JPH0437268U - - Google Patents
Info
- Publication number
- JPH0437268U JPH0437268U JP7713190U JP7713190U JPH0437268U JP H0437268 U JPH0437268 U JP H0437268U JP 7713190 U JP7713190 U JP 7713190U JP 7713190 U JP7713190 U JP 7713190U JP H0437268 U JPH0437268 U JP H0437268U
- Authority
- JP
- Japan
- Prior art keywords
- tube
- gas introduction
- reaction tube
- exhaust
- reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 238000010926 purge Methods 0.000 claims description 4
- 238000009792 diffusion process Methods 0.000 claims 2
- 230000003647 oxidation Effects 0.000 claims 2
- 238000007254 oxidation reaction Methods 0.000 claims 2
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案装置の一実施例の構成を一部を
断面図で示した側面図、第２図は第１図の−
線断面図、第３図は第１図の−線断面図、第
４図は従来装置の一例の要部を示す断面図である
。
１……（石英）反応管側の管、２……（石英）
ガス導入管、３……（石英）排気管、４……共通
球面摺合せ、４ａ……凸状球面、４ｂ……凹状球
面、５，６……フランジ部、７……ベローズ、８
……接続リング、９，１０……フランジ部、１１
，１２……シールリング（Ｏリング）、１３……
パージガス導入管、１４……パージガス排気管、
１５，１６……クランプ。
FIG. 1 is a side view showing a partially sectional view of the configuration of an embodiment of the device of the present invention, and FIG.
3 is a cross-sectional view taken along the line -- in FIG. 1, and FIG. 4 is a cross-sectional view showing essential parts of an example of a conventional device. 1... (quartz) tube on the reaction tube side, 2... (quartz)
Gas introduction pipe, 3... (quartz) exhaust pipe, 4... Common spherical surface sliding, 4a... Convex spherical surface, 4b... Concave spherical surface, 5, 6... Flange portion, 7... Bellows, 8
... Connection ring, 9, 10 ... Flange part, 11
, 12... Seal ring (O ring), 13...
Purge gas introduction pipe, 14...Purge gas exhaust pipe,
15, 16... Clamp.
Claims (1)
反応管側の管１と排気管３との間を共通球面摺合
せ４で接続し、この共通球面摺合せ４の外部にお
いて反応管側の管１とガス導入管２及び反応管側
の管１と排気管３の各部分にフランジ部５，６を
設け、これらのフランジ部５，６と、ベローズ７
を有する接続リング８のフランジ部９，１０との
間を、それぞれシールリング１１，１２を挿設し
て固定せしめてなる酸化拡散装置。 (2) 接続リング８にパージガス導入管１３及び
パージガス排気管１４を設けてなる請求項第１項
記載の酸化拡散装置。[Claims for Utility Model Registration] (1) The reaction tube side tube 1 is connected to the gas introduction tube 2 and the reaction tube side tube 1 and the exhaust tube 3 are connected by a common spherical sliding joint 4. Outside the common spherical sliding joint 4, flange portions 5, 6 are provided on each portion of the tube 1 and gas introduction tube 2 on the reaction tube side, and on the tube 1 and exhaust tube 3 on the reaction tube side, and these flange portions 5, 6 and , bellows 7
An oxidation diffusion device formed by inserting and fixing seal rings 11 and 12 between the flange parts 9 and 10 of a connecting ring 8 having a connecting ring 8. (2) The oxidation diffusion device according to claim 1, wherein the connection ring 8 is provided with a purge gas introduction pipe 13 and a purge gas exhaust pipe 14.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7713190U JPH0437268U (en) | 1990-07-19 | 1990-07-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7713190U JPH0437268U (en) | 1990-07-19 | 1990-07-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0437268U true JPH0437268U (en) | 1992-03-30 |
Family
ID=31619233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7713190U Pending JPH0437268U (en) | 1990-07-19 | 1990-07-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0437268U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020528491A (en) * | 2017-06-21 | 2020-09-24 | ピコサン オーワイＰｉｃｏｓｕｎ Ｏｙ | Substrate processing equipment and method |
-
1990
- 1990-07-19 JP JP7713190U patent/JPH0437268U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020528491A (en) * | 2017-06-21 | 2020-09-24 | ピコサン オーワイＰｉｃｏｓｕｎ Ｏｙ | Substrate processing equipment and method |
| US11505864B2 (en) | 2017-06-21 | 2022-11-22 | Picosun Oy | Adjustable fluid inlet assembly for a substrate processing apparatus and method |
| JP2023017951A (en) * | 2017-06-21 | 2023-02-07 | ピコサン オーワイ | Substrate processing apparatus and method |