JPH0445120B2 - - Google Patents

Description

[Detailed Description of the Invention] [Summary] The present invention provides a sliding device equipped with an air floating sliding body that can slide along sliding guide rolls.
The purpose is to improve the rigidity of the sliding body and the straight-line accuracy when sliding the sliding body. The objective is achieved by making the sliding body take charge of rigidity and making the sliding pieces take charge of straight-line accuracy.

[Industrial application field]

The present invention relates to the structure of an air floating type sliding body used in a movable part of a measuring machine, a precision mechanical device, etc.

There is a tendency for this type of movable part to become more precise, and therefore a guideway structure that can realize highly accurate and stable movement is desired. The present invention fulfills this need.

[Conventional technology]

A conventional air floating type sliding body is shown in FIG. In the figure, 1 is a sliding guide rail, and 2 is a sliding body. The guide rail 1 has a prismatic shape. The sliding body 2 includes flat blocks 3 and 4 and flat blocks 5 and 4.
6 and are connected by screws 7 from the blocks 5 and 6, and are fitted to the outer periphery of the guide rail 1 with a small gap therebetween. This sliding body 2 is provided with an air supply port 8 and an air passage (not shown) that communicates with the air supply port 8. A large number of air outlets (not shown) are provided that open to the inner surface. The sliding body 2 is slidable along the guide rail 1 in the directions of arrows A and B. In this case, when pressurized air is supplied into the sliding body 2 from the air supply port 8, the air is supplied between the air outlet 1 and the sliding body through the air passage, and the sliding body 2 becomes in a floating state. Slides smoothly.

[Problem that the invention seeks to solve]

In this type of conventional block assembly structure, each block is connected with screws, so the threaded portions are affected by air supply pressure, own weight, external pressure (or the load when using the block), etc. There was a problem in that the accuracy became unstable due to deformation or elongation.

[Means for solving problems]

The present invention provides a structure of an air floating type sliding body that can solve the above-mentioned problems, and the principle thereof is shown in FIG.

In Fig. 1, 11 is a sliding guide rail;
12 is a sliding body that fits into the sliding guide rail 11 and can slide in the directions of arrows C and D; 13 is a pressurized air supply means.

The sliding guide rail 11 has a prismatic shape.

The sliding body 12 is constructed by attaching sliding pieces 15 , 15 , 17 , 18 to each inner surface of a sliding body body 14 having an integral structure by adhesive or the like, and each sliding piece is attached to each outer circumferential surface of the sliding guide rail 11 . are opposed to each other with a small gap between them.

The pressure air supply means 13 is for supplying pressurized air between the sliding guide rail 11 and the sliding body 12 for floating the sliding body 12, and for example, the pressure air supply means 13 is for supplying pressurized air between the sliding body 12 and a compressor (not shown), etc. An air hose 19 that connects the
6, 17, 18 and each outer circumferential surface of the sliding guide rail 11. It is composed of a passage provided in the sliding body 12 and an air outlet so as to supply air into the minute gaps between the outer peripheral surfaces of the sliding guide rails 11.

[Effect]

The sliding body body 14 is responsible for rigidity, and each sliding piece 1
5, 16, 17, and 18 are responsible for wear resistance properties.

Since the slide body 14 has a one-piece structure, it has sufficient rigidity and can solve the problems associated with the conventional screw connection method. This effect becomes even greater if the slide body 14 is made of a highly rigid metal material.

In addition, the sliding pieces 15, 16, 17, and 18 play a role in maintaining high straight-line accuracy when the sliding body 12 slides in relation to the high rigidity of the sliding body 14. That is, the sliding guide rail 1 of each sliding piece
If the side facing 1 is finished with high flatness accuracy,
High straightness accuracy can be maintained, and this finishing can be easily done as a single item before the sliding piece is attached. In addition, sliding pieces 15, 16, 17, 1
If 8 is made of a highly wear-resistant material such as ceramic, the sliding part can be prevented from wearing even when the supply air pressure becomes extremely low or when excessive external pressure (abnormal external force) is applied to the sliding member 12. be able to.

〔Example〕

Embodiments of the present invention will be described below with reference to FIGS. 2 and 3.

FIG. 2 is a perspective view showing a measuring machine to which the present invention is applied, and in the figure, reference numerals 11, 12, and 13 denote sliding guide rails, sliding bodies, and pressure air supply means similar to those shown in FIG. 1 is a member to be measured, 101 is an electric micrometer, and 102 is an instrument. In the case of this figure, an example is shown in which the flatness (straightness) in the length direction of the outer peripheral surface of a prismatic member to be measured 100 is measured on a surface plate 103. and is supported. An electric micrometer 101 is attached to the sliding body 12 via a support member 104, and a measurement result by the electric micrometer 101 is measured by a meter 102.

The sliding guide rail 11 has its base fixed to the support 20 and stands upright on the surface plate 103. Abutment 20
is supported on the surface plate 103 by three-point support, and receives pressure air from a pressure air supply means that supplies pressure air to the sliding body 12.
It is now able to float upwards.

As mentioned above, the sliding body 12 is made of sliding body powder 14.
A sliding piece is attached to each inner surface of the sliding piece, and the detailed structure of the sliding piece and the method of attaching the sliding piece are supplementally explained as follows.

Each sliding piece 15, 16, 17, 18 has an inner surface (sliding guide rail 1
The air pockets 21 each have a plurality of concave air pockets 21, each of which has an air outlet 23 that communicates with an air supply port 22 to which the air hose 19 is connected via an air passage (not shown). is open. These sliding pieces 15,1
6, 17, and 18 are attached to the sliding guide rail 11 by adhesive, but this is done by attaching each slide to the outer circumferential surface of a prismatic sliding piece holding member whose outer dimensions are slightly larger than the sliding guide rail 11. This is done by holding the moving pieces, inserting the sliding piece holding member into the sliding body body 14 in this state, and adhering each sliding piece to the inner surface of the sliding body body 14 with an adhesive. In this case, it is not necessary to drill holes in the sliding body 14 with high precision by electrical discharge machining or the like (the uneven gap between the inner surface of the sliding body 14 and the sliding piece can be covered with adhesive). ), the processing of the sliding body body 14 is facilitated.

Although not shown in the drawings, the sliding body 12 is vertically balanced by a balance weight so that it can easily slide.

As described above, in the present invention, the sliding body 14 constituting the sliding body 12 and each sliding parallel arrangement 15, 16, 1
7 and 18 are separate bodies, so the rigidity is the same as that of the sliding body 1.
4, and each sliding piece 15, 1 is in charge of wear resistance.
It is now possible to use the 6th, 17th, and 18th in charge. Specifically, the sliding body 14 is formed of a highly rigid metal, etc., and each sliding piece 15, 1
6, 17, and 18 are made of a highly wear-resistant material such as ceramic. Thereby, the sliding body 14 having an integral structure does not deform even when the supplied air pressure is considerably high, and the conventional problems can be solved. In addition, each sliding piece 15, 16, 17, 1
8 is related to the fact that the integrated slide body 14 has high rigidity by finishing the side opposite to the adhesive side (the side facing the sliding guide rail 11) with high flat area accuracy when it is a single item before installation. By doing so, it is possible to improve the straight-line accuracy when sliding the sliding body 12,
Furthermore, even if the supplied air pressure becomes extremely low (reduced flying ability) or if excessive external pressure is applied to the sliding body 12, wear of the sliding portion can be prevented. That is, according to the present invention, it is possible to maintain high straight-line accuracy during sliding of the sliding member over a long period of time.

When measuring the straightness of the outer surface of the member to be measured 100 by sliding the sliding body 12, the second
As shown in the figure, the sliding guide rail 11 is brought close to the outer surface of the upright member to be measured 100 on the surface plate 103, and the needle 105 of the electric micrometer is brought into contact with it, and in this state, the sliding body 12 is slid in the vertical direction. make it move. In this case, pressure air is supplied from the pressure air supply means 13 into the minute gaps between the sliding guide rail 11 and each sliding piece 15, 16, 17, 18, and the sliding body 12 slides smoothly in a floating state. move. As a result, the straightness of the outer surface of the member to be measured 100 can be measured by the instrument 102.
It can be measured by During this measurement,
Surface plate 1 for positioning the sliding guide rail 11
03, but since the sliding guide rail 11 is moved in a floating state, the legs of the support base 20 move the surface plate 10 during this movement.
3 will not be damaged.

〔Effect of the invention〕

As described above, according to the present invention, it is possible to achieve the following various excellent effects.

(1) The sliding body is composed of a sliding body and a sliding piece, and since the sliding body is an integral structure,
The sliding body has sufficient rigidity and will not deform even when the supplied air pressure is considerably high.

(2) By processing the sliding surface of the sliding piece with high precision and attaching the sliding piece to the inner surface of the sliding body with adhesive, the integrated sliding body has high rigidity. In connection with this, the linear movement accuracy of the sliding body can be made high, and the processing can be easily performed as a single piece before the sliding piece is attached. In addition, by forming the sliding piece from a highly wear-resistant material, it is possible to prevent wear on the sliding part even when the supply air pressure is extremely low or when excessive external pressure is applied to the sliding element. , it is possible to maintain high straight-line accuracy for a long period of time.

[Brief explanation of drawings]

Fig. 1 is a diagram showing the principle of the present invention, Fig. 2 is a perspective view showing a measuring instrument to which the invention is applied, Fig. 3 is a perspective view showing the structure of an air floating type sliding body according to an embodiment of the invention, Fig. 4 The figure is a perspective view showing a conventional air floating type sliding body. In the figure, 11 is a sliding guide rail, 12 is a sliding body, 13 is a pressurized air supply means, 14 is a sliding body body, 15, 16, 17, 18 is a sliding piece.

Claims (1)

[Scope of Claims] 1. A sliding body is slidably fitted to the outer periphery of a prismatic sliding guide rail, and pressurized air for floating the sliding body is provided between the sliding guide roll and the sliding body. In a sliding device provided with a pressurized air supply means, the sliding body is opposed to an integrally structured highly rigid frame-shaped sliding body body and each outer circumferential surface of the sliding guide roll with a small gap therebetween. , a highly wear-resistant sliding piece attached to each inner surface of the sliding body body with adhesive, and a pressurized air blowout supplied by the pressurized air supply means to the inner surface of the sliding piece. A structure of an air floating type sliding body characterized by an air outlet formed therein.