JPH0442837B2 - - Google Patents
Info
- Publication number
- JPH0442837B2 JPH0442837B2 JP12701484A JP12701484A JPH0442837B2 JP H0442837 B2 JPH0442837 B2 JP H0442837B2 JP 12701484 A JP12701484 A JP 12701484A JP 12701484 A JP12701484 A JP 12701484A JP H0442837 B2 JPH0442837 B2 JP H0442837B2
- Authority
- JP
- Japan
- Prior art keywords
- tube
- laser
- width
- output
- inner tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000008878 coupling Effects 0.000 claims description 25
- 238000010168 coupling process Methods 0.000 claims description 25
- 238000005859 coupling reaction Methods 0.000 claims description 25
- 239000007789 gas Substances 0.000 description 25
- 238000006243 chemical reaction Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】
産業上の利用分野
本発明は放電励起ガス同軸流型レーザ発振器の
出力増大及び変換効率の増大を図つたレーザ発振
器に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a discharge-excited gas coaxial flow type laser oscillator that increases the output and conversion efficiency of the laser oscillator.
従来例の構造とその問題点
第１図は従来の放電励起ガス同軸流型レーザ発
振器の一例を示す。Structure of conventional example and its problems FIG. 1 shows an example of a conventional discharge-excited gas coaxial flow type laser oscillator.
図において、１はレーザ管、２は全反射鏡、３
は出力結合鏡でこれらで光学共振器を構成してい
る。４はガス導入部の外管、４０は内管でこれら
が二重管を構成している。５は内管４０の端面と
レーザ管１の端面との間隙、６，６′は電極で、
円筒状あるいは棒状（ピン状）をしている。７，
７′はレーザ管１の中央部に配され電極６，６′と
対向する電極である。８，９は媒質ガスの流れの
方向を示す。１０はレーザ出力光である。 In the figure, 1 is a laser tube, 2 is a total reflection mirror, and 3
is an output coupling mirror, and these constitute an optical resonator. Reference numeral 4 denotes an outer tube of the gas introduction section, and 40 an inner tube, which constitute a double tube. 5 is a gap between the end face of the inner tube 40 and the end face of the laser tube 1; 6 and 6' are electrodes;
It is cylindrical or rod-shaped (pin-shaped). 7,
Reference numeral 7' denotes an electrode disposed at the center of the laser tube 1 and facing the electrodes 6 and 6'. 8 and 9 indicate the flow direction of the medium gas. 10 is laser output light.
この例では媒質ガスは共振器の両端部から矢印
８の方向に流入し、内管４０に沿つて流れ、間隙
５を通つてレーザ管１内に導入され、共振器の中
央から矢印９の方向に排出される。放電は電極６
と電極７、および電極６′と電極７′との間で行わ
れる。 In this example, the medium gas flows from both ends of the resonator in the direction of arrow 8, flows along the inner tube 40, is introduced into the laser tube 1 through the gap 5, and is introduced from the center of the resonator in the direction of arrow 9. is discharged. The discharge is at electrode 6
and electrode 7, and between electrode 6' and electrode 7'.
第１図に従来方式では間隙５が二つの円筒内管
４０とレーザ管１の端面で形成されているため二
重管の内管４０の外周からレーザ管１の中央部に
ガスの流れが集中し、均一な流速分布が得られな
い。このため放電が一点に集中し、電極６，６′
の温度が高くなることが多く放電体積が小さいた
め十分に出力を得ることができない。 As shown in FIG. 1, in the conventional system, the gap 5 is formed between the two cylindrical inner tubes 40 and the end face of the laser tube 1, so the gas flow is concentrated from the outer periphery of the double inner tube 40 to the center of the laser tube 1. However, a uniform flow velocity distribution cannot be obtained. Therefore, the discharge concentrates at one point, and the electrodes 6, 6'
The temperature is often high and the discharge volume is small, making it impossible to obtain sufficient output.
またこの放電点が不規則に動き回るためその都
度出力の変動をきたし、また時には放電が停止す
ることもある。このためガス圧を高めたり、投入
電力を高めることができず、安定な出力を得るた
めには低い出力値で運転しなければならないとい
う欠点があつた。 Furthermore, since this discharge point moves around irregularly, the output fluctuates each time, and sometimes the discharge may stop. For this reason, it was not possible to increase the gas pressure or the input power, and it had the disadvantage that it had to be operated at a low output value in order to obtain stable output.
そこでこの様な問題点を解決するために内管の
端部に複数個の結合通路を設けたレーザ発振器に
ついて本出願人は先に提案した。その具体的構成
を第２図に示す。 In order to solve this problem, the applicant has previously proposed a laser oscillator in which a plurality of coupling passages are provided at the end of the inner tube. Its specific configuration is shown in FIG.
第２図において第１図の従来例と同じ部位には
同じ番号を付し、詳しい説明は省略する。 In FIG. 2, the same parts as in the conventional example shown in FIG. 1 are given the same numbers, and detailed explanations will be omitted.
本例の特徴はガス導入部分の二重管を構成する
内管４０１に電極の機能をもたせ、その内管４０
１のレーザ管１側に複数個の結合通路５５を設
け、この結合通路５５を通じて媒質ガスをレーザ
管１内に導入する様にしたところにある。 The feature of this example is that the inner tube 401 constituting the double tube of the gas introduction part has an electrode function.
A plurality of coupling passages 55 are provided on the laser tube 1 side, and a medium gas is introduced into the laser tube 1 through the coupling passages 55.
本例のガス導入部分の拡大斜視図を第３図に示
す。第３図に示す様にこの構成では、外管４と電
極兼用内管４０１とで二重管構造を構成し、電極
兼用内管４０１の一端には全反射鏡２が設けられ
ており、電極兼用内管４０１の他端には複数個の
結合通路５５が設けられている。 FIG. 3 shows an enlarged perspective view of the gas introduction portion of this example. As shown in FIG. 3, in this configuration, an outer tube 4 and an inner tube 401 that also serves as an electrode constitute a double tube structure, and a total reflection mirror 2 is provided at one end of the inner tube 401 that also serves as an electrode. A plurality of coupling passages 55 are provided at the other end of the dual-purpose inner tube 401.
外管４と電極兼用内管４０１との間に導入され
た媒質ガスは電極兼用内管４０１の一部に設けら
れた複数個の結合通路５５からレーザ管１内に強
制的に噴出されるためレーザ管１内では結合通路
５５部分と結合通路５５の無い部分との圧力差及
び噴出ガス同志の衝突により乱流が形成され、レ
ーザ１内の管軸方向の媒質ガスの流速分布が一様
になる。これにより出力の増大、安定化がはかれ
る。 The medium gas introduced between the outer tube 4 and the inner tube 401 that also serves as an electrode is forcibly ejected into the laser tube 1 from a plurality of coupling passages 55 provided in a part of the inner tube 401 that also serves as an electrode. In the laser tube 1, a turbulent flow is formed due to the pressure difference between the coupling passage 55 part and the part without the coupling passage 55 and the collision of the ejected gases, and the flow velocity distribution of the medium gas in the tube axis direction in the laser tube 1 becomes uniform. Become. This increases and stabilizes the output.
第４図ａ、第４図ｂは第３図の構成におけるガ
ス導入部の複数個の結合通路５５を軸心からずれ
た位置に向つて加工し、噴出ガスが矢印の様に回
転力が与えられるように構成した点にある。 4a and 4b show that the plurality of coupling passages 55 of the gas introduction part in the configuration shown in FIG. The point is that it is configured so that it can be used.
この様な構成をとるとレーザ管内をガスがスパ
イラル状に回転し進行することになりレーザ出力
も向上し安定な発振出力を得る事ができる。 With such a configuration, the gas rotates and advances in a spiral shape within the laser tube, improving the laser output and making it possible to obtain stable oscillation output.
しかし、発振器を小型化しかつ高出力とするに
はこれらの構成でもなお不十分である。 However, even these configurations are still insufficient to downsize the oscillator and provide high output.
発明の目的
本発明は小型でかつ高出力の放電励起ガス同軸
流型レーザ発振器を得ることを目的とするもので
ある。OBJECTS OF THE INVENTION An object of the present invention is to obtain a compact and high-output discharge-excited gas coaxial flow type laser oscillator.
発明の構成
本発明はレーザ管へ媒質ガスを導入する媒質ガ
ス導入部を外管、中管および内管の三重管構造と
し、中管と内管のレーザ管側の端面近傍に複数個
の結合通路を設け、外管、中管および内管を互い
に摺動可能として結合通路の巾および長さを任意
に設定し得るようにしたものである。Structure of the Invention The present invention has a medium gas introduction part for introducing medium gas into the laser tube having a triple tube structure of an outer tube, a middle tube, and an inner tube, and a plurality of couplings near the end faces of the middle tube and the inner tube on the laser tube side. A passage is provided so that the outer tube, middle tube, and inner tube can slide relative to each other, so that the width and length of the coupling passage can be arbitrarily set.
実施例の説明
以下、本発明の実施例について図面とともに詳
細に説明する。DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
第５図ａは本発明の一実施例におけるレーザ発
振器のガス導入部のスリツトノズル拡大図、第５
図ｂはその断面図である。又第６図は第５図に示
したスリツトノズルの動作説明のための立体図を
示す。 FIG. 5a is an enlarged view of the slit nozzle of the gas introduction part of the laser oscillator in one embodiment of the present invention.
Figure b is a sectional view thereof. Further, FIG. 6 shows a three-dimensional view for explaining the operation of the slit nozzle shown in FIG. 5.
本実施例の特徴は、複数個の結合通路５６，５
７の深さ方向が軸心からずれた位置に向つて加工
し、更に結合通路５６の巾ｄおよび長さｌを任意
に変えられるようにし、レーザ管の放電長を短く
した場合、あるいはポンプの排出量を大きくした
場合等にスリツトノズルの結合通路５６の巾ｄお
よび長さｌの最適値を選択することができるよう
にしたものである。 The feature of this embodiment is that a plurality of coupling passages 56, 5
7 is machined so that the depth direction is shifted from the axis, and the width d and length l of the coupling passage 56 can be changed arbitrarily to shorten the discharge length of the laser tube or the pump. This makes it possible to select optimal values for the width d and length l of the connecting passage 56 of the slit nozzle when the discharge amount is increased.
スリツトノズルは三重構造とし複数個の結合通
路５６を持つ中管４０４と同数の結合通路５７を
持つ内管４０３を有し又、中管４０４をつつむリ
ング状外管４０２をもつて構成される。結合通路
５６，５７で形成されるスリツトの巾を任意に設
定するために内管４０３を第６図の矢印Ａ方向に
回転させると結合通路５６と５７の重なり部分の
巾が変りノズル巾を自由に設定することができ
る。次に結合通路５６，５７の長さを設定するた
め外管４０２を長手方向Ｂに移動し設定すること
で結合通路５６，５７で形成されるスリツトの長
さを任意設定することができる。なお内管４０３
の結合通路５７の巾は中管４０４の結合通路５６
の巾と同等もしくは大きい巾が好ましい。又外管
４０２の長さは、中管４０４の結合通路５６の長
さと同等もしくはそれ以下が好ましい。 The slit nozzle has a triple structure and includes an inner tube 404 having a plurality of coupling passages 56, an inner tube 403 having the same number of coupling passages 57, and a ring-shaped outer tube 402 surrounding the middle tube 404. In order to arbitrarily set the width of the slit formed by the coupling passages 56 and 57, by rotating the inner tube 403 in the direction of arrow A in Fig. 6, the width of the overlapping portion of the coupling passages 56 and 57 changes, allowing the nozzle width to be freely adjusted. Can be set to . Next, by moving and setting the outer tube 402 in the longitudinal direction B to set the lengths of the coupling passages 56 and 57, the length of the slit formed by the coupling passages 56 and 57 can be arbitrarily set. In addition, the inner pipe 403
The width of the connecting passage 57 is the width of the connecting passage 56 of the middle pipe 404.
The width is preferably equal to or larger than the width of. Further, the length of the outer tube 402 is preferably equal to or shorter than the length of the coupling passage 56 of the inner tube 404.
第７図はレーザ管の有効放電長Ｌを250mmにと
つた時、スリツトノズルのスリツトの巾ｄと長さ
ｌについて変化させたときのレーザの単位長出力
の関係を示すものである。領域２１は600Wの出
力が得られる領域を、領域２２は500Wの出力が
得られる領域を示す。したがつて、スリツト巾ｄ
とスリツト巾ｌを領域２１にあるように選択すれ
ば高出力得られることになる。 FIG. 7 shows the relationship between the unit length output of the laser and the width d and length l of the slit nozzle when the effective discharge length L of the laser tube is set to 250 mm. Area 21 indicates an area where an output of 600W can be obtained, and area 22 indicates an area where an output of 500W can be obtained. Therefore, the slit width d
If the slit width l is selected to be in the region 21, high output can be obtained.
第８図は第７図における点Ａ，Ｂにスリツト巾
およびスリツト長さを選んだときの単位長出力お
よび変換効率の特性を示す。即ち、スリツトの巾
を１mm、長さ40mm、噴出面積1.6cm2の設定値Ａと、
巾を２mm、長さ20mm、噴出面積1.6cm2の設定値Ｂ
と二通りの設定値を選び単位長出力と変換効率を
調べた。なお、パラメータとして横軸に示すよう
に有効放電長を変化させた。同図からわかるよう
に、有効放電長が短かくなると設定値Ａの場合の
方が単位長出力、変換効率ｎのいずれもすぐれて
いることがわかる。スリツト巾ｄとスリツト長ｌ
を第７図の領域２１に設定した場合には有効放電
長0.2〜0.6ｍ付近で単位長出力、変換効率ｎが最
大になり、小型で高出力、高効率のレーザ発振器
を得ることができる。 FIG. 8 shows the characteristics of unit length output and conversion efficiency when the slit width and slit length are selected at points A and B in FIG. That is, the setting value A is that the width of the slit is 1 mm, the length is 40 mm, and the ejection area is 1.6 cm2 .
Setting value B: width 2mm, length 20mm, ejection area 1.6cm 2
We selected two settings and investigated the unit length output and conversion efficiency. Note that the effective discharge length was changed as a parameter as shown on the horizontal axis. As can be seen from the figure, as the effective discharge length becomes shorter, the setting value A is superior in both unit length output and conversion efficiency n. Slit width d and slit length l
When is set in the region 21 of FIG. 7, the unit length output and conversion efficiency n become maximum near the effective discharge length of 0.2 to 0.6 m, and a compact, high-power, high-efficiency laser oscillator can be obtained.
発明の効果
以上のように、本発明はレーザ管への媒質ガス
導入部のスリツトノズルのスリツト巾およびスリ
ツト長を可変とした放電励起ガス同軸流型レーザ
発振器で、有効放電長さ短かくした小型の発振器
において高出力、高変換効率のレーザ発振器を得
ることができる。Effects of the Invention As described above, the present invention provides a discharge-excited gas coaxial flow type laser oscillator in which the slit width and slit length of the slit nozzle of the medium gas introduction part to the laser tube are variable, and the effective discharge length is shortened. A laser oscillator with high output and high conversion efficiency can be obtained.
第１図及び第２図は各々従来の放電励起ガス同
軸流型レーザ発振器の共振器部の構造を示す断面
図、第３図は第２図に示すレーザ発振器のガス導
入部の拡大斜視図、第４図ａ，ｂは従来のレーザ
発振器のガス導入部の結合通路部分の他の例を示
す拡大断面図、第５図ａ，ｂは本発明の一実施例
におけるレーザ発振器のガス導入部の結合通路部
分の断面側面図および断面正面図、第６図は本発
明によるレーザ発振器のガス導入部の拡大斜視
図、第７図は本発明によるレーザ発振器のレーザ
出力分布図、第８図は本発明によるレーザ発振器
のレーザ出力と変換効率を表わす特性図である。
１……レーザ管、４，４０２……外管、６，
６′，７，７′……電極、４０，４０１，４０３…
…内管、５６，５７……結合通路、４０４……中
管。
1 and 2 are cross-sectional views showing the structure of a resonator section of a conventional discharge-excited gas coaxial flow laser oscillator, and FIG. 3 is an enlarged perspective view of the gas introduction section of the laser oscillator shown in FIG. FIGS. 4a and 4b are enlarged cross-sectional views showing other examples of the coupling passage portion of the gas introduction part of a conventional laser oscillator, and FIGS. 6 is an enlarged perspective view of the gas introduction part of the laser oscillator according to the present invention, FIG. 7 is a laser output distribution diagram of the laser oscillator according to the present invention, and FIG. 8 is a cross-sectional front view of the coupling passage portion. FIG. 3 is a characteristic diagram showing the laser output and conversion efficiency of the laser oscillator according to the invention. 1... Laser tube, 4,402... Outer tube, 6,
6', 7, 7'...electrode, 40,401,403...
...Inner pipe, 56, 57...Joining passage, 404...Medium pipe.
Claims (1)
よび内管とからなる三重管構造を有し、前記中管
と内管のレーザ管側の端面近傍に複数個の結合通
路を設け、前記外管、中管および内管が互いに摺
動可能であることを特徴とするレーザ発振器。 ２ 内管の結合通路の巾が中管の結合通路巾と同
等または大きい特許請求の範囲第１項記載のレー
ザ発振器。 ３ 結合通路の深さ方向が軸心からはずれた方向
に延びる特許請求の範囲第１項記載のレーザ発振
器。[Scope of Claims] 1. The medium gas introduction part to the laser tube has a triple tube structure consisting of an outer tube, a middle tube, and an inner tube, and a plurality of medium gas introduction parts are provided near the end faces of the middle tube and the inner tube on the laser tube side. A laser oscillator characterized in that the outer tube, the middle tube, and the inner tube are slidable relative to each other. 2. The laser oscillator according to claim 1, wherein the width of the coupling passage in the inner tube is equal to or greater than the width of the coupling passage in the middle tube. 3. The laser oscillator according to claim 1, wherein the depth direction of the coupling passage extends in a direction away from the axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59127014A JPS616884A (en) | 1984-06-20 | 1984-06-20 | Laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59127014A JPS616884A (en) | 1984-06-20 | 1984-06-20 | Laser oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS616884A JPS616884A (en) | 1986-01-13 |
| JPH0442837B2 true JPH0442837B2 (en) | 1992-07-14 |
Family
ID=14949549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59127014A Granted JPS616884A (en) | 1984-06-20 | 1984-06-20 | Laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS616884A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2599394B2 (en) * | 1987-07-24 | 1997-04-09 | 株式会社 アマダ | High-speed axial-flow gas laser oscillator |
-
1984
- 1984-06-20 JP JP59127014A patent/JPS616884A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS616884A (en) | 1986-01-13 |
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