JPH044369A - Valve - Google Patents

Abstract

PURPOSE:To provide a valve operating stably for a long period even at a high temperature by forming a diaphragm with a fluorine type heatproof rubber, and providing an adhesion preventive member which consists of an oxide or the like between the liquid contact surface and the diaphragm. CONSTITUTION:A main body 10 is formed of an oxide of quartz, sapphire and the like, or a fluorine type heatproof rubber, to bear in a high temparature operation, and valve piece 20 is also formed of a fluorine type heatproof rubber. And a diaphragm 30 is a means to form a sealing space S to communicate flowing-in passage 12 and a flowing-out passage 13 between the liquid contact surface 11 of the main body 10, and it is a unitary mould of a quality same as the valve piece 20. Furthermore, in order to prevent the direct contact of the liquid contact surface 11 and the diaphragm 30 in the sealing space S, an adhesion preventive member 40 which consists of an oxide of quartz, sapphire, or the like, or a fluorine type heatproof rubber is placed between them. As a result, the system can bear even at a high temperature 280 deg.C or higher, and a perfect cutoff and a secure feeding with no leakage can be secured stably for a long period. Furthermore, the mechanical strength and the reliability are also high, the handing is easy, and the automation is also realized.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a valve. In particular, the present invention is used for supplying and shutting off high-temperature scum, etc. in a semiconductor manufacturing process.

[Prior Art] For example, FIGS. 2 and 3 show valves used for supplying and shutting off various fluids in semiconductor manufacturing equipment using M-CVD and MO-CVD methods.

FIG. 2 shows the inflow channel 12. A bellows 39 (45 is a cover) that forms a sealed space S between the main body 10 having an outflow passage 13, the valve piece 20, and the liquid contact surface 11 of the main body 10, which communicates both the passages 12 and 13. , valve piece 20
Fig. 3 shows a so-called bellows seal type valve consisting of an operating rod 25 and a main body 10 (12, 13).
A chip 29 embedded in the liquid contact surface 11 of the main body 10,
A diaphragm 3 that forms a sealed space S between it and the liquid contact surface 11, and a part of which forms a valve piece (20).
A so-called diaphragm-type valve is shown, which is composed of a first valve and an operating rod 25.

Therefore, in either type, the inflow path 12 and the outflow path 13 can be connected and isolated via the sealed space S by moving the operating rod 25 up and down.

Incidentally, the main body 10 of the valve is generally made of metal such as 5US316, and the valve piece 20 is made of Teflon resin or the like.

However, for example, M-CVD equipment that uses mercury, etc., does not allow the use of metals, and in recent years, even higher corrosion resistance and heat resistance are required due to the relationship with vapor pressure. It has been pointed out that the MO-CVD method equipment for producing compounds tends to use oxygen at a higher temperature (for example, 250 to 280°C), so the valve with the above structure cannot withstand use. In addition, in addition to heat resistance, a diaphragm made of Teflon resin etc. has a diaphragm that is not only heat resistant, but also has good dust permeability, so it is especially important for MO-CV to avoid contamination with foreign dust.
Cannot be used with D method equipment.

On the other hand, it is conceivable to use heat-resistant rubber that is not permeable to scum, but in this case, thermal deformation occurs, and furthermore, it remains stuck to the liquid contact surface 11 of the main body 10 when the temperature is returned to room temperature. There is a problem with this.

For example, when using high-temperature scraps of 250°C or higher, the main body 10. In reality, a valve having a manual cock type structure as shown in FIG. 3 in which the valve piece 20 is made of quartz or heat-resistant glass is used.

[Problems to be Solved by the Invention] However, in the case of the above-mentioned manual cock type, since the main body 10 and the valve piece 20 have a tapered sliding structure, it lacks complete fluid isolation, and it is difficult to tighten the handle 26. There were problems such as leaks occurring due to changes in angle or changes over time, low mechanical strength and reliability, and difficulty in automatic operation during high-temperature use.

An object of the present invention is to provide a valve that can stably guarantee accurate supply of fluid and complete shutoff with no leakage over a long period of time even at high temperatures.

1. Means for Solving the Problem] The present invention provides a main body having an inflow path and an outflow path, a diaphragm that forms a sealed space between the liquid contact surface of the main body and which communicates the inflow path and the outflow path; In a valve formed of a valve piece that communicates with and blocks off an inlet or an outlet passage and a sealed space, at least the liquid-contacting surface of the main body is formed of an oxide such as quartz or sapphire or a fluorine-based heat-resistant rubber, and The diaphragm is made of fluorine-based heat-resistant rubber, and an anti-adhesive layer made of oxide such as quartz or sapphire or fluorine-based heat-resistant rubber is used to prevent direct contact between the tire plum and the liquid contact surface in the sealed space. It is characterized by the arrangement of members.

[Function = 5- In the present invention, at least the liquid contact surface of the main body is formed of an oxide such as quartz or fluorine-based heat-resistant rubber, and the tire plum is also formed of fluorine-based heat-resistant rubber that does not have dregs permeability. ,
For example, it can be used reliably even at high temperatures of 280°C or higher.

In addition, since an anti-adhesive member is interposed between the diaphragm and the liquid contact surface, the diaphragm can be prevented from sticking to the liquid contact surface and remain stable even when the usage environment changes from high temperature to room temperature. Opening and closing can be guaranteed. Furthermore, mixing of different fluids due to permeation of waste can be completely prevented, and automation of valve opening and closing can be easily achieved.

[Example] Hereinafter, one embodiment of the present invention will be described with reference to the drawings.

As shown in Fig. 1, this valve is roughly divided into main body 10.
．． Valve piece 20. Diaphragm 30 Adhesion prevention member 4
0, etc., and is designed to be used reliably and stably at high temperatures.

First, the main body 10 is made of an oxide such as quartz or sapphire, or a fluorine-based heat-resistant rubber that can withstand high-temperature use. In this embodiment, it is made of quartz.

However, in the present invention, it is sufficient that at least the liquid contact surface 11 is made of the above-mentioned quartz or the like, and this does not necessarily mean that the entire liquid contact surface 11 is made of quartz or the like.

For example, inflow rIIr12. This is the case, for example, when another material is used for that part to facilitate the connection between the outflow path 13 and the piping. Therefore, corrosion resistance due to conventional stainless steel construction,
It can eliminate oxidation resistance problems and can be used even at high temperatures of 280°C or higher.

Next, since the valve piece 20 also comes into contact with liquid, it is made of fluorine-based heat-resistant rubber. In this example 280°
Kalrez (manufactured by DuPont), which can withstand use even at C or higher, is used.

Further, this valve piece 20 is integrally provided with a locking portion 20a, and is attached to the operating rod 25 by fitting into a groove 25a. Therefore, if the operating rod 25 is moved up and down manually or automatically, the opening 13 of the outflow passage 13 can be moved up and down.
A can be opened and closed.

The diaphragm 30 also has a sealed space S that communicates the inflow path 12 and the outflow path 13 with the liquid contact surface 11 of the main body 10.
In this embodiment, the valve piece 2
It is an integrally molded product made of the same material as 0. This diaphragm 30 is fitted into the circular groove 15 of the main body 10, and the flange 55 and cover 50 are fastened and fixed with bolts 56. The protrusion 50a of the cover 50 forms a protective cover for the diaphragm 30. That is, the protective cover (
50a) serves to prevent the diaphragm 30, which has a considerable wall thickness, from being damaged during use at high temperatures. therefore,
The protective cover 50a (cover 50) is a fixed bonnet made of metal in order to have sufficient mechanical strength, and can withstand the large pressure applied to the diaphragm 30.

Here, the diaphragm type is used because if the bellows seal type shown in FIG.
This is based on the results of the applicant's experiments and research that at 280° C., severe abrasion, twisting, etc. occur, and there is no practical value.

Now, if a diaphragm type valve is used in which at least the liquid contact surface 11 of the main body 10 is made of quartz or the like, and the valve piece 20 and the diaphragm 30 are made of fluorine-based heat-resistant rubber, the valve can withstand use at high temperatures and is The disadvantages of the manual cock type shown in Figure 4, such as leakage and lack of reliability, can be eliminated. However, even this cannot be said to ensure stable use over a long period of time and adaptability to various usage conditions.

That is, since the diaphragm 30 is made of rubber even though it is heat resistant, it deforms at high temperatures, and when the temperature in the sealed space S returns to room temperature, it remains deformed or sticks to the liquid contact surface 11 with a large contact area. Sometimes. This can be easily understood by considering the general thermal bonding method for rubber-based materials.

Here, in the present invention, an anti-adhesion member 40 that can withstand high temperatures is interposed within the sealed space S between the liquid contact surface 11 and the diaphragm 30.

In this practical example, the anti-adhesion member 40 is made of quartz and has a washer shape, like the liquid contact surface 11.

However, the material itself may be sapphire, heat-resistant plastic, or the like.

Therefore, even if the diaphragm 30 deforms and hangs down toward the liquid contact surface 11 during high-temperature use, it does not directly contact the liquid contact surface 11 but merely contacts the anti-adhesion member 40.

Therefore, even if the temperature in the sealed space S drops to room temperature and the tire plum 30 and the anti-adhesion member 40 (top side in FIG. 1) stick together, the anti-adhesion member 40 (the first
Since the lower surface side in the figure) and the liquid contact surface 11 are always in a separable state, no inconvenience occurs in the opening/closing operation of the valve piece 20.

In addition, the valve piece 20 and the peripheral edge 1 of the opening 1.3a
The contact area with the valve piece 6 is very small, and the mechanical strength of the valve piece 20 itself is also greater than that of the diaphragm 30, so there is no possibility that they will stick together.

Furthermore, in this example, we focused on the restorability of heat-resistant rubber,
Temperature detection means 60 is provided.

-10~ In other words, when the heat-resistant rubber is brought back to room temperature from a high temperature, it remains deformed or remains stuck to other parts, but when the temperature is raised to, for example, 50 to 60°C, it returns to its original shape. It has the property of being restored. In the case of this example (the above-mentioned Power Luretz), it deforms when the operating temperature is 150°C or higher, and if it sticks to quartz when the temperature drops to room temperature, the shape is restored by raising the temperature to 57°C, and the quartz (adhesive preventive It has been confirmed that the material peels off from the member 40).

Therefore, in this embodiment, in order to ensure reliable operation of the - layer and expand flexibility, the operating rod 25 must be operated unless the temperature inside the valve, especially the sealed space S, exceeds a predetermined temperature (for example, 57°C above). The temperature detection means 60 is provided to introduce an interlock that does not permit operation. Although the form and type of the means 60 are not limited, in this embodiment, it is formed from a metal cover 50 and a cartridge heater embedded in the flange 55.

According to this embodiment, the liquid contact surface 1 of the main body 10
The diaphragm 30 is made of fluorine-based heat-resistant rubber, and both 1.1. ．． Since the anti-adhesive member 40 made of oxide (quartz) is interposed between the 30°C and 30°C, it can withstand high temperatures of 280°C or more, ensuring complete shutoff without leaks and reliable supply over a long period of time. It also has high mechanical strength and reliability, is easy to handle, and can be operated automatically.

In addition, since the valve piece 20 and the diaphragm 30 are integrally molded, it is possible to eliminate the need for an O-ring penetrating structure between the diaphragm 30 and the operating rod 25, and from this point of view, it is possible to completely prevent leaks and further improve mechanical stability. You can improve.

Furthermore, the anti-adhesion member 40 is in the shape of a washer and only needs to be inserted into the sealed space S, so it is easy to assemble at low cost.

Further, above the diaphragm 30, a metal cover 2 is provided.
5 (25a), so the diaphragm 3
It can prevent damage due to thermal distortion and ensure long-term stable operation.

Further, since the cover 50 and the flange 55 are provided with temperature detection means 60 for interlocking, the valve is removed after the adhesion between the tire plum 30 and the anti-adhesion member 40 as well as the adhesion between other parts is removed. It is possible to easily create a foolproof plan for opening and closing operations.

[Effects of the Invention] According to the present invention, at least the liquid-contacting surface of the main body is made of an oxide or the like, the diaphragm is made of fluorine-based heat-resistant rubber, and the gap between the liquid-contacting surface and the diaphragm is made of an oxide or the like. Since it is configured with an anti-adhesive member,
It is possible to provide a highly reliable and easy-to-handle valve that can stably operate for a long period of time with accurate supply and complete shutoff without leakage even at high temperatures of 250 to 280°C or higher.

[Brief explanation of the drawing]

FIG. 1 is a vertical sectional view showing one embodiment of the present invention, and FIG.
Figures 4 to 4 are vertical sectional views of conventional valves, with Figure 2 showing a bellows seal type and Figure 3 showing a diaphragm type.
FIG. 4 shows a manual cock type. DESCRIPTION OF SYMBOLS 10... Main body, 11... Liquid contact surface, 12... Inflow path, 13... Outflow path, 20... Valve piece, 25... Operating rod, 30... Diaphragm, 40... ...Adhesion prevention member, 50...Cover, 55...Flange, 60...Temperature detection means, S...Sealed space 6 Applicant: Daiwa Semiconductor Equipment Co., Ltd.

Claims (1)

[Claims] (1) A main body having an inflow path and an outflow path, a diaphragm that forms a sealed space that communicates the inflow path and the outflow path between the liquid contact surface of the main body, and a diaphragm that forms a sealed space that communicates the inflow path or the outflow path with the sealed space. In the valve formed to include a valve piece that communicates and shuts off communication, at least the liquid-contacting surface of the main body is formed of an oxide such as quartz or sapphire or a fluorine-based heat-resistant rubber, and the diaphragm is formed of a fluorine-based heat-resistant rubber. , A valve characterized in that an anti-stick member made of an oxide such as quartz, sapphire, or fluorine-based heat-resistant rubber is disposed in the sealed space to prevent direct contact between the diaphragm and the liquid contact surface. .