JPH0442273U - - Google Patents
Info
- Publication number
- JPH0442273U JPH0442273U JP8354190U JP8354190U JPH0442273U JP H0442273 U JPH0442273 U JP H0442273U JP 8354190 U JP8354190 U JP 8354190U JP 8354190 U JP8354190 U JP 8354190U JP H0442273 U JPH0442273 U JP H0442273U
- Authority
- JP
- Japan
- Prior art keywords
- panel
- hydrogen storage
- storage alloy
- vacuum chamber
- pump case
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 229910052739 hydrogen Inorganic materials 0.000 claims description 4
- 239000001257 hydrogen Substances 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims 1
- 238000005245 sintering Methods 0.000 claims 1
- 238000007751 thermal spraying Methods 0.000 claims 1
- 239000012774 insulation material Substances 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
第１，２図は本考案の１実施例を示し、第１図
は壁面ポンプ装置を示す断面図、第２図は水素貯
蔵合金の固着状態を示す断面図である。
１……壁面ポンプ装置、２……ポンプケース、
２ｂ……開口部、３……冷凍機、４……シールド
パネル（パネル）、５……第１段パネル（コール
ドヘツド）、６……断熱材、７……第２段パネル
（コールドヘツド）、８……パネル、９……バツ
フル、１０……真空槽、Ａ……水素貯蔵合金。
Figures 1 and 2 show one embodiment of the present invention, with Figure 1 being a sectional view showing a wall pump device, and Figure 2 being a sectional view showing a fixed state of the hydrogen storage alloy. 1...Wall pump device, 2...Pump case,
2b...opening, 3...refrigerator, 4...shield panel (panel), 5...first stage panel (cold head), 6...insulation material, 7...second stage panel (cold head) , 8... Panel, 9... Batsuful, 10... Vacuum chamber, A... Hydrogen storage alloy.
Claims (1)
該ポンプケース内に真空槽側から順次に配置され
るバツフルと、冷凍機によつて冷却されるパネル
とを備え、前記パネルが、金属板の表面に水素貯
蔵合金を焼結又は溶射によつて固着した水素貯蔵
合金層を有することを特徴とする壁面ポンプ装置
。 a pump case whose opening is connected to the vacuum chamber;
The pump case includes bubbles arranged sequentially from the vacuum chamber side and a panel cooled by a refrigerator, and the panel is made of a metal plate with a hydrogen storage alloy on the surface by sintering or thermal spraying. A wall pump device characterized in that it has a fixed hydrogen storage alloy layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8354190U JPH0442273U (en) | 1990-08-06 | 1990-08-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8354190U JPH0442273U (en) | 1990-08-06 | 1990-08-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0442273U true JPH0442273U (en) | 1992-04-09 |
Family
ID=31631293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8354190U Pending JPH0442273U (en) | 1990-08-06 | 1990-08-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0442273U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10184540A (en) * | 1996-12-25 | 1998-07-14 | Anelva Corp | Cryopump |
-
1990
- 1990-08-06 JP JP8354190U patent/JPH0442273U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10184540A (en) * | 1996-12-25 | 1998-07-14 | Anelva Corp | Cryopump |
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