JPH0437210A - Electrode structure of piezoelectric vibrator - Google Patents
Electrode structure of piezoelectric vibratorInfo
- Publication number
- JPH0437210A JPH0437210A JP14557590A JP14557590A JPH0437210A JP H0437210 A JPH0437210 A JP H0437210A JP 14557590 A JP14557590 A JP 14557590A JP 14557590 A JP14557590 A JP 14557590A JP H0437210 A JPH0437210 A JP H0437210A
- Authority
- JP
- Japan
- Prior art keywords
- metal film
- piezoelectric
- present
- piezoelectric vibrator
- electrode structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistors
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
- H05K3/321—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by conductive adhesives
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〈発明の目的〉
「産業上の利用分野」
本発明は、エージング特性を改善した圧電振動子に関す
る。DETAILED DESCRIPTION OF THE INVENTION <Object of the Invention>"Field of Industrial Application" The present invention relates to a piezoelectric vibrator with improved aging characteristics.
「従来の技術」
従来より圧電振動子、とりわけ広く利用されている水晶
振動子において、厚みすべり振動のＡＴカットの丸板、
角板、また複雑な形状に加工出来るエツチング加工によ
る振動子等種々の振動子か利用されている。そして水晶
振動子を支持具に固定する際、導電性接着剤で固着して
いる。通常は水晶と接する面には膜強度の強い材料を選
定し、その上に導電率の良い材料を用い、２層膜として
いた。しかし導電性接着剤のエポキシと金の密着性が悪
く、長期のエージング特性がこれに起因して劣化してい
た。``Prior art'' Conventionally, piezoelectric vibrators, especially the widely used crystal oscillators, are AT-cut round plates with thickness-shear vibration,
Various types of oscillators are used, such as square plates and etched oscillators that can be processed into complex shapes. When fixing the crystal resonator to the support, it is fixed with a conductive adhesive. Usually, a material with strong film strength is selected for the surface in contact with the crystal, and a material with good conductivity is used on top of that to form a two-layer film. However, the adhesion between the conductive adhesive epoxy and gold was poor, and the long-term aging characteristics deteriorated due to this.
「発明が解決しようとする課題」
通常の２層構造ではエポキシ樹脂の導電性接着剤を使用
したときは特に、固着部分での歪によりエージング特性
が劣化していた。``Problem to be Solved by the Invention'' In a normal two-layer structure, especially when an epoxy resin conductive adhesive is used, the aging characteristics deteriorate due to distortion at the fixed part.
「発明の目的」
本発明は、前述した欠点を除去し、安定なエージング特
性の水晶振動子を提供することを目的としている。``Object of the Invention'' The present invention aims to eliminate the above-mentioned drawbacks and provide a crystal resonator with stable aging characteristics.
く本発明の構成〉
「課題を解決する手段」
そこで本発明では、圧電振動板の縁部を固着して成る圧
電振動子において、該圧電振動板上の励振電極及び該縁
部に延びる引き出し部に第１金属膜と第２金属膜の２層
の電極を形成し、少なくとも該圧電振動板の縁部と導電
性接着剤により支持具とを固着する該２層の電極部分上
に第３金属膜を形成した構成である。Structure of the Present Invention> Means for Solving the Problem Therefore, in the present invention, in a piezoelectric vibrator formed by fixing the edge of a piezoelectric diaphragm, an excitation electrode on the piezoelectric diaphragm and a lead-out portion extending to the edge are provided. two layers of electrodes, a first metal film and a second metal film, are formed on the electrode, and a third metal is formed on the electrode portion of the two layers that fixes at least the edge of the piezoelectric diaphragm and the support with a conductive adhesive. This is a structure in which a film is formed.
「作用」
本発明では、第１金属膜には圧電振動板と密着性の良い
金属、第２金属膜には導電率の良い金属、第３金属膜に
は固着剤と第２金属膜とも密着性の良い金属を選択する
ことにより、温度変化による歪が生じなくなる。"Function" In the present invention, the first metal film is a metal that has good adhesion to the piezoelectric diaphragm, the second metal film is a metal that has good conductivity, and the third metal film is also in close contact with the adhesive and the second metal film. By selecting a metal with good properties, distortion due to temperature changes will not occur.
「実施例」 第１図は、本発明の実施例を示す断面図である。"Example" FIG. 1 is a sectional view showing an embodiment of the present invention.
水晶振動板１上に第１金属膜２としてクロムが蒸着され
ている。水晶振動板１の主面中央部には励振電極があり
、側面に向かって引き出し電極が延在している。本例の
場合圧電振動板の下側−面で支持具と固着するため、側
面を経由して他方の面まで引き出し電極が延びている。Chromium is vapor-deposited as a first metal film 2 on the crystal diaphragm 1 . An excitation electrode is provided at the center of the main surface of the crystal diaphragm 1, and an extraction electrode extends toward the side surface. In this example, since the piezoelectric diaphragm is fixed to the support at its lower surface, the extraction electrode extends to the other surface via the side surface.
クロムの上に更に第２金属膜３として金が蒸着されてい
る。そして支持部には、第２金属膜３の上に、さらに第
３金属膜４としてニッケル・クロムを蒸着している。Gold is further deposited as a second metal film 3 on the chromium. Further, nickel and chromium are deposited as a third metal film 4 on the second metal film 3 on the support portion.
圧電振動板は、支持具６の上に載置され固着剤５として
導電性接着剤により支持具に固着されている。The piezoelectric diaphragm is placed on a support 6 and fixed to the support using a conductive adhesive as a fixing agent 5.
本発明では第２金属膜として金を用いているが、金は導
電性接着剤として最も使われているエポキシ樹脂の場合
密着性が悪い。そこで金の上にエポキシ樹脂と密着性の
いいニッケル・クロムを蒸着し、長期エージングにより
周波数が変化するのを防止できるようになった。In the present invention, gold is used as the second metal film, but gold has poor adhesion to epoxy resin, which is most commonly used as a conductive adhesive. Therefore, by depositing epoxy resin and nickel and chromium on top of the gold, which has good adhesion, it became possible to prevent the frequency from changing due to long-term aging.
第２図は、本発明と従来品との比較を示す高温放置エー
ジング特性である。実線は、本発明による水晶振動子の
特性であり、点線は従来の２層金属膜の水晶振動子の特
性であり、従来品では時間とともに周波数が急激に変化
してしまうが、本発明による水晶振動子では長期に安定
した周波数を維持出来るようになった。FIG. 2 shows aging characteristics at high temperature, showing a comparison between the present invention and a conventional product. The solid line is the characteristic of the crystal resonator according to the present invention, and the dotted line is the characteristic of the conventional two-layer metal film crystal resonator.In the conventional product, the frequency changes rapidly over time, but in the crystal resonator according to the present invention, the frequency changes rapidly over time. The vibrator can now maintain a stable frequency for a long period of time.
なお、実施例において第１金属膜としてクロム、第２金
属膜として金、第３金属膜としてニッケル・クロムを用
いているが、必ずしもこれに限定されず、第１金属膜に
は水晶等圧電素子と密着性の良い金属、第２金属膜には
導電性の良い金属、第３金属膜にはエポキ／樹脂等固着
材と密着性のよい金属であればよい。In the examples, chromium is used as the first metal film, gold is used as the second metal film, and nickel-chromium is used as the third metal film, but the invention is not limited to this. The second metal film may be a metal with good conductivity, and the third metal film may be a metal with good adhesion to the fixing material such as epoxy/resin.
なお圧電体として水晶を例に挙げたか、タンタル酸リチ
ウムや圧電セラミック等でもよい。Note that although quartz is used as an example of the piezoelectric material, lithium tantalate, piezoelectric ceramic, etc. may also be used.
〈本発明の効果〉
本発明によって、従来よりあった長期エージング特性で
、圧電振動板を固着する固着剤と圧電板上の金属膜との
密着性に起因する特性劣化がなくなり、安定な周波数特
性の圧電振動子を得ることが出来るようになった。<Effects of the present invention> The present invention eliminates characteristic deterioration caused by the adhesion between the adhesive that fixes the piezoelectric diaphragm and the metal film on the piezoelectric plate, and provides stable frequency characteristics with long-term aging characteristics that existed in the past. piezoelectric vibrators can now be obtained.
第１図は、本発明の実施例を示す断面図である。
第２図は、本発明による圧電振動子と従来の圧電振動子
のエージング特性を示すグラフである。
１・・・・・−・−圧電振動板）
２・・・・−・・−・−第１金属膜、
３−・・−一一一一・ 第２金属膜、
４−・・・・−−−−一 第３金属膜、５−・・・・−
・・・ 導電性接着剤、６−・・・−・−支持具FIG. 1 is a sectional view showing an embodiment of the present invention. FIG. 2 is a graph showing the aging characteristics of a piezoelectric vibrator according to the present invention and a conventional piezoelectric vibrator. 1...--Piezoelectric diaphragm) 2--...--First metal film, 3---1111-Second metal film, 4-...- −−−−1 Third metal film, 5−・・・・・−
... Conductive adhesive, 6-...-- Supporting tool
Claims (1)
、該圧電振動板上の励振電極及び該縁部に延びる引き出
し部に第１金属膜と第２金属膜の２層の電極を形成し、
少なくとも該圧電振動板の縁部と導電性接着剤により支
持具とを固着する該２層の電極部分上に第３金属膜を形
成したことを特徴とする圧電振動子の電極構造。In a piezoelectric vibrator formed by fixing an edge of a piezoelectric diaphragm, two layers of electrodes, a first metal film and a second metal film, are formed on an excitation electrode on the piezoelectric diaphragm and a lead-out portion extending to the edge. ,
An electrode structure for a piezoelectric vibrator, characterized in that a third metal film is formed on at least an edge of the piezoelectric diaphragm and a supporting member of the two layers that are fixed to each other using a conductive adhesive.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14557590A JPH0437210A (en) | 1990-05-31 | 1990-05-31 | Electrode structure of piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14557590A JPH0437210A (en) | 1990-05-31 | 1990-05-31 | Electrode structure of piezoelectric vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0437210A true JPH0437210A (en) | 1992-02-07 |
Family
ID=15388282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14557590A Pending JPH0437210A (en) | 1990-05-31 | 1990-05-31 | Electrode structure of piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0437210A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0629769A (en) * | 1992-07-09 | 1994-02-04 | Murata Mfg Co Ltd | Chip type electronic parts |
| JPH0722894A (en) * | 1993-06-30 | 1995-01-24 | Rohm Co Ltd | Ceramic oscillation element and piezoelectric oscillator using the same |
| EP0686310A4 (en) * | 1993-12-23 | 1996-04-03 | Motorola Inc | A method of compliantly mounting a piezoelectric device |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5291676A (en) * | 1976-01-29 | 1977-08-02 | Seiko Instr & Electronics Ltd | Profile slide vibrator |
| JPS5390793A (en) * | 1977-01-19 | 1978-08-09 | Matsushita Electric Ind Co Ltd | Piezoelectric vibrator |
| JPS5425692A (en) * | 1977-07-29 | 1979-02-26 | Nippon Denpa Kogyo Kk | Thin film structure |
| JPS5626338U (en) * | 1979-08-08 | 1981-03-11 | ||
| JPS5753124A (en) * | 1980-09-17 | 1982-03-30 | Seiko Instr & Electronics Ltd | Crystal resonator unit and its production |
| JPS5793715A (en) * | 1980-12-02 | 1982-06-10 | Seiko Instr & Electronics Ltd | Electrode construction of piezoelectric oscillator |
| JPS5827548U (en) * | 1981-08-15 | 1983-02-22 | マツダ株式会社 | Engine cylinder block structure |
| JPS58173847A (en) * | 1982-04-07 | 1983-10-12 | Matsushita Electric Ind Co Ltd | Manufacture of element |
| JPH0241510B2 (en) * | 1985-07-02 | 1990-09-18 |
-
1990
- 1990-05-31 JP JP14557590A patent/JPH0437210A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5291676A (en) * | 1976-01-29 | 1977-08-02 | Seiko Instr & Electronics Ltd | Profile slide vibrator |
| JPS5390793A (en) * | 1977-01-19 | 1978-08-09 | Matsushita Electric Ind Co Ltd | Piezoelectric vibrator |
| JPS5425692A (en) * | 1977-07-29 | 1979-02-26 | Nippon Denpa Kogyo Kk | Thin film structure |
| JPS5626338U (en) * | 1979-08-08 | 1981-03-11 | ||
| JPS5753124A (en) * | 1980-09-17 | 1982-03-30 | Seiko Instr & Electronics Ltd | Crystal resonator unit and its production |
| JPS5793715A (en) * | 1980-12-02 | 1982-06-10 | Seiko Instr & Electronics Ltd | Electrode construction of piezoelectric oscillator |
| JPS5827548U (en) * | 1981-08-15 | 1983-02-22 | マツダ株式会社 | Engine cylinder block structure |
| JPS58173847A (en) * | 1982-04-07 | 1983-10-12 | Matsushita Electric Ind Co Ltd | Manufacture of element |
| JPH0241510B2 (en) * | 1985-07-02 | 1990-09-18 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0629769A (en) * | 1992-07-09 | 1994-02-04 | Murata Mfg Co Ltd | Chip type electronic parts |
| JPH0722894A (en) * | 1993-06-30 | 1995-01-24 | Rohm Co Ltd | Ceramic oscillation element and piezoelectric oscillator using the same |
| EP0686310A4 (en) * | 1993-12-23 | 1996-04-03 | Motorola Inc | A method of compliantly mounting a piezoelectric device |
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