JPH0444612Y2 - - Google Patents

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Publication number
JPH0444612Y2
JPH0444612Y2 JP15957386U JP15957386U JPH0444612Y2 JP H0444612 Y2 JPH0444612 Y2 JP H0444612Y2 JP 15957386 U JP15957386 U JP 15957386U JP 15957386 U JP15957386 U JP 15957386U JP H0444612 Y2 JPH0444612 Y2 JP H0444612Y2
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JP
Japan
Prior art keywords
exhaust gas
vent
gas vent
valve
furnace
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Expired
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JP15957386U
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Japanese (ja)
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JPS6364766U (en
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Publication of JPS6364766U publication Critical patent/JPS6364766U/ja
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Description

【考案の詳細な説明】 (産業上の利用分野) 本考案は、ガス浸炭炉等の雰囲気熱処理炉に設
ける排ガスベントに関する。
[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to an exhaust gas vent provided in an atmospheric heat treatment furnace such as a gas carburizing furnace.

(従来の技術) 雰囲気熱処理炉(以下、単に熱処理炉という)
には、第3図に示すように、中間扉1を介して加
熱室2と焼入室3とを連接して有するものがあ
る。加熱室2は、電気ヒータを内蔵する炉壁4に
よつて画成されており、この中にはガスベント5
を通じて、プロパンまたはブタンから変成した
RXガスが供給されるようになつている。一方焼
入室3は、出入口扉6を有するケーシング7によ
つて区画されており、その内底部には焼入用油8
が収納されている。
(Conventional technology) Atmospheric heat treatment furnace (hereinafter simply referred to as heat treatment furnace)
As shown in FIG. 3, some have a heating chamber 2 and a quenching chamber 3 connected to each other via an intermediate door 1. The heating chamber 2 is defined by a furnace wall 4 that houses an electric heater, and includes a gas vent 5.
converted from propane or butane through
RX gas is now being supplied. On the other hand, the quenching chamber 3 is divided by a casing 7 having an entrance/exit door 6, and a quenching oil 8 at its inner bottom.
is stored.

かゝる熱処理炉において、加熱室2を一定の温
度およびガス雰囲気に保持しておき、先ず出入口
扉6を開いて焼入室3に被熱処理品を装入し、そ
の後出入口扉6を閉じ、次に中間扉1を開いて被
熱処理品を加熱室2に装入し、その後中間扉1を
閉じる。そして所定時間経過後、再び中間扉1を
開いて被熱処理品を焼入室3に引き出し、その
まゝ油8中に投入(焼入れ)する。この焼入れに
先立つて中間扉1を閉じておき、焼入完了後は、
出入口扉6を開いて被熱処理品を炉外ヘ搬出し、
これにて一連の雰囲気熱処理が完了する。
In such a heat treatment furnace, the heating chamber 2 is maintained at a constant temperature and gas atmosphere, the entrance/exit door 6 is first opened and the product to be heat treated is charged into the quenching chamber 3, then the entrance/exit door 6 is closed, and then the The intermediate door 1 is opened and the product to be heat treated is loaded into the heating chamber 2, and then the intermediate door 1 is closed. Then, after a predetermined period of time has elapsed, the intermediate door 1 is opened again, the product to be heat treated is pulled out into the quenching chamber 3, and then put into the oil 8 (quenched). Prior to this hardening, the intermediate door 1 is closed, and after the hardening is completed,
Open the entrance/exit door 6 and carry out the heat-treated product out of the furnace.
This completes a series of atmospheric heat treatments.

ところで、上記熱処理中、ガスベント5を通じ
てRXガスが流され続けており、その余剰のガス
が中間扉1の隙間から加熱室3に入り、さらに該
焼入室3に設けた後述する排ガスベントから大気
中へと排出されている。このため、いま中間扉1
を開いて加熱を終えた被熱処理品を焼入室3へ移
動させると、該焼入室3内のガスが急激に熱せら
れて急速に膨張し、この結果、炉内圧力が急速に
高まる。その後、中間扉1を閉じて被熱処理品を
油8中に焼入れすると、今度は温度低下によりガ
スが急速に収縮し、この結果、炉内圧力が急速に
低下する。
By the way, during the above heat treatment, the RX gas continues to flow through the gas vent 5, and the excess gas enters the heating chamber 3 through the gap in the intermediate door 1, and is further discharged into the atmosphere from the exhaust gas vent, which will be described later, provided in the quenching chamber 3. It is being discharged to. For this reason, now intermediate door 1
When the heated product is moved to the quenching chamber 3, the gas in the quenching chamber 3 is rapidly heated and expands rapidly, resulting in a rapid increase in pressure within the furnace. Thereafter, when the intermediate door 1 is closed and the product to be heat treated is quenched in the oil 8, the gas rapidly contracts due to the temperature drop, and as a result, the pressure in the furnace decreases rapidly.

すなわち、炉内圧力は、第6図に線Aで示すよ
うに、中間扉1の開放時点T1から急激に上昇し
た後、被熱処理品の油8中への投入時点T2から
逆に急激に低下し、そのまゝ低圧力P1に長時間
(回復時間ΔT)推移し、その後元の圧力P0に回
復する。しかしていま、前記低圧力P1が負圧に
なつて、しかも回復時間ΔTが長いような場合、
外気が炉内に侵入し、この外気が一定の割合とな
つた時点で爆発が起こり、きわめて危険となる。
従来、かゝる爆発を避けるべく、汎用の熱処理炉
においては、加熱室2に供給するガス流量を高目
に設定しなおかつ排ガスベント形状に工夫をなし
て、負圧にならないように対策をしていた。
That is, as shown by line A in FIG. 6, the pressure in the furnace increases rapidly from the time T1 when the intermediate door 1 is opened, and then conversely decreases rapidly from the time T2 when the product to be heat treated is put into the oil 8. However, the pressure remains at the low pressure P 1 for a long time (recovery time ΔT), and then returns to the original pressure P 0 . However, if the low pressure P1 becomes negative pressure and the recovery time ΔT is long,
Outside air enters the furnace, and when this outside air reaches a certain percentage, an explosion occurs, which is extremely dangerous.
Conventionally, in order to avoid such explosions, in general-purpose heat treatment furnaces, measures were taken to prevent negative pressure by setting the gas flow rate supplied to the heating chamber 2 at a high level and devising the shape of the exhaust gas vent. was.

しかるに最近、省資源化のため、炉内に供給す
るガス流量を削減したいとする要望が強く、この
ため、被熱処理品を加熱室2から焼入室3へ移動
させるに際し、焼入室3をN2ガス、Arガス等の
不活性ガスでパージする(一般にスーパーパージ
と呼ばれる)ことによつて、炉内圧力の回復時間
の短縮を図り、もつて爆発を防止する対策を採る
場合が多くなつてきている。
However, in recent years, there has been a strong desire to reduce the gas flow rate supplied to the furnace in order to save resources, and for this reason, when moving the product to be heat-treated from the heating chamber 2 to the quenching chamber 3, the quenching chamber 3 is replaced with N 2 Increasingly, measures are being taken to shorten the recovery time of furnace pressure and prevent explosions by purging with inert gas such as gas or Ar gas (generally called super purge). There is.

前出第3図に示した熱処理炉は、上記のごとき
対策を実現し得るように構成されたもので、同図
中、11は焼入室3に付設された排ガスベント
を、12は同じく焼入室に付設されたパージガス
用給気ベントをそれぞれ表している。排ガスベン
ト11は、途中から微小ガス排出用第1の排ガス
ベント13とパージガス排出用第2の排ガスベン
ト14とに分岐されている。第1の排ガスベント
13は、第4図にも示すように、その途中にオリ
フイス15を具備しており、一方第2の排ガスベ
ント14は、第5図にも示すように、その上端に
常時開口を閉塞するバタフライ弁16を具備して
いる。これによつて加熱室2で被熱処理品を加熱
中、余剰のRXガスは、第1の排ガスベント13
から外気へ排出される。しかして、被熱処理品を
加熱室2から焼入室3へ移動させた後、給気ベン
ト12を通じて焼入室3に不活性ガスをパージす
る。すると、炉内圧力Pは、第7図に線Bで示す
ように、一時的に大きく上昇するが、その後バタ
フライ弁16が開くことによつて急激に低下し、
一時的に負圧となるも、元の圧力P0に急速に回
復する。この結果、炉内に外気の侵入する機会が
ほとんどなくなり、爆発を未然に防止できる。
The heat treatment furnace shown in Fig. 3 above is constructed so as to be able to realize the above-mentioned measures. Each figure represents the purge gas supply air vent attached to the. The exhaust gas vent 11 is branched from the middle into a first exhaust gas vent 13 for discharging minute gases and a second exhaust gas vent 14 for discharging purge gas. The first exhaust gas vent 13 is equipped with an orifice 15 in the middle, as shown in FIG. It is equipped with a butterfly valve 16 that closes the opening. As a result, while the product to be heat-treated is being heated in the heating chamber 2, the excess RX gas is transferred to the first exhaust gas vent 13.
is discharged to the outside air. After the article to be heat-treated is moved from the heating chamber 2 to the quenching chamber 3, the quenching chamber 3 is purged with inert gas through the air supply vent 12. Then, as shown by line B in FIG. 7, the furnace pressure P increases temporarily, but then rapidly decreases as the butterfly valve 16 opens.
Although the pressure becomes negative temporarily, it quickly recovers to the original pressure P 0 . As a result, there is almost no opportunity for outside air to enter the furnace, and an explosion can be prevented.

すなわち、爆発を防止できる分、雰囲気ガスの
流量削減を達成できることとなる。因みにかゝる
防爆対策により、雰囲気ガスの流量を従来の1/10
〜1/20とする実績も報告されている。
In other words, the flow rate of the atmospheric gas can be reduced to the extent that explosion can be prevented. Incidentally, due to these explosion-proof measures, the flow rate of atmospheric gas has been reduced to 1/10 of the conventional level.
A track record of ~1/20 has also been reported.

なお、上記熱処理炉において、第2の排ガスベ
ント14にバタフライ弁16を設けたが、これに
代え、第2の排ガスベントにアクチユエータ付開
閉弁を介装し、炉内圧力に応じてこの開閉弁を開
くようにしたものもある。
In the above heat treatment furnace, the second exhaust gas vent 14 was provided with the butterfly valve 16, but instead of this, an on-off valve with an actuator was installed in the second exhaust gas vent, and this on-off valve was adjusted according to the pressure inside the furnace. Some are made to open.

(考案が解決しようとする問題点) しかしながら、上記ガスパージ機能を有する従
来の熱処理炉において、パージガス排出用第2の
排ガスベント14に付設したバタフライ弁16
は、閉弁時のシール性が悪いと、ここから雰囲気
ガスが洩れ出て炉内圧力を一定に維持するのが困
難となるため、かなりの重量物として形成されて
いる。このため、その動作圧力が高まつて、第7
図に示すように、炉内圧力のピーク圧力Pmaxが
増大してパージガスが加熱室2へ流動し、雰囲気
ガスに乱れを生じ、結果として、雰囲気ガスの組
成が変化して被熱処理品の品質を劣化させるとい
う問題があつた。
(Problems to be Solved by the Invention) However, in the conventional heat treatment furnace having the above gas purge function, the butterfly valve 16 attached to the second exhaust gas vent 14 for discharging purge gas
If the seal is poor when the valve is closed, atmospheric gas will leak out, making it difficult to maintain a constant pressure in the furnace, so it is made to be quite heavy. Therefore, its operating pressure increases and the seventh
As shown in the figure, the peak pressure Pmax of the furnace pressure increases and the purge gas flows into the heating chamber 2, causing turbulence in the atmospheric gas.As a result, the composition of the atmospheric gas changes and the quality of the heat-treated products is affected. There was a problem with deterioration.

またバタフライ弁に代えてアクチユエータ付開
閉弁を用いた場合にも、圧力差が小さい時チヤタ
リングするため、作動圧を高く設定せざるを得
ず、バタフライ弁におけると同様の問題を回避す
ることはできなかつた。
Also, when using an on-off valve with an actuator instead of a butterfly valve, it chatters when the pressure difference is small, so the operating pressure must be set high, and the same problem as with a butterfly valve cannot be avoided. Nakatsuta.

本考案は、上記従来の問題点を解決するために
なされたもので、被熱処理品の移動に際して起こ
り易い爆発を防止しつゝ微小ガス雰囲気の安定的
維持を図つた雰囲気熱処理炉用排ガスベントを提
供することを目的とする。
The present invention was developed to solve the above-mentioned conventional problems, and is an exhaust gas vent for an atmospheric heat treatment furnace that prevents explosions that are likely to occur when moving products to be heat treated and maintains a stable microgas atmosphere. The purpose is to provide.

(問題点を解決するための手段) このため、本考案は、パージガス排出用排ガス
ベントに開閉弁を介装し、この開閉弁をパージガ
ス供給用給気ベントに介装した開閉弁に同期開閉
可能に接続したことを要旨とする。
(Means for solving the problem) Therefore, in the present invention, an on-off valve is installed in the exhaust gas vent for discharging purge gas, and this on-off valve can be opened and closed synchronously with the on-off valve installed in the air supply vent for supplying purge gas. The gist is that it was connected to.

上記開閉弁は、その種類を問わないもので、レ
バー方式、パイロツト方式、電磁方式、電動機方
式等によつて操作される種々の弁を採用すること
ができる。また排ガスベントの開閉弁と給気ベン
トの開閉弁とを同期開閉させる手段も任意であ
り、例えばレバー方式の開閉弁に対しては、レバ
ー同志を機械的に連結して、これを一つアクチユ
エータに結び、あるいは電磁方式の開閉弁に対し
ては、これらを一つの電源回路に結ぶようにすれ
ば良い。
The above-mentioned on-off valve is of any type, and various valves operated by a lever method, a pilot method, an electromagnetic method, an electric motor method, etc. can be employed. In addition, the means for synchronously opening and closing the exhaust gas vent on-off valve and the air supply vent on-off valve is optional. For example, for a lever-type on-off valve, the levers are mechanically connected to each other, and these are connected to a single actuator. For electromagnetic on-off valves, these can be connected to one power supply circuit.

(作用) 上記構成の雰囲気熱処理炉用排ガスベントにお
いて、パージガス排出用排ガスベントとパージガ
ス供給用給気ベントとを同期して開閉することに
よつて、焼入室をスーパーパージした際、炉内圧
力が不必要に高まることがなくなり、雰囲気の安
定化を達成できる。
(Function) In the exhaust gas vent for an atmospheric heat treatment furnace configured as described above, by opening and closing the exhaust gas vent for discharging purge gas and the supply air vent for supplying purge gas in synchronization, when the quenching chamber is super-purged, the pressure inside the furnace is reduced. There is no need to increase the temperature unnecessarily, and the atmosphere can be stabilized.

(実施例) 以下、本考案の実施例を添付図面にもとづいて
説明する。
(Example) Hereinafter, an example of the present invention will be described based on the accompanying drawings.

第1図は、本考案にかゝる雰囲気熱処理炉用排
ガスベントを示したものである。なお、本熱処理
炉は第3図に示したものと基本構造は同じである
ので、同一部分に同一符号を付して全体構造は省
略する。本実施例の特徴とするところは、パージ
ガス排出用第2の排ガスベント14にボールコツ
ク21を介装すると共に、パージガス供給用給気
ベント12にもボールコツク22を介装し、これ
ら二つのボールコツク21,22のレバー21
a,22aを一つの連結杆23で連結し、この連
結杆23の一端をアクチユエータ24によつて駆
動される揺動アーム25に係合した点にある。
FIG. 1 shows an exhaust gas vent for an atmospheric heat treatment furnace according to the present invention. The basic structure of this heat treatment furnace is the same as that shown in FIG. 3, so the same parts are given the same reference numerals and the overall structure will be omitted. The feature of this embodiment is that a ball socket 21 is installed in the second exhaust gas vent 14 for discharging purge gas, and a ball socket 22 is also installed in the air supply vent 12 for supplying purge gas, and these two ball sockets 21, 22 levers 21
a, 22a are connected by one connecting rod 23, and one end of this connecting rod 23 is engaged with a swinging arm 25 driven by an actuator 24.

上記連結杆23と揺動アーム25との係合は、
揺動アーム25に設けた長孔25aに滑動自在に
嵌めたリンケージ26を介してなされている。こ
れにより、揺動アーム25の揺動に追従して二つ
のレバー21a,21bが一体に回動し、第2の
排ガスベント14の開閉弁21と給気ベント12
の開閉弁22とは同期して開弁位置あるいは閉弁
位置を採り得るようになる。なお、アクチユエー
タ24には前記開弁位置および閉弁位置を表示す
る目盛27が付されている。因みに図示の状態は
開弁状態を表わしている。
The engagement between the connecting rod 23 and the swinging arm 25 is as follows:
This is done via a linkage 26 that is slidably fitted into a long hole 25a provided in the swing arm 25. As a result, the two levers 21a and 21b rotate together following the swinging of the swinging arm 25, and the opening/closing valve 21 of the second exhaust gas vent 14 and the air supply vent 12 are rotated together.
The opening/closing valve 22 can take the open position or the closed position in synchronization with the opening/closing valve 22. Incidentally, the actuator 24 is provided with a scale 27 that indicates the valve opening position and the valve closing position. Incidentally, the illustrated state represents the valve open state.

かゝる構成により、加熱を終えた被熱処理品を
中間扉1を開けて加熱室2から焼入室3に移す
(第3図参照)。するとこれにタイミングを合せて
アクチユエータ24が作動し、揺動アーム25が
揺動して、その動きが連結杆23を介してレバー
21a,22aに伝達され、二つの開閉弁21,
22が同時に開く。これによつて焼入室3はパー
ジガスにてパージされ、同時に該ガスは第2の排
ガスベント12を通じて外気へ逃がされる。
With this configuration, the heated workpiece is transferred from the heating chamber 2 to the quenching chamber 3 by opening the intermediate door 1 (see FIG. 3). Then, the actuator 24 operates in synchronization with this, the swinging arm 25 swings, and the movement is transmitted to the levers 21a, 22a via the connecting rod 23, and the two on-off valves 21,
22 open at the same time. As a result, the quenching chamber 3 is purged with the purge gas, and at the same time, the gas is released to the outside air through the second exhaust gas vent 12.

この結果、炉内圧力は、第2図に線Cで示すよ
うに、一時的に上昇するが、直ちに低下し、さら
に一時的に負圧となつた後速やかに元の圧力P0
に回復する。しかして、そのピーク圧力Pmaxお
よびボトム圧力Pminはきわめて小さく、結果と
して加熱室2の雰囲気ガスに乱れが生じることが
なくなる。またもちろんのこと、回復時間がきわ
めて短かいため、外気の侵入する機会がなくな
り、爆発の発生も防止できる。また前記ピーク圧
力Pmaxの低さと回復の速さとにより、パージガ
スの使用量の削減も達成できる。因みに、炉容積
1110の熱処理炉について、従来のもの(第3
図)と比較した結果、ピーク圧力Pmaxは、従来
の250mmAqから30mmAqに低下し、また一回の処
理のパージガス使用量は、従来の400から100
に削減できた。なお回復時間に関しては両者共約
4秒で、差がなかつた。
As a result, the pressure in the furnace temporarily increases as shown by line C in Figure 2, but immediately decreases, and then temporarily becomes negative pressure, after which it quickly returns to the original pressure P 0
to recover. Therefore, the peak pressure Pmax and bottom pressure Pmin are extremely small, and as a result, the atmospheric gas in the heating chamber 2 is not disturbed. Of course, since the recovery time is extremely short, there is no opportunity for outside air to enter, and an explosion can be prevented. Further, due to the low peak pressure Pmax and the speed of recovery, it is possible to reduce the amount of purge gas used. By the way, the furnace volume
Regarding the heat treatment furnace of 1110, the conventional one (third
As a result of comparison with Figure), the peak pressure Pmax has decreased from 250 mmAq to 30 mmAq, and the amount of purge gas used for one treatment has decreased from 400 to 100 mmAq.
was able to be reduced to There was no difference in recovery time between the two cases, which was approximately 4 seconds.

(考案の効果) 以上、詳細に説明したように、本考案は、パー
ジガス排出用排ガスベントをパージガス供給用給
気ベントと同期して開閉できるようにしたので、
焼入室をスーパーパージした際、炉内圧力が不必
要に高まることがなくなつて、微小ガス雰囲気を
安定的に維持する効果を奏した。
(Effects of the invention) As explained above in detail, the present invention enables the exhaust gas vent for discharging purge gas to be opened and closed in synchronization with the air supply vent for supplying purge gas.
When the quenching chamber was super-purged, the pressure inside the furnace no longer increased unnecessarily, resulting in the effect of stably maintaining a microgas atmosphere.

また上記炉内圧力の低下と回復の速さとによ
り、パージガスの使用量の削減を達成する効果を
奏した。
Furthermore, due to the above-mentioned reduction in the pressure inside the furnace and speed of recovery, it was possible to reduce the amount of purge gas used.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、本考案にかゝる雰囲気熱処理炉用排
ガスベントを示す正面図、第2図は、本排ガスベ
ントを用いてスーパーパージしたときの炉内圧力
変化を示す線図、第3図は、従来の雰囲気熱処理
炉の構造を示す模式図、第4図は、微小ガス排出
用排ガスベントの構造を一部断面として示す正面
図、第5図は、従来のパージガス排出用排ガスベ
ントの構造を示す正面図、第6図は、スーパーパ
ージを行わない場合の炉内圧力変化を示す線図、
第7図は、従来のスーパーパージを行つたときの
炉内圧力変化を示す線図である。 1……中間扉、2……加熱室、3……焼入室、
12……給気ベント、13……第1の排ガスベン
ト、14……第2の排ガスベント、21……第2
の排ガスベント用開閉弁、22……給気ベント用
開閉弁、23……連結杆、24……アクチユエー
タ。
Fig. 1 is a front view showing the exhaust gas vent for an atmospheric heat treatment furnace according to the present invention, Fig. 2 is a diagram showing the change in pressure inside the furnace when super purge is performed using the exhaust gas vent of the present invention, and Fig. 3 4 is a schematic diagram showing the structure of a conventional atmospheric heat treatment furnace, FIG. 4 is a front view partially showing the structure of an exhaust gas vent for discharging minute gases, and FIG. 5 is a structure of a conventional exhaust gas vent for discharging purge gas. FIG. 6 is a diagram showing the change in pressure inside the furnace when super purge is not performed.
FIG. 7 is a diagram showing the change in pressure inside the furnace when conventional super purge is performed. 1... Intermediate door, 2... Heating chamber, 3... Quenching chamber,
12...Air supply vent, 13...First exhaust gas vent, 14...Second exhaust gas vent, 21...Second
22... an on-off valve for an exhaust gas vent, 23... a connecting rod, 24... an actuator.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 中間扉を介して雰囲気加熱室と焼入室とを連接
して成る雰囲気熱処理炉において、前記焼入室に
付設された微小ガス排出用第1の排ガスベントと
パージガス排出用第2の排ガスベントとのうち
の、前記第2の排ガスベントに開閉弁を介装し、
該開閉弁を前記焼入室に付設されたパージガス供
給用給気ベントに介装した開閉弁に同期開閉可能
に接続したことを特徴とする雰囲気熱処理炉用排
ガスベント。
In an atmospheric heat treatment furnace configured by connecting an atmosphere heating chamber and a quenching chamber via an intermediate door, a first exhaust gas vent for discharging minute gases and a second exhaust gas vent for discharging purge gas attached to the quenching chamber. An on-off valve is interposed in the second exhaust gas vent,
An exhaust gas vent for an atmospheric heat treatment furnace, characterized in that the on-off valve is connected to an on-off valve installed in an air supply vent for supplying purge gas attached to the quenching chamber so as to be able to open and close synchronously.
JP15957386U 1986-10-17 1986-10-17 Expired JPH0444612Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15957386U JPH0444612Y2 (en) 1986-10-17 1986-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15957386U JPH0444612Y2 (en) 1986-10-17 1986-10-17

Publications (2)

Publication Number Publication Date
JPS6364766U JPS6364766U (en) 1988-04-28
JPH0444612Y2 true JPH0444612Y2 (en) 1992-10-21

Family

ID=31084129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15957386U Expired JPH0444612Y2 (en) 1986-10-17 1986-10-17

Country Status (1)

Country Link
JP (1) JPH0444612Y2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4956417B2 (en) * 2005-02-03 2012-06-20 Dowaサーモテック株式会社 Atmospheric heat treatment apparatus and operation method thereof
US8262387B2 (en) 2005-02-03 2012-09-11 Dowa Thermotech Co., Ltd. Atmosphere heat treatment apparatus and method of operating the same
JP5330651B2 (en) * 2007-02-26 2013-10-30 Dowaサーモテック株式会社 Heat treatment method

Also Published As

Publication number Publication date
JPS6364766U (en) 1988-04-28

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