of the same composition and size as in Example 1, cast by the same method, was annealed at 380° C. for 60 minutes in a N2 gas atmosphere in a magnetic field, and then laser irradiated. . Irradiation was carried out using a YAG pulsed laser beam with a beam diameter of 0.1 mm under conditions such that the spot diameter was 100 μm, and the beam was scanned in the width direction of the ribbon so that the spot spacing was 250 μm and the dot spacing was 5 mm. After laser irradiation, this thin strip is chemically etched to a total thickness of 2μ from both the front and back sides.
m removed. Note that the etching solution is 5 vol of hydrogen fluoride.
.. % hydrogen peroxide solution. When the iron loss of this ribbon was measured using a single plate tester, W13/50 was 0.065.
It was W/kg. This iron loss value is superior to the iron loss of 0.104 W/kg without etching.
【0020】実施例3
実施例1と同一組成、ロール周速を20m/sとした以
外は実施例1と同一方法で鋳造された板厚65μm、幅
25mmの非晶質合金薄帯に、YAGパルスレーザを照
射した。照射は、スポット径が150μmとなる条件で
、薄帯の幅方向にスポットの間隔が300μm、点列の
間隔が8mmとなるようにビームを走査した。レーザ照
射後、薄帯を380℃、60分、N2 ガス中で磁界中
アニールし、さらに表裏両面から合わせて5μmエッチ
ングした。エッチング液は実施例1および2と同一であ
る。この薄帯の鉄損を単板試験器で測定したところ、W
13/50 は0.058W/kgであった。この鉄損
値はエッチングをしない場合の鉄損値0.116W/k
gに比べてすぐれた値である。Example 3 YAG was cast onto an amorphous alloy ribbon having a thickness of 65 μm and a width of 25 mm, which was cast in the same manner as in Example 1 except that the composition was the same as in Example 1 and the peripheral speed of the roll was 20 m/s. A pulsed laser was irradiated. The irradiation was carried out under conditions such that the spot diameter was 150 μm, and the beam was scanned so that the spot spacing was 300 μm and the dot row spacing was 8 mm in the width direction of the ribbon. After laser irradiation, the ribbon was annealed in a magnetic field at 380° C. for 60 minutes in N2 gas, and further etched by a total of 5 μm from both the front and back surfaces. The etching solution was the same as in Examples 1 and 2. When the iron loss of this ribbon was measured using a single plate tester, it was found that W
13/50 was 0.058W/kg. This iron loss value is 0.116W/k without etching.
This is an excellent value compared to g.
【0021】実施例4
実施例1と同一組成、0.4mm幅のスリットを4枚1
mm間隔で配列したノズルを用い、ロール周速を18m
/sとした以外は実施例1と同一方法で鋳造された板厚
82μm、幅25mmの非晶質合金薄帯を400℃、6
0分、N2 ガス中で磁界中アニールした後、エッチン
グにより薄帯の表裏両面からあわせて板厚10μmを除
去した。この薄帯に深さ2μm、幅50μmで、間隔が
10mmの溝を薄帯幅方向に平行な方向に形成した。単
板試験器で測定した鉄損W13/50 は0.073W
/kgであった。この鉄損値はエッチングをしない同一
板厚72μmのFe基非晶質合金薄帯に溝を形成して得
られる鉄損値0.125W/kgに比べてすぐれた値で
ある。Example 4 Four slits each having the same composition as Example 1 and each having a width of 0.4 mm
Using nozzles arranged at mm intervals, the roll circumferential speed was 18 m.
An amorphous alloy ribbon with a thickness of 82 μm and a width of 25 mm, which was cast in the same manner as in Example 1 except that
After annealing in a magnetic field in N2 gas for 0 minutes, a total thickness of 10 μm was removed from both the front and back sides of the ribbon by etching. Grooves having a depth of 2 μm, a width of 50 μm, and an interval of 10 mm were formed in the ribbon in a direction parallel to the width of the ribbon. Iron loss W13/50 measured with a single plate tester is 0.073W
/kg. This iron loss value is superior to the iron loss value of 0.125 W/kg obtained by forming grooves in a Fe-based amorphous alloy ribbon of the same plate thickness of 72 μm without etching.
【0022】実施例5
実施例4と同一組成、同一方法で鋳造された板厚82μ
m、幅25μmの非晶質合金薄帯を400℃、60分、
N2 ガス中で磁界中アニールした後、エッチングによ
り薄帯の表裏両面からあわせて板厚10μmを除去した
。
この薄帯に、先端の径が30μmの金属針を用いて薄帯
表面をけがき、薄帯の幅方向に平行な間隔10mmの線
状歪みを導入した。歪み導入後に単板試験器で測定した
W13/50 は0.078W/kgであった。この鉄
損値はエッチングをしない同一板厚72μmのFe基非
晶質合金薄帯に線状歪を導入したときの鉄損0.132
W/kgに比べてすぐれた値である。Example 5 A plate with the same composition and thickness as Example 4, cast by the same method, with a thickness of 82 μm.
m, an amorphous alloy ribbon with a width of 25 μm was heated at 400°C for 60 minutes,
After annealing in a magnetic field in N2 gas, a total thickness of 10 μm was removed from both the front and back surfaces of the ribbon by etching. The surface of this ribbon was scribed using a metal needle with a tip diameter of 30 μm to introduce linear strain at intervals of 10 mm parallel to the width direction of the ribbon. W13/50 measured with a veneer tester after introducing strain was 0.078 W/kg. This iron loss value is 0.132 when linear strain is introduced into the same 72 μm thick Fe-based amorphous alloy ribbon without etching.
This is an excellent value compared to W/kg.
【0023】[0023]
【発明の効果】本発明が提供するFe基非晶質合金は、
従来のFe基非晶質合金に比べて鉄損の改善が著しい。
したがって、この合金を電力トランス、高周波トランス
の鉄心、磁気回路のヨークに用いるとき、損失の低減、
すなわち効率の改善効果が顕著に表れる。また磁気セン
サとして用いるとき感度の向上が著しい。[Effect of the invention] The Fe-based amorphous alloy provided by the present invention is
The iron loss is significantly improved compared to conventional Fe-based amorphous alloys. Therefore, when this alloy is used for the iron core of power transformers, high frequency transformers, and yokes of magnetic circuits, it can reduce loss,
In other words, the effect of improving efficiency is noticeable. Furthermore, when used as a magnetic sensor, the sensitivity is significantly improved.
【図1】多重スリットノズル法で作製した62μmの非
晶質Fe80.5Si6.5 B12C1 合金薄帯を
エッチングにより板厚を除去していくときの鉄損の変化
(●)、ヒステリシス損の変化(○)を示す。なお比較
のために板厚30μmの同一組成の薄帯についても同様
に調べた。▲は鉄損、△はヒステリシス損を示す。[Figure 1] Changes in iron loss (●) and changes in hysteresis loss (●) when the thickness of a 62 μm amorphous Fe80.5Si6.5 B12C1 alloy ribbon fabricated by the multi-slit nozzle method is removed by etching. ○). For comparison, a thin strip having the same composition and having a thickness of 30 μm was also examined in the same manner. ▲ indicates iron loss, △ indicates hysteresis loss.
【図2】エッチング後の非晶質合金薄帯にレーザ照射し
たときの鉄損改善効果の板厚依存性を示す図である。FIG. 2 is a diagram showing the dependence of the iron loss improvement effect on the plate thickness when laser irradiation is applied to the amorphous alloy ribbon after etching.
【図3】板厚45μm以上の厚肉非晶質合金薄帯を作製
するために用いるノズルの構造を示す図である。FIG. 3 is a diagram showing the structure of a nozzle used to produce a thick amorphous alloy ribbon having a thickness of 45 μm or more.
【図4】レーザ照射効果の板厚依存性を示す図である。FIG. 4 is a diagram showing the dependence of the laser irradiation effect on the plate thickness.
a 2重スリットノズル
b 3重スリットノズル
l, l1 ,l2 スリットの間隔W1 ,
W2 ,W3 スリットの幅→ 冷却基
板の移動方向a Double slit nozzle b Triple slit nozzle l, l1, l2 Slit interval W1,
W2, W3 Width of slit → direction of movement of cooling board
Claims (8)
た45μm以上の板厚を有するFe基非晶質合金薄帯に
おいて、該非晶質合金薄帯の表面層の、少なくとも0.
5μmの厚さを、表裏両面それぞれから除去することに
より、最大磁束密度1.3Tにおけるヒステリシス損を
0.04W/kg以下にすることを特徴とする軟磁気特
性のすぐれたFe基非晶質合金薄帯の製造方法。1. In an Fe-based amorphous alloy ribbon having a thickness of 45 μm or more produced using a multi-slit nozzle, the surface layer of the amorphous alloy ribbon has at least 0.
An Fe-based amorphous alloy with excellent soft magnetic properties characterized by a hysteresis loss of 0.04 W/kg or less at a maximum magnetic flux density of 1.3 T by removing a thickness of 5 μm from both the front and back surfaces. Method for manufacturing thin strips.
グで行うことを特徴とする請求項1記載の軟磁気特性の
すぐれたFe基非晶質合金薄帯の製造方法。2. The method for producing an Fe-based amorphous alloy ribbon with excellent soft magnetic properties according to claim 1, wherein the ribbon surface layer is removed by chemical etching.
れた軟磁気特性のすぐれたFe基非晶質合金薄帯。3. An Fe-based amorphous alloy ribbon with excellent soft magnetic properties produced by the method according to claims 1 and 2.
が30μm以上のFe基非晶質合金薄帯に磁区細分化処
理を行うことにより、50Hz、1.3Tにおける鉄損
を0.08W/kg以下にすることを特徴とする軟磁気
特性のすぐれたFe基非晶質合金薄帯の製造方法。4. By performing magnetic domain refining treatment on the Fe-based amorphous alloy ribbon having a plate thickness of 30 μm or more produced by the method according to claim 1, the iron loss at 50 Hz and 1.3 T can be reduced to 0. A method for producing an Fe-based amorphous alloy ribbon with excellent soft magnetic properties, characterized in that the magnetic strength is 0.8 W/kg or less.
によることを特徴とする請求項4記載の軟磁気特性のす
ぐれたFe基非晶質合金薄帯の製造方法。5. The method for producing a Fe-based amorphous alloy ribbon with excellent soft magnetic properties according to claim 4, wherein the method of magnetic domain refining is pulsed laser irradiation.
行な溝の形成によることを特徴とする請求項4記載の軟
磁気特性のすぐれたFe基非晶質合金薄帯の製造方法。6. The method for producing an Fe-based amorphous alloy ribbon with excellent soft magnetic properties according to claim 4, wherein the magnetic domain refining method is by forming grooves parallel to the width direction of the ribbon. .
によることを特徴とする請求項4記載の軟磁気特性のす
ぐれたFe基非晶質合金薄帯の製造方法。7. The method for producing an Fe-based amorphous alloy ribbon with excellent soft magnetic properties according to claim 4, wherein the method of magnetic domain refining is the introduction of mechanical strain.
気特性のすぐれたFe基非晶質合金薄帯。8. An Fe-based amorphous alloy ribbon with excellent soft magnetic properties produced by the method according to claim 4.
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|---|---|---|---|
| JP3143604A JP2873747B2 (en) | 1991-06-14 | 1991-06-14 | Fe-based amorphous alloy ribbon having excellent soft magnetic properties and method for producing the same |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3143604A JP2873747B2 (en) | 1991-06-14 | 1991-06-14 | Fe-based amorphous alloy ribbon having excellent soft magnetic properties and method for producing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04367202A true JPH04367202A (en) | 1992-12-18 |
| JP2873747B2 JP2873747B2 (en) | 1999-03-24 |
Family
ID=15342594
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| US9978497B2 (en) | 2013-03-13 | 2018-05-22 | Hitachi Metals, Ltd. | Wound magnetic core and method of producing the same |
| WO2019189813A1 (en) * | 2018-03-30 | 2019-10-03 | 日立金属株式会社 | Fe-BASED AMORPHOUS ALLOY RIBBON AND METHOD FOR PRODUCING SAME, IRON CORE, AND TRANSFORMER |
| JPWO2019189813A1 (en) * | 2018-03-30 | 2020-04-30 | 日立金属株式会社 | Fe-based amorphous alloy ribbon, its manufacturing method, iron core, and transformer |
| JP2020127018A (en) * | 2018-03-30 | 2020-08-20 | 日立金属株式会社 | Fe-BASED AMORPHOUS ALLOY RIBBON, METHOD OF MANUFACTURING THE SAME, IRON CORE AND TRANSFORMER |
| JP2020127019A (en) * | 2018-03-30 | 2020-08-20 | 日立金属株式会社 | Fe-BASED AMORPHOUS ALLOY RIBBON, IRON CORE AND TRANSFORMER |
| US12002607B2 (en) | 2018-03-30 | 2024-06-04 | Proterial, Ltd. | Fe-based amorphous alloy ribbon and method for producing same, iron core, and transformer |
| JP2021039963A (en) * | 2019-08-30 | 2021-03-11 | 東芝産業機器システム株式会社 | Winding core manufacturing equipment and winding core manufacturing method |
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