JPH0441643U - - Google Patents
Info
- Publication number
- JPH0441643U JPH0441643U JP8301690U JP8301690U JPH0441643U JP H0441643 U JPH0441643 U JP H0441643U JP 8301690 U JP8301690 U JP 8301690U JP 8301690 U JP8301690 U JP 8301690U JP H0441643 U JPH0441643 U JP H0441643U
- Authority
- JP
- Japan
- Prior art keywords
- pressure medium
- metal diaphragm
- pressure
- movement
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 2
- 239000000284 extract Substances 0.000 claims 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図はこの考案による圧力センサの一実施例
を示す断面図、第２図は従来の圧力センサの断面
図である。
図において、２は金属ダイヤフラム、３は圧力
媒体室、４はセンサチツプ、７はＯリング（弾性
体）である。なお、図中、同一符号は同一または
相当部分を示す。
FIG. 1 is a sectional view showing an embodiment of the pressure sensor according to this invention, and FIG. 2 is a sectional view of a conventional pressure sensor. In the figure, 2 is a metal diaphragm, 3 is a pressure medium chamber, 4 is a sensor chip, and 7 is an O-ring (elastic body). In addition, in the figures, the same reference numerals indicate the same or corresponding parts.
補正 平３．９．２８
実用新案登録請求の範囲を次のように補正する
。Amendment 3/9/28 The scope of claims for utility model registration is amended as follows.
【実用新案登録請求の範囲】
圧力を直接受ける金属ダイヤフラムと、該金属
ダイヤフラムの動きを伝達する密封された液体状
の圧力媒体と、該圧力媒体により伝達された前記
金属ダイヤフラムの動きを電気信号の変化として
取り出すセンサチツプとを備えた圧力センサにお
いて、前記圧力媒体中に、もしくは圧力媒体に接
して、温度による当該圧力媒体の体積変化を吸収
する弾性体を設けたことを特徴とする圧力センサ
。[Claims for Utility Model Registration] A metal diaphragm that directly receives pressure, a sealed liquid pressure medium that transmits the movement of the metal diaphragm, and an electrical signal that transmits the movement of the metal diaphragm transmitted by the pressure medium. 1. A pressure sensor comprising a sensor chip that is taken out as a change, characterized in that an elastic body is provided in the pressure medium or in contact with the pressure medium to absorb changes in volume of the pressure medium due to temperature .
Claims (1)
ダイヤフラムの動きを伝達する密封された液体状
の圧力媒体と、該圧力媒体により伝達された前記
金属ダイヤフラムの動きを電気信号の変化として
取り出すセンサチツプとを備えた圧力センサにお
いて、前記圧力媒体中に、もしくは圧力媒体に接
して、当該圧力媒体の温度により体積変化を吸収
する弾性体を設けたことを特徴とする圧力センサ
。 A metal diaphragm that directly receives pressure, a sealed liquid pressure medium that transmits the movement of the metal diaphragm, and a sensor chip that extracts the movement of the metal diaphragm transmitted by the pressure medium as a change in an electrical signal. A pressure sensor, characterized in that an elastic body is provided in the pressure medium or in contact with the pressure medium to absorb changes in volume due to the temperature of the pressure medium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8301690U JPH0441643U (en) | 1990-08-04 | 1990-08-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8301690U JPH0441643U (en) | 1990-08-04 | 1990-08-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0441643U true JPH0441643U (en) | 1992-04-08 |
Family
ID=31630333
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8301690U Pending JPH0441643U (en) | 1990-08-04 | 1990-08-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0441643U (en) |
-
1990
- 1990-08-04 JP JP8301690U patent/JPH0441643U/ja active Pending
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