JPH044771U - - Google Patents
Info
- Publication number
- JPH044771U JPH044771U JP4498090U JP4498090U JPH044771U JP H044771 U JPH044771 U JP H044771U JP 4498090 U JP4498090 U JP 4498090U JP 4498090 U JP4498090 U JP 4498090U JP H044771 U JPH044771 U JP H044771U
- Authority
- JP
- Japan
- Prior art keywords
- laser gas
- laser
- container
- storage container
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052736 halogen Inorganic materials 0.000 claims description 2
- 150000002367 halogens Chemical class 0.000 claims description 2
- 230000010355 oscillation Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Lasers (AREA)
Description
第１図は本考案の一実施例を示す構成図、第２
図は本考案の他の実施例を示す構成図である。
主要部分の符号の説明、１……レーザガス容器
、２……レーザガス、４……フアン、６……サブ
容器、７ａ〜７ｆ……配管、８ａ〜８ｆ……開閉
バルブ、１１……真空ポンプ、１２……ハロゲン
ガス。
Fig. 1 is a configuration diagram showing one embodiment of the present invention;
The figure is a configuration diagram showing another embodiment of the present invention. Explanation of symbols of main parts, 1...Laser gas container, 2...Laser gas, 4...Fan, 6...Sub container, 7a to 7f...Piping, 8a to 8f...Opening/closing valve, 11...Vacuum pump, 12...Halogen gas.
Claims (1)
なくともハロゲンガスからなるレーザガスをレー
ザ媒質とするエキシマレーザ発振装置であつて、
前記レーザガス容器内の前記レーザガスを排気す
るための第１の配管部材と、前記レーザガス容器
内に前記レーザガスを供給するための第２の配管
部材と、前記第１および第２の配管部材に接続さ
れ、前記レーザガス容器内に供給する前記レーザ
ガスを一時貯蔵する貯蔵容器と、前記貯蔵容器内
を減圧するための真空ポンプと、前記真空ポンプ
により減圧された前記貯蔵容器に前記レーザガス
を供給するための第３の配管部材とを有すること
を特徴とするエキシマレーザ発振装置。 An excimer laser oscillation device that uses a laser gas, which is circulated in a laser gas container by a fan and is made of at least halogen gas, as a laser medium,
A first piping member for exhausting the laser gas in the laser gas container, a second piping member for supplying the laser gas into the laser gas container, and connected to the first and second piping members. , a storage container for temporarily storing the laser gas to be supplied into the laser gas container; a vacuum pump for reducing the pressure inside the storage container; and a storage container for supplying the laser gas to the storage container whose pressure has been reduced by the vacuum pump. An excimer laser oscillation device comprising: 3 piping members.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4498090U JPH044771U (en) | 1990-04-26 | 1990-04-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4498090U JPH044771U (en) | 1990-04-26 | 1990-04-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH044771U true JPH044771U (en) | 1992-01-16 |
Family
ID=31558761
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4498090U Pending JPH044771U (en) | 1990-04-26 | 1990-04-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH044771U (en) |
-
1990
- 1990-04-26 JP JP4498090U patent/JPH044771U/ja active Pending
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