JPH0444902Y2 - - Google Patents

Description

[Detailed explanation of the invention] (Industrial application field) This invention can effectively absorb large horizontal vibrations caused by earthquakes, etc., and small horizontal vibrations from the floor. The present invention relates to a vibration energy absorbing device that can absorb vibrational energy.

(Prior art and its problems) The conventional vibration energy absorbing device A has an iron plate 8 and a rubber plate 9 between the upper and lower mounting members 1 and 2 as shown in FIG.
The rubber plates 9 were alternately laminated to absorb vibrations in the horizontal direction. In this case, since the internal friction of the rubber plate 9 is quite large, no excessive resonance phenomenon is observed as in the case of metal springs, but clear resonance points are still seen as shown in Fig. 3, and the vibration isolation effect is unsatisfactory. Ta. In FIG. 3, A is a vibration isolating device such as a metal spring, B is the vibration isolating device of the above-mentioned conventional example, and C is a vibration isolating device of the present invention.

(Purpose of the invention) The present invention was made in view of the shortcomings of the conventional example, and its purpose is to provide a vibration energy absorbing device that has an outstanding vibration isolation effect compared to conventional vibration isolating devices. There is something to do.

(Means for Solving the Problems) In order to achieve the above object, the present invention: A plurality of substrates 4 are arranged at predetermined intervals.

Viscoelastic bodies 5 and rubber bodies 6 made of low resilience rubber are alternately arranged between substrates 4, 4.

One surface of the viscoelastic body 5 is fixed to one substrate 4, and the other surface of the viscoelastic body 5 is brought into contact with the other substrate 4, and one side of the rubber body 6 is attached to the non-fixed side substrate 4 of the viscoelastic body 5. The other surface of the rubber body 6 is placed in contact with the fixed side substrate 4 of the viscoelastic body 5, and the viscoelastic body 5 and the rubber body 6 are arranged so as to be in contact with each other at their side surfaces. .

; adopts technical means.

(Function) For example, vibration energy absorption device A is installed under precision machinery such as semiconductor manufacturing equipment and precision measuring machines.
will be installed as appropriate.

The rubber body 6 carries the load of the precision machine 10, and the viscoelastic body 5 absorbs horizontal vibrations.

When horizontal vibration is transmitted from the floor, the viscoelastic body 5 repeatedly deforms according to the amplitude, but the viscoelastic body 5
Because it has low repulsion, it exhibits a much greater vibration absorption effect than conventional vibration absorption materials.

On the other hand, when vibrations are transmitted, the rubber body 6 deforms together with the viscoelastic body 5, but since it has an elastic force, it effectively works to restore the viscoelastic body 5 to its original shape.

As a result, the resonance phenomenon is almost eliminated, producing an extremely high vibration-proofing effect.

(Example) Hereinafter, embodiments of the present invention will be described in detail.

The vibration energy absorbing device A of the present invention is composed of a plurality of substrates 4, a viscoelastic body 5, and a rubber body 6. Among these, the uppermost layer board is an upper mounting member 1 that is attached to the bottom of the precision instrument 10, and the lowermost layer board is a lower mounting member 2 that is attached to the floor surface.
A ring-shaped viscoelastic body 5 made of low resilience rubber is attached to the lower surface of the upper mounting member 1, and a ring-shaped viscoelastic body 5 is also protruded from the lower surface of the substrate 4 constituting the intermediate layer. A ring-shaped rubber body 6 and a circular rubber body 6 are formed in the center of the ring-shaped rubber body 6 on the upper surface of the substrate 4, and a fitting recess 7 is formed between the rubber bodies 6 and 6. , the upper layer viscoelastic body 5 fits into this fitting recess 7. The side surfaces of the fitted viscoelastic body 5 are in contact with the side surfaces of the rubber bodies 6, 6. This portion constitutes one set of vibration energy absorbing members 3.
Furthermore, a ring-shaped rubber body 6 is attached to the upper surface of the lower attachment member 2. The laminated state of the substrate 4 is not limited to the embodiment shown in the figure, and the viscoelastic body 5 and the rubber body 6 are placed between the two upper and lower substrates 4, 4 (i.e., the upper mounting member 1 and the lower mounting member 2). It is also possible to simply arrange the layers alternately. As the number of laminated layers increases, the vibration energy absorption effect increases. Further, in the illustrated embodiment, the viscoelastic body 5 and the rubber body 6 are arranged concentrically so that they fit into each other, but of course they are not limited to this, and they can also be arranged in a polka dot pattern and fit into each other. You can make it match. Further, a gap may be provided at the fitting portion of both 5 and 6, and in short, any shape in which both 5 and 6 are arranged alternately is included. The viscoelastic body 5 is made of, for example, a low resilience rubber such as norbornene polymer. In other words, it is a high molecular weight dendritic powder with a molecular weight of 3 million or more, has very good compatibility with naphthenic or aromatic oils, does not flow even when a large amount of malleable oil is added, and maintains rubber-like elasticity. By adjusting the type and amount of added oil, it is possible to freely change the polymer from a dendritic polymer to an oil-extended polymer with a glass transition temperature of -30°C or less.

Therefore, for example, a laminated vibration energy absorbing device A is appropriately installed under a class 10 precision instrument, but in the case of only one layer, an upper mounting member 1 with a viscoelastic body 5 provided on the lower surface is used. , rubber body 6 on the top surface,
6 is attached to the lower mounting member 2, and the viscoelastic body 5 is fitted into the fitting recess 7 between the rubber bodies 6 and 6 to be used integrally. In the case of multiple layers, a vibration energy absorbing member 3 is inserted between the upper and lower mounting members 1 and 2. The number of layers is 3 vibration energy absorbing members.
It can be selected as appropriate by increasing or decreasing the number of . The fitted viscoelastic body 5 and rubber body 6 are in contact with each other at their side surfaces. In the laminated vibration energy absorbing device A arranged in this way, the rubber body 6 carries the load of the precision machine 10, and the viscoelastic body 5 takes charge of absorbing horizontal vibrations. That is, while one surface of the rubber body 6 is fixed to the non-fixed side substrate 4 of the viscoelastic body 5, the other surface of the rubber body 6 is in contact with the fixed side substrate 4 of the viscoelastic body 5. Therefore, when a large horizontal vibration is caused by an earthquake, and a small one is an extremely weak horizontal vibration that is transmitted through the floor, only the bottom surface of the horizontal vibration from the floor will stick to the underlying substrate 4. From the rubber body 6 which is
At this time, since the viscoelastic body 5 has low repulsion, it absorbs most of the vibration energy in the horizontal direction, and exhibits a large vibration absorption effect.
On the other hand, although the rubber bodies 6 have a vibration absorption effect due to large internal friction, they also have an elastic force and therefore exhibit a certain degree of resonance phenomenon, but the viscoelastic bodies 5 are arranged alternately and are in contact with each other. Therefore, most of the resonance of the rubber body 6 is absorbed by the viscoelastic body 5, and as a result, the resonance phenomenon is almost eliminated and an extremely high vibration damping effect is produced. The rubber body 6 deforms together with the viscoelastic body 5 when vibrations are transmitted, but since it has an elastic force, it effectively works to restore the deformed viscoelastic body 5 to its original shape.

(Effects) As described above, the present invention has a plurality of substrates arranged at predetermined intervals, and viscoelastic bodies made of low-resilience rubber and rubber bodies are alternately arranged between the substrates. One side of the rubber body is fixed to one substrate, and the other side of the viscoelastic body is in contact with the other substrate, and one side of the rubber body is fixed to the non-fixed side substrate of the viscoelastic body, and the viscoelastic body The other side of the rubber body is placed in contact with the fixed side substrate of the rubber body, and the viscoelastic body and the rubber body are arranged so that they are in contact with each other on that side. When a vibration energy absorption device is appropriately installed under a precision machine that dislikes minute horizontal vibrations, the viscoelastic body deforms according to the amplitude, from large horizontal vibrations such as those caused by earthquakes to small horizontal vibrations transmitted through the floor. is repeated to absorb most of this vibration energy. On the other hand, when vibrations are transmitted to the rubber body, it deforms together with the viscoelastic body, but because it has elasticity, it effectively works to restore the viscoelastic body to its original shape, returning the deformed viscoelastic body to its original shape. In practice, the two work together to provide an extremely high vibration-proofing effect. Moreover, a plurality of substrates are arranged at predetermined intervals, and a viscoelastic body made of low-repulsion rubber and a rubber body are alternately arranged between the substrates, and one surface of the viscoelastic body is placed on one substrate. At the same time, the other side of the viscoelastic body is brought into contact with the other substrate, and one side of the rubber body is fixed to the non-fixed side substrate of the viscoelastic body, and the other side of the rubber body is brought into contact with the fixed side substrate of the viscoelastic body. Since the surfaces are in contact with each other, if you want to increase or decrease the number of laminated layers, you only need to attach and remove the substrate on which the viscoelastic body and the rubber body are fixed on one side, and the advantage is that it is extremely easy to change the number of laminated layers. be.

[Brief explanation of the drawing]

FIG. 1: An exploded external perspective view of an embodiment of the present invention. FIG. 2: A sectional view of an embodiment of the present invention. Figure 3: Comparison graph of resonance phenomena. FIG. 4...A sectional view of a conventional example. A... Vibration energy absorbing device, 1... Upper mounting member, 2... Lower mounting member, 3... Vibration energy absorbing member, 4... Substrate, 5... Viscoelastic body, 6...
Rubber body, 7... Fitting recess, 8... Steel plate, 9... Rubber plate, 10... Precision machine.

Claims (1)

[Claims for Utility Model Registration] (1) A plurality of substrates are arranged at predetermined intervals, and viscoelastic bodies made of low-resilience rubber and rubber bodies are alternately arranged between the substrates. One side of the rubber body is fixed to one substrate, and the other side of the viscoelastic body is brought into contact with the other substrate, and one side of the rubber body is fixed to the non-fixed side substrate of the viscoelastic body, and the other side of the viscoelastic body is fixed to the other substrate. A vibration energy absorbing device characterized in that the other side of the rubber body is brought into contact with the fixed substrate, and the viscoelastic body and the rubber body are arranged so as to be in contact with each other at the side surfaces thereof. (2) The vibration energy absorbing device according to claim 1, wherein the viscoelastic body is made of norbornene polymer.