JPH0443101B2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a plasma processing apparatus for sheet-like materials,
For details, in a vacuum container in a plasma atmosphere,
This invention relates to a device that performs low-temperature plasma treatment by placing a sheet material along the outer peripheral surface of a rotating drum-shaped discharge electrode.

[Prior Art] In recent years, plasma processing has attracted attention as a treatment method for improving the scientific, physical, mechanical, optical or electrical properties or surface structure of sheet materials such as plastic films and fabrics. . In other words, plasma treatment can improve the adhesion, friction properties, texture, gloss or color fastness of sheet materials, or improve the antistatic, surface hardening, roughening, anti-blocking, or darkening of dyed materials. It is known that this can be achieved (for example, see Japanese Patent Application Laid-open Nos. 18737-1987 and 149441-1980).

Conventionally, this type of plasma processing apparatus for sheet-like materials has a drum-shaped discharge electrode fixed to a rotating shaft that passes through the vacuum container, and a rod-shaped discharge electrode facing the drum-shaped discharge electrode, which is provided inside the vacuum container. . and,
For example, by insulating the vacuum vessel from the electric circuit to which both discharge electrodes are connected, plasma discharge from both discharge electrodes to the vacuum vessel is prevented,
Prevents power wastage.

[Problems to be Solved by the Invention] However, in the past, since the drum-shaped discharge electrode was directly fixed to the rotating shaft, the rotating shaft was also in a charged state. For this reason, plasma is discharged from the rod-shaped discharge electrode also to the rotating shaft, resulting in wasted power.

In addition, plasma processing equipment for sheet-like materials generally requires large-scale equipment due to the wide range of sheet-like materials to be treated. It is necessary to have processing capacity. In other words, it is necessary to further increase the input power of the plasma processing apparatus, which originally creates a plasma atmosphere, to increase the plasma density, thereby improving the processing capacity. However, in a vacuum vessel in a plasma atmosphere with low electrical resistance, if the above input is increased, a locally large amount of electricity will be generated between the vacuum vessel and the electrical discharge circuits that are insulated from each other inside the vacuum vessel. Due to this, narrow corners, for example, between the rotating shaft passing through the vacuum vessel and the vacuum vessel adjacent to this rotating shaft, are insufficiently insulated, and current can flow inside the vacuum vessel. , the inner wall of the vacuum vessel emits light, and an instantaneous abnormal arc discharge occurs. Therefore, the plasma discharge state becomes unstable and continuous operation is not possible.

This invention was made in view of the above-mentioned conventional problems, and allows continuous operation with a large amount of power flowing.
Moreover, wastage of electricity was prevented. That is, the object is to provide a low-temperature plasma processing apparatus for sheet-like materials that can be used industrially.

[Means for Solving the Problems] In order to achieve the above object, the low-temperature plasma processing apparatus for sheet-like materials of the present invention includes a vacuum container that includes a drum-shaped first discharge electrode and a first discharge electrode that faces the drum-shaped first discharge electrode. An insulating member is interposed between the cylindrical portion of the drum in the first discharge electrode and a rotating shaft passing through the vacuum container, and is insulated from the electric circuit connecting the two discharge electrodes. The position is such that the distance from the surface of the second discharge electrode to the inner surface of the vacuum vessel is greater than twice the distance from the surface of the second discharge electrode to the drum surface of the first discharge electrode.

[Function] According to the present invention, since the vacuum vessel is insulated from the electric circuit as in the prior art, it is possible to prevent loss caused by discharge into the plasma vacuum vessel. Furthermore, since the insulating member is interposed between the rotating shaft and the cylindrical portion, the entire rotating shaft is insulated from the first discharge electrode, so that plasma discharge from the second discharge electrode to the rotating shaft is possible. There is no risk of this occurring.

Further, the rotating shaft is insulated from the first discharge electrode,
In addition, since the vacuum container is insulated from the electric circuit connected to the first and second discharge electrodes, for example, the part between the vacuum container and the penetration part of the rotation shaft through which the rotation shaft penetrates, that is, the narrow corner Since there is no risk that the insulation will be insufficient in the parts, there is no risk of abnormal arc discharge occurring here.

Furthermore, by making the distance from the surface of the second discharge electrode to the inner surface of the vacuum vessel sufficiently larger than the distance from the surface of the second discharge electrode to the surface of the first discharge electrode, the discharge between both discharge electrodes can be reduced. It is stable, otherwise the occurrence of local light emission and instantaneous abnormal arc discharge is reduced, and input power can be increased.

[Example] Hereinafter, an example of the present invention will be described with reference to the drawings.

In FIG. 1 showing a first embodiment of the present invention, a vacuum vessel 1 includes a drum-shaped drum electrode (first discharge electrode) 2 and a large number of rod electrodes facing the drum electrode 2. A second discharge electrode 3 is installed in parallel. Between these two discharge electrodes 2 and 3, an electric circuit 6 is connected from an AC power source 4 to a transformer 5 and to connect both discharge electrodes 2 and 3.
Voltage is applied via.

The vacuum container 1 is made of stainless steel and is filled with extremely low pressure plasma processing gas by a gas container 7 filled with plasma processing gas and a vacuum exhaust device 8 for evacuating the inside of the vacuum container 1. It is kept in the same condition. On both sides of this vacuum container 1, other vacuum containers 1A and 1B each having an unwinding machine 11 and a winding machine 13 installed therein are flange-jointed. A is a sheet-like material, which is guided by a large number of guide rolls 12 from an unwinding end 11 and wound up by a winding machine 13 along the outer peripheral surface of the drum electrode 2 which is being driven to rotate. In other words,
The sheet-like material A of the unwinder 11 is continuously subjected to low-temperature plasma treatment on the drum electrode 2 in the vacuum container 1 held in a plasma atmosphere, and then wound up by the winder 13 .

In FIG. 2, the drum electrode 2 has a water jacket (cooling passage) 2a through which a low conductive cooling medium such as distilled water or silicone oil flows.
is provided in the cylindrical portion 2c of the drum. Both side wall portions 2b of this drum electrode 2 are curved inward into a spherical shape, and are fixed to a rotating shaft 17 at the center via insulating members 14, 15 and a joint 16. The insulating member 14 is an annular ring having a U-shaped cross section and is made of, for example, a glass lining with excellent weather resistance, and is lined with the flange 16a of the joint 16. On the other hand, the insulating member 15 has an annular shape and is made of polycarbonate, for example. 30
is a rubber ring, which is disposed in an annular groove provided in the side wall portion 2b of the drum electrode 2, and seals between the drum electrode 2 and the insulating member 14. A rubber ring 31 is disposed in an annular groove provided in the joint 16 and seals between the joint 16 and the rotating shaft 17. Incidentally, since the insulating member 14 is lined with the joint 16, the space between the joint 16 and the insulating member 14 is of course in a sealed state. Therefore,
The internal space 2d of the drum electrode 2 is sealed from the internal space 1a of the vacuum container 1.

The rotating shaft 17 is driven by a motor (not shown) provided outside the vacuum container 1, and has bearing portions 18 and 19 at a penetrating portion 17a penetrating the vacuum container 1 and an inner end portion 17b, respectively. Through bearings 18a and 19a of
It is pivotally supported by the vacuum container 1. In other words, the rotation axis 1
7 penetrates the drum electrode 2, and the drum electrode 2
It protrudes from both side wall portions 2b, 2b, and is pivotally supported at the protruding portions on both sides. 18b
is a mechanical seal, which is provided on the bearing portion 18 and seals the internal space 1a of the vacuum container 1 from the atmosphere.

The rotating shaft 17 is provided with two insertion holes 17c that open from its right end 17d into the internal space 2d of the drum electrode 2. A copper tube 20 having an insulating member 26 made of fluororesin provided on its outer peripheral surface is inserted into the insertion hole 17c with a slight gap 17e as shown in FIG. The above copper pipe 20
A cooling medium flows through a cooling passage 20a therein, which is connected in series to a water jacket 2a via a flexible tube 21 shown in FIG. Therefore, the cooling medium flows from the cooling passage 20a in the upper copper tube 20 in FIG. 2 to the water jacket 2 through the upper flexible tube 21, as shown by arrow P.
a, passes through the lower flexible tube 21 and is discharged from the cooling passage 20a in the lower copper tube 20.

Reference numeral 32 in FIG. 3 is a gas joint, which supplies the plasma processing gas into the gas container 7 in FIG. It is for supplying to the internal space 2d of the drum electrode 2 shown in the figure. Note that the insertion hole 17c is located at the right end portion 17d of the rotating shaft 17.
As shown in FIG. 3, it is sealed from the atmosphere with a rubber ring 33. That is, the internal space 2d of the drum electrode 2 in FIG. 2 is filled with plasma processing gas and maintained at a higher pressure than the internal space 1a of the vacuum container 2.

Both ends 3a of the plurality of rod electrodes 3 are fixed to a pair of holding members 22A and 22B. This holding member 22 is supported by the vacuum container 1 via an insulator 23.

One end of the electrical circuit 6 is inserted into the vacuum container 1 via an introduction terminal 6a that insulates the vacuum container 1 from the electrical circuit 6, and is connected to the rod electrode 3. The other end is connected to the drum electrode 2 via a slip ring 25, a copper tube 20, a conducting wire 27, and the like. That is, the vacuum container 1 is electrically insulated from the electric circuit 6 and maintained in a grounded state. Note that the electric circuit 6 and both discharge electrodes 2 and 3 are kept ungrounded and strictly insulated from the vacuum vessel 1.

In the above structure, since the vacuum vessel 1 is insulated from the electric circuit 6 as in the conventional case, there is no possibility that plasma will be discharged from the rod electrode 3 to the vacuum vessel 1, so that power consumption can be prevented. .

In addition, the cylindrical portion 2c of the drum electrode 2 and the rotating shaft 17
Insulating members 14 and 15 are interposed between them to insulate both 2 and 17. In other words, since the rotating shaft 17 is insulated from the drum electrode 2, the rod electrode 2
Since there is no risk of plasma being discharged onto the rotating shaft 17, wastage of power can be prevented.

Further, as described above, the rotating shaft 17 is insulated from the drum electrode 2, and the vacuum container 1 is connected to both the electrodes 2 and 3.
Since the electrical circuit 6 connected to the rotating shaft 17 is insulated from the electric circuit 6 connected to the rotary shaft 17, the portion between the penetrating portion 17a of the rotating shaft 17 and the bearing portion 18 of the vacuum vessel 1 adjacent thereto, that is, the narrow corner, is insufficiently insulated. There is no fear. Therefore, since there is no risk of abnormal arc discharge occurring on the inner wall of the vacuum vessel, continuous operation can be achieved.
Also, a rotating shaft 17 protruding from the vacuum container 1 to the outside
Since it is insulated from the drum electrode 2 as described above, it is maintained in an uncharged state, so there is no risk of electric shock to the operator.

Furthermore, as described above, since the rotating shaft 17 is not charged, there is no risk of arc discharge occurring in the mechanical seal 18b, which is exposed to a plasma atmosphere and has a complicated structure. Therefore, it can withstand long-term continuous operation.

Similarly, in the bearing 19a,
Since there is no risk of arc discharge occurring, the bearing 19a can be provided within the vacuum vessel 1 in a plasma atmosphere. Therefore, bearings 18a, which have the heavy drum electrode 2 close to both sides of the drum electrode 2 in the vacuum container 1 via the rotating shaft 17,
Since it can be supported by 19a, the distance between the two bearings is smaller than when a bearing is provided outside the vacuum container 2, so it is possible to reduce the diameter of the rotating shaft 17 and the size of the bearings 18a and 19a. obtain.

By the way, as shown in FIG. 4, which will be described later, the rotating shaft 1
7 and the drum electrode 2, and the rotating shaft 17
If the copper pipe (conductor) is not inserted inside the
Since it is not possible to apply electricity to the drum electrode 2 from outside the vacuum vessel 1 via the rotating shaft 17, it is necessary to provide a slip ring 25 inside the vacuum vessel 1. In contrast, in this embodiment, a copper tube (conductor) 20 connected to the drum electrode 2 of the electric circuit 6 is inserted through the rotating shaft 17 that rotates together with the drum electrode 2 shown in FIG. , even though the rotating shaft 17 and the drum electrode 2 are insulated,
A slip ring 25 for energizing the rotating drum electrode 2 can be provided outside the vacuum vessel 1. Therefore, there is no risk that the plasma atmosphere will be damaged by the abrasion powder of the slip ring 25 or that arc discharge will occur in the abrasion powder, so that the plasma processing apparatus can be operated smoothly and continuously.

In addition, in order to perform good plasma processing, it is necessary to prevent the drum electrode 2 and the copper tube 20 from generating heat due to large electric power. Here, this example:
A water jacket 2a serving as a cooling passage for a cooling medium and a copper tube 20 are connected in series. Therefore,
Copper tube 20, that is, rotation axis 1 in electric circuit 6
The piping for cooling the part inserted into 7,
There is no need to provide it separately. Further, by using the copper tube 20 as a conductive wire, the copper tube 20 that generates heat can be cooled extremely effectively. Furthermore, since the rotating shaft 17 is made of stainless steel with low magnetic permeability or volume resistivity, there is little risk of generating heat due to electromagnetic permeation of the current flowing inside the copper tube 20.

In this embodiment, two copper tubes 20 are provided for the outward and return paths of the cooling medium, but the number of copper tubes 20 may be three or more or one. When there is only one copper pipe 20, the inside and outside of the copper pipe 20 are
It suffices to refer to the outgoing or returning path of the cooling passage.

Furthermore, in this embodiment, the internal space 2d of the drum electrode 2 is sealed from the internal space 1a of the vacuum container 1 by rubber rings 30, 31.
Here, the internal space 2d of the drum electrode 2 is maintained at a higher pressure than the internal space 1a of the vacuum container 1 via the gas coupling 32 and the like. Therefore, the plasma gas in the internal space 1a is transferred to the internal space 2d.
Since it does not enter, there is no risk of causing plasma discharge within this internal space 2d.
Plasma discharge becomes stable. Furthermore, when the plasma processing gas is introduced from the container 7 (see Fig. 1) into the internal space 2d, the internal space 1
The purity of the plasma processing gas in the vacuum container 1 is prevented from deteriorating due to the gas leaking to a.

Note that it is also possible to connect the internal space 2d to the atmosphere through the small hole 17f of the rotating shaft 17 shown in FIG. In that case, the internal space 2d is filled with atmosphere,
Since it is not a plasma atmosphere, local light emission in this internal space 2d is reduced, and plasma discharge is stabilized.

Furthermore, since the insulating member 14 shown in FIG. 2, which is placed in a plasma atmosphere, is a glass lining with excellent weather resistance, there is no risk of it being subjected to low-temperature plasma treatment or deteriorating due to arc discharge. Therefore, there is no risk that the insulating member 14 itself will be corroded or that impure gas will be generated within the vacuum container 1. As the insulating member 14, in addition to the glass lining, ceramics, fine ceramics, or heat-resistant, ultraviolet-resistant, or electron beam-resistant plastics may be used alone or in combination.

FIG. 4 shows a second embodiment of the invention.

In this embodiment, the cylindrical portion 2c of the drum electrode 2
is fixed to the rotating shaft 17 via a flat insulating member 40 with a hole in the center. This drum electrode 2 has an insulating member 41 fixed to its side surface 2e with bolts 42 as shown in FIG.
3 is fitted, and the side surface portion 2e becomes the insulating member 4.
It is covered with 1. The internal space 2d of the drum electrode 2 includes an insulating member 40, rubber rings 30, 31
It is completely sealed off from the internal space 1a of the vacuum container 1 and the atmosphere.

In FIG. 4, the rotating shaft 17 has an insertion hole 17.
g is provided, and a pipe 17 is inserted into this insertion hole 17g.
cooling passages 44 and 45 are provided inside and outside the pipe 17h as an outgoing path and a returning path through which a cooling medium flows. A connecting pipe (piping material) 46 is made of an insulator such as rubber, and connects the cooling passages 44 and 45 to the water jacket 2.
It is connected to a.

Further, as shown in FIG. 6, the numerous rod electrodes 3 ₁ , 3 ₂ , ..., 3 _o facing the drum electrode 2 (first discharge electrode) have a pair of conductive electrodes at both ends 3a. It is fixed to holding members 22A, 22B by welding, and these holding members 22A, 22B are supported by vacuum vessel 1 via insulator 23. These many rod electrodes 3 ₁ , 3 ₂ , ..., 3 _o and the holding members 22A, 2
2B constitutes a discharge electrode 3 (second discharge electrode) having a cage-shaped structure. This squirrel cage electrode 3
is a pair of holding members 22A, 22 so that the large number of rod electrodes 3 ₁ , 3 ₂ , . . . , 3 _o are arranged at approximately equal pitches.
The support members 22A and 22B are held in the vacuum vessel 1 by support brackets 56A and 56B via the insulator 23.

_{The distance} from the surface of the numerous rod electrodes _{3 1} , 3 ₂ , .
..., _3. Holding both the discharge electrodes so that the distance from the surface of the drum electrode 2 to the outer surface of the drum electrode 2 constituting the first discharge electrode is more than twice the distance reduces the discharge between the two discharge electrodes. It was found that it is possible to maintain a stable ratio and suppress the occurrence of localized light emission and instantaneous abnormal arc discharge. More preferably, the former is 5 times or more as compared to the latter.

The pitch of the rod electrodes 3 ₁ , 3 ₂ , ..., 3 _o is as follows:
It is more preferable that the pitches be evenly spaced, but when manufacturing costs are taken into consideration, in practice, the pitch variation for at least 50% of the large number of rod electrodes 3 ₁ to 3 _o is the same. It is allowed to be up to 3 times the average outer diameter of ₁ to 3 _o , preferably 1.3 times or less.

The holding members 22A, 22B which line up and fix the rod electrodes 3 ₁ , 3 ₂ , ..., 3 _o on the virtual cylindrical peripheral surface
Of course, it is also possible to divide it into two or more parts in the circumferential direction for reasons such as manufacturing, installation work, or maintenance work.

57A and 57B indicate a refrigerant supply port and a refrigerant discharge port, respectively. That is, the illustrated example shows a diagram in which the entire squirrel cage electrode 3 can be cooled with a cooling medium, and the rod electrodes 3 ₁ , 3 ₂ , ..., 3 _o are cooled by a cooling medium through which the rod electrodes 3 1 , 3 2 , ..., 3 o are cooled. In addition to providing a passage, the holding materials 22A, 22B are connected to the rod electrodes 3 ₁ ,
A refrigerant passage is provided for supplying and discharging refrigerant to 3 ₂ , . . . , 3 _o . The refrigerant supply/discharge ports 57A and 57B are connected to the vacuum vessel via a connecting pipe 58 made of an insulating material such as ceramics and having a length of 30 mm or more, as shown in FIG. It is connected to a refrigerant supply/drainage pipe 59 which is fixedly fixed through the refrigerant supply pipe 59, and the interposition of this insulating connecting pipe 58 prevents local light emission and instantaneous light emission around the supply/drainage pipe 59. The occurrence of abnormal arc discharge can be greatly reduced compared to the case where the connecting pipe is not interposed.

8 and 9 are diagrams showing details of the cage electrode 3 provided with cooling means, with FIG. 8 being a front view of the cage electrode, and FIG. 9 being a side view of the same. In that example, the refrigerant passage 22PA provided in one holding member 22A becomes a common inlet side cooling path for the refrigerant passages 3P ₁ to 3P _o provided in each of the rod electrodes 3 ₁ to 3 _o , and The refrigerant passage 22PB provided in the rod electrodes 3 ₁ to 3 _o serves as a common exit side cooling passage for the refrigerant passages 3P 1 to 3P _o of the rod electrodes 3 ₁ to 3 o.

In this second embodiment, the slip ring 25 shown in FIG. There is. The rest of the structure is the same as that of the first embodiment shown in FIG. 2, and the same or corresponding parts are given the same reference numerals and detailed explanation thereof will be omitted.

According to the second embodiment shown in FIGS. 4 to 9, since the side surface 2e of the drum electrode 2 is covered with the insulating member 41, unnecessary plasma discharge from the rod electrode 3 to the side surface 2e is prevented. Prevented. Further, since this prevents the temperature from rising in the vicinity of both side surfaces 2e of the drum electrode 2, the entire surface of the sheet-like material can be uniformly plasma-treated.

Furthermore, since the water jacket 2a communicates with the cooling passages 44 and 45 via the connecting pipe 46 made of an insulator, current flows from the drum electrode 2 to the rotating shaft 17 only through the cooling medium. , the rotating shaft 17 can be more strictly insulated from the drum electrode 2.

In addition, the sealed internal space 2d of the drum electrode 2
Since the drum electrode 2 is assembled in the atmosphere,
Since it is filled with air and not a plasma atmosphere, local light emission in this internal space 2d is reduced and plasma discharge is stabilized.

Furthermore, a plurality of rod electrodes 3 ₁ to 3 _o are held by the holding member 22
Since the electrodes 3 have a cage-like structure held together by A and 22B and are held in the vacuum container 1, the rod electrodes ₃₁ to _3o penetrate the vacuum container 1 and are cantilevered to the base externally. Compared to the general supported structure, the structure in which the rod electrodes 3 ₁ to 3 _o penetrate the vacuum vessel 1 is eliminated, and therefore local light emission and instantaneous abnormal arc discharge occur at the penetrating portion. This prevents the discharge from becoming unstable and enables continuous operation with a large amount of power.

In addition, since the structure is such that the plurality of rod electrodes 3 ₁ to 3 _o are held at both ends, the stress generated in the rod electrodes 3 ₁ to 3 _o is lower than the general structure of cantilever support described above. Since the diameter of the rod electrodes 3 ₁ to 3 _o can be reduced, the cost of manufacturing the device can be reduced accordingly. Furthermore, the pitch can be made smaller as the diameter of the rod electrodes 3 ₁ to 3 _o becomes smaller, and the number of rod electrodes 3 _{1 to} 3 _o can be dramatically increased _. It is possible to dramatically increase the input power from the

In addition, since the rod electrodes 3 ₁ to 3 _o are fixed at both ends with the holding members 22A and 22B, their positions do not change over time, so there is no possibility of quality unevenness in the product.

Furthermore, since the discharge electrode 3 having the cage-shaped structure has a structure in which the rod electrodes 3 ₁ to 3 _o constituting it are cooled using a refrigerant, the surface temperature of the rod electrodes 3 ₁ to 3 _o can be kept constant. Moreover, since it can be kept uniform, there is no local temperature rise, that is, the sheet-like material A to be processed is not heated abnormally and its quality is not altered, and low-temperature plasma processing can be performed stably for a long time. can be done.

FIG. 10 is a diagram showing a third embodiment of the present invention showing a modification of the squirrel cage electrode 3 equipped with a cooling means;
The support member 22A and each rod electrode 3 ₁ - corresponding to the figure
FIG. 3 is a partially enlarged sectional view of the joint portion with 3 _o . In this embodiment, the refrigerant passages 3 of the rod electrodes 3 ₁ to 3 _o
By disposing orifices 60 at P ₁ to 3P _o and appropriately setting the inner diameter of the orifices 60, the refrigerant sent from the holding member 22A to each of the rod-shaped electrodes 3 ₁ to 3 _o can be transferred to each of the rod electrodes 3 ₁ to 3 _o. This is an example in which the water is distributed and supplied more evenly. In this example, the orifice 60 is formed by a small hole provided in the holding member 22A.

11 and 12 are views of a fourth embodiment of the present invention showing still another modification of the squirrel cage electrode 3 equipped with a cooling means, and FIG. 11 is a front view of the squirrel cage electrode 3; FIG. 12 is a side view of the same. In this embodiment, the refrigerant passages 3P ₁ of each rod electrode 3 ₁ to 3 _o ,
The refrigerant passages 22PA and 22PB of the support members 22A and 22B are connected in series to connect 3P ₂ , ...3P _o in series.
are separated by a partition plate 61.

Furthermore, regarding the first embodiment shown in FIG.
As in the fifth embodiment shown in FIG. 3, the side surface 2e of the drum electrode 2 can be covered with an insulating member 41.
Moreover, the cooling structure shown in FIGS. 6 to 12 can also be adopted for the rod electrode 3 shown in FIG. 2.

FIG. 14 shows another plasma processing apparatus for sheet-shaped materials to which the present invention is applied. In this diagram,
9 and 10 are preliminary vacuum chambers, which are provided with a plurality of seal rolls (not shown) and a seal chamber (not shown) in the traveling direction of the sheet material A, and by vacuum suctioning the inside of the seal chamber, The pressure is reduced stepwise from atmospheric pressure to help maintain a predetermined pressure inside the vacuum container 1.

Although not shown, the unwinding machine 11 in FIG.
The present invention is also applicable to a device in which the winder 13 is disposed in the vacuum container 1 together with both electrodes 2 and 3.

[Effects of the Invention] As explained above, according to the present invention, it is possible to prevent waste of power in a plasma processing apparatus for sheet-like materials that consumes a large amount of power, and also to prevent abnormal arc discharge. The processing equipment has a processing capacity that can be used industrially and can be operated continuously.

[Brief explanation of the drawing]

FIG. 1 is a schematic configuration diagram showing a first embodiment of the present invention, FIG. 2 is a vertical cross-sectional view of FIG. 1, FIG. 3 is a vertical cross-sectional view of the right end clearly showing the rotation axis, and FIG. A vertical cross-sectional view showing the second embodiment, FIG. 5 is a cross-sectional view showing how to attach the insulating member covering the side surface of the drum electrode shown in FIG. 4, and FIG. 6 shows the second discharge electrode shown in FIG. 4. A perspective view, FIG. 7 is a partially cutaway side view showing the cooling medium supply/discharge structure to the second discharge electrode in FIG. 6, and FIGS. 8 and 9 are the cooling structure for the discharge electrode in FIG. 6. FIG. 10 is a longitudinal sectional view showing main parts of the third embodiment, and FIGS. 11 and 12 are a front view and side view showing the fourth embodiment, respectively. FIG. 13 is a longitudinal cross-sectional view showing a fifth embodiment in which an insulating member covering the side surface of the drum electrode shown in FIG. It is a schematic configuration diagram. DESCRIPTION OF SYMBOLS 1...Vacuum container, 1a...Internal space, 2...First discharge electrode (drum electrode), 2a...Cooling passage (water jacket), 2b...Side wall portion, 2c...Cylindrical portion, 2d... Internal space, 2e... Side part, 3...
Second discharge electrode, 3 ₁ - 3 _o ... Rod electrode, 6 ... Electric circuit, 7 ... Gas supply source (gas container), 14,
15, 40... Insulating member, 17... Rotating shaft, 17
a, 17b...Protruding part (penetration part, left end part), 20
...Conductor, 22A, 22B...Holding member, 23...
...Insulating material, 41... Insulating member, 44, 45... Cooling passage, 46... Connecting pipe, A... Sheet-like material.

Claims (1)

[Scope of Claims] 1. A drum-shaped first discharge electrode that is fixed to and rotates on a rotating shaft that penetrates the vacuum container and has a sheet-shaped material along its outer circumferential surface; A plasma processing apparatus for a sheet-like material in which a second discharge electrode is provided inside a vacuum container, wherein the vacuum container is electrically insulated from an electric circuit connecting both of the discharge electrodes, and a second discharge electrode is provided inside the vacuum container. An insulating member is interposed between the cylindrical portion of the drum in the electrode and the rotating shaft to electrically insulate the two,
and the positions of both discharge electrodes are such that the distance from the surface of the second discharge electrode to the inner surface of the vacuum vessel is greater than twice the distance from the surface of the second discharge electrode to the drum surface of the first discharge electrode. Low-temperature plasma processing equipment for sheet-like materials. 2. The low-temperature plasma processing apparatus for sheet-like materials according to claim 1, wherein a conductor connected to the first discharge electrode of the electric circuit is inserted into the rotating shaft. 3 Claims in which the first discharge electrode is provided with a cooling passage through which a cooling medium flows, and this cooling passage is connected in series to a cooling passage for a cooling medium that cools a conductor inserted into the rotating shaft. 2. The low-temperature plasma processing apparatus for sheet-like materials according to item 2. 4. The first discharge electrode is provided with a cooling passage through which a cooling medium flows, and this cooling passage is communicated with a cooling passage provided inside the rotating shaft via a connecting pipe made of an insulator. A low-temperature plasma processing apparatus for sheet-like materials according to scope 1. 5. Claim 1, wherein the first discharge electrode has an inner space of its drum connected to a gas supply source containing a plasma processing gas and is maintained at a pressure higher than the pressure of the inner space of the vacuum container. A low-temperature plasma processing apparatus for the sheet-like material described above. 6. The low-temperature plasma processing apparatus for sheet-like materials according to claim 1, wherein the first discharge electrode has an internal space of the drum connected to the atmosphere. 7. The low-temperature plasma processing apparatus for sheet-like materials according to claim 1, wherein the first discharge electrode has a drum whose internal space is sealed. 8. The low-temperature plasma processing apparatus for a sheet-like material according to claim 1, wherein the first discharge electrode has a side surface covered with an insulating member. 9 The second discharge electrode is such that the plurality of rod electrodes constituting it are located parallel to each other and lined up on the virtual cylindrical circumferential surface that covers the circumferential surface of the first drum-shaped electrode. The low-temperature plasma processing apparatus for sheet-like materials according to claim 1, which has a cage-like structure held by holding members at both ends and is held in a vacuum container via an insulating material. 10 The rod electrodes constituting the cage-shaped structure have a refrigerant passage therein through which a cooling medium passes, and the holding member connects each inlet side and each outlet side of the refrigerant passage of each rod electrode in parallel, respectively. A low-temperature plasma processing apparatus for sheet-like materials according to claim 9, comprising: 11 The rod electrodes constituting the cage-shaped structure have a refrigerant passage therein through which a cooling medium passes, and the holding member constitutes a cooling path that sequentially connects the refrigerant passages of the rod electrodes in series. A low-temperature plasma processing apparatus for sheet-like materials according to Scope 9. 12. The low-temperature plasma processing apparatus for sheet-shaped materials according to claim 10 or 11, wherein the holding member is provided with a refrigerant supply port and a refrigerant discharge port that communicate with the refrigerant passage of each rod electrode. 13. The sheet-like article according to claim 12, wherein the supply port and the discharge port are connected to a supply/drainage pipe provided through the vacuum container via a connecting pipe made of an insulating material. low temperature plasma processing equipment. 14 Position both discharge electrodes so that the distance from the surface of the second discharge electrode to the inner surface of the vacuum vessel is greater than five times the distance from the surface of the second discharge electrode to the drum surface of the first discharge electrode. A low-temperature plasma processing apparatus for sheet-like materials according to any one of claims 1 to 13, wherein the apparatus is arranged as follows.