JPH0440030U - - Google Patents

Info

Publication number
JPH0440030U
JPH0440030U JP8304890U JP8304890U JPH0440030U JP H0440030 U JPH0440030 U JP H0440030U JP 8304890 U JP8304890 U JP 8304890U JP 8304890 U JP8304890 U JP 8304890U JP H0440030 U JPH0440030 U JP H0440030U
Authority
JP
Japan
Prior art keywords
heat shield
magnetically levitated
levitated body
heat source
magnetically
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8304890U
Other languages
Japanese (ja)
Other versions
JP2521154Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8304890U priority Critical patent/JP2521154Y2/en
Publication of JPH0440030U publication Critical patent/JPH0440030U/ja
Application granted granted Critical
Publication of JP2521154Y2 publication Critical patent/JP2521154Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Mechanical Conveyors (AREA)
  • Thermal Insulation (AREA)
  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来例の一部截断側面図、第２図は本
考案の実施例の一部截断側面図、第３図は第２図
の−線断面図、第４図は第３図示の熱シール
ドの拡大断面図、第５図は熱シールドの斜視図で
ある。 １……真空室、２……熱源、３……磁気浮上体
、８……ワーク、９……熱シールド、１０……黒
色化された表面、１１……鏡面の表面、１３……
水冷パイプ。 Fig. 1 is a partially cut-away side view of the conventional example, Fig. 2 is a partially cut-away side view of the embodiment of the present invention, Fig. 3 is a cross-sectional view taken along the line - - of Fig. An enlarged sectional view of the heat shield, FIG. 5 is a perspective view of the heat shield. 1... Vacuum chamber, 2... Heat source, 3... Magnetic levitation body, 8... Work, 9... Heat shield, 10... Blackened surface, 11... Mirror surface, 13...
water cooling pipe.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 内部に熱源を有する真空室内に、磁気により浮
上してワークを搬送する磁気浮上体を設け、該磁
気浮上体と熱源との間に該磁気浮上体を保護する
熱シールドを設けるようにしたものに於いて、該
熱シールドの該熱源に向いた表面を黒色に処理す
ると共に該磁気浮上体に向いた表面を鏡面に処理
し、更に該熱シールドに水冷パイプを設けて水冷
したことを特徴とする真空中磁気浮上搬送装置の
熱シールド装置。 A magnetically levitated body that levitates magnetically to transport a workpiece is installed in a vacuum chamber that has a heat source inside, and a heat shield is provided between the magnetically levitated body and the heat source to protect the magnetically levitated body. The surface of the heat shield facing the heat source is treated black and the surface facing the magnetically levitated body is treated to have a mirror finish, and the heat shield is further provided with a water cooling pipe for water cooling. Heat shield device for vacuum magnetic levitation transport equipment.
JP8304890U 1990-08-04 1990-08-04 Heat shield device for magnetic levitation transfer device in vacuum Expired - Lifetime JP2521154Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8304890U JP2521154Y2 (en) 1990-08-04 1990-08-04 Heat shield device for magnetic levitation transfer device in vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8304890U JP2521154Y2 (en) 1990-08-04 1990-08-04 Heat shield device for magnetic levitation transfer device in vacuum

Publications (2)

Publication Number Publication Date
JPH0440030U true JPH0440030U (en) 1992-04-06
JP2521154Y2 JP2521154Y2 (en) 1996-12-25

Family

ID=31630394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8304890U Expired - Lifetime JP2521154Y2 (en) 1990-08-04 1990-08-04 Heat shield device for magnetic levitation transfer device in vacuum

Country Status (1)

Country Link
JP (1) JP2521154Y2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017224644A (en) * 2016-06-13 2017-12-21 株式会社アルバック Transport device
JP2018029137A (en) * 2016-08-18 2018-02-22 株式会社アルバック Transport device
CN114518006A (en) * 2020-11-19 2022-05-20 中国航天科工飞航技术研究院（中国航天海鹰机电技术研究院） Pipeline wall sleeve type cooling circulation heat dissipation system and magnetic suspension transportation system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017224644A (en) * 2016-06-13 2017-12-21 株式会社アルバック Transport device
JP2018029137A (en) * 2016-08-18 2018-02-22 株式会社アルバック Transport device
CN114518006A (en) * 2020-11-19 2022-05-20 中国航天科工飞航技术研究院（中国航天海鹰机电技术研究院） Pipeline wall sleeve type cooling circulation heat dissipation system and magnetic suspension transportation system

Also Published As

Publication number Publication date
JP2521154Y2 (en) 1996-12-25

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Legal Events

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Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term