JPH0440770U - - Google Patents
Info
- Publication number
- JPH0440770U JPH0440770U JP8230990U JP8230990U JPH0440770U JP H0440770 U JPH0440770 U JP H0440770U JP 8230990 U JP8230990 U JP 8230990U JP 8230990 U JP8230990 U JP 8230990U JP H0440770 U JPH0440770 U JP H0440770U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- holding
- cooling device
- diamond synthesis
- combustion method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 238000001816 cooling Methods 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 229910003460 diamond Inorganic materials 0.000 claims description 5
- 239000010432 diamond Substances 0.000 claims description 5
- 238000003786 synthesis reaction Methods 0.000 claims description 5
- 238000009841 combustion method Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は、本考案に係わる燃焼法によるダイヤ
モンド合成の際の基板の冷却装置の断面概要図、
第２図は、本考案に係わる別態様の燃焼法による
ダイヤモンド合成の際の基板の冷却装置の要部断
面概要図、第３図は、従来技術の説明図である。
１……冷却箱、１ａ……上壁、１ｂ……下壁、
１ｃ……側壁、２……基台、３……支持板、４…
…基板、５……給気管、５ａ……縦管、５ｂ……
横管、６……開口部、７……摺動リング、８……
流量調整弁、９，１３……フレキシブル管、１０
……シリンダ、１１……ロツド、１２……排気管
、１４……ダイヤモンド合成用燃焼バーナ、１５
……火口、１６，１７……熱電対。
FIG. 1 is a cross-sectional schematic diagram of a cooling device for a substrate during diamond synthesis by the combustion method according to the present invention;
FIG. 2 is a schematic sectional view of a main part of a cooling device for a substrate during diamond synthesis by a combustion method according to another embodiment of the present invention, and FIG. 3 is an explanatory diagram of a conventional technique. 1...Cooling box, 1a...Upper wall, 1b...Lower wall,
1c...Side wall, 2...Base, 3...Support plate, 4...
... Board, 5 ... Air supply pipe, 5a ... Vertical pipe, 5b ...
Horizontal pipe, 6...opening, 7...sliding ring, 8...
Flow rate adjustment valve, 9, 13...Flexible pipe, 10
... Cylinder, 11 ... Rod, 12 ... Exhaust pipe, 14 ... Combustion burner for diamond synthesis, 15
...crater, 16,17...thermocouple.
Claims (1)
部が空洞の冷却箱に流量調整弁を具備する給気管
と排気管とを設けるとともに、給気管の噴出口が
基板を保持する一面の内面に対向し且つ進退可能
に設けられてなることを特徴とする燃焼法による
ダイヤモンド合成の際の基板の冷却装置。 (2) 基板を保持する面の壁内の基板保持面側お
よび内面側のそれぞれに熱電対が埋設されてなる
ことを特徴とする燃焼法によるダイヤモンド合成
の際の基板の冷却装置。[Scope of Claim for Utility Model Registration] (1) A cooling box having one surface for holding a substrate on its outer surface and having a hollow interior is provided with an air supply pipe and an exhaust pipe equipped with a flow rate adjustment valve, and a 1. A cooling device for a substrate during diamond synthesis by a combustion method, characterized in that an outlet faces an inner surface of one surface holding the substrate and is movably provided. (2) A cooling device for a substrate during diamond synthesis by a combustion method, characterized in that thermocouples are embedded in each of the substrate holding surface side and the inner surface side within the wall of the substrate holding surface.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8230990U JPH0440770U (en) | 1990-08-01 | 1990-08-01 | |
| GB9106521A GB2243150B (en) | 1990-03-28 | 1991-03-27 | Method for synthesizing diamond by combustion |
| US07/675,953 US5135730A (en) | 1990-03-28 | 1991-03-27 | Method and apparatus for synthesizing diamond by combustion |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8230990U JPH0440770U (en) | 1990-08-01 | 1990-08-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0440770U true JPH0440770U (en) | 1992-04-07 |
Family
ID=31629001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8230990U Pending JPH0440770U (en) | 1990-03-28 | 1990-08-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0440770U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3004951U (en) * | 1994-06-03 | 1994-12-06 | 株式会社山口工業 | Automotive paint surface pretreatment equipment |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01203297A (en) * | 1988-02-09 | 1989-08-16 | Natl Inst For Res In Inorg Mater | Diamond synthesis method using combustion flame |
-
1990
- 1990-08-01 JP JP8230990U patent/JPH0440770U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01203297A (en) * | 1988-02-09 | 1989-08-16 | Natl Inst For Res In Inorg Mater | Diamond synthesis method using combustion flame |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3004951U (en) * | 1994-06-03 | 1994-12-06 | 株式会社山口工業 | Automotive paint surface pretreatment equipment |