JPH0442396U - - Google Patents
Info
- Publication number
- JPH0442396U JPH0442396U JP8519590U JP8519590U JPH0442396U JP H0442396 U JPH0442396 U JP H0442396U JP 8519590 U JP8519590 U JP 8519590U JP 8519590 U JP8519590 U JP 8519590U JP H0442396 U JPH0442396 U JP H0442396U
- Authority
- JP
- Japan
- Prior art keywords
- attached
- claw member
- flat
- opening
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000000078 claw Anatomy 0.000 claims description 6
Description
第１図は、本考案の実施例の側面図、第２図は
、同実施例の下方から見た平面図、第３図は、同
実施例の作動状況の平面図、第４図は、従来の技
術によるロケツト用ハンドの一例の側面図、第５
図は、同例の下方から見た平面図、第６図は、同
実施例の作動状況の平面図である。
１……ウエハー、２……オリフラ、３……ベー
ス、４……平型爪部材、５……保持平面、６……
第１の開閉用シリンダ、７……Ｖ字型爪部材、８
……Ｖ字型凹面、９……第２の開閉用シリンダ、
１０……センサ、１１……爪部材、１２……Ｖ字
型凹面、１３……開閉用シリンダ。
Fig. 1 is a side view of the embodiment of the present invention, Fig. 2 is a plan view of the embodiment seen from below, Fig. 3 is a plan view of the operating state of the embodiment, and Fig. 4 is: Side view of an example of a conventional rocket hand, No. 5
The figure is a plan view of the same embodiment as seen from below, and FIG. 6 is a plan view of the operating state of the same embodiment. DESCRIPTION OF SYMBOLS 1... Wafer, 2... Orientation flat, 3... Base, 4... Flat claw member, 5... Holding plane, 6...
First opening/closing cylinder, 7...V-shaped claw member, 8
...V-shaped concave surface, 9...Second opening/closing cylinder,
10... Sensor, 11... Claw member, 12... V-shaped concave surface, 13... Opening/closing cylinder.
Claims (1)
たベース３、取扱い対象となるウエハー１に付さ
れたオリフラ２に当接する保持平面５を備えて前
記ベース３に揺動自在に取付けられ、第１の開閉
用シリンダ６を付設された平型爪部材４及び前記
ウエハー１の円筒周面に当接するＶ字型凹面８を
備え、前記平型爪部材４に対向する如くなして、
前記ベース３に揺動自在に取付けられ、第２の開
閉用シリンダ９を付設されたＶ字型爪部材７を有
するロボツト用アーム。 A base 3 rotatably supported and equipped with a direction control mechanism, a holding plane 5 that comes into contact with an orientation flat 2 attached to a wafer 1 to be handled, and a first A flat claw member 4 attached with an opening/closing cylinder 6 and a V-shaped concave surface 8 that abuts against the cylindrical circumferential surface of the wafer 1, facing the flat claw member 4,
A robot arm that is swingably attached to the base 3 and has a V-shaped claw member 7 to which a second opening/closing cylinder 9 is attached.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8519590U JPH0442396U (en) | 1990-08-10 | 1990-08-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8519590U JPH0442396U (en) | 1990-08-10 | 1990-08-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0442396U true JPH0442396U (en) | 1992-04-10 |
Family
ID=31634186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8519590U Pending JPH0442396U (en) | 1990-08-10 | 1990-08-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0442396U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013248697A (en) * | 2012-05-31 | 2013-12-12 | Seiko Epson Corp | Robot, and robot hand |
-
1990
- 1990-08-10 JP JP8519590U patent/JPH0442396U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013248697A (en) * | 2012-05-31 | 2013-12-12 | Seiko Epson Corp | Robot, and robot hand |