JPH0446350B2 - - Google Patents

Info

Publication number
JPH0446350B2
JPH0446350B2 JP60109578A JP10957885A JPH0446350B2 JP H0446350 B2 JPH0446350 B2 JP H0446350B2 JP 60109578 A JP60109578 A JP 60109578A JP 10957885 A JP10957885 A JP 10957885A JP H0446350 B2 JPH0446350 B2 JP H0446350B2
Authority
JP
Japan
Prior art keywords
cryogenic environment
gas
expander
temperature
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60109578A
Other languages
Japanese (ja)
Other versions
JPS61268972A (en
Inventor
Masaaki Akamatsu
Kazuhiko Asahara
Junji Tsukuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Priority to JP60109578A priority Critical patent/JPS61268972A/en
Publication of JPS61268972A publication Critical patent/JPS61268972A/en
Publication of JPH0446350B2 publication Critical patent/JPH0446350B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation By Low-Temperature Treatments (AREA)

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明はヘリウム液化・冷凍装置の運転制御方
法に関し、詳細には極低温環境部で急激な熱負荷
の変動があつた場合でも冷凍出力の過不足を発生
することなく安定した運転状態を維持できる様な
ヘリウム液化・冷凍装置の運転制御方法に関する
ものである。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a method for controlling the operation of a helium liquefaction/refrigeration system, and more specifically, the present invention relates to a method for controlling the operation of a helium liquefaction/refrigeration system, and in particular, it is possible to control the refrigeration output even when there is a sudden change in heat load in a cryogenic environment. The present invention relates to a method for controlling the operation of a helium liquefaction/refrigeration system that can maintain stable operating conditions without causing excess or deficiency.

[従来の技術] ヘリウム(以下「He」と表記する)液化・冷
凍装置は、約15〜20気圧まで圧縮された高圧の
Heガスの一部を膨張機で等エントロピー膨張さ
せることによつて寒冷を発生させ、該寒冷を利用
してHeガスの残部を熱交換作用により所定の低
温度(いわゆる逆転温度)まで段階的に予冷した
後、ジユールトムソン(以下JTという)弁に通
し、JT効果を利用した冷却作用によりHeガスの
液化を行ない、液体He温度即ち極低温を得る様
にしたものである。こうして得られた液体Heを
製品として取り出す形式とすれば液化装置とな
り、一方液体Heを取り出すことなく閉回路的に
循環使用する様にし、該液体Heの潜熱を利用し
て極低温環境部(冷凍負荷部分)内の被冷却体の
熱負荷を吸収し、該環境部の温度を一定に維持す
る形式とすれば冷凍装置となる。即ち冷凍装置が
液化装置と異なる点は、液化装置では低圧側He
(戻り側He)のガス流量が高圧側He(入り側He)
のガス流量に比べて液化量分だけ少なくなるのに
対し、冷凍装置では、液化Heも蒸発して低圧側
に戻るため高圧側と低圧側のHeガス流量が等し
くなる点にある。このため液化装置と冷凍装置と
では、装置本体内の熱交換器及び膨張機の温度分
布が異なり、それらの熱的設計が異なつてくるに
過ぎず、装置の構造上、本質的な相違はない。従
つて以下He冷凍装置を代表的にとり挙げて説明
する。
[Prior art] Helium (hereinafter referred to as "He") liquefaction/refrigeration equipment uses high-pressure gas compressed to approximately 15 to 20 atmospheres.
By isentropically expanding a part of the He gas in an expander, cold is generated, and using this cold, the remaining He gas is gradually heated to a predetermined low temperature (so-called inversion temperature) by heat exchange action. After pre-cooling, the He gas is passed through a Joel-Thomson (hereinafter referred to as JT) valve, and the He gas is liquefied by the cooling action utilizing the JT effect, thereby achieving a liquid He temperature, that is, an extremely low temperature. If the liquid He obtained in this way is taken out as a product, it will become a liquefaction device, but on the other hand, the liquid He will be circulated in a closed circuit without being taken out, and the latent heat of the liquid He will be used to make use of the latent heat of the liquid He. If it absorbs the heat load of the object to be cooled in the load section and maintains the temperature of the environment constant, it becomes a refrigeration system. In other words, the difference between refrigeration equipment and liquefaction equipment is that in liquefaction equipment, the low-pressure side He
(Return side He) gas flow rate is high pressure side He (inlet side He)
In contrast, in a refrigeration system, the liquefied He also evaporates and returns to the low-pressure side, so the He gas flow rate on the high-pressure side and the low-pressure side becomes equal. For this reason, liquefaction equipment and refrigeration equipment differ only in the temperature distribution of the heat exchanger and expander within the equipment body, and their thermal designs are different; there is no essential difference in the structure of the equipment. . Therefore, a He refrigeration system will be described below as a representative example.

この様なHe冷凍装置としては、例えば第3図
に略図する様な構成のものが知られている。即ち
第3図において冷凍装置1は、熱交換器5a〜5
e、膨張機7a,7b,JT弁6等が内蔵された
装置本体2、該本体2入口側に連結された圧縮機
3及び精製器4、装置本体2の出口側に連結され
た極低温環境部10等から構成されている。そし
てHeガスは圧縮機3で加圧された後、第1〜第
5の熱交換器5a〜5eを通過(以下この通過経
路を「高圧側経路」という)して熱交換を受けつ
つ冷却され、更にJT弁6で大気圧近くまで断熱
膨張することにより一部液化してHeの気液混合
状態、即ちHeミスト(以下単に「液体He」とい
うことがある)となつた後、Heミスト供給管8
から極低温環境部10内へ送られ、該環境部10
の雰囲気を極低温まで冷却する。尚極低温環境部
10内の具体的な用途としては、例えば極低温下
における金属材料の機械的性質を調べる為の極低
温疲労試験装置を代表的に挙げることができる。
この場合には同試験装置内の液体Heが気化した
場合にこれを再凝縮させるための凝縮器を設ける
こともできる。
As such a He refrigerating device, for example, one having a configuration as schematically illustrated in FIG. 3 is known. That is, in FIG. 3, the refrigeration system 1 includes heat exchangers 5a to 5.
e, a device body 2 in which expanders 7a, 7b, JT valve 6, etc. are built-in, a compressor 3 and a purifier 4 connected to the inlet side of the device body 2, and a cryogenic environment connected to the outlet side of the device body 2; It consists of parts 10 and the like. After the He gas is pressurized by the compressor 3, it passes through the first to fifth heat exchangers 5a to 5e (hereinafter, this passage route is referred to as the "high pressure side route") and is cooled while undergoing heat exchange. , further adiabatically expands to near atmospheric pressure in the JT valve 6, partially liquefies He into a gas-liquid mixture state, that is, He mist (hereinafter simply referred to as "liquid He"), and then supplies He mist. tube 8
into the cryogenic environment section 10, and the environment section 10
The atmosphere is cooled to an extremely low temperature. A typical example of a specific use of the cryogenic environment section 10 is a cryogenic fatigue testing device for examining the mechanical properties of metal materials at cryogenic temperatures.
In this case, a condenser may be provided to re-condense the liquid He in the test device if it evaporates.

さて極低温環境部10内に存在する被冷却体の
熱を奪つて気化したHeガスは、再び装置本体2
の熱交換器5a〜5eを逆方向に上昇(以下この
通過経路を「低圧側経路」という)し、対向流の
高圧側経路を流れるHeを冷却した後、自らは常
温常圧のHeガスとなつて圧縮機3に戻る。そし
てHeがこの経路を循環することによつて極低温
環境部10を継続して極低温に保つ様になつてい
る。この様な従来のHe冷凍機では膨張機の処理
量の調節は手動で行ない、膨張機による寒冷の発
生量を制御しているので、負荷の変動を生じた場
合や起動時などにはその都度、流量調節を行なう
必要があつた。特に1台のHe冷凍機に対し複数
の極低温環境部(以下ユーザと言うことがある)
を並列的に接続した冷凍システム(以下マルチユ
ーザシステムと言う)においては負荷の変動が大
きく、適切な膨張機処理量の調節が行なわれなけ
れば、過剰の寒冷発生によりエネルギーの浪費を
生じることがある。また冷却運転中のユーザのう
ち1基(又は2基以上)の冷却を停止したり再び
冷却を開始する場合には、これらの操作に伴つて
He冷凍装置の運転条件が変動し、従来の手動操
作では冷却運転中のユーザの温度条件を一定に保
つ様に運転するためには高度の熟練が要求され
る。
Now, the He gas that has been vaporized by taking away the heat of the object to be cooled existing in the cryogenic environment section 10 is returned to the main body of the apparatus.
The He gas passes through the heat exchangers 5a to 5e in the opposite direction (hereinafter, this passage path is referred to as the "low pressure side path"), and after cooling the He flowing through the counterflow high pressure side path, it becomes He gas at normal temperature and pressure. Return to compressor 3. By circulating He through this path, the cryogenic environment section 10 is continuously kept at a cryogenic temperature. In conventional He refrigerators like this, the throughput of the expander is manually adjusted and the amount of cold generated by the expander is controlled, so if there is a change in load or at startup, etc. , it was necessary to adjust the flow rate. In particular, multiple cryogenic environment departments (hereinafter sometimes referred to as users) for one He refrigerator
In a refrigeration system that connects multiple units in parallel (hereinafter referred to as a multi-user system), the load fluctuates widely, and if the expander throughput is not appropriately adjusted, energy may be wasted due to excessive cooling. be. In addition, when a user stops cooling one (or two or more) units during cooling operation or starts cooling again, the user
The operating conditions of a He refrigeration system vary, and conventional manual operation requires a high level of skill to maintain a constant temperature condition for the user during cooling operation.

本発明はこうした事情に着目し、膨張機におけ
る過剰な寒冷の発生を抑えながらユーザの環境温
度を一定に保持するとともに、更にマルチユーザ
システムにおいては1基(又は2基以上)のユー
ザの冷却停止および再冷却を他のユーザの運転条
件に悪影響を及ぼすことなく適正に行なうことの
できる様なHe液化・冷凍装置を提供しようとし
て種々研究を進めた結果、特願昭58−169998号に
示す技術を開発した。
Focusing on these circumstances, the present invention maintains the user's environmental temperature constant while suppressing the generation of excessive cold in the expander, and furthermore, in a multi-user system, the cooling of one (or two or more) users is stopped. As a result of conducting various researches in an attempt to provide a He liquefaction/refrigeration system that can properly perform recooling without adversely affecting the operating conditions of other users, the technology disclosed in Japanese Patent Application No. 169998/1983 was developed. developed.

即ち第4図は該公開発明に係るHe冷凍装置を
示す概略全体図で、13は温度制御コントロー
ラ、14は圧力制御コントローラ、15は測温
点、16は圧力検出点を夫々示す。
That is, FIG. 4 is a schematic overall view showing the He refrigerating apparatus according to the disclosed invention, in which 13 indicates a temperature control controller, 14 indicates a pressure control controller, 15 indicates a temperature measurement point, and 16 indicates a pressure detection point.

圧縮機3のHeガス吐出側の系統L2の高圧Heガ
スの一部は膨張機7a,7bにより寒冷を発生
し、この寒冷により冷却された残部のHeガスは
JT弁6を通過してJT効果によりHeミストを発
生して極低温環境部10の雰囲気を極低温まで冷
却する。ここで低温側の膨張機7bから吐出され
たHeガスG1と極低温環境部10からの戻りガス
G2との合流点より下流側に測温点15を設け、
測温点15における測温値を温度制御コントロー
ラ13に入力し該測温値の高低に応じて低温側膨
張機7bの処理量を調節する。即ち測温値が設定
値より高い場合には膨張機7bによる寒冷発生量
が不足していることを意味するので温度制御コン
トローラ13から膨張機7bへ出力増大の指令を
発信し膨張機7bの処理量を増大させて寒冷発生
量を増加しこれにより測温点15の温度を低下さ
せる。一方測温値が設定値より低い場合には膨張
機7bによる寒冷発生量が過剰であることを意味
するので温度制御コントローラ13から膨張機7
bへ出力減少の指令を発信し膨張機7bの処理量
を減少させて寒冷発生量を減少し、これにより測
温点15の温度を高める。この様にして測温点1
5の温度が一定に保持される。その結果熱交換器
5dにおいて冷媒である高圧側Heガスは一定の
設定温度をもつ冷却剤である所の低圧側Heガス
によつて安定した冷却作用を受けるので、熱交換
後の温度は所定の温度を保つことができ、これに
よつて運転条件の変動にかかわらず極低温環境部
10は一定の温度に保持される。尚測温点15は
合流点と直後の熱交換器の入口部間(入口部を含
む)に設けるものとし、合流点と測温点15の間
には吐出ガスG1と戻りガスG2の混合をよくする
ために混合器を設けることもある。
A part of the high-pressure He gas in system L2 on the He gas discharge side of the compressor 3 is cooled by the expanders 7a and 7b, and the remaining He gas cooled by this cold is
It passes through the JT valve 6 and generates He mist due to the JT effect, thereby cooling the atmosphere in the cryogenic environment section 10 to a cryogenic temperature. Here, He gas G 1 discharged from the expander 7b on the low temperature side and return gas from the cryogenic environment section 10
Temperature measurement point 15 is installed downstream from the confluence with G 2 ,
The temperature value at the temperature measurement point 15 is input to the temperature control controller 13, and the throughput of the low temperature side expander 7b is adjusted depending on the level of the temperature value. In other words, if the measured temperature value is higher than the set value, it means that the amount of cold generated by the expander 7b is insufficient, so the temperature control controller 13 sends a command to increase the output to the expander 7b and processes the expander 7b. The amount of cold generation is increased by increasing the amount of cold generated, thereby lowering the temperature at the temperature measuring point 15. On the other hand, if the measured temperature value is lower than the set value, it means that the amount of cold generated by the expander 7b is excessive.
A command to reduce the output is sent to the expander 7b to reduce the throughput of the expander 7b, thereby reducing the amount of cold generation, thereby increasing the temperature at the temperature measuring point 15. In this way, temperature measurement point 1
5 temperature is held constant. As a result, in the heat exchanger 5d, the high-pressure side He gas, which is a refrigerant, receives a stable cooling effect by the low-pressure side He gas, which is a refrigerant that has a constant set temperature, so that the temperature after heat exchange remains at a predetermined temperature. The temperature can be maintained, thereby maintaining the cryogenic environment 10 at a constant temperature regardless of fluctuations in operating conditions. The temperature measurement point 15 shall be provided between the confluence point and the inlet of the heat exchanger immediately after (including the inlet), and between the confluence point and the temperature measurement point 15, the discharge gas G 1 and the return gas G 2 are connected. A mixer may be provided to improve mixing.

但し、圧縮機3の吐出量が一定の場合には膨張
機7bの処理量を冷凍負荷に応じて変化させても
He冷凍装置の所要動力は変らず、特に冷凍負荷
が減少した場合にはエネルギー原単位が低下す
る。この低下を防止するために該He冷凍装置で
は圧縮機3の吐出圧力を圧力検出点16にて検出
し、この圧力を一定に保つ様に圧力制御コントロ
ーラ14により圧縮機3の吐出量を調節する様に
してある。これによつて冷凍負荷が減少した場合
にはJT弁のみを絞れば、膨張機7bの処理量は
冷凍負荷に応じて低下するので、圧縮機3の吐出
圧力を一定に保つ様に圧力制御コントローラ14
の作用により吐出風量が減少することにより、エ
ネルギー原単価の低下を防止し、省エネルギー運
転を行なうことができる。
However, if the discharge amount of the compressor 3 is constant, even if the throughput of the expander 7b is changed according to the refrigeration load.
The required power of He refrigeration equipment does not change, but the energy consumption rate decreases, especially when the refrigeration load decreases. In order to prevent this drop, in the He refrigeration system, the discharge pressure of the compressor 3 is detected at the pressure detection point 16, and the discharge amount of the compressor 3 is adjusted by the pressure controller 14 so as to keep this pressure constant. It is arranged like this. If the refrigeration load decreases as a result, if only the JT valve is throttled down, the throughput of the expander 7b will decrease in accordance with the refrigeration load, so the pressure control controller will keep the discharge pressure of the compressor 3 constant. 14
By reducing the discharge air volume due to the effect of , it is possible to prevent a decrease in the energy unit cost and perform energy-saving operation.

[発明が解決しようとする問題点] ところが、低温側膨張機から送給されるHeガ
スG1と極低温環境部からの戻りガスG2との合流
点より下流側の測定点における温度は、極低温環
境部における熱負荷変動の発生後、若干遅れて変
化するものであり、上記の制御法では、極低温環
境部で熱負荷が急激に変化した場合制御に遅れが
出てくる。しかも極低温環境部の熱負荷変動にも
かかわらずその寒冷状態を安定に維持する為に
は、前記膨張機の処理量を制御しただけでは不十
分であり、もしJT弁から極低温環境部への寒冷
供給量が不測すると該極低温環境部の冷却状態が
不安定となり、逆にJT弁から極低温環境部への
寒冷供給量が多過ぎると寒冷過剰となつて省エネ
ルギー化の目的が果たせなくなる。
[Problems to be Solved by the Invention] However, the temperature at the measurement point downstream of the confluence of the He gas G 1 fed from the low-temperature side expander and the return gas G 2 from the cryogenic environment section is as follows. The change occurs with a slight delay after the heat load fluctuation occurs in the cryogenic environment, and with the above control method, if the heat load changes suddenly in the cryogenic environment, there will be a delay in control. Moreover, in order to maintain the cold state stably despite heat load fluctuations in the cryogenic environment section, simply controlling the throughput of the expander is insufficient; If the cold supply amount is unexpected, the cooling state of the cryogenic environment section will become unstable, and conversely, if the cold supply amount from the JT valve to the cryogenic environment section is too large, there will be excessive cooling and the purpose of energy saving will not be achieved. .

本発明はこの様な状況のもとで、極低温環境部
における熱負荷が急変した場合でも、その急変に
応じて冷凍装置の寒冷発生量を迅速且つ適正に制
御することができ、しかも極低温環境部における
寒冷を安定に維持することのできる運転制御法を
提供しようとするものである。
Under such circumstances, even if the heat load in the cryogenic environment section suddenly changes, the present invention can quickly and appropriately control the amount of cold generated by the refrigeration system in accordance with the sudden change. The purpose is to provide an operation control method that can stably maintain the cold in the environment.

[問題点を解決する為の手段] 上記の様な目的を達成し得た本発明運転制御方
法の構成は、例えば第4図に示した如く、ヘリウ
ムガスの等エントロピー膨張によつて得られた寒
冷を利用する熱交換作用により常温高圧のヘリウ
ムガスを段階的に予冷した後、ジユールトムソン
弁に通すことによつて液化させるヘリウム液化・
冷凍装置の運転制御方法において、極低温環境部
に熱負荷変動検出器を設けると共に、ヘリウム液
化・冷凍装置における高圧ヘリウムガス供給回路
に設けた膨張機の吐出ガスと極低温環境部からの
戻りガスの合流点よりも下流側に温度測定器を設
け、上記熱負荷変動検出器によつて求められる極
低温環境部の熱負荷変動に基づいて前記膨張機か
らの必要寒冷発生量を算出して制御すると共に、
該制御を上記温度測定器による測温結果で補正す
る他、上記熱負荷変動を基に極低温環境部におけ
る寒冷の安定化に必要な冷媒流量を算出してジユ
ールトムソン弁の開度を調整するところに要旨を
有するものである。
[Means for Solving the Problems] The configuration of the operation control method of the present invention that can achieve the above objectives is obtained by isentropic expansion of helium gas, as shown in FIG. 4, for example. Helium liquefaction is a process in which helium gas at room temperature and high pressure is precooled step by step using a heat exchange action that uses cold, and then liquefied by passing it through a Joel-Thomson valve.
In a method for controlling the operation of a refrigeration equipment, a heat load fluctuation detector is provided in the cryogenic environment section, and the discharge gas of the expander installed in the high-pressure helium gas supply circuit in the helium liquefaction/refrigeration equipment and the return gas from the cryogenic environment section are A temperature measuring device is provided downstream of the confluence of the above, and the required amount of cold generation from the expander is calculated and controlled based on the heat load fluctuation of the cryogenic environment section determined by the heat load fluctuation detector. At the same time,
In addition to correcting this control based on the temperature measurement results from the temperature measuring device, the refrigerant flow rate required to stabilize the cold in the cryogenic environment is calculated based on the heat load fluctuations, and the opening degree of the Joel-Thomson valve is adjusted. The gist lies in the fact that it does.

[作用] 後記実施例でも明らかにする通り、本発明の基
本的な寒冷制御装置は第4図に示した技術と類似
しているが、本発明では、第4図の例の様に、極
低温環境部における熱負荷変動の影響を受けて変
化する該極低温環境部からの戻りガスの温度変化
に応じて高圧Heガス供給回路に設けた膨張機か
らの寒冷発生量(吐出ガス量)を制御するのでは
なく、本質的な制御要素として、極低温環境部に
設けた熱負荷変動検出器(例えば液体Heの液位
やガス圧等)による熱負荷変動を直接検出し、こ
の熱負荷変動に基づいて前記膨張機からの必要寒
冷発生量を算出して制御するものである。しかも
検出される該熱負荷変動を基にして極低温環境部
における寒冷消費量を算出し、極低温環境部にお
ける寒冷状態の安定化に必要な冷媒供給量を割り
出してJT弁を適正に自動制御するものである。
即ち本発明では極低温環境部における熱負荷変動
を直接検知してHe液化・冷凍装置の寒冷発生装
置の冷却効率を制御すると共に、該極低温環境部
への寒冷供給量を制御するものであり、前記第4
図に示した様な方法に比べて熱負荷変動に対する
応答が極めて早く、急激な熱負荷変動があつた場
合でもHe液化・冷凍装置側で遅れが生じる様な
ことがない。しかも上記熱負荷の変動を基に極低
温環境部における寒冷消費量を直ちに算出し、寒
冷能力を安定に維持し得る量の冷媒が該極低温環
境部へ供給される様にJT弁の開度を自動制御す
る構成としているので、極低温環境部に寒冷能力
が低下して冷却効率が低下したり、或は寒冷過剰
によるロス等を生ずることもなくなる。
[Function] As will be made clear in the examples below, the basic cooling control device of the present invention is similar to the technology shown in FIG. 4, but in the present invention, as in the example of FIG. The amount of cold generation (discharged gas amount) from the expander installed in the high-pressure He gas supply circuit is adjusted according to the temperature change of the return gas from the cryogenic environment section, which changes due to the heat load fluctuation in the low-temperature environment section. Instead of controlling, as an essential control element, heat load fluctuations are directly detected by a heat load fluctuation detector (for example, liquid He level, gas pressure, etc.) installed in the cryogenic environment part, and this heat load fluctuation is Based on this, the required amount of cold generation from the expander is calculated and controlled. Furthermore, the amount of refrigeration consumed in the cryogenic environment section is calculated based on the detected heat load fluctuations, and the amount of refrigerant supplied necessary to stabilize the cold state in the cryogenic environment section is determined, and the JT valve is automatically controlled appropriately. It is something to do.
That is, the present invention directly detects heat load fluctuations in the cryogenic environment to control the cooling efficiency of the cold generation device of the He liquefaction/refrigeration equipment, and also controls the amount of cold supplied to the cryogenic environment. , the fourth
Compared to the method shown in the figure, the response to changes in heat load is extremely fast, and even if there is a sudden change in heat load, there will be no delay on the He liquefaction/refrigeration equipment side. In addition, the amount of refrigeration consumed in the cryogenic environment section is immediately calculated based on the fluctuations in the heat load, and the opening of the JT valve is adjusted so that the amount of refrigerant that can stably maintain the cooling capacity is supplied to the cryogenic environment section. Since the system is configured to automatically control the temperature, there is no possibility that the cooling capacity of the cryogenic environment section will decrease, resulting in a decrease in cooling efficiency, or that there will be no loss due to excessive cooling.

尚本発明においても、高圧Heガス供給回路に
設けた膨張機の吐出ガスと極低温環境部からの戻
りガスの合流点よりも下流側に温度測定器を設
け、その測温結果を上記膨張機における処理量の
制御要素として利用するが、この測温結果を主た
る制御要素とすると前述の如く熱負荷変動に対す
る応答が遅れることに鑑み、本発明では該測温結
果を、前記熱負荷変動から算出される必要寒冷発
生量制御値が適正であるか否かを確認する為の確
認要素として利用し、該必要寒冷発生量制御値を
補正することによつて制御をより正確に行ない得
る様にしている。
Also in the present invention, a temperature measuring device is provided downstream of the confluence of the discharge gas of the expander installed in the high-pressure He gas supply circuit and the return gas from the cryogenic environment section, and the temperature measurement results are sent to the expander. However, in view of the fact that if this temperature measurement result is used as the main control element, the response to heat load fluctuations will be delayed as described above, in the present invention, the temperature measurement result is calculated from the heat load fluctuation. It is used as a confirmation element to check whether the necessary cold generation amount control value is appropriate, and by correcting the necessary cold generation amount control value, the control can be performed more accurately. There is.

かくして極低温環境部における熱負荷の変動に
応じてHe液化・冷凍装置の運転制御を極めて迅
速且つ的確に実施し得ることになつた。
In this way, it has become possible to control the operation of the He liquefaction/refrigeration equipment extremely quickly and accurately in response to changes in the heat load in the cryogenic environment.

[実施例] 第1図は本発明の実施例を示す概略フロー図で
あり、基本的な構成は第4図の例と同様であるの
で、同一の部分には同一の符号を付している。本
例でも、圧縮機3で昇圧した後精製装置4で精製
されたHeガスはランイL2から液化・冷凍装置本
体2へ送り込まれ、高圧側経路に沿つて熱交換器
5a〜5eを順次通過しながら徐々に冷却された
後JT弁6で断熱膨張により一部が液化されて極
低温環境部10へ供給される。極低温環境部10
では、例えば極低温疲労試験等による寒冷負荷を
受けて一部の液化Heが気化し、この低圧Heガス
は再び装置本体2の熱交換器5a〜5eを逆方向
に流れて、対向流の高圧側経路を流れるHeガス
を冷却した後、自らは常温常圧のHeガスとなつ
てラインL1から圧縮機3に戻る。ここで、装置
本体2内における冷却不足を補う為、高圧側経路
内のHeガスの一部をバイパスさせ膨張機7a,
7bを経て低圧側経路へ送り込む様に構成する
他、高圧側経路内におけるHeガスの圧力低下を
防止する為、圧縮機3の吐出圧力を圧力検出点1
6で検出し、この圧力を一定に保つ様に圧力制御
コントローラ14で圧縮機の吐出量を調節し得る
様に構成した点は、前記第4図の従来例と同様で
ある。
[Example] Figure 1 is a schematic flow diagram showing an example of the present invention, and the basic configuration is the same as the example in Figure 4, so the same parts are given the same reference numerals. . In this example as well, the He gas that has been pressurized by the compressor 3 and then purified by the purifier 4 is sent from the run L 2 to the liquefaction/refrigeration device main body 2, and sequentially passes through the heat exchangers 5a to 5e along the high-pressure side path. After being gradually cooled down, a portion of the fluid is liquefied by adiabatic expansion in the JT valve 6 and supplied to the cryogenic environment section 10. Cryogenic environment department 10
In this case, some of the liquefied He gas is vaporized under the cold load caused by, for example, a cryogenic fatigue test, and this low-pressure He gas flows again in the opposite direction through the heat exchangers 5a to 5e of the device main body 2, and is converted into a countercurrent high-pressure He gas. After cooling the He gas flowing through the side path, it returns to the compressor 3 from the line L1 as He gas at room temperature and pressure. Here, in order to compensate for the lack of cooling in the device main body 2, a part of the He gas in the high pressure side path is bypassed and the expander 7a,
7b to the low-pressure side path, and in order to prevent the pressure drop of He gas in the high-pressure side path, the discharge pressure of the compressor 3 is detected at the pressure detection point 1.
This is similar to the prior art example shown in FIG. 4 in that the compressor is configured so that the discharge amount of the compressor can be adjusted by the pressure controller 14 so as to detect the pressure at 6 and keep the pressure constant.

この様なHe液化・冷凍装置において極低温環
境部10の熱負荷が変動すると、前述の如く装置
本体2における冷却効率に過不足が生じ、極低温
環境部10における冷却能が低下したり或は同部
10が過冷却状態になつて経済的損失を招くこと
がある。そこで本発明では、図示する如く極低温
環境部10に液位計17を付設して液位指示調節
器18に接続し、極低温環境部10内の熱負荷変
動に伴つて生じる液位の変動を直ちに検出する。
そしてこの部分で液位の変動に見合つた戻りガス
G2及び測温点15におけるガスの熱量変動を推
定し、それに応じた膨張機7bの処理量(吐出ガ
ス量)を算出してその信号を演算器19へ送り、
該演算器19から膨張機7bへ処理量増減の指令
が出される。
In such a He liquefaction/refrigeration system, if the heat load on the cryogenic environment section 10 fluctuates, as described above, the cooling efficiency in the main body 2 of the apparatus will be insufficient or too high, and the cooling capacity in the cryogenic environment section 10 may decrease. The section 10 may become supercooled, resulting in economic loss. Therefore, in the present invention, as shown in the figure, a liquid level gauge 17 is attached to the cryogenic environment section 10 and connected to a liquid level indicating regulator 18, and fluctuations in the liquid level that occur with changes in the heat load in the cryogenic environment section 10 are provided. Detect immediately.
In this part, the return gas is adjusted to match the fluctuations in the liquid level.
Estimate the calorific value fluctuation of the gas at G 2 and the temperature measurement point 15, calculate the processing amount (discharged gas amount) of the expander 7b according to it, and send the signal to the calculator 19,
A command to increase or decrease the throughput is issued from the computing unit 19 to the expander 7b.

本発明では、上記の様な液位検出による熱負
荷変動の推定、及び液位変動に応じた膨張機7
b処理量の増減算出及び指令、が適正に行なわれ
る限り、上記の構成だけで装置本体2内の温度制
御は適正に行なわれるが、本例では膨張機7b処
理量のコントロールをより正確に行なう為下記の
補正操作を併用している。即ち極低温環境部10
からの戻りガスG2と、前記膨張機7bからの吐
出ガスG1の合流点よりも下流側の測温点15に
温度測定器を配設しておき、この部分でG1とG2
の混合ガス温度を測定する、そして該混合ガス温
度を極力一定に保ち得る様に、温度制御コントロ
ーラ13の部分で膨張機7bの処理量を算出して
演算器19へ送り、演算器19では該温度制御コ
ントローラ13から送られてれる算出値と前記液
位制御コントローラ18から送られてくる算出値
を比較演算して、膨張機7bにおける最適の処理
量を割出して膨張機7bに指示するものである。
即ち本発明では、液位制御コントローラ18及び
演算器19で算出・指示された膨張機7b処理量
の制御結果を、測温点15及び温度制御コントロ
ーラ13で確認した後演算器19にフイードバツ
クして制御値を補正する様にしているから制御制
度を著しく高めることができる。しかも膨張機7
bにおける必要処理量の指示は、極低温環境部1
0の熱負荷変動を液位計17及び液位制御コント
ローラ18で直接検知した後、演算器19を介し
て直ちに発せられるので、急激な熱負荷変動があ
つた場合でも制御に遅れが出る様な恐れもなくな
る。
In the present invention, estimation of heat load fluctuation by liquid level detection as described above, and expansion machine 7 according to the liquid level fluctuation are performed.
As long as the increase/decrease calculation and command of the processing amount b are performed properly, the temperature inside the device main body 2 can be properly controlled with only the above configuration, but in this example, the processing amount of the expander 7b is controlled more accurately. Therefore, the following correction operations are also used. That is, the cryogenic environment section 10
A temperature measuring device is installed at a temperature measuring point 15 downstream of the confluence of the return gas G 2 from the expander 7b and the discharge gas G 1 from the expander 7b.
In order to keep the mixed gas temperature as constant as possible, the temperature control controller 13 calculates the throughput of the expander 7b and sends it to the computing unit 19. A device that compares and calculates the calculated value sent from the temperature control controller 13 and the calculated value sent from the liquid level control controller 18, determines the optimal throughput in the expander 7b, and instructs the expander 7b. It is.
That is, in the present invention, the control result of the expander 7b throughput calculated and instructed by the liquid level control controller 18 and the computing unit 19 is confirmed by the temperature measurement point 15 and the temperature control controller 13, and then fed back to the computing unit 19. Since the control value is corrected, the control precision can be significantly improved. Moreover, expander 7
The instructions for the required processing amount in b are given by the cryogenic environment section 1.
0 heat load fluctuation is detected directly by the liquid level gauge 17 and the liquid level control controller 18, and then immediately issued via the calculator 19, so even if there is a sudden heat load fluctuation, there will be no delay in control. There will be no fear.

ところで装置本2におけるJT弁6の開度を固
定しておいた場合は、極低温環境部10の熱負荷
変動でHe液位が変動してもそれを調整する機能
は発揮されず、He液位が低下して寒冷能が不足
気味になつたり、或は液化・冷凍装置2側が過剰
運転状態となつてHe液位が過度に上昇してくる。
そこで本発明では、この様なHe液位の変動を極
力少なくして寒冷能を一定に維持するため、液位
計17で検出される液位変動値を基にして、極低
温環境部10に補給すべき液体He量を算出し、
液位制御コントローラ18からJT弁6の開度を
制御する信号を伝送する。これによつて極低温環
境部10にはHe液位の変動に応じた量の液体He
が補給されることになり、該極低温環境部10の
寒冷能を可及的一定に保つことができる。
By the way, if the opening degree of the JT valve 6 in the device main 2 is fixed, even if the He liquid level fluctuates due to changes in the heat load in the cryogenic environment section 10, the function to adjust it will not be activated, and the He liquid The He liquid level may drop and the cooling capacity may become insufficient, or the liquefaction/refrigeration device 2 may be in an overoperating state and the He liquid level may rise excessively.
Therefore, in the present invention, in order to minimize such fluctuations in the He liquid level and maintain a constant cooling capacity, the cryogenic environment part 10 is controlled based on the liquid level fluctuation value detected by the liquid level gauge 17. Calculate the amount of liquid He that should be replenished,
A signal for controlling the opening degree of the JT valve 6 is transmitted from the liquid level controller 18. As a result, the amount of liquid He in the cryogenic environment section 10 corresponds to the fluctuation of the He liquid level.
is replenished, and the cooling capacity of the cryogenic environment section 10 can be kept as constant as possible.

第2図は本発明の他の実施例を示すフロー図で
あり、再凝縮型He冷凍機への適用例を示してい
る。本例においては、冷媒たるHeは、圧縮機3
−熱交換器5a〜5e−極低温環境部10におけ
る再凝縮器20−熱交換器5a〜5eの間で閉回
路を形成し、JT弁6でHeを液化して再凝縮器2
0へ送り、この部分でHeの蒸発潜熱を利用して
極低温環境部10における被冷却体の熱負荷を吸
収し、極低温環境部10を極低温状態に維持す
る。この場合、冷凍室を構成する極低温環境部1
0は密閉構造となつており、該極低温環境部10
内で熱負荷の変動があるとそれは直ちに同部10
内の圧力変動となつて現われてくる。そこで本発
明では該極低温環境部10に圧力検知器21を付
設しておき、この圧力変動を常時検知してコンピ
ユータ22に入力する様に構成している。そして
該コンピユータ22で、極低温環境部10のガス
圧(熱負荷)変動に見合つた戻りガスG2及び1
5点におけるガスの熱量変動を推定し、それに応
じた膨張機7bの処理量(吐出ガス量)を算出し
てその信号を演算器19へ送り、該演算器19か
ら膨張機7bへ処理量増減の指令が出される。
FIG. 2 is a flowchart showing another embodiment of the present invention, and shows an example of application to a recondensing He refrigerator. In this example, the refrigerant He is used in the compressor 3.
A closed circuit is formed between the heat exchangers 5a to 5e, the recondenser 20 in the cryogenic environment section 10, and the heat exchangers 5a to 5e, and the JT valve 6 liquefies He, and the recondenser 2
This part uses the latent heat of vaporization of He to absorb the heat load of the object to be cooled in the cryogenic environment section 10, and maintains the cryogenic environment section 10 in a cryogenic state. In this case, the cryogenic environment section 1 constituting the freezing room
0 has a sealed structure, and the cryogenic environment section 10
If there is a change in the heat load within the
This appears as pressure fluctuations within the body. Therefore, in the present invention, a pressure detector 21 is attached to the cryogenic environment section 10, and the pressure fluctuation is constantly detected and inputted to the computer 22. Then, the computer 22 generates return gases G 2 and 1 corresponding to the gas pressure (thermal load) fluctuations in the cryogenic environment section 10.
Estimate the heat amount fluctuation of the gas at five points, calculate the processing amount (discharged gas amount) of the expander 7b according to it, send the signal to the calculator 19, and increase or decrease the processing amount from the calculator 19 to the expander 7b. command is issued.

この指令は、極低温環境部10の熱負荷変動に
よつて生ずる圧力変動をインプツトデータとして
直ちに演算・伝送が行なわれるので、前記第1図
の例と同様膨張機7bの処理量制御に時間的な遅
れが生ずる様な恐れはない。但し本例においても
上記熱負荷変動の推定及び膨張機7b必要処理量
の算出及び制御をより制度良く行なう為に、第1
図の例と同様測温点15における実測ガス温度を
基にした補正が行なわれる。
This command is immediately calculated and transmitted using the pressure fluctuations caused by heat load fluctuations in the cryogenic environment section 10 as input data, so it takes less time to control the throughput of the expander 7b as in the example shown in FIG. There is no risk of any delays. However, in this example as well, in order to more accurately estimate the heat load fluctuations and calculate and control the required processing amount of the expander 7b, the first
Similar to the example shown in the figure, correction is performed based on the actually measured gas temperature at the temperature measuring point 15.

即ち再凝縮器20からの戻りガスG2と、膨張
機7bからの吐出ガスG1の合流点よりも下流側
の測温点15に温度測定器を配設しておき、この
部分でG1とG2の混合ガス温度を測定し、該混合
ガス温度を極力一定に保ち得る様に、温度制御コ
ントローラ13の部分で膨張機7bの必要処理量
を算出して演算器19へ送る。演算器19では、
該温度制御コントローラ13から送られてくる算
出値と前記コンピユータ22から送られてくる算
出値を比較演算して、膨張機7bにおける最適の
吐出ガス量を割り出し膨張機7bに指示するもの
である。即ち本例でも、圧力検知器21からの圧
力変動を基にコンピユータ22で算出された膨張
機7b処理量の制御結果を、測温点15及び温度
制御コントローラで確認した後演算器19にフイ
ードバツクして制御値を補正する様にしているか
ら、高精度の制御が可能となる。
That is, a temperature measuring device is installed at a temperature measuring point 15 downstream of the confluence of the return gas G 2 from the recondenser 20 and the discharge gas G 1 from the expander 7b, and at this point G 1 The temperature of the mixed gas and G 2 is measured, and the temperature controller 13 calculates the required throughput of the expander 7b and sends it to the calculator 19 so that the mixed gas temperature can be kept as constant as possible. In the computing unit 19,
The calculated value sent from the temperature control controller 13 and the calculated value sent from the computer 22 are compared and calculated, and the optimal discharge gas amount in the expander 7b is determined and instructed to the expander 7b. That is, in this example as well, the control result of the expansion machine 7b throughput calculated by the computer 22 based on the pressure fluctuation from the pressure detector 21 is confirmed by the temperature measurement point 15 and the temperature control controller, and then fed back to the calculator 19. Since the control value is corrected based on the value, highly accurate control is possible.

また上記の構成だけでは、極低温環境部10に
急激な熱負荷変動が起こつた場合に同部10内を
安定した寒冷状態に保つことができず、寒冷不足
や寒冷過剰の状態が生じ得る。そこで本例でも、
圧力検知器21で検知される圧力変動を基にして
再凝縮器20への液体Heの送給量を自動的に調
整し、それによつて極低温環境部10の寒冷能を
熱負荷変動前の状態に直ちに復帰させる様にして
いる。即ち再凝縮器20に供給される冷媒の流量
は、流量測定点24で計測され、それが所定量と
なるなる様に流量制御コントローラ23からJT
弁6に伝送されているが、本発明ではこの流量測
定値をコンピユータ22に入力しておき、極低温
環境部10で熱負荷変動があつたときは、その変
動に見合つた量の冷媒が再凝縮器20へ送り込ま
れる様、コンピユータ22から流量制御コントロ
ーラ23を経てJT弁6に開度調整の信号が送ら
れる。その結果、極低温環境部10内における寒
冷状態は直ちに熱負荷変動前の状態に復帰し、安
定した極低温状態が維持されることになる。
Further, with only the above configuration, when a sudden change in heat load occurs in the cryogenic environment section 10, it is not possible to maintain the inside of the section 10 in a stable cold state, and a state of insufficient cooling or excessive cooling may occur. Therefore, in this example,
The amount of liquid He fed to the recondenser 20 is automatically adjusted based on the pressure fluctuation detected by the pressure detector 21, thereby increasing the cooling capacity of the cryogenic environment section 10 to the level before the heat load fluctuation. We are trying to get back to normal condition immediately. That is, the flow rate of the refrigerant supplied to the recondenser 20 is measured at the flow rate measurement point 24, and the flow rate control controller 23 controls the JT so that the flow rate becomes a predetermined amount.
However, in the present invention, this flow rate measurement value is input into the computer 22, and when there is a heat load fluctuation in the cryogenic environment section 10, an amount of refrigerant commensurate with the fluctuation is regenerated. An opening adjustment signal is sent from the computer 22 to the JT valve 6 via the flow rate controller 23 so that the fluid is fed into the condenser 20. As a result, the cold state in the cryogenic environment section 10 immediately returns to the state before the heat load change, and a stable cryogenic state is maintained.

尚本発明においても、圧縮機3の吐出量が一定
である場合は膨張機7bの処理量を熱負荷に応じ
て変化させてもHe液化・冷凍装置の所要動力は
変わらず、特に熱負荷が減少した場合には寒冷過
剰となつてエネルギー原単位が低下する。従つて
この様な無駄を回避する為には、第1図にも示し
ている様に圧縮機3の吐出圧力を圧力検出点16
で検出し、この圧力を一定に保つ様に圧力制御コ
ントローラ14で圧縮機3の吐出量を調整できる
構成としておくのがよい。こうしておけば熱負荷
が減少した場合でも装置本体が過剰運転状態とな
る様な恐れがなくなり、省エネルギー運転が可能
となる。
In the present invention, when the discharge amount of the compressor 3 is constant, even if the processing amount of the expander 7b is changed according to the heat load, the required power of the He liquefaction/refrigeration system does not change. If it decreases, there will be excessive cooling and the energy consumption rate will decrease. Therefore, in order to avoid such waste, as shown in FIG.
It is preferable to have a configuration in which the discharge amount of the compressor 3 can be adjusted by the pressure control controller 14 so as to detect this pressure at a constant value. By doing so, even if the heat load is reduced, there is no fear that the main body of the apparatus will be in an over-operating state, and energy-saving operation becomes possible.

本発明は概略以上の様に構成されるが、その最
大の特徴は、極低温環境部における熱負荷変動を
液位変動や圧力変動等により直接検出し、その測
定値を基にして(a)He液化・冷凍装置本体におけ
る膨張機からの必要寒冷発生量を算出して該膨張
機の制御を行なうと他、(b)該測定値を基に極低温
環境部における寒冷の安定化に必要な冷媒流量を
算出してJT弁の開度を調整する様に構成したと
ころにあり、こうした特徴を享受し得る範囲で
種々の変更を行なうことができる。例えば第1,
2図では5基の熱交換器を組合せた例を示した
が、熱交換器の数は勿論図示のものに限定されず
適宜増減することができる。また図では低温部側
膨張機7bの吐出量だけを制御する例を示した
が、高温部側膨張機7aの吐出量も同様にして制
御することもできる。更に図例は何れも1台の
He液化・冷凍機に対して1個の極低温環境部を
接続した例を示したが、1台のHe液化・冷凍機
に複数の極低温環境部を並列的に接続した冷凍シ
ステム(マルチユーザーシステム)に適用するこ
とも勿論可能である。殊に本発明は熱負荷の急激
な変動に対して応答が速く、しかも急激な熱負荷
変動にもかかわらず極低温環境部を安定した寒冷
状態に維持し得るという特長があり、こうした特
長からすれば、極低温環境部の稼動数変更により
熱負荷が急変し易い前記マルチユーザーシステム
等に適用した場合、その特徴を最も有効に発揮し
得るものと言える。
The present invention is roughly configured as described above, but its greatest feature is that it directly detects heat load fluctuations in the cryogenic environment by liquid level fluctuations, pressure fluctuations, etc., and based on the measured values, (a) In addition to calculating the required amount of cold generation from the expander in the He liquefaction/refrigeration equipment body and controlling the expander, (b) based on the measured value, the amount of cold generated necessary for stabilizing the cold in the cryogenic environment section. The structure is such that the opening degree of the JT valve is adjusted by calculating the refrigerant flow rate, and various changes can be made within the range where these characteristics can be enjoyed. For example, the first
Although FIG. 2 shows an example in which five heat exchangers are combined, the number of heat exchangers is of course not limited to that shown and can be increased or decreased as appropriate. Further, although the figure shows an example in which only the discharge amount of the low temperature section side expander 7b is controlled, the discharge amount of the high temperature section side expander 7a can also be controlled in the same manner. Furthermore, all the illustrations are for one unit.
Although we have shown an example in which one cryogenic environment section is connected to a He liquefaction/refrigeration machine, a refrigeration system (multi-user Of course, it is also possible to apply it to a system). In particular, the present invention has the advantage of being able to respond quickly to sudden changes in heat load, and to maintain a cryogenic environment in a stable cold state despite sudden changes in heat load. For example, it can be said that its characteristics can be most effectively exhibited when applied to the multi-user system, etc., where the heat load is likely to change suddenly due to a change in the operating number of the cryogenic environment section.

[発明の効果] 本発明は以上の様に構成されており、その効果
を要約すれば次に通りである。
[Effects of the Invention] The present invention is configured as described above, and its effects can be summarized as follows.

(1) 極低温環境部の熱負荷変動を直接検知して制
御する方法であるから応答が極めて早く、制御
に遅れが生じない。
(1) Since this method directly detects and controls heat load fluctuations in the cryogenic environment, the response is extremely fast and there is no delay in control.

(2) 熱負荷変動値から算出される値を制御後の実
測値から求められる値で補正しつつフイードバ
ツク制御する方法であるから、誤制御を行なう
恐れがなく制御精度も高い。
(2) Since this method performs feedback control while correcting the value calculated from the heat load fluctuation value with the value obtained from the actual measured value after control, there is no risk of erroneous control and the control accuracy is high.

(3) 従来例では熱負荷変動によつて生ずる極低温
環境部の寒冷能の変動については厳密に管理さ
れていなかつたが、本発明では極低温環境部の
寒冷能を同時に熱負荷変動前の状態に復帰させ
ることができる。従つて熱負荷変動にもかかわ
らず寒冷能を安定的に維持することが可能とな
り、寒冷不足や寒冷過剰といつた問題を一切生
じない。
(3) In the conventional example, fluctuations in the cooling capacity of the cryogenic environment section caused by heat load fluctuations were not strictly controlled, but in the present invention, the cooling capacity of the cryogenic environment section is simultaneously controlled before the heat load change. The state can be restored. Therefore, it is possible to maintain the cooling capacity stably despite heat load fluctuations, and problems such as insufficient cooling or excessive cooling do not occur.

【図面の簡単な説明】[Brief explanation of the drawing]

第1,2図は本発明の実施例を示すフロー図、
第3,4図は公知のHe液化・冷凍装置及びその
運転制御法を説明する為のフロー図である。 2……冷凍装置本体、3……圧縮機、5a〜5
e……熱交換器、6……JT弁、7a……高温側
膨張機、7b……低温側膨張機、10……極低温
環境部(ユーザ)、13……温度制御コントロー
ラ、14……圧力制御コントローラ、15……測
温点、16……圧力検出点、17……液位計、1
8……液位制御コントローラ、19……演算器、
20……再凝縮器、21……圧力検知器、22…
…コンピユータ、23……流量制御コントロー
ラ。
1 and 2 are flow diagrams showing embodiments of the present invention,
3 and 4 are flowcharts for explaining a known He liquefaction/refrigeration system and its operation control method. 2...Refrigerating device main body, 3...Compressor, 5a-5
e... Heat exchanger, 6... JT valve, 7a... High temperature side expansion machine, 7b... Low temperature side expansion machine, 10... Cryogenic environment section (user), 13... Temperature control controller, 14... Pressure control controller, 15...Temperature measurement point, 16...Pressure detection point, 17...Liquid level gauge, 1
8... Liquid level control controller, 19... Arithmetic unit,
20... Recondenser, 21... Pressure detector, 22...
...Computer, 23...Flow rate control controller.

Claims (1)

【特許請求の範囲】 1 ヘリウムガスの等エントロピー膨張によつて
得られた寒冷を利用する熱交換作用により常温高
圧のヘリウムガスを段階的に予冷した後、ジユー
ルトムソン弁に通すことによつて液化させるヘリ
ウム液化・冷凍装置の運転制御方法において、極
低温環境部に熱負荷変動検出器を設けると共に、
ヘリウム液化・冷凍装置における高圧ヘリウムガ
ス供給回路に設けた膨張機の吐出ガスと極低温環
境部からの戻りガスの合流点よりも下流側に温度
測定器を設け、上記熱負荷変動検出器によつて求
められる極低温環境部の熱負荷変動に基づいて前
記膨張機からの必要寒冷発生量を算出して制御す
ると共に、該制御を上記温度測定器による測温結
果で補正する他、上記熱負荷変動を基に極低温環
境部における寒冷の安定化に必要な冷媒流量を算
出してジユールトムソン弁の開度を調整すること
を特徴とするヘリウム液化・冷凍装置の運転制御
方法。 2 常温高圧のヘリウムガスを供給する圧縮機の
吐出側圧力を検知しつつその検出値が一定となる
様に圧縮機の制御を行なう特許請求の範囲第1項
に記載の運転制御方法。
[Scope of Claims] 1 Helium gas at room temperature and high pressure is precooled in stages by a heat exchange action that utilizes the cold obtained by isentropic expansion of helium gas, and then passed through a Joel-Thomson valve. In the operation control method of a helium liquefaction/refrigeration equipment, a heat load fluctuation detector is provided in the cryogenic environment part, and
A temperature measuring device is installed downstream of the confluence of the discharge gas of the expander installed in the high-pressure helium gas supply circuit of the helium liquefaction/refrigeration equipment and the return gas from the cryogenic environment section, and the thermal load fluctuation detector described above is installed. In addition to calculating and controlling the required amount of cold generation from the expander based on the heat load fluctuation of the cryogenic environment section, which is determined by A method for controlling the operation of a helium liquefaction/refrigeration system, characterized in that the flow rate of refrigerant necessary for stabilizing cooling in a cryogenic environment is calculated based on fluctuations, and the opening degree of a Juul-Thomson valve is adjusted. 2. The operation control method according to claim 1, wherein the pressure on the discharge side of the compressor that supplies helium gas at room temperature and high pressure is detected and the compressor is controlled so that the detected value is constant.
JP60109578A 1985-05-21 1985-05-21 Method of controlling operation of helium liquefying and refrigerating device Granted JPS61268972A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60109578A JPS61268972A (en) 1985-05-21 1985-05-21 Method of controlling operation of helium liquefying and refrigerating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60109578A JPS61268972A (en) 1985-05-21 1985-05-21 Method of controlling operation of helium liquefying and refrigerating device

Publications (2)

Publication Number Publication Date
JPS61268972A JPS61268972A (en) 1986-11-28
JPH0446350B2 true JPH0446350B2 (en) 1992-07-29

Family

ID=14513817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60109578A Granted JPS61268972A (en) 1985-05-21 1985-05-21 Method of controlling operation of helium liquefying and refrigerating device

Country Status (1)

Country Link
JP (1) JPS61268972A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0627617B2 (en) * 1989-04-18 1994-04-13 岩谷産業株式会社 Liquid nitrogen evaporation prevention device in liquid nitrogen storage tank for semiconductor sensor cooling
JP6591183B2 (en) * 2015-03-20 2019-10-16 川崎重工業株式会社 Raw material gas liquefaction apparatus and raw material gas liquefaction amount correction control method
JP6368973B2 (en) * 2015-07-22 2018-08-08 大陽日酸株式会社 Circulating helium recondensing device and circulating helium recondensing method

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59134479A (en) * 1983-01-20 1984-08-02 株式会社神戸製鋼所 Device for liquefying and refrigerating helium
JPH0247674B2 (en) * 1983-09-13 1990-10-22 Kagaku Gijutsucho HERIUMUEKIKA * REITOSOCHI

Also Published As

Publication number Publication date
JPS61268972A (en) 1986-11-28

Similar Documents

Publication Publication Date Title
US11680738B2 (en) CO2 refrigeration system with high pressure valve control based on coefficient of performance
US6694763B2 (en) Method for operating a transcritical refrigeration system
JP6741565B2 (en) Raw material gas liquefier and control method thereof
RU2671479C1 (en) Method for adjusting cryogenic cooling apparatus and device therefor
US20150184885A1 (en) Method for controlling a chiller system
CN101124443A (en) Control of refrigeration circuits with internal heat exchangers
US3307370A (en) Cooling device for helium
JPH0446350B2 (en)
JP6719370B2 (en) Heat source system, control device, control method, and program
JP2841955B2 (en) Supercritical helium cooling device and operating method thereof
US20230280072A1 (en) Refrigeration system with parallel compressors
KR100313598B1 (en) Refrigerant compressor calorimeter system utilizing wasted condenser hot water
JPH0247674B2 (en) HERIUMUEKIKA * REITOSOCHI
EP2242966B1 (en) Method of controlling a heat-rejection heat exchanging side of a refrigerant circuit
JPH07117307B2 (en) Cryogenic cooling device
JPH0643647Y2 (en) Cryogenic refrigerator
JP2793074B2 (en) Operation control method and apparatus for turbine type expander
JP7475043B2 (en) Temperature control system and control method thereof
JPH01127860A (en) Method of controlling auxiliary cold source of cryogenic liquefying refrigerator
JPH0233955B2 (en)
JPS60186664A (en) Operation control method for cryogenic refrigeration equipment
JP2510637B2 (en) Operation control method of cryogenic refrigeration refrigeration system
JPH0727432A (en) Controlling method for air conditioning refrigerator
JP2574823B2 (en) Operation control method of cryogenic refrigeration refrigeration system
JPH05322344A (en) Method and apparatus for controlling operating state of turbine type expansion machine in freezer device