JPH0445510U

JPH0445510U -

Info

Publication number: JPH0445510U
Application number: JP8599290U
Authority: JP
Priority date: 1990-08-15
Filing date: 1990-08-15
Publication date: 1992-04-17

Description

[Brief explanation of the drawing]

第１図は、実施例の概略構成図、第２図は、薬
液槽における薬液の流れの説明図、第３図は、従
来例の概略構成図、第４図は、従来の薬液槽にお
ける薬液の流れの説明図である。１１……薬液循環ろ過装置、１２……薬液槽、
１３……オーバフロー槽、１４……第１散水器、
１５……第１ポンプ、１６……第１フイルタ、１
７……第１配管、２１……吸引口、２４……第２
散水器、２５……第２ポンプ、２６……第２フイ
ルタ、２７……第２配管、４０……薬液。 Figure 1 is a schematic configuration diagram of the embodiment, Figure 2 is an explanatory diagram of the flow of a chemical solution in a chemical tank, Figure 3 is a schematic diagram of a conventional example, and Figure 4 is a diagram of a conventional chemical solution tank. It is an explanatory diagram of the flow. 11... Chemical solution circulation filtration device, 12... Chemical solution tank,
13... Overflow tank, 14... First water sprinkler,
15...first pump, 16...first filter, 1
7...First piping, 21...Suction port, 24...Second
Water sprinkler, 25...second pump, 26...second filter, 27...second piping, 40...chemical solution.

Claims

[Claims for Utility Model Registration] (1) A system comprising a chemical solution tank, an overflow tank, a first water sprinkler, a first pump, a first filter, and a first pipe, the overflow system comprising: a tank is provided on the upper outer periphery of the chemical solution tank; the first water sprinkler is provided in the lower center of the chemical solution tank; and the overflow tank, the first pump, the first filter, and the first water sprinkler. A chemical solution circulation filtration device connected to a container in order through the first piping, comprising a plurality of suction ports, a plurality of second water sprinklers, a second pump, a second filter, and a second piping. The plurality of suction ports are formed at the ends of the plurality of branched suction ports of the second piping, and are disposed at the lower part of the side wall in the chemical tank, and the plurality of second water sprinklers are , wherein the chemical solution circulation filtration is disposed in the chemical solution tank, and wherein each of the suction ports, the second pump, the second filter, and each of the second water sprinklers are connected in order through the second piping. Device. (2) The chemical liquid circulation filtration device according to claim 1, wherein each of the second water sprinklers is disposed above each of the suction ports in the chemical liquid tank.