JPH0443323B2 - - Google Patents
Info
- Publication number
- JPH0443323B2 JPH0443323B2 JP10952583A JP10952583A JPH0443323B2 JP H0443323 B2 JPH0443323 B2 JP H0443323B2 JP 10952583 A JP10952583 A JP 10952583A JP 10952583 A JP10952583 A JP 10952583A JP H0443323 B2 JPH0443323 B2 JP H0443323B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- metal thin
- ferromagnetic metal
- potential
- lubricant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、耐久性の優れた金属薄膜型の磁気記
録媒体の製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method for manufacturing a metal thin film type magnetic recording medium with excellent durability.
従来例の構成とその問題点
近年、磁気記録の高密度化の要望の高まりと共
に、強磁性金属薄膜を磁気記録層とする磁気記録
媒体の開発が各方面で進められている。Conventional Structures and Their Problems In recent years, with the increasing demand for higher density magnetic recording, development of magnetic recording media in which a ferromagnetic metal thin film is used as a magnetic recording layer is progressing in various fields.
磁気記録媒体の基本構成は第1図に断面図で示
されるように、支持体1上に真空蒸着法、スパツ
タリング法等の薄膜形成手段により形成された強
磁性金属薄膜2と、強磁性金属薄膜2の耐摩耗性
向上等の目的で配される潤滑剤塗布層3とから成
り、必要に応じて、図示していないが、非磁性薄
膜、軟磁性薄膜、支持体1の強磁性金属薄膜2を
有する面と反対側の面に配される塗布層等が構成
要素として付加されるものである。 The basic structure of the magnetic recording medium, as shown in the cross-sectional view in FIG. 2, and a lubricant coating layer 3 disposed for the purpose of improving the wear resistance of the support 1. If necessary, although not shown, a non-magnetic thin film, a soft magnetic thin film, and a ferromagnetic metal thin film 2 of the support 1 are coated. A coating layer or the like disposed on the surface opposite to the surface having the surface is added as a component.
しかし、かかる磁気記録媒体は、用いられる強
磁性金属薄膜2の厚みが、0.3μm以下と薄いため
支持体1の表面粗さが、そのまま強磁性金属薄膜
2の表面粗さになるため極めて平滑な支持体1を
用いなくてはならない。 However, in such a magnetic recording medium, since the thickness of the ferromagnetic metal thin film 2 used is as thin as 0.3 μm or less, the surface roughness of the support 1 becomes the surface roughness of the ferromagnetic metal thin film 2, resulting in an extremely smooth surface. Support 1 must be used.
従つて、第1図の構成の磁気記録媒体は、回転
シリンダ、回転ヘツド等を構成要素とするヘリカ
ル走査型のビテオテープレコーダ(以下V.T.Rと
いう)に於て利用する時、大きな摩擦を受けるた
めに潤滑剤を選んでも、V.T.Rでのくり返し使用
により走査が不安定になり再生信号が時間方向で
ゆらぐ、いわゆるジツターガ発生し、再生画面が
ゆれたり曲つたりする不都合があつた。 Therefore, when the magnetic recording medium having the structure shown in Fig. 1 is used in a helical scanning type video tape recorder (hereinafter referred to as VTR), which has components such as a rotating cylinder and a rotating head, it is subject to large friction. Even if the lubricant was selected, repeated use in a VTR caused scanning to become unstable and the playback signal to fluctuate in the time direction, causing so-called jitter, which caused the playback screen to shake or distort.
特に前記現象は、磁気記録媒体の長手位置によ
り強く現れる個所と目視観察ではジツターを無視
できる部分のあることを追求した結果、塗布機を
用いて潤滑剤を塗布する時、強磁性金属薄膜の表
面が電位を有し且つその電位が長手位置で変化す
る現象と強い相関があることを見出した。 In particular, as a result of our efforts to find out that there are parts where the above phenomenon appears more strongly in the longitudinal position of the magnetic recording medium and parts where jitter can be ignored by visual observation, we found that when applying lubricant using a coating machine, the surface of the ferromagnetic metal thin film It has been found that there is a strong correlation with the phenomenon that has a potential and that the potential changes with the longitudinal position.
発明の目的
本発明は耐久性の優れた金属薄膜型の磁気記録
媒体の製造方法を提供することを目的とする。OBJECTS OF THE INVENTION An object of the present invention is to provide a method for manufacturing a metal thin film type magnetic recording medium with excellent durability.
発明の構成
本発明は支持体上に形成した強磁性金属薄膜上
に潤滑剤溶液を塗布する際に、前記強磁性金属薄
膜を一定の電位に保持することを特徴とする。Structure of the Invention The present invention is characterized in that when a lubricant solution is applied onto a ferromagnetic metal thin film formed on a support, the ferromagnetic metal thin film is held at a constant potential.
強磁性金属薄膜を構成する結晶粒子は、10〓か
ら200〓ぐらいの範囲の酸化層を通常有している
ため潤滑剤を塗布する時、巻回された状態から巻
き戻される際大気中で剥離帯電し、表面に電荷が
残りその電荷量は一定していない。 The crystal grains that make up the ferromagnetic metal thin film usually have an oxidized layer in the range of 10 to 200, so they may peel off in the air when applying lubricant or when unwinding from the wound state. It is charged and a charge remains on the surface, and the amount of charge is not constant.
又磁気記録媒体は大量に生産されるものである
から連続して処理、加工される単位は5000m2程の
大きな面積になるため、濡滑剤溶液も循環圧送さ
れる。 Furthermore, since magnetic recording media are produced in large quantities, the unit in which they are continuously processed and processed has a large area of about 5000 m 2 , so the wetting and lubricant solution is also circulated and pumped.
その際潤滑剤溶液も配管、ポンプ、容器壁、コ
ーターヘツド等の構成機材と摩擦帯電する。 At this time, the lubricant solution is also charged by friction with the components such as piping, pumps, container walls, and coater heads.
塗布する相手側と塗布する潤滑剤溶液が両方共
同じ極性、同じ電位に帯電することは考えにくい
ことであり、このため強磁性金属薄膜と潤滑剤溶
液との間で塗布される短時間の間に反撥現象が生
じたり、放電現象が発生して潤滑剤層の形成が不
均一になる。 It is difficult to imagine that both the other side to be coated and the lubricant solution to be coated will be charged to the same polarity and the same potential, and for this reason, during the short period of time during which the ferromagnetic metal thin film and the lubricant solution are coated. A repulsion phenomenon occurs or a discharge phenomenon occurs, resulting in uneven formation of the lubricant layer.
本発明はかかる問題解決のために、塗布機の構
成を吟味して確実に潤滑剤溶液を塗布する際の強
磁性金属薄膜を接地することで均一も潤滑剤層を
得ることに成功したことに基ずくものである。 In order to solve this problem, the present invention has succeeded in obtaining a uniform lubricant layer by carefully examining the configuration of the coating machine and grounding the ferromagnetic metal thin film when applying the lubricant solution. It is based on
更に検討を加えた結果、接地によらなくても、
一定の電位に保持することで同様の効果が確認で
きた。 As a result of further consideration, even if it does not depend on grounding,
A similar effect was confirmed by holding the potential at a constant level.
実施例の説明
第2図は本発明の実施に用いた塗布機の要部構
成図である。DESCRIPTION OF EMBODIMENTS FIG. 2 is a block diagram of the main parts of a coating machine used in carrying out the present invention.
支持体1と強磁性金属薄膜2とから成る磁気記
録媒体用原板4(以下これを基板という)は矢印
A方向に移動する。 A magnetic recording medium original plate 4 (hereinafter referred to as a substrate) consisting of a support 1 and a ferromagnetic metal thin film 2 moves in the direction of arrow A.
基板4の強磁性金属薄膜2を有する側の表面に
アプリケータロール5により運ばれる潤滑剤溶液
6が塗布され、潤滑層8が形成される。 A lubricant solution 6 carried by an applicator roll 5 is applied to the surface of the substrate 4 on the side having the ferromagnetic metal thin film 2, thereby forming a lubricant layer 8.
この際均一な潤滑層8の厚みを得るために計量
が行われ、この場合は矢印B方向に回転するアプ
リケータロール5と反応のC方向に回転するメタ
リングロール7とのすき間で主として調節される
ものである。 At this time, metering is performed to obtain a uniform thickness of the lubricating layer 8, and in this case, it is mainly adjusted by the gap between the applicator roll 5, which rotates in the direction of arrow B, and the metering roll 7, which rotates in the direction of reaction C. It is something that
一定のウエツト厚みを有する潤滑層8を付与さ
れた基板4は図示しない乾燥炉に進み、その後巻
き取られる。 The substrate 4 coated with a lubricating layer 8 having a certain wet thickness is advanced to a drying oven (not shown) and then wound up.
アプリケータロール5により過剰に運ばれた潤
滑剤溶液6の一部はメタリングロール7に転写
し、ドクターブレード9によりかき落されて潤滑
剤溶液6の容器10に戻る。 A portion of the lubricant solution 6 carried in excess by the applicator roll 5 is transferred to the metering roll 7, scraped off by the doctor blade 9, and returned to the container 10 for the lubricant solution 6.
11は少なくとも表面が良導電性材料よりなる
電位規制ローラーであり、この電位規制ローラー
11はブラシ12により接地されている。 Reference numeral 11 denotes a potential regulating roller whose surface is made of a highly conductive material, and this potential regulating roller 11 is grounded by a brush 12 .
13はバツクアツプローラであり、バツクアツ
プローラ13は基板4を電位規制ローラー11と
ではさんで強磁性金属薄膜2の電位を一定に保持
させる。バツクアツプロール13は、ゴムで構成
するのが好ましい。 Reference numeral 13 denotes a back-up roller, and the back-up roller 13 holds the substrate 4 between the potential regulating roller 11 and the potential of the ferromagnetic metal thin film 2 at a constant level. The backup roll 13 is preferably made of rubber.
14はフリーローラーであり潤滑層8を形成す
る潤滑剤溶液6が乾燥するまでは基板4の潤滑層
8側と反対側の面に接するものである。 Reference numeral 14 denotes a free roller that contacts the surface of the substrate 4 on the side opposite to the lubricant layer 8 side until the lubricant solution 6 forming the lubricant layer 8 dries.
電位規制ローラ11は、潤滑剤溶液6が塗布さ
れる位置に近くなるように構成するのが好まし
い。 It is preferable that the potential regulating roller 11 is configured to be close to the position where the lubricant solution 6 is applied.
また、電位規制ローラー11の電位は接地によ
らず直流電源により−300V〜+300Vの範囲で調
整することができる。この範囲を越えると強磁性
金属薄膜2にピンホールが発生することがあるの
で好ましくない。 Further, the potential of the potential regulating roller 11 can be adjusted in the range of -300V to +300V by a DC power supply without being grounded. Exceeding this range is not preferable because pinholes may occur in the ferromagnetic metal thin film 2.
尚、本発明は、上記実施例に示す塗布機以外の
他の実布機においても同様に実施可能であり、ま
た潤滑剤溶液の種類、支持体の種類、強磁性金属
薄膜の種類について下記の具体的な実施例につい
ても全く同じ作用効果を有するものである。 It should be noted that the present invention can be carried out in the same way with other coating machines other than the coating machines shown in the above embodiments, and the types of lubricant solutions, types of supports, and types of ferromagnetic metal thin films are as follows. The specific embodiments also have exactly the same effects.
本発明の実施と比較例の実施に用いた塗布機の
寸法構成等は次の通りである。 The dimensions and configuration of the coating machine used in the implementation of the present invention and the comparative examples are as follows.
アプリケータロール5の径は20cm、アプリケー
タロール5と基板4が接する位置と径6cmの電位
規制ローラ11との距離は10cmで、比較例は電位
規制ロール11をはずし、その位置に静電電圧計
を近ずけて基板4の表面電位を計測した。 The diameter of the applicator roll 5 is 20 cm, and the distance between the position where the applicator roll 5 and the substrate 4 touch and the potential regulating roller 11 with a diameter of 6 cm is 10 cm. The surface potential of the substrate 4 was measured by bringing the substrate 4 close to the substrate.
以下さらに具体的な実施例を示す。 More specific examples will be shown below.
実施例 1
厚さ9μmのポリエチレンテレフタレートフイ
ルム(以下フイルムAと称す)を80℃の媒体を周
囲に循環させた円筒状キヤン(図示せず)の外周
に沿つてフイルムAを22m/minで移動させなが
ら二元蒸発源を用いて加熱電子ビームをそれぞれ
Coに対して70KW、Crに対して36KW投入するよ
うに制御してCrが19重量%になる強磁性金属薄
膜0.19μmの厚さで形成した基板を得た。Example 1 A polyethylene terephthalate film (hereinafter referred to as film A) with a thickness of 9 μm was moved at 22 m/min along the outer periphery of a cylindrical can (not shown) around which a medium at 80°C was circulated. while heating the electron beam using a dual evaporation source, respectively.
By controlling the input power to be 70 KW for Co and 36 KW for Cr, a substrate was obtained in which a ferromagnetic metal thin film with a Cr content of 19% by weight was formed with a thickness of 0.19 μm.
前記蒸着時の真空度は8×10-7TORRであり、得
られた強磁性金属薄膜は垂直磁化膜である。 The degree of vacuum during the vapor deposition was 8×10 −7 TORR , and the obtained ferromagnetic metal thin film was a perpendicularly magnetized film.
前記基板を大気中に取出し4時間後に潤滑剤溶
液を乾燥後の膜厚が夫々約50〓になるように前述
の塗布機を用いて基板に塗布した。 The substrate was taken out into the atmosphere, and 4 hours later, a lubricant solution was applied to the substrate using the above-mentioned coating machine so that the film thickness after drying was approximately 50 mm.
用いた潤滑剤溶液はn−ヘキサン中にミリスチ
ン酸を溶解させたもので塗布速度は60m/minで
ある。 The lubricant solution used was myristic acid dissolved in n-hexane, and the coating speed was 60 m/min.
5000m長の基板を5等分して潤滑剤溶液の塗布
を1000m単位で行つて、8mm幅の磁気テープにし
てV.T.Rでのくり返し走行を行つた。 A 5000 m long board was divided into 5 equal parts, a lubricant solution was applied in 1000 m increments, and the tape was made into 8 mm wide magnetic tape and repeatedly run on a VTR.
比較例として電位規制ロール11をはずし、そ
の位置で基板の表面電位を観測した。 As a comparative example, the potential regulating roll 11 was removed and the surface potential of the substrate was observed at that position.
その1例を第3図に示した。このように比較例
では表面電位が不安定であつたが実施例では接地
電位で、この両者の差はくり返し走行時のテープ
長手位置での場所による摩擦係数の増加現象とし
て現われ、その結果再生画面がゆらぐジツターと
して現れたもので、長手に100mを1巻として本
発明品50巻、比較例50巻を25℃、60%R.H.30℃、
85%R.H.の環境で調べたところ、それぞれ100回
のくり返し使用で本発明品はジツターがはつきり
画面で判別できるものが皆無であつたのに対して
比較例では25℃、60%R.H.で30%、30℃、85%
R.H.で60%のテープがジツター成分としてはつ
きり認められた。ジツター発生個所と表面電位の
関係を追求したところ第3図に示すように電位が
急変している所、すなわち、矢印D,E,Fのと
ころに対応していることが明らかとなつた。 An example is shown in Figure 3. In this way, the surface potential was unstable in the comparative example, but it was at the ground potential in the example, and the difference between the two appears as an increase in the coefficient of friction depending on the longitudinal position of the tape during repeated running, and as a result, the playback screen This appeared as a fluctuating jitter, and 50 rolls of the invention product and 50 rolls of the comparative example were rolled at 25°C, 60% RH 30°C, and each roll was 100 m long.
When tested in an environment of 85% RH, the products of the present invention had no jitter that could be discerned on the screen after repeated use 100 times, whereas the comparative example showed no jitter that could be discerned on the screen at 25°C and 60% RH. 30%, 30℃, 85%
At RH, 60% of the tape was clearly recognized as a jitter component. When we investigated the relationship between the locations where jitter occurred and the surface potential, it became clear that the potentials corresponded to the locations where the potential suddenly changed, that is, the locations indicated by arrows D, E, and F, as shown in FIG.
実施例 2
厚さ7μmの芳香族ポリアミドフイルム(以下
フイルムBと称す)を200℃の媒体を周囲に循環
させた円筒状キヤンを真空容器より絶縁保持し前
記円筒状キヤンの外周に沿つて前記フイルムBを
30m/minで移動させながら二元蒸発源を用い加
熱電子ビームをそれぞれCoに対して74KW、Cr
に対して40KW投入するように制御してCrが20重
量%となる強磁性金属薄膜である垂直磁化膜を
0.2μmの厚さで形成した基板を得た。Example 2 A cylindrical can in which a 7 μm thick aromatic polyamide film (hereinafter referred to as film B) was circulated around a medium at 200°C was held insulated from a vacuum container, and the film was placed along the outer periphery of the cylindrical can. B
While moving at 30 m/min, heating electron beams were applied to Co and Cr using a dual evaporation source at 74 KW and 74 KW, respectively, for Co and Cr.
The perpendicular magnetization film, which is a ferromagnetic metal thin film with a Cr content of 20% by weight, is controlled so that 40KW is applied to the
A substrate formed with a thickness of 0.2 μm was obtained.
蒸着に先立ち真空容器内部を2×10-7TORRまで
排気した後、酸素を導入して2×10-6TORRで前記
強磁性金属薄膜を形成したがその時に円筒状キヤ
ンには13.56MHzの高周波電圧を印加した。 Prior to vapor deposition, the inside of the vacuum chamber was evacuated to 2×10 -7 T ORR , and then oxygen was introduced to form the ferromagnetic metal thin film at 2×10 -6 T ORR . high frequency voltage was applied.
この高周波電圧は陽極電圧3.5KVで入射波550
〔W〕反射波50〔W〕の整合状態を保持した。 This high frequency voltage is anode voltage 3.5KV and incident wave 550
[W] The matching state of the reflected wave 50 [W] was maintained.
前記基板を大気中に取出し、1日後に潤滑剤溶
液を乾燥後の膜厚が約50〓になるように前述の塗
布機を用いて基板に塗布した。 The substrate was taken out into the atmosphere, and one day later, a lubricant solution was applied to the substrate using the above-mentioned coating machine so that the film thickness after drying was about 50 mm.
塗布に用いた潤滑剤溶液は潤滑剤であるステア
リン酸をメチルエチルケトンに溶解させたもので
ある。塗布速度は、75m/minで、比較例と共に
各々5000mの基板を夫々5等分して1000m単位で
塗布をくり返し、8mm幅の磁気テープにしてV.
T.Rでのくり返し走行を行つた。 The lubricant solution used for coating was prepared by dissolving stearic acid, a lubricant, in methyl ethyl ketone. The coating speed was 75 m/min, and each board of 5000 m in length was divided into 5 equal parts and the coating was repeated in 1000 m increments as in the comparative example, and the V.
I drove the TR repeatedly.
30℃、90%R.H.の環境で夫々のテープを100回
くり返し使用してジツターが画面にはつきり現れ
たテープ巻数は本発明品では皆無であつたが、比
較例では50巻中50%であつた。 When each tape was used 100 times in an environment of 30°C and 90% RH, there were no rolls of tape in which jitter appeared on the screen with the product of the present invention, but in 50% of the 50 rolls with the comparative example. It was hot.
別の角度から耐久性を調べるためにV.T.Rをス
チルフレームモードで操作し、30℃、90%RHで
各テープの任意位置を10個所選んで再生出力が
3dB下がるまでの時間は全テープで測定点500に
対して、本発明品は全て30分以上であつたのに対
し比較例では5分以下が34点、5分から10分が21
点、10分から30分が131点とバラツキがあり、か
つ耐久性も明らかに劣つていた。 To examine durability from a different angle, we operated the VTR in still frame mode, selected 10 arbitrary positions on each tape at 30°C and 90%RH, and measured the playback output.
The time it took for the tape to drop by 3 dB was over 30 minutes for all tapes with 500 measurement points, whereas for the comparative example, 34 points were under 5 minutes, and 21 points were between 5 and 10 minutes.
The points varied from 10 minutes to 30 minutes at 131 points, and the durability was clearly inferior.
発明の効果
以上述べたように本発明の方法によれば既存の
塗布機の一部に例えば電位規制ローラーを配する
だけで、従来耐久性に難のあつた金属薄膜型磁気
記録媒体の耐久性とりわけ、V.T.Rでのくり返し
使用による走行不安定現象によるジツター発生に
起因した画質の低下のない、スチルライフの長い
磁気テープを再現性良く大量に得ることができ
る。Effects of the Invention As described above, according to the method of the present invention, the durability of metal thin film magnetic recording media, which had conventionally had difficulty in durability, can be improved by simply arranging, for example, a potential regulating roller in a part of an existing coating machine. In particular, it is possible to obtain a large quantity of magnetic tape with good reproducibility and a long still life without deterioration in image quality caused by jitter caused by running instability caused by repeated use in a VTR.
第1図は磁気記録媒体の断面図、第2図は本発
明の実施に用いた塗布機の一例の要部構成図、第
3図は比較例の基板の塗布時の表面電位の長手変
化の一例を示す表面電位特性図である。
1……支持体、2……強磁性金属薄膜、3……
潤滑剤塗布層、4……基板、5……アプリケータ
ロール、6……潤滑剤溶液、11……電位規制ロ
ール。
Fig. 1 is a cross-sectional view of a magnetic recording medium, Fig. 2 is a diagram showing the main parts of an example of a coating machine used in the implementation of the present invention, and Fig. 3 is a longitudinal change in surface potential during coating on a substrate of a comparative example. FIG. 3 is a surface potential characteristic diagram showing an example. 1...Support, 2...Ferromagnetic metal thin film, 3...
Lubricant coating layer, 4...Substrate, 5...Applicator roll, 6...Lubricant solution, 11...Potential regulation roll.
Claims (1)
剤溶液を塗布する際に、前記強磁性金属薄膜を一
定電位に保持することを特徴とする磁気記録媒体
の製造方法。1. A method for producing a magnetic recording medium, which comprises maintaining the ferromagnetic metal thin film at a constant potential when applying a lubricant solution onto the ferromagnetic metal thin film formed on a support.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58109525A JPS601627A (en) | 1983-06-17 | 1983-06-17 | Method for manufacturing magnetic recording media |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58109525A JPS601627A (en) | 1983-06-17 | 1983-06-17 | Method for manufacturing magnetic recording media |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS601627A JPS601627A (en) | 1985-01-07 |
| JPH0443323B2 true JPH0443323B2 (en) | 1992-07-16 |
Family
ID=14512462
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58109525A Granted JPS601627A (en) | 1983-06-17 | 1983-06-17 | Method for manufacturing magnetic recording media |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS601627A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3340768B2 (en) * | 1992-09-17 | 2002-11-05 | ティーディーケイ株式会社 | Extrusion coating method and apparatus |
-
1983
- 1983-06-17 JP JP58109525A patent/JPS601627A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS601627A (en) | 1985-01-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0432536B1 (en) | Magnetic recording medium and method for making it | |
| JP2000248365A (en) | Thin film forming apparatus, thin film forming method, and guide guide roll | |
| US5589263A (en) | Magnetic recording medium having a ferromagnetic metal thin film, a dry etched layer, a carbonaceous film, and a lubricant film | |
| US5496595A (en) | Method for forming film by plasma CVD | |
| JPH0443323B2 (en) | ||
| JPH0466051B2 (en) | ||
| JPS61131227A (en) | Magnetic recording medium | |
| JPH08287458A (en) | Method and apparatus for manufacturing magnetic recording medium | |
| SU1732381A1 (en) | Method of packing material manufacture for tape cassette | |
| JPH09120529A (en) | Magnetic recording medium and method of manufacturing magnetic recording medium | |
| JP2979829B2 (en) | Manufacturing method of magnetic recording medium | |
| JPH07282449A (en) | Method of manufacturing magnetic recording medium | |
| JPH0334613B2 (en) | ||
| JPS59129944A (en) | Method and device for manufacturing magnetic recording medium | |
| JP2002269724A (en) | Magnetic recording media | |
| JPH05225564A (en) | Production of magnetic recording medium | |
| JPH07141651A (en) | Method for manufacturing metal thin film magnetic recording medium | |
| JPH02137125A (en) | Production of magnetic recording medium | |
| JPS60231908A (en) | Magnetic recording medium | |
| JPS61240437A (en) | Production of magnetic recording medium | |
| JPS6295738A (en) | Production of magnetic recording medium | |
| JPS6171447A (en) | Method for forming titanium nitride film of magnetic tape sliding member | |
| JPH06251364A (en) | Method of manufacturing magnetic recording medium | |
| JPH11120558A (en) | Metal thin-film magnetic recording medium and method of manufacturing the same | |
| JPH0469811A (en) | Magnetic recording medium |