JPH044678U - - Google Patents

Info

Publication number
JPH044678U
JPH044678U JP4295390U JP4295390U JPH044678U JP H044678 U JPH044678 U JP H044678U JP 4295390 U JP4295390 U JP 4295390U JP 4295390 U JP4295390 U JP 4295390U JP H044678 U JPH044678 U JP H044678U
Authority
JP
Japan
Prior art keywords
liquid
storage tank
supply line
chemical
chemical solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4295390U
Other languages
Japanese (ja)
Other versions
JP2510249Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990042953U priority Critical patent/JP2510249Y2/en
Publication of JPH044678U publication Critical patent/JPH044678U/ja
Application granted granted Critical
Publication of JP2510249Y2 publication Critical patent/JP2510249Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本考案の一実施例である薬液温調装置
を示す断面図、第2図は薬液温調装置の制御部の
電気的構成を示すブロツク図、第3図は薬液温調
装置の他の制御部の電気的構成を示すブロツク図
、第4図はスピン処理装置を示す概略斜視図、第
5図は従来の薬液温調装置を示す概略図である。 1……貯溜槽、4……断熱材、6……冷却水供
給ライン、7……ヒータ、8……温度センサ、1
0……循環ポンプ、12……薬液供給ライン、4
1……薬液温調装置。
Fig. 1 is a sectional view showing a chemical solution temperature control device which is an embodiment of the present invention, Fig. 2 is a block diagram showing the electrical configuration of the control section of the drug solution temperature control device, and Fig. 3 is a diagram showing the electrical configuration of the control section of the drug solution temperature control device. FIG. 4 is a block diagram showing the electrical configuration of another control section, FIG. 4 is a schematic perspective view showing a spin processing device, and FIG. 5 is a schematic diagram showing a conventional chemical solution temperature control device. 1...Storage tank, 4...Insulating material, 6...Cooling water supply line, 7...Heater, 8...Temperature sensor, 1
0...Circulation pump, 12...Medical solution supply line, 4
1... Chemical solution temperature control device.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 薬液供給ラインの薬液温度を、貯溜槽内の液体
により調整する装置であつて、貯溜槽内の液体を
冷却する冷却手段と、貯溜槽内の液体を加熱する
加熱手段と、貯溜槽内の液体を撹拌する撹拌手段
と、貯溜槽内を通じる薬液供給ラインとを有する
ことを特徴とする薬液温調装置。
A device that adjusts the temperature of a chemical solution in a chemical solution supply line using a liquid in a storage tank, the device comprising a cooling means for cooling the liquid in the storage tank, a heating means for heating the liquid in the storage tank, and a liquid in the storage tank. 1. A chemical liquid temperature control device comprising: a stirring means for stirring the liquid; and a chemical liquid supply line passing through the storage tank.
JP1990042953U 1990-04-20 1990-04-20 Chemical temperature controller Expired - Lifetime JP2510249Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990042953U JP2510249Y2 (en) 1990-04-20 1990-04-20 Chemical temperature controller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990042953U JP2510249Y2 (en) 1990-04-20 1990-04-20 Chemical temperature controller

Publications (2)

Publication Number Publication Date
JPH044678U true JPH044678U (en) 1992-01-16
JP2510249Y2 JP2510249Y2 (en) 1996-09-11

Family

ID=31554948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990042953U Expired - Lifetime JP2510249Y2 (en) 1990-04-20 1990-04-20 Chemical temperature controller

Country Status (1)

Country Link
JP (1) JP2510249Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4911881U (en) * 1972-05-04 1974-01-31

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513455U (en) * 1974-06-26 1976-01-12
JPS51100954U (en) * 1975-02-13 1976-08-13
JPS6366781U (en) * 1986-10-18 1988-05-06
JPS63201469A (en) * 1987-02-17 1988-08-19 タイテック株式会社 Cooling-output measuring device for cooling device
JPH01123976A (en) * 1987-11-09 1989-05-16 Sanyo Electric Co Ltd Cold temperature regulator

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513455U (en) * 1974-06-26 1976-01-12
JPS51100954U (en) * 1975-02-13 1976-08-13
JPS6366781U (en) * 1986-10-18 1988-05-06
JPS63201469A (en) * 1987-02-17 1988-08-19 タイテック株式会社 Cooling-output measuring device for cooling device
JPH01123976A (en) * 1987-11-09 1989-05-16 Sanyo Electric Co Ltd Cold temperature regulator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4911881U (en) * 1972-05-04 1974-01-31

Also Published As

Publication number Publication date
JP2510249Y2 (en) 1996-09-11

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term