JPH0443764Y2 - - Google Patents

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Publication number
JPH0443764Y2
JPH0443764Y2 JP1984056121U JP5612184U JPH0443764Y2 JP H0443764 Y2 JPH0443764 Y2 JP H0443764Y2 JP 1984056121 U JP1984056121 U JP 1984056121U JP 5612184 U JP5612184 U JP 5612184U JP H0443764 Y2 JPH0443764 Y2 JP H0443764Y2
Authority
JP
Japan
Prior art keywords
centering bar
spherical
battery
coil spring
touch sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984056121U
Other languages
Japanese (ja)
Other versions
JPS60168009U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5612184U priority Critical patent/JPS60168009U/en
Publication of JPS60168009U publication Critical patent/JPS60168009U/en
Application granted granted Critical
Publication of JPH0443764Y2 publication Critical patent/JPH0443764Y2/ja
Granted legal-status Critical Current

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  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Description

【考案の詳細な説明】 (産業上の利用分野) 本考案は種々の工作機械に使用される計測用タ
ツチセンサーに関する。
[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to a measuring touch sensor used in various machine tools.

(技術背景) 従来、例えばNC(数値制御)工作機械等の主
軸に同軸状に計測用タツチセンサーを装着し、
NC加工物テーブルを移動させながら該テーブル
に固定された加工物の表面に上記タツチセンサー
の先端部を接触させ、この接触を電気的手段によ
り検出して、例えば工作機械の主軸の軸心と加工
体の基準面部間距離とか、加工体の各部位間の間
隔等の寸法計測を行うことが知られている。
(Technical background) Conventionally, for example, a touch sensor for measurement was attached coaxially to the main axis of an NC (numerical control) machine tool, etc.
While moving the NC workpiece table, the tip of the touch sensor is brought into contact with the surface of the workpiece fixed on the table, and this contact is detected by electrical means, for example, the center of the main shaft of the machine tool is connected to the surface of the workpiece. It is known to measure dimensions such as the distance between reference plane parts of a body and the intervals between parts of a workpiece.

上記従来技術の一例として、例えば本考案の出
願人が実願昭58−172545号(出願日昭和58年11月
7日)に開示した計測用タツチセンサーがある。
この先行技術を第1図及び第2図とともに説明す
る。
An example of the above-mentioned prior art is a measuring touch sensor disclosed in Utility Application No. 172545/1983 (filed on November 7, 1988) by the applicant of the present invention.
This prior art will be explained with reference to FIGS. 1 and 2.

第1図及び第2図において、11は加工物テー
ブル、12は支持アーム、13は工作機械本体部
であり、該加工物テーブル11に金属加工物Wを
載置して固定される。上記テーブル11は水平方
向(X、Y方向)及び垂直方向(Z方向)に移動
自在とされる。機械本体部13の工具主軸15
に、公知の工具取り付け方法と同様の方法でによ
り同軸状にタツチセンサー16が着脱可能とされ
る。
In FIGS. 1 and 2, 11 is a workpiece table, 12 is a support arm, and 13 is a machine tool main body. A metal workpiece W is placed and fixed on the workpiece table 11. The table 11 is movable in the horizontal direction (X, Y direction) and vertical direction (Z direction). Tool spindle 15 of machine main body 13
Additionally, the touch sensor 16 can be attached and detached coaxially using a method similar to a known tool attachment method.

タツチセンサー16は、第2図に示すように金
属製円筒形心出しバー17を有し、該バー17の
一端部に導電性中空柄部材18が形成される一
方、他端の先端部に球体を所定位置に支持する環
状座部24が形成されている。上記柄部材18の
内部に電池22が配置され、該柄部材18の内部
底面が電池22の一方の電極、例えば陰極と電気
接続される。心出しバー17の円筒状胴体部分の
内空部に導電性コイルばね25が装着され、該コ
イルばね25の一端部に、例えば鋼球等の導電性
球状測定子19が接続され、該コイルばね25の
ばね力により先端部の環状座部24の所定位置に
復帰可能に着座せしめられる一方、該コイルばね
25の他端が表示灯21を介して上記電池22の
もう一方の陽電極と機械的かつ電気的に接続され
る。上記表示灯21は、第2図に示すように心出
しバー17のほぼ中央の胴体部分の内空部に配置
され、該心出しバー17における表示灯21に対
応する位置に、透明絶縁樹脂材を用いて形成した
透視窓を兼ねた絶縁体部材20が接着剤により接
着して介設される。このようにして、心出しバー
17の先端部に着座せしめられた測定子19は、
ほぼ中間部に介在させられた絶縁体部材20によ
り電池22の陽電極から電気的に絶縁されるとと
もに該電池22、表示灯21、コイルばね25及
び球状測定子19が直列接続される。
The touch sensor 16 has a metal cylindrical centering bar 17, as shown in FIG. An annular seat 24 is formed to support the in place. A battery 22 is disposed inside the handle member 18, and the inner bottom surface of the handle member 18 is electrically connected to one electrode, for example, a cathode, of the battery 22. A conductive coil spring 25 is installed in the inner space of the cylindrical body portion of the centering bar 17, and a conductive spherical measuring element 19, such as a steel ball, is connected to one end of the coil spring 25. While the spring force of the coil spring 25 allows the coil spring 25 to be returned to a predetermined position on the annular seat 24 at the tip, the other end of the coil spring 25 is mechanically connected to the other positive electrode of the battery 22 via the indicator light 21. and electrically connected. As shown in FIG. 2, the indicator light 21 is disposed in the inner space of the body of the centering bar 17 at the center thereof, and a transparent insulating resin material is placed in the centering bar 17 at a position corresponding to the indicator light 21. An insulator member 20 which also serves as a see-through window and is formed by using an adhesive is interposed. In this way, the probe 19 seated on the tip of the centering bar 17 is
An insulator member 20 interposed approximately in the middle provides electrical insulation from the positive electrode of the battery 22, and the battery 22, indicator lamp 21, coil spring 25, and spherical probe 19 are connected in series.

上記タツチセンサー16は、第1図に示すよう
に工作機械、例えばボール盤の工具主軸15に同
軸状に取り付けられ、移動テーブル11に金属加
工物Wが固定される。次いで、該テーブル11を
移動させながら工具主軸15が下方に下げられ、
タツチセンサー16の先端の球状測定子19が加
工物Wの測定面部に接触すると、電池22の陽極
から表示灯21、コイルばね25、測定子19、
加工物W、工作機アーム部12、工作機本体部1
3、柄部材18及び上記電池22の陰極に至る電
気閉回路が形成される。このとき、表示灯21が
点灯し、窓部20を通して測定子19が形状寸法
測定対象の加工物Wと接触したことを表示すると
ともに図示しない演算装置により公知の方法で工
具主軸15に固定されたタツチセンサー16の位
置座標X,Y,Zが算定される。
As shown in FIG. 1, the touch sensor 16 is coaxially attached to a tool spindle 15 of a machine tool, for example, a drilling machine, and a metal workpiece W is fixed to the movable table 11. Next, the tool spindle 15 is lowered while moving the table 11,
When the spherical probe 19 at the tip of the touch sensor 16 comes into contact with the measurement surface of the workpiece W, the anode of the battery 22, the indicator light 21, the coil spring 25, the probe 19,
Workpiece W, machine tool arm 12, machine tool main body 1
3. An electrical closed circuit is formed between the handle member 18 and the cathode of the battery 22. At this time, the indicator light 21 lights up to indicate that the contact point 19 has come into contact with the workpiece W to be measured in shape and dimension through the window section 20, and is fixed to the tool spindle 15 by a known method by a calculation device (not shown). The position coordinates X, Y, Z of the touch sensor 16 are calculated.

上記先行技術によれば、測定子19を球体とす
るとともにコイルばね25のばね力により環状座
部24と密着するように測定子19を付勢するよ
うにしたから、測定時、たとえ加工物Wに対する
測定子19のオーバートラベルが生じてもコイル
ばね25により円滑に吸収することができ、タツ
チセンサー接触部の破損を有効に防止するととも
に適正な接触位置にて計測を行うことができ、高
精度をもつて計測を行うことができるという利点
を有する。
According to the above-mentioned prior art, since the measuring element 19 is made into a sphere and is biased by the spring force of the coil spring 25 so as to come into close contact with the annular seat part 24, when measuring, even if the workpiece W Even if overtravel of the contact point 19 occurs, it can be smoothly absorbed by the coil spring 25, effectively preventing damage to the contact part of the touch sensor, and making it possible to measure at the appropriate contact position, resulting in high precision. It has the advantage of being able to perform measurements using

しかしながら、上記形式のタツチセンサーにお
いては、心出しバー17のほぼ中央の胴体部分に
絶縁体部材20を介在させて形成したものである
から、計測対象の加工物Wと接触した時、横方向
に移動する加工物Wから心出しバー17に加えら
れた力が該バー17のほぼ中央部の絶縁体部材2
0の接着部分に対して大きな曲げモーメントとし
て作用し、該接着部分が破損し易いという重大な
欠点があつた。
However, in the touch sensor of the above type, since the centering bar 17 is formed with the insulator member 20 interposed in the body portion approximately in the center, when it comes into contact with the workpiece W to be measured, the touch sensor moves in the lateral direction. The force applied to the centering bar 17 from the moving workpiece W is applied to the insulator member 2 at approximately the center of the bar 17.
This has a serious drawback in that a large bending moment acts on the bonded portion of 0, and the bonded portion is easily damaged.

(本考案の目的) 本考案は、上記形式の計測用タツチセンサーに
おける問題点を解消するためになされたもので、
特別の補強部材を要することなく、計測時に作用
する曲げモーメントに対し十分な耐性を有するタ
ツチセンサーを提供することを目的とする。
(Purpose of the present invention) The present invention was made in order to solve the problems with the above-mentioned type of measurement touch sensor.
It is an object of the present invention to provide a touch sensor that has sufficient resistance to bending moments that act during measurement without requiring special reinforcing members.

(本考案の構成) 本考案は、上記目的を達成するため、心出しバ
ー部材の一端部又は先端部のいずれかに電気絶縁
体部材を介在せしめて上記球状測定子を上記電池
のもう一方の電極から電気的に絶縁せしめ、これ
により上記電池の一方の電極からコイルばね部
材、球状測定子、被測定物体、工作機械本体部及
び柄部材を経由して上記電池のもう一方の電極に
至る電気閉回路を形成して上記測定子と被測定物
体間の接触を検出可能としたものである。
(Structure of the present invention) In order to achieve the above object, the present invention interposes an electrical insulator member at either one end or the tip of the centering bar member, and connects the spherical probe to the other end of the battery. It is electrically insulated from the electrodes, so that electricity flows from one electrode of the battery to the other electrode of the battery via the coil spring member, the spherical probe, the object to be measured, the machine tool main body, and the handle member. A closed circuit is formed to enable detection of contact between the probe and the object to be measured.

以下、本考案を実施例を示す添付の第3図〜第
6図とともに説明する。
Hereinafter, the present invention will be explained with reference to the accompanying FIGS. 3 to 6 showing embodiments.

(第1実施例) 第3図及び第4図において、第1図及び第2図
の計測用タツチセンサーの構成部分と等価の部分
に同一符号を付して説明を省略する。
(First Embodiment) In FIGS. 3 and 4, parts equivalent to those of the measuring touch sensor shown in FIGS. 1 and 2 are given the same reference numerals, and their explanations will be omitted.

第3図において,心出しバー17の一端部の周
面に、例えば90°の角度間隔をもつて4つの窓穴
30が設けられる。心出しバー17内部における窓
穴30に対応した位置に信号灯21が配置される。
心出しバー17の基部外周面を被覆するように円
筒形透明絶縁体部材32が接着され、各窓穴30
は該透明絶縁体部材32で被覆して封止される。
円筒形透明絶縁体部材32の一端部は中空柄部材
18の一端部の閉口内に嵌挿され、該透明絶縁体
32と柄部材18は図示しない接着剤を介して接
着される。中空柄部材18に、例えば乾電池等を
用いた電源22が収容される。バー17のもう一
方の先端部に支持台座部24が設けられ、該支持
台座部24に球状測定子19が心出しバー17内
に張設されたコイルばね25を介して接触状態に
着座せしめられている。上記電源22、表示灯2
1、コイルばね25及び球状測定子19は電気的
に直列接続している。このようにして形成された
計測用タツチセンサーの周面部から、第4図に示
すように、透明絶縁体部材32及び窓穴30を透
かしてバー17内に配置された表示灯21の点滅
を観察することができる。
In FIG. 3, four window holes are formed on the circumferential surface of one end of the centering bar 17 at angular intervals of, for example, 90°.
30 will be provided. A signal light 21 is arranged at a position corresponding to the window hole 30 inside the centering bar 17.
A cylindrical transparent insulator member 32 is adhered to cover the outer peripheral surface of the base of the centering bar 17, and each window hole 30 is
is covered and sealed with the transparent insulator member 32.
One end of the cylindrical transparent insulator member 32 is fitted into a closed opening of one end of the hollow handle member 18, and the transparent insulator 32 and the handle member 18 are bonded together with an adhesive (not shown). A power source 22 using, for example, a dry battery is housed in the hollow handle member 18 . A support pedestal 24 is provided at the other end of the bar 17, and the spherical probe 19 is seated in contact with the support pedestal 24 via a coil spring 25 stretched within the centering bar 17. ing. Above power supply 22, indicator light 2
1. The coil spring 25 and the spherical probe 19 are electrically connected in series. As shown in FIG. 4, from the circumferential surface of the measurement touch sensor formed in this way, the blinking of the indicator light 21 arranged in the bar 17 is observed through the transparent insulator member 32 and the window hole 30. can do.

上記構成のタツチセンサーにおいては、計測に
あたり移動する加工物Wから心出しバー17の先
端部に横方向の力が作用しても、透明絶縁体部材
32は心出しバー17の基部と柄部材18間に挟
着しめたから、該透明絶縁体部材32部分には専
ら圧縮応力として作用し、曲げ応力は非常に小さ
なものとされる。したがつて、圧縮応力に対して
は金属材料と同等の強度を有する透明絶縁体部材
32の取り付け部分の破損を確実に回避すること
ができる。
In the touch sensor configured as described above, even if a lateral force is applied to the tip of the centering bar 17 from the moving workpiece W during measurement, the transparent insulator member 32 will not move the base of the centering bar 17 and the handle member 18. Since it is sandwiched between the transparent insulator members 32, only compressive stress acts on the transparent insulator member 32, and the bending stress is extremely small. Therefore, it is possible to reliably avoid damage to the attachment portion of the transparent insulator member 32, which has the same strength as a metal material against compressive stress.

(第2の実施例) 本考案における、電池22の一方の電極から測
定子19を電気的に浮かして接触時点検出用電気
回路を形成するための絶縁体は、第3図及び第4
図に示す第1実施例のように心出しバー17と柄
部材18に挟着するようにしたものに限らず、第
5図に示すように、心出しバー17の先端部に、
環状台座部42を一体的に形成した絶縁体部材4
0を接着して形成したものであつてもよい。
(Second Embodiment) In the present invention, an insulator for electrically floating the probe 19 from one electrode of the battery 22 to form an electric circuit for detecting the time of contact is shown in FIGS. 3 and 4.
The tip of the centering bar 17 is not limited to the one that is sandwiched between the centering bar 17 and the handle member 18 as in the first embodiment shown in the figure, but as shown in FIG.
Insulator member 4 integrally formed with annular pedestal portion 42
0 may be formed by adhering.

(第3の実施例) 第6図に示すように、球状測定子支持用の環状
座部42を有する支持台座部材43は鋼材を用い
て形成し、焼入れ処理したものである。支持台座
部材43と心出しバー17間に円筒状の絶縁体部
材44が介在せしめられる。絶縁体部材44は両
端部に内向きフランジ部44aと外向きフランジ
部44bを有する。該絶縁体部材44及び支持台
座部材43は嵌め合わせ方式又は例えば合成樹脂
接着剤を用いて接着される。
(Third Embodiment) As shown in FIG. 6, a support pedestal member 43 having an annular seat portion 42 for supporting a spherical probe is made of steel and hardened. A cylindrical insulator member 44 is interposed between the support base member 43 and the centering bar 17. The insulator member 44 has an inward flange portion 44a and an outward flange portion 44b at both ends. The insulator member 44 and the support pedestal member 43 are bonded together using a fitting method or, for example, using a synthetic resin adhesive.

上記構成の実施例において、絶縁体部材44は
心出しバー17のもう一方の先端部に介在せしめ
るようにしたから、上記第1実施例におけると同
様、計測時横方向に移動する加工物Wから当該タ
ツチセンサー16に加えられる力は専ら圧縮応力
として作用し、曲げ応力は非常に小さなものとさ
れ、該絶縁体44部分の破損を確実に回避するこ
とができる。また、支持台座部は非常に頑丈なも
のとすることができる。
In the embodiment with the above configuration, since the insulator member 44 is interposed at the other end of the centering bar 17, it is possible to prevent the workpiece W from moving laterally during measurement, as in the first embodiment. The force applied to the touch sensor 16 acts exclusively as compressive stress, and the bending stress is made very small, so that damage to the insulator 44 portion can be reliably avoided. Additionally, the support pedestal can be made very sturdy.

(考案の作用効果) 以上の説明から明らかなように、本考案の計測
用タツチセンサーは、計測対象の加工物Wとの接
触時点検出用電気回路を形成するため、導電性測
定子を電池の一方の電極から電気的に浮かすため
の絶縁体部材は心出しバーの一端部又は先端部の
いずれかに配置することにより、計測時横方向に
移動する加工物Wから加えられる力を専ら圧縮応
力として受けるようにして、特別の防護部材を要
することなく、絶縁体部分の破損を確実に回避で
きる、耐用性の優れたものとすることができる。
(Operations and Effects of the Invention) As is clear from the above explanation, the measurement touch sensor of the present invention connects the conductive probe to the battery in order to form an electric circuit for detecting the point of contact with the workpiece W to be measured. By placing the insulator member to be electrically suspended from one electrode at either one end or the tip of the centering bar, the force applied from the workpiece W moving laterally during measurement is exclusively compressive stress. As a result, damage to the insulator portion can be reliably avoided without requiring any special protective member, and the insulator portion can be made to have excellent durability.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は工作機械における工具主軸に従来形式
の計測用タツチセンサーを取り付けた工作機械の
概略側面図、第2図は第1図の従来形式の計測用
タツチセンサーの縦断面図、第3図は本考案の第
1実施例のタツチセンサーの縦断面図、第4図は
第3図のタツチセンサーの側面図、第5図は本考
案の第2実施例のタツチセンサーの縦断面図、第
6図は本考案の第3実施例のタツチセンサーの一
部切欠拡大断面図である。 11……加工物テーブル、13……工作機械本
体部、15……工具主軸、16……計測用タツチ
センサー、17……心出しバー、18……柄部
材、19……球状測定子、20……透明絶縁体部
分(窓部)、21……表示灯、22……電源(電
池)、24……環状座部、30……窓穴、32…
…透明絶縁体部材、40……絶縁体、43……支
持台座部材、44……絶縁体部材、W……加工物
(計測対象物)。
Figure 1 is a schematic side view of a machine tool with a conventional measuring touch sensor attached to the tool spindle, Figure 2 is a vertical cross-sectional view of the conventional measuring touch sensor shown in Figure 1, and Figure 3. 4 is a side view of the touch sensor of FIG. 3, and FIG. 5 is a longitudinal sectional view of the touch sensor of the second embodiment of the present invention. FIG. 6 is an enlarged partially cutaway sectional view of a touch sensor according to a third embodiment of the present invention. DESCRIPTION OF SYMBOLS 11... Workpiece table, 13... Machine tool body, 15... Tool spindle, 16... Touch sensor for measurement, 17... Centering bar, 18... Handle member, 19... Spherical measuring tip, 20 ...transparent insulator part (window), 21 ... indicator light, 22 ... power supply (battery), 24 ... annular seat, 30 ... window hole, 32 ...
... Transparent insulator member, 40 ... Insulator, 43 ... Support pedestal member, 44 ... Insulator member, W ... Workpiece (measurement object).

Claims (1)

【実用新案登録請求の範囲】 工作機械の工具主軸に同軸状に取り付け可能と
した導電性筒状心出しバー部材を有し、上記心出
しバー部材の一方の端部に導電性柄部材を取り付
けるとともに該柄部材内部に電池を配置する一
方、該心出しバーの他方の先端部に環状座部を形
成し、上記心出しバー部材の胴体部の内部に導電
性コイルばね部材を装着するとともに該コイルば
ね部材の一端部を導電性球状測定子と接続して該
ばね部材のばね力により該球状測定子を上記環状
座部の所定位置に復帰可能に着座せしめ、上記柄
部材内部の電池の一方の電極、コイルばね及び球
状測定子を電気的に直列接続して構成され、上記
心出しバー部材の先端部に装着された球状測定子
が工作機械の加工体移動台上に固定された被測定
物体表面と接触したことを電気的に検知して該被
測定物体の形状寸法を測定する、計測用タツチセ
ンサーにおいて、 上記心出しバー部材の一端部又は先端部のいず
れかに電気絶縁体部材を介在せしめて上記球状測
定子を上記電池のもう一方の電極から電気的に絶
縁せしめ、これにより上記電池の一方の電極から
コイルばね部材、球状測定子、被測定物体、工作
機械本体部及び柄部材を経由して上記電池のもう
一方の電極に至る電気閉回路を形成して上記測定
子と被測定物体間の接触を検出可能としたことを
特徴とする、計測用タツチセンサー。
[Claim for Utility Model Registration] A conductive cylindrical centering bar member that can be attached coaxially to the tool spindle of a machine tool, and a conductive handle member is attached to one end of the centering bar member. At the same time, a battery is disposed inside the handle member, an annular seat is formed at the other end of the centering bar, and a conductive coil spring member is installed inside the body of the centering bar member. One end of the coil spring member is connected to a conductive spherical measuring element, and the spherical measuring element is seated so as to be able to return to a predetermined position on the annular seat by the spring force of the spring member, and one of the batteries inside the handle member is connected to the conductive spherical measuring element. The object to be measured is constructed by electrically connecting an electrode, a coil spring, and a spherical gauge head in series, and the spherical gauge head attached to the tip of the centering bar member is fixed on a workpiece moving table of a machine tool. In a measurement touch sensor that electrically detects contact with the surface of an object and measures the shape and dimensions of the object to be measured, an electrical insulator member is attached to either one end or the tip of the centering bar member. The spherical gauge head is electrically insulated from the other electrode of the battery by intervening the coil spring member, the spherical gauge head, the object to be measured, the machine tool main body, and the handle member from one electrode of the battery. A measuring touch sensor, characterized in that an electrical closed circuit is formed that connects to the other electrode of the battery via the contact point, thereby making it possible to detect contact between the probe and the object to be measured.
JP5612184U 1984-04-16 1984-04-16 Touch sensor for measurement Granted JPS60168009U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5612184U JPS60168009U (en) 1984-04-16 1984-04-16 Touch sensor for measurement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5612184U JPS60168009U (en) 1984-04-16 1984-04-16 Touch sensor for measurement

Publications (2)

Publication Number Publication Date
JPS60168009U JPS60168009U (en) 1985-11-07
JPH0443764Y2 true JPH0443764Y2 (en) 1992-10-15

Family

ID=30579417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5612184U Granted JPS60168009U (en) 1984-04-16 1984-04-16 Touch sensor for measurement

Country Status (1)

Country Link
JP (1) JPS60168009U (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5179760B2 (en) * 2007-02-05 2013-04-10 株式会社ミツトヨ Coordinate measuring aid, coordinate measuring probe and coordinate measuring machine

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5842885Y2 (en) * 1978-08-30 1983-09-28 株式会社小松製作所 Sensor of hole pitch error measuring machine
JPS56148008A (en) * 1980-04-19 1981-11-17 Makino Milling Mach Co Ltd Geometry measuring apparatus for machine tool

Also Published As

Publication number Publication date
JPS60168009U (en) 1985-11-07

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