JPH0438037U - - Google Patents
Info
- Publication number
- JPH0438037U JPH0438037U JP8037690U JP8037690U JPH0438037U JP H0438037 U JPH0438037 U JP H0438037U JP 8037690 U JP8037690 U JP 8037690U JP 8037690 U JP8037690 U JP 8037690U JP H0438037 U JPH0438037 U JP H0438037U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- wafer
- jig
- pressurizing
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 12
- 239000004744 fabric Substances 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Description
第１図は本考案に係るウエハ鏡面加工装置の一
実施例を示す要部の縦断面図、第２図は従来形こ
の種加工装置の第１図に相当する縦断面図である
。
１……固定シヤフト、２……自動調心軸受、３
……研磨治具、４……治具押えプレート、４ａ…
…ピボツト、５……治具把持金具、６……ワツク
ス、７……ウエハ、８……研磨布、９……研磨定
盤、１０……ピボツト受け。
FIG. 1 is a vertical cross-sectional view of the essential parts of an embodiment of a wafer mirror-finishing apparatus according to the present invention, and FIG. 2 is a vertical cross-sectional view corresponding to FIG. 1 of a conventional processing apparatus of this type. 1...Fixed shaft, 2...Self-aligning bearing, 3
...Polishing jig, 4...Jig holding plate, 4a...
... Pivot, 5 ... Jig gripping fitting, 6 ... Wax, 7 ... Wafer, 8 ... Polishing cloth, 9 ... Polishing surface plate, 10 ... Pivot receiver.
Claims (1)
具によつて加圧研磨するウエハ鏡面加工装置にお
いて、前記ウエハを加圧研磨中研磨治具の中心点
を加圧保持する手段と、ウエハ加圧研磨前後に研
磨治具の周囲を把持する手段とを具備してなるこ
とを特徴とするウエハ鏡面加工装置。 A wafer mirror polishing apparatus for pressurizing and polishing a wafer set at a predetermined polishing position using a polishing jig, comprising: means for pressurizing and holding the center point of the polishing jig during pressure polishing of the wafer; A wafer mirror polishing device comprising means for gripping the periphery of a polishing jig before and after polishing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8037690U JPH0438037U (en) | 1990-07-27 | 1990-07-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8037690U JPH0438037U (en) | 1990-07-27 | 1990-07-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0438037U true JPH0438037U (en) | 1992-03-31 |
Family
ID=31625381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8037690U Pending JPH0438037U (en) | 1990-07-27 | 1990-07-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0438037U (en) |
-
1990
- 1990-07-27 JP JP8037690U patent/JPH0438037U/ja active Pending