JPH0439654Y2 - - Google Patents
Info
- Publication number
- JPH0439654Y2 JPH0439654Y2 JP17115886U JP17115886U JPH0439654Y2 JP H0439654 Y2 JPH0439654 Y2 JP H0439654Y2 JP 17115886 U JP17115886 U JP 17115886U JP 17115886 U JP17115886 U JP 17115886U JP H0439654 Y2 JPH0439654 Y2 JP H0439654Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- support
- cooling
- cooling tube
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001073 sample cooling Methods 0.000 claims description 17
- 238000001816 cooling Methods 0.000 claims description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Description
【考案の詳細な説明】
［産業上の利用分野］
本考案は、試料を低温に冷却して観察するよう
にし電子顕微鏡における試料装置に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a sample device for an electron microscope, in which a sample is cooled to a low temperature and then observed.
［従来の技術］
第３図は従来の試料装置を示しており、１は試
料２を保持する試料冷却筒、３は該試料冷却筒１
の支持体で、移動ステージ４上に載置されてい
る。５は該試料冷却筒１と、図示していないが、
液体窒素や液体ヘリウムの冷却槽とを熱的に接続
する熱伝導網線である。[Prior Art] Fig. 3 shows a conventional sample apparatus, in which 1 is a sample cooling cylinder that holds a sample 2, and 3 is the sample cooling cylinder 1.
The support body is placed on the moving stage 4. 5 is the sample cooling cylinder 1, although not shown,
This is a heat conduction network that thermally connects liquid nitrogen or liquid helium cooling tanks.
上述した構成で、試料２は網線５および冷却筒
１を介して液体窒素温度あるいは液体ヘリウム温
度に冷却される。該冷却された試料冷却筒１への
試料ステージ４からの熱流入を阻止するため、該
冷却支持体３はステアタイトやプラスチツク等の
断熱材料によつて形成されていると共に、支持体
の長さを長くして断熱効果を増すために、該支持
体自身を折曲げるように構成している。 With the above-described configuration, the sample 2 is cooled to liquid nitrogen temperature or liquid helium temperature via the mesh wire 5 and the cooling cylinder 1. In order to prevent heat from flowing from the sample stage 4 into the cooled sample cooling cylinder 1, the cooling support 3 is made of a heat insulating material such as steatite or plastic, and the length of the support is In order to increase the length of the support body and increase the heat insulation effect, the support body itself is configured to be bent.
［考案が解決しようとする問題点］
上述した構成では、移動ステージ上に載置され
た支持体３を折曲げて構成し、長くしているた
め、外部の振動が移動ステージを介して支持体３
に伝わつた場合、支持体が長い間振動し、安定に
試料の顕微鏡観察を行うことができない。[Problems to be solved by the invention] In the above-described configuration, the support 3 placed on the movable stage is bent and made long, so external vibrations are transmitted through the movable stage to the support. 3
If this happens, the support will vibrate for a long time, making stable microscopic observation of the sample impossible.
本考案は、上述した点に鑑みてなされたもの
で、耐振性の優れた電子顕微鏡の試料装置を提供
することを目的としている。 The present invention has been made in view of the above-mentioned points, and an object of the present invention is to provide an electron microscope sample device with excellent vibration resistance.
［問題点を解決するための手段］
本考案に基づく電子顕微鏡の試料装置は、内部
に観察試料が保持される試料冷却筒と、該試料冷
却筒を冷却するための冷却手段と、移動ステージ
と、該移動ステージ上に配置され、該試料冷却筒
を支持する支持体とを備えており、該試料冷却筒
支持体を、中空の管状に形成したことを特徴とし
ている。[Means for Solving the Problems] A sample device for an electron microscope based on the present invention includes a sample cooling tube in which an observation sample is held, cooling means for cooling the sample cooling tube, and a moving stage. , a support body disposed on the movable stage and supporting the sample cooling cylinder, and the sample cooling cylinder support body is formed in the shape of a hollow tube.
［実施例］
以下本考案の一実施例を添附図面に基づいて詳
述する。[Embodiment] An embodiment of the present invention will be described below in detail based on the accompanying drawings.
第１図は本考案に基づく電子顕微鏡の試料装置
の断面図、第２図は該装置の一部平面図である
が、第１図は第２図のＡ−Ａ断面を表している。
図中、第３図と同一部分は同一番号を付し、その
詳細な説明を省略するが、この実施例では、試料
冷却筒２の支持体６を内側環状台７、外側環状体
８および該内側と外側の環状台の間に固定配置さ
れた３本の中空の円筒９によつて構成している。
該円筒の材料としては、ステンレス、ガラス入り
エポキシ等の断熱材料が使用される。 FIG. 1 is a sectional view of a sample device for an electron microscope based on the present invention, and FIG. 2 is a partial plan view of the device, and FIG. 1 shows a cross section taken along line AA in FIG.
In the figure, the same parts as in FIG. 3 are given the same numbers, and detailed explanations thereof are omitted. It is composed of three hollow cylinders 9 fixedly arranged between inner and outer annular stands.
As the material of the cylinder, a heat insulating material such as stainless steel or glass-filled epoxy is used.
このような構成では、試料冷却筒１の支持体６
が中空となつているため、熱抵抗が板状あるいは
棒状の支持体に比べて高くなり、該支持体６の長
さを短くすることができる。従つて、移動ステー
ジ４を介して伝わる外部振動に対し、短時間に振
動が収まり、安定に試料の顕微鏡観察を行うこと
ができる。 In such a configuration, the support 6 of the sample cooling tube 1
Since it is hollow, the thermal resistance is higher than that of a plate-shaped or rod-shaped support, and the length of the support 6 can be shortened. Therefore, external vibrations transmitted via the moving stage 4 are suppressed in a short time, allowing stable microscopic observation of the sample.
以上本考案の実施例を詳述したが、本考案はこ
の実施例に限定されず幾多の変形が可能である。
例えば、試料冷却筒の支持体を円筒状に形成した
が、中空の角柱状に形成しても良い。 Although the embodiments of the present invention have been described in detail above, the present invention is not limited to these embodiments and can be modified in many ways.
For example, although the support of the sample cooling tube is formed into a cylindrical shape, it may be formed into a hollow prismatic shape.
［効果］
本考案では、試料冷却筒の支持体を中空の管状
に形成したため、支持体の長さを短くでき、耐振
性を増すことができる。又、中空の管状の支持体
であるために熱容量が小さくなり、その結果、試
料冷却筒を熱的に短時間に定常状態とすることが
でき、より一層安定な試料の顕微鏡観察を行うこ
とができる。[Effects] In the present invention, since the support of the sample cooling tube is formed into a hollow tube shape, the length of the support can be shortened and the vibration resistance can be increased. In addition, since it is a hollow tubular support, its heat capacity is small, and as a result, the sample cooling cylinder can be thermally brought into a steady state in a short time, making it possible to perform more stable microscopic observation of the sample. can.
第１図は本考案の一実施例である試料装置の断
面図、第２図は第１図の装置の平面図、第３図は
従来の試料装置の断面図である。
１……試料冷却筒、２……試料、３……支持
体、４……移動ステージ、５……熱伝導網線、６
……支持体、７……内側環状台、８……外側環状
台、９……円筒。
FIG. 1 is a sectional view of a sample device that is an embodiment of the present invention, FIG. 2 is a plan view of the device shown in FIG. 1, and FIG. 3 is a sectional view of a conventional sample device. DESCRIPTION OF SYMBOLS 1...Sample cooling tube, 2...Sample, 3...Support, 4...Movement stage, 5...Thermal conduction mesh wire, 6
...Support, 7...Inner annular stand, 8...Outer annular stand, 9...Cylinder.
Claims (1)
試料冷却筒を冷却するための冷却手段と、移動ス
テージと、該移動ステージ上に配置され、該試料
冷却筒を支持する支持体とを備えており、該試料
冷却筒支持体は、中空の管状に形成されているこ
とを特徴とする電子顕微鏡の試料装置。 A sample cooling tube in which an observation sample is held, a cooling means for cooling the sample cooling tube, a moving stage, and a support disposed on the moving stage and supporting the sample cooling tube. A sample device for an electron microscope, characterized in that the sample cooling tube support is formed in a hollow tube shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17115886U JPH0439654Y2 (en) | 1986-11-07 | 1986-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17115886U JPH0439654Y2 (en) | 1986-11-07 | 1986-11-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6377251U JPS6377251U (en) | 1988-05-23 |
| JPH0439654Y2 true JPH0439654Y2 (en) | 1992-09-17 |
Family
ID=31106533
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17115886U Expired JPH0439654Y2 (en) | 1986-11-07 | 1986-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0439654Y2 (en) |
-
1986
- 1986-11-07 JP JP17115886U patent/JPH0439654Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6377251U (en) | 1988-05-23 |
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