JPH0448272U - - Google Patents
Info
- Publication number
- JPH0448272U JPH0448272U JP9121190U JP9121190U JPH0448272U JP H0448272 U JPH0448272 U JP H0448272U JP 9121190 U JP9121190 U JP 9121190U JP 9121190 U JP9121190 U JP 9121190U JP H0448272 U JPH0448272 U JP H0448272U
- Authority
- JP
- Japan
- Prior art keywords
- fluorescent screen
- fluorescent
- thin film
- manufacturing apparatus
- film manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 2
- 239000003973 paint Substances 0.000 claims 1
- 238000002128 reflection high energy electron diffraction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000002265 prevention Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図、第２図は本考案の薄膜製造装置の蛍光
スクリーン部の拡大図であり、第１図は蛍光スク
リーン部の側面図、第２図は正面図、第３図、第
４図は従来のＲＨＥＥＥＤ装置を有する薄膜製造
装置を示す図であり、第３図はその全体構成図、
第４図は蛍光スクリーン部の拡大図である。
１……ガラス窓、２……フランジ、３……真空
容器ポート、４〜６……蛍光スクリーン、７……
シヤツター、８……駆動軸、９……汚れ防止スク
リーン。
1 and 2 are enlarged views of the fluorescent screen section of the thin film manufacturing apparatus of the present invention, FIG. 1 is a side view of the fluorescent screen section, FIG. 2 is a front view, and FIGS. 3 and 4 are FIG. 3 is a diagram showing a thin film manufacturing apparatus having a conventional RHEEED device, and FIG. 3 is an overall configuration diagram thereof;
FIG. 4 is an enlarged view of the fluorescent screen section. 1... Glass window, 2... Flange, 3... Vacuum vessel port, 4-6... Fluorescent screen, 7...
Shutter, 8... Drive shaft, 9... Dirt prevention screen.
Claims (1)
ーンを有する薄膜製造装置において、上記蛍光ス
クリーンを蛍光塗料を塗布した、回転または移動
可能なガラス板によつて構成したことを特徴とす
る薄膜製造装置。 1. A thin film manufacturing apparatus having a RHEED electron gun and a fluorescent screen in a vacuum container, characterized in that the fluorescent screen is constituted by a rotatable or movable glass plate coated with fluorescent paint.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9121190U JPH0448272U (en) | 1990-08-30 | 1990-08-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9121190U JPH0448272U (en) | 1990-08-30 | 1990-08-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0448272U true JPH0448272U (en) | 1992-04-23 |
Family
ID=31826636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9121190U Pending JPH0448272U (en) | 1990-08-30 | 1990-08-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0448272U (en) |
-
1990
- 1990-08-30 JP JP9121190U patent/JPH0448272U/ja active Pending
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